Chassis air inlet structure of polycrystalline silicon reduction furnace
The polysilicon reduction furnace chassis air intake structure addresses the issue of inconsistent branch pipe lengths and high welding workload by using internal welding and sealing plates, enhancing cleanliness and reducing costs.
Patent Information
- Application Number
- CN202420248508.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-02-01
- Publication Date
- 2025-01-03
- Estimated Expiration
- 2034-02-01
AI Technical Summary
The existing polysilicon reduction furnace chassis air intake structure has inconsistent branch pipe lengths, leading to gaps and high welding workload, which affects cleanliness and increases manufacturing costs.
A polysilicon reduction furnace chassis air intake structure that allows for internal welding of extension sections and connecting pipes, sealed with a sealing plate, reducing weld length and gaps, ensuring smoothness and cleanliness of the intake passage.
This design improves the cleanliness of the air intake channel, reduces welding workload, and lowers production costs by minimizing leakage points and material accumulation.
Smart Images
Figure CN222293622U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of polysilicon production equipment, in particular to an air intake structure of a chassis of a polysilicon reduction furnace. Background Art
[0002] Polysilicon is the direct material for producing single-crystal silicon. High-purity polysilicon is the basic material for semiconductor devices such as photoelectric conversion cells and integrated circuits. With the rapid development of the semiconductor industry, the large-scale application of ultra-large-scale integrated circuits and the sharp increase in demand for photovoltaic cells, the demand for polysilicon continues to grow steadily.
[0003] The polysilicon reduction furnace is the core equipment in the polysilicon production. The air inlet pipe on the chassis of the polysilicon reduction furnace is used to introduce silicon-containing materials and reducing gas into the furnace. It is an important component of the polysilicon reduction furnace. Therefore, whether the structure of the air inlet pipe is reasonable will not only affect the cleanliness of the air inlet channel, but also directly affect the quality and manufacturing cost of the polysilicon reduction furnace.
[0004] In order to ensure that the pressure at each nozzle is consistent, Figure 7 As shown, the existing polysilicon reduction furnace chassis air intake structure will weld a circular half-tube on the chassis, and the circular half-tube will cover one end of the intake pipe connected to each nozzle; in order to avoid interference, the intake branch pipes usually have inconsistent lengths, and the circular half-tube is connected to the intake branch pipe so that the silicon-containing material and reducing gas introduced from the intake branch pipe can be collected and then evenly distributed to each nozzle; due to structural limitations, the circular half-tube and the chassis can only be welded from the outside by surfacing welding, and there are a large number of gaps inside the channel formed by the circular half-tube and the chassis. The large welding workload will also lead to material accumulation, making it difficult to ensure the cleanliness of the intake channel, and the manufacturing cost is relatively high.
[0005] Therefore, developing and designing a polysilicon reduction furnace chassis air intake structure that can effectively reduce the amount of welding, improve the cleanliness of the air intake channel, and reduce the manufacturing cost is a problem that needs to be solved urgently at this stage. Utility Model Content
[0006] In order to solve the problems existing in the prior art, the utility model provides a polysilicon reduction furnace chassis air intake structure, in which the extension section and the connecting pipe, as well as the connecting pipe and the second air intake ring pipe, can be fixedly connected by internal welding, which can effectively ensure the smoothness of the weld surface and improve the cleanliness of the air intake passage; after the extension section and the connecting pipe, as well as the connecting pipe and the second air intake ring pipe, are fixedly connected, the gap is sealed with a sealing plate to achieve the connection between the second air intake ring pipe and the air intake pipe, and the length of the weld between the second air intake ring pipe and the air intake pipe is greatly reduced, which effectively reduces the welding workload, reduces the possibility of leakage points in the air intake passage, and reduces the production cost.
[0007] In order to achieve the above purpose, the technical solution adopted by the utility model is as follows:
[0008] The utility model provides a polysilicon reduction furnace chassis air intake structure, comprising:
[0009] A chassis, wherein the chassis has a plurality of air inlet pipes passing through the chassis, and the lower ends of the air inlet pipes have extension sections extending from the lower surface of the chassis;
[0010] A connecting pipe, the connecting pipe is fixedly connected to the extending section;
[0011] A first air intake ring pipe, the first air intake ring pipe is located below the chassis, the first air intake ring pipe is provided with an air intake port, and the first air intake ring pipe is connected to a plurality of air intake branch pipes;
[0012] A second intake ring pipe, the second intake ring pipe is located between the connecting pipe and the first intake ring pipe; the upper surface of the second intake ring pipe is provided with a through hole matching the connecting pipe, and the second intake ring pipe is fixedly connected to the connecting pipe through the through hole; a notch is provided on the lower surface of the second intake ring pipe at a position corresponding to the through hole, and a sealing plate is provided at the notch to seal it; the second intake ring pipe is connected to the intake branch pipe;
[0013] The first intake ring pipe, the intake branch pipe, the second intake ring pipe, the connecting pipe and the intake pipe are connected in sequence to form an intake passage.
[0014] As a preferred technical solution, one end of the connecting pipe is sleeved on the extending section, and the outer edge of the end surface of the extending section is welded to the inner wall surface of the connecting pipe.
[0015] As a preferred technical solution, the weld between the extension section and the pipe does not extend to the inner wall surface of the extension section;
[0016] and / or, the outer diameter of the extended section is smaller than the outer diameter of the air inlet pipe;
[0017] and / or, the inner diameter of the extending section is not less than the inner diameter of the air inlet pipe;
[0018] and / or, the length of the connecting pipe is greater than the length of the extending section;
[0019] And / or, the outer diameter of the connecting pipe is not greater than the outer diameter of the air intake pipe.
[0020] As a preferred technical solution, the lower end of the connecting pipe extends into the through hole, and the outer wall surface of the connecting pipe is welded to the inner wall surface of the through hole.
[0021] As a preferred technical solution, the sealing plate is welded to the notch.
[0022] As a preferred technical solution, two ends of the intake branch pipe are respectively welded to the first intake ring pipe and the second intake ring pipe;
[0023] And / or, the air intake branch pipe comprises multiple sections, and the multiple sections of the air intake branch pipe are connected by flanges;
[0024] And / or, the air intake branch pipe is configured as a straight pipe or a curved pipe.
[0025] As a preferred technical solution, the chassis includes an upper plate, a middle plate and a lower plate distributed from top to bottom, and there are gaps between the upper plate and the middle plate and between the middle plate and the lower plate. The air intake pipe passes through the upper plate, the middle plate and the lower plate in sequence, and the upper end of the air intake pipe is connected to a nozzle.
[0026] As a preferred technical solution, the nozzle is threadedly connected to the air intake pipe.
[0027] As a preferred technical solution, the plurality of intake pipes are divided into multiple groups, the intake pipes in the same group are distributed along the circumference of the chassis, and the intake pipes in different groups are at different distances from the center of the chassis; the number of the second intake ring pipes matches the number of groups of the intake pipes.
[0028] As a preferred technical solution, the center lines of the first air intake ring pipe and the second air intake ring pipe are both perpendicular to the chassis.
[0029] The beneficial effects of the utility model are as follows:
[0030] The utility model can realize fixed connection between the extension section and the connecting pipe, as well as between the connecting pipe and the second air intake ring pipe, by means of internal welding, which can effectively ensure that the weld surface is smooth and no gap will appear inside the air intake passage, thereby reducing the accumulation of silicon-containing materials in the air intake passage and improving the cleanliness of the air intake passage; after the extension section and the connecting pipe, as well as the connecting pipe and the second air intake ring pipe, are fixedly connected, the gap is sealed with a sealing plate, thereby realizing the connection between the second air intake ring pipe and the air intake pipe, and the length of the weld between the second air intake ring pipe and the air intake pipe is greatly reduced, which effectively reduces the welding workload, reduces the possibility of leakage points in the air intake passage, improves the quality of the polysilicon reduction furnace, and reduces the production cost. BRIEF DESCRIPTION OF THE DRAWINGS
[0031] Figure 1 It is a schematic diagram of the overall structure of an embodiment of a chassis air intake structure of a polysilicon reduction furnace of the utility model;
[0032] Figure 2 for Figure 1A front view of
[0033] Figure 3 for Figure 1 Another perspective of the structural entity diagram;
[0034] Figure 4 for Figure 1 A schematic diagram of the structure of the chassis and the second intake ring pipe;
[0035] Figure 5 for Figure 4 A cross-sectional view of the middle chassis and the second air intake ring pipe;
[0036] Figure 6 for Figure 5 A magnified image of area A;
[0037] Figure 7 It is a schematic diagram of the existing polysilicon reduction furnace chassis air intake structure.
[0038] In the figure: 1-chassis, 11-upper plate, 12-middle plate, 13-lower plate, 2-intake pipe, 21-extending section, 22-nozzle, 3-connecting pipe, 4-first intake ring pipe, 41-inlet port, 5-intake branch pipe, 51-flange, 6-second intake ring pipe, 61-through hole, 62-notch, 63-sealing plate. DETAILED DESCRIPTION
[0039] In order to facilitate understanding by those skilled in the art, the present invention is further described below in conjunction with the accompanying drawings.
[0040] Please refer to Figure 1-Figure 6 , is an embodiment of a chassis air intake structure of a polysilicon reduction furnace provided by the utility model, comprising a chassis 1, the chassis 1 is provided with a plurality of air intake pipes 2 penetrating the chassis 1, the lower end of the air intake pipe 2 is provided with an extension section 21 extending from the lower surface of the chassis 1; the air intake pipe 2 is fixedly connected to one end of a connecting pipe 3 through the extension section 21, the other end of the connecting pipe 3 is fixedly connected to a through hole 61 on the upper surface of a second air intake ring pipe 6, the first air intake ring pipe 4 is located below the second air intake ring pipe 6, and the first air intake ring pipe 4 and the second air intake ring pipe 6 are connected through a plurality of air intake pipes. The air branch pipe 5 is connected, and the first air intake ring pipe 4, the second air intake ring pipe 6 and the air intake branch pipe 5 can ensure that the silicon-containing material and the reducing gas are evenly distributed to each air intake pipe 2 at the second air intake ring pipe 6; the first air intake ring pipe 4, the air intake branch pipe 5, the second air intake ring pipe 6, the connecting pipe 3 and the air intake pipe 2 are connected in sequence to form an air intake channel, and the first air intake ring pipe 4 is provided with an air intake port 41, and the upper end of the air intake pipe 2 is connected with a nozzle 22, and the silicon-containing material and the reducing gas enter the air intake channel through the air intake port 41 and can be evenly sprayed out from the nozzle 22;
[0041] During assembly, the extension section 21 and the connecting pipe 3 can be fixedly connected by internal welding. At the same time, a notch 62 is provided on the lower surface of the second intake ring pipe 6 at a position corresponding to the through hole 61. The connecting pipe 3 and the second intake ring pipe 6 can also be fixedly connected by internal welding through the notch 62, which can effectively ensure the smoothness of the weld surface and improve the cleanliness of the intake passage. After the extension section 21 and the connecting pipe 3 and the connecting pipe 3 and the second intake ring pipe 6 are fixedly connected, the notch 62 is sealed with a sealing plate 63, so that the second intake ring pipe 6 and the intake pipe 2 can be connected, which greatly reduces the weld length between the second intake ring pipe 6 and the intake pipe 2 and effectively reduces the welding workload.
[0042] Specifically, the silicon-containing material and the reducing gas are preferably a mixed gas of trichlorosilane and hydrogen.
[0043] For clarification, please refer to Figure 1-Figure 4 The first air intake ring pipe 4 and the second air intake ring pipe 6 are both annular pipes, and the cross-section of the second air intake ring pipe 6 can be circular, elliptical or polygonal, so as to facilitate welding with the connecting pipe 3.
[0044] In this embodiment, please refer to Figure 5 and Figure 6 One end of the connecting pipe 3 is sleeved on the extending section 21, and the outer edge of the end face of the extending section 21 is welded to the inner wall surface of the connecting pipe 3, which can more conveniently realize the internal welding between the connecting pipe 3 and the extending section 21; it should be noted that the weld between the extending section 21 and the connecting pipe 3 should not extend to the inner wall surface of the extending section 21, so as to minimize the obstruction of the weld to the silicon-containing material and the reducing gas.
[0045] Based on the above examples, please refer to Figure 5 and Figure 6 The outer diameter of the extended section 21 is preferably smaller than the outer diameter of the intake pipe 2, and a step is formed between the intake pipe 2 and the extended section 21. At the same time, the outer diameter of the connecting pipe 3 is preferably not larger than the outer diameter of the intake pipe 2. When the connecting pipe 3 is sleeved on the extended section 21, the position of the connecting pipe 3 can be conveniently located for welding; the inner diameter of the extended section 21 is preferably not smaller than the inner diameter of the intake pipe 2 to ensure that the extended section 21 does not affect the transportation of silicon-containing materials and reducing gas in the intake channel; the length of the connecting pipe 3 is preferably larger than the length of the extended section 21 to facilitate welding the lower end of the connecting pipe 3 to the second intake ring pipe 6.
[0046] For further information, please refer to Figure 5 and Figure 6The lower end of the connecting pipe 3 extends into the through hole 61, and through the notch 62 on the second air intake ring pipe 6, the outer wall surface of the connecting pipe 3 and the inner wall surface of the through hole 61 can be conveniently fixedly connected by internal welding; further, after the second air intake ring pipe 6 and the connecting pipe 3 are fixedly connected, the sealing plate 63 is welded to the notch 62 to seal the notch 62, thereby ensuring the sealing of the air intake passage.
[0047] In this embodiment, please refer to Figure 1-Figure 4 The two ends of the intake branch pipe 5 are respectively welded to the first intake ring pipe 4 and the second intake ring pipe 6, and the intake branch pipe 5 connects and fixes the first intake ring pipe 4 with the second intake ring pipe 6; specifically, for the convenience of assembly, the intake branch pipe 5 preferably includes multiple sections, wherein two sections of the intake branch pipe 5 are respectively pre-fixedly connected to the first intake ring pipe 4 and the second intake ring pipe 6, and then the adjacent intake branch pipes 5 are connected by flanges 51, so that the connection between the first intake ring pipe 4 and the second intake ring pipe 6 can be achieved.
[0048] For clarification, please refer to Figure 1-Figure 4 In order to avoid interference, each section of the intake branch pipe 5 can be set as a straight pipe or a curved pipe according to actual conditions.
[0049] In this embodiment, please refer to Figure 5 and Figure 6 The chassis 1 includes an upper plate 11, a middle plate 12 and a lower plate 13 distributed from top to bottom. There are gaps between the upper plate 11 and the middle plate 12 and between the middle plate 12 and the lower plate 13. The air intake pipe 2 passes through the upper plate 11, the middle plate 12 and the lower plate 13 in sequence, and the upper end of the air intake pipe 2 is connected to a nozzle 22.
[0050] For clarification, please refer to Figure 5 The nozzle 22 and the air intake pipe 2 are preferably connected by a thread, so that the nozzle 22 can be easily replaced.
[0051] In this embodiment, please refer to Figure 1 and Figure 4 , several intake pipes 2 are divided into multiple groups, the intake pipes 2 in the same group are distributed along the circumference of the chassis 1, and the intake pipes 2 in different groups are at different distances from the center of the chassis 1; the number of second intake ring pipes 6 matches the number of groups of the intake pipes 2, and each second intake ring pipe 6 corresponds to several intake pipes 2 on the same circumference, ensuring that all the intake pipes 2 can be conveniently connected to the second intake ring pipe 6.
[0052] For clarification, please refer to Figure 1-Figure 4 The center lines of the first intake ring pipe 4 and the second intake ring pipe 6 are preferably perpendicular to the chassis 1, ensuring that the shape of the second intake ring pipe 6 matches the distribution of the intake pipe 2, and the first intake ring pipe 4 and the second intake ring pipe 6 can also be conveniently connected through the intake branch pipe 5.
[0053] Please refer to Figure 1-Figure 6 , the specific assembly method of the utility model is as follows:
[0054] The pipe 3 is sleeved on the extension section 21, and the outer edge of the end surface of the extension section 21 and the inner wall surface of the pipe 3 are fixedly connected by internal welding;
[0055] Align the through hole 61 of the second air intake ring pipe 6 with the extension section 21, and extend the lower end of the extension section 21 into the through hole 61, and fix the outer wall surface of the pipe 3 and the inner wall surface of the through hole 61 by internal welding;
[0056] Welding the sealing plate 63 to the notch 62 to block the notch 62;
[0057] The intake branch pipe 5 on the second intake ring pipe 6 is connected to the intake branch pipe 5 on the first intake ring pipe 4 via the flange 51 to form an intake passage.
[0058] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.
Claims
1. A polysilicon reduction furnace chassis air intake structure, characterized in that: include: A chassis (1), the chassis (1) having a plurality of air intake pipes (2) passing through the chassis (1), the lower ends of the air intake pipes (2) having extension sections (21) extending from the lower surface of the chassis (1); A connecting pipe (3), wherein the connecting pipe (3) is fixedly connected to the extending section (21); A first air intake ring pipe (4), the first air intake ring pipe (4) being located below the chassis (1), the first air intake ring pipe (4) being provided with an air intake port (41), and the first air intake ring pipe (4) being connected to a plurality of air intake branch pipes (5); a second intake ring pipe (6), the second intake ring pipe (6) being located between the connecting pipe (3) and the first intake ring pipe (4); a through hole (61) matching the connecting pipe (3) is provided on the upper surface of the second intake ring pipe (6), and the second intake ring pipe (6) is fixedly connected to the connecting pipe (3) via the through hole (61); a notch (62) is provided on the lower surface of the second intake ring pipe (6) at a position corresponding to the through hole (61), and a sealing plate (63) is provided at the notch (62) to seal the notch (62); the second intake ring pipe (6) is connected to the intake branch pipe (5); The first intake ring pipe (4), the intake branch pipe (5), the second intake ring pipe (6), the connecting pipe (3) and the intake pipe (2) are connected in sequence to form an intake passage.
2. The polysilicon reduction furnace chassis air intake structure according to claim 1, characterized in that: One end of the connecting pipe (3) is sleeved on the extending section (21), and the outer edge of the end surface of the extending section (21) is welded to the inner wall surface of the connecting pipe (3).
3. The polysilicon reduction furnace chassis air intake structure according to claim 2, characterized in that: The weld between the protruding section (21) and the connecting pipe (3) does not extend to the inner wall surface of the protruding section (21); and / or, the outer diameter of the extending section (21) is smaller than the outer diameter of the air inlet pipe (2); and / or, the inner diameter of the extending section (21) is not less than the inner diameter of the air inlet pipe (2); and / or, the length of the connecting pipe (3) is greater than the length of the extending section (21); And / or, the outer diameter of the connecting pipe (3) is not greater than the outer diameter of the air intake pipe (2).
4. A polysilicon reduction furnace chassis air intake structure according to claim 1 or 2, characterized in that: The lower end of the connecting pipe (3) extends into the through hole (61), and the outer wall surface of the connecting pipe (3) is welded to the inner wall surface of the through hole (61).
5. The polysilicon reduction furnace chassis air intake structure according to claim 1, characterized in that: The sealing plate (63) is welded to the notch (62).
6. The polysilicon reduction furnace chassis air intake structure according to claim 1, characterized in that: The two ends of the intake branch pipe (5) are respectively welded to the first intake ring pipe (4) and the second intake ring pipe (6); And / or, the air intake branch pipe (5) comprises a plurality of sections, and the plurality of sections of the air intake branch pipe (5) are connected via flanges (51); And / or, the air intake branch pipe (5) is configured as a straight pipe or a curved pipe.
7. The polysilicon reduction furnace chassis air intake structure according to claim 1, characterized in that: The chassis (1) comprises an upper plate (11), a middle plate (12) and a lower plate (13) which are arranged from top to bottom. There are gaps between the upper plate (11) and the middle plate (12) and between the middle plate (12) and the lower plate (13). The air intake pipe (2) passes through the upper plate (11), the middle plate (12) and the lower plate (13) in sequence. The upper end of the air intake pipe (2) is connected to a nozzle (22).
8. The polysilicon reduction furnace chassis air intake structure according to claim 7, characterized in that: The nozzle (22) is threadably connected to the air intake pipe (2).
9. The polysilicon reduction furnace chassis air intake structure according to claim 1, characterized in that: The plurality of intake pipes (2) are divided into a plurality of groups; the intake pipes (2) in the same group are distributed along the circumference of the chassis (1); and the intake pipes (2) in different groups are at different distances from the center of the chassis (1); and the number of the second intake ring pipes (6) matches the number of groups of the intake pipes (2).
10. The bottom plate air intake structure of a polysilicon reduction furnace according to claim 1, characterized in that: The center lines of the first air intake ring pipe (4) and the second air intake ring pipe (6) are both perpendicular to the chassis (1).