Vacuum coating device

Abstract

The utility model relates to a vacuum coating device which comprises a cavity with an opening formed at one end; the cover plate mechanism and the trailer are supported on the supporting face in the second direction and connected with each other, the cover plate mechanism is arranged at the end, with the opening, of the cavity in the first direction, and the trailer is arranged at the end, away from the cavity, of the cover plate mechanism in the first direction; the cover plate mechanism can drive the trailer to move on the supporting face in the first direction so as to open and close the opening. When the cover plate mechanism closes the opening, the cover plate mechanism and the cavity jointly form a vacuum cavity; the trailer is hinged to the cover plate mechanism so as to be capable of relatively rotating around a first axis extending in the third direction. When installation errors exist between the cavity and the cover plate mechanism, the cover plate mechanism and the cavity need to keep the same inclination angle due to the fact that the cover plate mechanism needs to seal the opening, relative rotation can be generated between the trailer and the cover plate mechanism at the moment, inclination of the cover plate mechanism is not limited, the sealing effect of the cover plate mechanism and the cavity is guaranteed, and the service life of the trailer is prolonged. Therefore, the sealing performance of the vacuum cavity is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating device. Background Art

[0002] Vacuum coating refers to a method of heating metal or non-metal materials under high vacuum conditions to evaporate and condense on the surface of the coated object (metal, semiconductor or insulator) to form a thin film. The vacuum coating device includes a chamber, a cover mechanism and a trailer, and the trailer is connected to the cover mechanism. Among them, the trailer is used to install auxiliary mechanisms for auxiliary vacuum coating, such as electrical cabinets and refrigerators.

[0003] The cover mechanism can drive the trailer to slide relative to the cavity to close or open the opening of the cavity. When the cover mechanism closes the opening of the cavity, a vacuum chamber for vacuum coating is formed between the cover mechanism and the cavity; when the cover mechanism opens the opening of the cavity, it is convenient to take and place the plated parts.

[0004] In traditional vacuum coating devices, the trailer is fixedly connected to the cover mechanism. When there is an installation error between the cavity and the cover mechanism, in order to ensure that the cover mechanism seals the opening, the cover mechanism needs to maintain the same tilt angle as the cavity, and the trailer will limit the tilt of the cover mechanism; and when the trailer and the cover mechanism tilt together, the side of the trailer away from the cover mechanism will tilt up, affecting the stability of the structure. Utility Model Content

[0005] Based on this, it is necessary to provide a vacuum coating device that can improve the above problems.

[0006] A vacuum coating device, comprising:

[0007] The cavity has an opening formed at one end in the first direction;

[0008] A cover mechanism and a trailer are both supported on the support surface and connected to each other in the second direction, the cover mechanism is provided at one end of the cavity having the opening in the first direction, and the trailer is provided at one end of the cover mechanism away from the cavity in the first direction; the cover mechanism can drive the trailer to move along the first direction on the support surface to open and close the opening; when the cover mechanism closes the opening, the cover mechanism and the cavity together form a vacuum chamber;

[0009] The trailer is hinged to the cover mechanism so as to be able to rotate relatively around a first axis extending along a third direction; the first direction, the second direction and the third direction intersect each other.

[0010] In the above vacuum coating device, since the trailer is hinged with the cover mechanism, when there is an installation error between the cavity and the cover mechanism, since the cover mechanism needs to seal the opening, the cover mechanism and the cavity need to maintain the same tilt angle. At this time, the trailer can rotate relative to the cover mechanism, so the tilt of the cover mechanism will not be restricted, and the sealing effect of the cover mechanism and the cavity is guaranteed, thereby ensuring the sealing of the vacuum cavity. At the same time, when the cover mechanism and the cavity have the same tilt angle, since the trailer and the cover mechanism can rotate relative to each other, the end of the trailer away from the cover mechanism will not tilt up, ensuring the stability of the structures installed on the trailer.

[0011] In one embodiment, the vacuum coating device includes a pin and a spherical bearing, the pin is installed on one of the cover mechanism and the trailer, and the cover mechanism and the other of the trailer are rotatably connected to the pin through the spherical bearing.

[0012] In one of the embodiments, the vacuum coating device further comprises an elastic mechanism, and the elastic mechanism is used to buffer the relative rotation between the cover mechanism and the trailer.

[0013] In one of the embodiments, the vacuum coating device further includes a guiding mechanism, through which the cover mechanism slidably cooperates with the cavity, and the guiding mechanism is used to guide the cover mechanism in the first direction and support the cover mechanism in the second direction.

[0014] In one embodiment, the guide mechanism includes a guide shaft disposed on one of the cavity and the cover mechanism, and a roller disposed on the other;

[0015] The guide shaft extends along the first direction, and the roller cooperates with the guide shaft to guide the cover mechanism in the first direction.

[0016] In one embodiment, the outer peripheral surface of the roller is concave to form a circumferential groove, and the guide shaft is arranged in the circumferential groove; the roller is movably connected to the structure connected thereto in the axial direction, and the axial direction of the roller is parallel to the third direction; and / or

[0017] The guide mechanism further comprises a swinging member, the swinging member is connected to the cavity or the cover mechanism, the roller is mounted on the swinging member, and the swinging member can swing around a second axis extending along the third direction relative to the structure connected thereto.

[0018] In one embodiment, the guide mechanism also includes a first adjustment component, which includes a first mounting member and a first adjustment member, the first mounting member is connected to the cavity or the cover mechanism, the roller is mounted on the first mounting member, and the first adjustment member is used to adjust the position of the first mounting member relative to the cavity or the cover mechanism in the second direction.

[0019] In one embodiment, the vacuum coating device further includes a driving wheel mechanism and a driven wheel mechanism, wherein the driving wheel mechanism is connected to the cover mechanism, and the driven wheel mechanism is connected to the trailer;

[0020] The vacuum coating device also includes a track arranged on the supporting surface, and the track extends along the first direction to guide the driving wheel mechanism and the driven wheel mechanism along the first direction; the cover mechanism and the trailer are supported on the supporting surface through the driving wheel mechanism, the driven wheel mechanism and the track.

[0021] In one embodiment, the driving wheel mechanism comprises a driving shaft, a driving wheel and a first rib, the driving shaft is rotatably mounted on the cover mechanism, the driving wheel is sleeved outside the driving shaft and matched with the track, and the first rib is connected to the driving wheel;

[0022] The driving wheel mechanism further includes a second adjusting component, which is mounted on the driving shaft and is used to adjust the position of the driving wheel in the axial direction of the driving shaft so that the gap between the first rib and the track is within a first preset range.

[0023] In one embodiment, the second adjustment component includes a second mounting member and a second adjustment member, the second mounting member is mounted on the driving shaft, and the second adjustment member is mounted on the second mounting member to adjust the axial position of the driving wheel on the driving shaft.

[0024] In one embodiment, the driven wheel mechanism comprises a driven shaft, an eccentric sleeve, a driven wheel and a second rib, the driven shaft is connected to the trailer, the eccentric sleeve is sleeved outside the driven shaft, the driven wheel is rotatably sleeved outside the eccentric sleeve and cooperates with the track, and the second rib is connected to the driven wheel; the positions of the driven shaft and the trailer in the circumferential direction are adjustable to adjust the position of the eccentric sleeve, thereby adjusting the position of the driven wheel in the second direction;

[0025] The driven wheel mechanism further includes a third adjusting component, which is mounted on the driven shaft and is used to adjust the axial position of the driven wheel on the driven shaft so that the gap between the second rib and the track is within a second preset range.

[0026] In one embodiment, the driven wheel mechanism further includes a limiting assembly, wherein the limiting assembly is connected to the trailer, and the driven shaft is mounted on the trailer via the limiting assembly, and the limiting assembly is used to limit the driven shaft in the axial, radial and circumferential directions of the driven shaft.

[0027] In one embodiment, the third adjustment assembly includes a third mounting member and a third adjusting member, the third mounting member is mounted on the driven shaft, and the third adjusting member is mounted on the third mounting member for adjusting the axial position of the eccentric sleeve on the driven shaft, thereby adjusting the axial position of the driven wheel on the driven shaft. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A front view of a vacuum coating device provided in one embodiment of the present application;

[0029] Figure 2 for Figure 1 A front view of a partial structure of the vacuum coating device shown in ;

[0030] Figure 3 for Figure 1 A front view of the cover mechanism and the articulated part of the trailer of the vacuum coating device shown in FIG.

[0031] Figure 4 for Figure 3 A cross-sectional view of the structure shown in;

[0032] Figure 5 for Figure 3 A top view of the structure shown in;

[0033] Figure 6 for Figure 2 A front view of a portion of the structure shown in FIG.

[0034] Figure 7 for Figure 1 A side view of a partial structure of the vacuum coating device shown in ;

[0035] Figure 8 for Figure 7 A rear view of the structure shown in;

[0036] Fig. 9 for Figure 7 A top view of the structure shown in;

[0037] Fig.10 for Figure 7 A cross-sectional view of the structure shown in;

[0038] Fig.11 for Figure 2A front view of a portion of the structure shown in FIG.

[0039] Fig.12 for Figure 2 A side view of the structure shown in;

[0040] Fig.13 for Fig.12 A cross-sectional view of a portion of the structure shown in ;

[0041] Fig.14 for Fig.13 A magnified view of the structure shown in FIG.

[0042] Fig.15 for Figure 1 A side view of a driven wheel mechanism of the vacuum coating device shown in ;

[0043] Fig.16 for Fig.15 A sectional view of a driven wheel mechanism shown in ;

[0044] Fig.17 for Fig.15 Another cross-sectional view of the driven wheel mechanism shown in .

[0045] Description of reference numerals:

[0046] 100, vacuum coating device; 10, cavity; 11, opening; 20, cover mechanism; 21, cover assembly; 22, connecting member; 23, support member; 30, trailer; 40, pin; 51, spherical bearing; 52, connecting plate; 60, guide mechanism; 61, guide shaft; 62, roller; 621, circumferential groove; 63, swing member; 64, bushing; 65, first adjustment assembly; 651, first mounting member; 652, first adjustment member; 70, cantilever beam; 80, driving wheel mechanism; 81, driving shaft; 82, driving wheel; 83, first retaining edge; 84, second adjustment assembly; 841, first Second mounting member; 8411, fixed plate; 8412, locking nut; 842, second adjusting member; 90, driven wheel mechanism; 91, driven shaft; 92, eccentric sleeve; 93, driven wheel; 94, second retaining edge; 95, third adjusting assembly; 951, third mounting member; 952, third adjusting member; 96, limiting assembly; 961, first mounting seat; 962, shaft ring; 963, second mounting seat; 964, rotating sleeve; 9641, first connecting part; 9642, second connecting part; 965, fixed ring; 966, outer plate; 967, blocking plate; 110, driving mechanism; 120, track. DETAILED DESCRIPTION

[0047] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0048] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0049] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0050] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0051] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0052] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0053] See also Figure 1 , an embodiment of the present application provides a vacuum coating device 100, which is used to coat the surface of a plated object under a vacuum state. Specifically, the incoming material of the plated object is a strip, the strip is a polymer macromolecular layer, the thin film layer coated on the surface of the polymer macromolecular layer is a metal layer, the polymer macromolecular layer and the coating layer can form a composite current collector, and the composite current collector can be used to prepare a lithium battery. In some specific embodiments, the polymer macromolecular layer is a PET, PP or PI layer, and the metal layer is an aluminum layer or a copper layer. It is conceivable that in other embodiments, the incoming material of the plated object is not limited to a strip, and there is no limitation on the materials of the plated object and the coating layer.

[0054] The vacuum coating device 100 includes a chamber 10, a cover mechanism 20 and a trailer 30. An opening 11 is formed at one end of the chamber 10 in the first direction, and the cover mechanism 20 and the trailer 30 are both supported on a support surface. Specifically, the support surface is used to support the cover mechanism 20 and the trailer 30 in the second direction. The cover mechanism 20 is arranged at one end of the chamber 10 having the opening 11 in the first direction, and the trailer 30 is arranged at one end of the cover mechanism 20 away from the chamber 10 in the first direction, and its end close to the cover mechanism 20 is connected to the cover mechanism 20. The cover mechanism 20 can drive the trailer 30 to move on the support surface along the first direction to open and close the opening 11. When the cover mechanism 20 closes the opening 11, the cover mechanism 20 and the chamber 10 jointly form a vacuum chamber, and the plated parts are accommodated in the vacuum chamber for coating. When the cover mechanism 20 opens the opening 11, the plated parts can be taken and placed through the opening 11.

[0055] It should be noted that the trailer 30 is used to install auxiliary mechanisms for assisting vacuum coating, such as electrical cabinets and refrigerators, etc. It should be understood that in other embodiments, the types of mechanisms installed on the trailer 30 are not limited. For example, in other embodiments, a water distributor, etc., may also be installed on the trailer 30.

[0056] For further information, see Figure 2 The trailer 30 is hinged to the cover mechanism 20 so that the two can rotate relative to each other around a first axis extending along a third direction. The first direction, the second direction and the third direction intersect each other. Specifically, the first direction, the second direction and the third direction are perpendicular to each other.

[0057] The vacuum coating device 100 provided in the embodiment of the present application is hinged to the cover mechanism 20 by the trailer 30. When there is an installation error between the cavity 10 and the cover mechanism 20, the cover mechanism 20 needs to seal the opening, so the cover mechanism 20 and the cavity 10 need to maintain the same inclination angle. At this time, the trailer 30 can rotate relative to the cover mechanism 20, so the inclination of the cover mechanism 20 will not be restricted, and the sealing effect of the cover mechanism 20 and the cavity 10 is ensured, thereby ensuring the sealing of the vacuum cavity. At the same time, when the cover mechanism 20 and the cavity 10 have the same inclination angle, the trailer 30 and the cover mechanism 20 can rotate relative to each other, so the end of the trailer 30 away from the cover mechanism 20 will not be lifted, thereby ensuring the stability of each structure installed on the trailer 30.

[0058] Further reading Figure 2 , and see Figure 3-Figure 5 The vacuum coating device 100 includes a pin 40 and a joint bearing 51. The pin 40 extends along the third direction and is installed on one of the cover mechanism 20 and the trailer 30. The cover mechanism 20 and the trailer 30 are rotatably connected to the pin 40 through the joint bearing 51. On the one hand, the pin 40 cooperates with the joint bearing 51 to realize the rotation of the trailer 30 and the cover mechanism 20 around the first axis; on the other hand, the joint bearing 51 is a spherical sliding bearing, whose sliding contact surface is an inner spherical surface and an outer spherical surface, and can rotate and swing at any angle during movement, with a large adjustment range.

[0059] In some specific implementations, the pin shaft 40 is disposed on the cover mechanism 20 , and a connecting plate 52 is disposed on the trailer 30 . The connecting plate 52 is connected to the pin shaft 40 via a spherical bearing 51 .

[0060] It is conceivable that in some other embodiments, the cover mechanism 20 and the trailer 30 may be hinged using other structures, which are not limited here.

[0061] Furthermore, the vacuum coating device 100 is provided with a pin shaft 40 and a spherical bearing 51 at both ends in the third direction, and the spherical bearing 51 at each end is mounted on the pin shaft 40 at the corresponding end. In this way, compared with the case where the pin shaft 40 and the spherical bearing 51 are only provided at one end, it can not only bear the heavier trailer 30, but also prevent the trailer 30 from deviating to one end when rotating.

[0062] In some specific embodiments, the cavity 10 is a rectangular parallelepiped structure with a hollow interior and an opening 11 at one end, and the opening 11 is connected to the inner cavity of the cavity 10. When the cover mechanism 20 closes the opening 11, it defines a vacuum cavity together with the cavity wall of the inner cavity. Figure 1 The second direction is the X direction of the cavity 10, and the second direction is the height direction of the cavity 10. Figure 1 The third direction is the length direction of the cavity 10, also known as Fig.12 It is conceivable that in other specific implementations, the shape of the cavity 10 is not limited.

[0063] In some embodiments, see Figure 1 , the cover mechanism 20 includes a cover assembly 21, a connector 22, a support 23 and a roller. The trailer 30 is connected to the cover assembly 21, and the connector 22, the support 23 and the roller are located on the side of the cover assembly 21 facing away from the trailer 30 in the first direction. The connector 22 and the roller both extend along the first direction, and both ends of both are connected to the cover assembly 21 and the support 23. Among them, the cover assembly 21 and the support 23 are used to support the roller, and the roller includes a unwinding roller and a winding roller, the unwinding roller is used to unwind the plated parts for coating, and the winding roller can wind up the plated parts after coating. Furthermore, the cover assembly 21 is also used to install a driving member, such as a motor, for driving the roller to rotate.

[0064] With the above arrangement, the cover assembly 21, the connector 22, the support 23, the roller and the trailer 30 can move together in the first direction. When moving to the preset position, the cover assembly 21 can define the above vacuum chamber together with the cavity 10. At this time, the connector 22, the support 23 and the roller are all accommodated in the vacuum chamber. That is, at this time, the cover mechanism 20 serves as a winding mechanism of the vacuum coating device 100. It is conceivable that in other embodiments, the cover mechanism 20 can also adopt other arrangements. For example, when the coated part is a non-rolled material, the cover mechanism 20 can omit the support 23, the connector 22 and the roller. At this time, the cover mechanism 20 only includes the cover assembly 21, which is not limited here.

[0065] The vacuum coating device 100 further includes a guide mechanism 60, through which the cover mechanism 20 is slidably matched with the chamber 10, and the guide mechanism 60 is used to guide the cover mechanism 20 in a first direction to prevent the cover mechanism 20 from deviating when moving in the first direction. At the same time, the guide drum 60 also plays a role in supporting the cover mechanism 20 in a second direction.

[0066] In some embodiments, see Figure 2 , and see Figure 6 The guide mechanism 60 includes a guide shaft 61 and a roller 62. The guide shaft 61 is disposed on one of the cavity 10 and the cover mechanism 20, and the roller 62 is disposed on the other of the cavity 10 and the cover mechanism 20. In some embodiments, the guide shaft 61 is disposed on the cavity 10, and the roller 62 is disposed on the support member 23 of the cover mechanism 20. In other embodiments, the guide shaft 61 is disposed on the support member 23, and the roller 62 is disposed on the cavity 10.

[0067] The present application is further described below by taking the example that the guide shaft 61 is disposed on the cavity 10 and the roller 62 is disposed on the support member 23. It is understood that this description is only used as an example and does not limit the protection scope of the present application.

[0068] In some embodiments, see Figure 1 The vacuum coating device 100 further includes a cantilever beam 70, which is mounted on the inner wall of the inner cavity, and the guide shaft 61 is mounted on the cantilever beam 70, that is, the guide shaft 61 is indirectly mounted on the cavity 10 through the cantilever beam 70, so as to facilitate the installation of the guide shaft 61. Of course, in some other embodiments, the vacuum coating device 100 can also omit the cantilever beam 70, and directly mount the guide shaft 61 on the cavity 10, which is not limited here.

[0069] Optionally, see Figure 7 The outer circumferential surface of the roller 62 is concave to form a circumferential groove 621, and the guide shaft 61 is arranged in the circumferential groove 621. The roller 62 is movably connected to the support member 23 in the axial direction, and the axial direction of the roller 62 is parallel to the third direction. In this way, when the cavity 10 is installed unevenly and causes the guide shaft 61 to extend incompletely along the first direction, due to the cooperation between the circumferential groove 621 of the roller 62 and the guide shaft 61, during the movement of the cover mechanism 20 along the first direction, the roller 62 will slightly move relative to the support member 23 in the third direction to avoid the roller 62 from getting stuck, so that the cover assembly 21 and the cavity 10 are finally sealed to form a vacuum chamber.

[0070] In some embodiments, see Figure 8-Figure 10The guide mechanism 60 further includes a swinging member 63, which is connected to the support member 23, and the roller 62 is mounted on the swinging member 63 through a sleeve 64. The swinging member 63 can swing relative to the support member 23 around a second axis extending in a third direction, and the roller 62 and the sleeve 64 can move together in the third direction relative to the swinging member 63. With this arrangement, when the cavity 10 is installed unevenly and causes the guide shaft 61 to extend incompletely along the first direction, since the circumferential groove 621 of the roller 62 cooperates with the guide shaft 61, during the movement of the cover mechanism 20 along the first direction, the swinging member 63 will slightly move around the second axis relative to the support member 23 to adjust the position of the roller 62 and avoid the roller 62 from getting stuck, so as to finally make the cover assembly 21 and the cavity 10 close and seal to form a vacuum chamber.

[0071] In some specific embodiments, each swing member 63 is respectively provided with a roller 62 at both ends in the first direction, and the two rollers 62 are guided and matched with a guide shaft 61. It is conceivable that in other specific embodiments, each swing member 63 may be provided with only one roller 62, or more than two rollers 62, which is not limited here.

[0072] Further, the guide mechanism 60 also includes a first adjustment component 65, which includes a first mounting member 651 and a first adjustment member 652. The first mounting member 651 is connected to the support member 23, the swinging member 63 is mounted on the first mounting member 651, and the first adjustment member 652 is used to adjust the position of the first mounting member 651 relative to the support member 23 in the second direction. Specifically, the first adjustment member 652 includes two adjustment screws, both of which are mounted on the support member 23, and are respectively penetrated from both ends in the second direction on the first mounting member 651 and screwed thereto. By adjusting the two adjustment screws, the position of the first mounting member 651 relative to the support member 23 in the second direction can be adjusted, thereby adjusting the position of the swinging member 63 in the second direction, so as to finally adjust the position of the roller 62 in the second direction, so that the circumferential groove 621 of the roller 62 is matched and installed with the guide shaft 61.

[0073] In some embodiments, the vacuum coating device 100 is provided with a set of guide mechanisms 60 at both ends in the third direction, and in this case, the cover mechanism 20 and the chamber 10 cooperate with each other through two sets of guide mechanisms 60. In this way, compared with the case where the guide mechanism 60 is provided at only one end, the cover mechanism 20 is prevented from deviating to one end when moving.

[0074] In some embodiments, see Fig.11, the vacuum coating device 100 further includes a driving wheel mechanism 80 and a driven wheel mechanism 90, the driving wheel mechanism 80 is connected to the cover assembly 21 of the cover mechanism 20, and the driven wheel mechanism 90 is connected to the trailer 30. The vacuum coating device 100 further includes a track 120 provided on the support surface, the track 120 extends along the first direction, and is used to guide the driving wheel mechanism 80 and the driven wheel mechanism 90 along the first direction. The cover mechanism 20 and the trailer 30 are supported on the support surface by the driving wheel mechanism 80, the driven wheel mechanism 90 and the track 120. Specifically, the vacuum coating device 100 further includes a driving mechanism 110, the driving wheel mechanism 80 is connected to the driving mechanism 110, and the driving mechanism 110 drives the driving wheel mechanism 80 to rotate, thereby causing the cover mechanism 20 and the trailer 30 to move along the first direction.

[0075] For further information, see Fig.12 The vacuum coating device 100 has two driving wheel mechanisms 80 and two driven wheel mechanisms 90 at both ends in the third direction. The driving wheel mechanism 80 and the driven wheel mechanism 90 at the same end in the third direction are opposite to each other in the first direction and cooperate with the same track 120.

[0076] In some embodiments, the vacuum coating device 100 further includes an elastic mechanism (not shown in the figure), which is used to buffer the relative rotation between the cover mechanism 20 and the trailer 30 to prevent the cover mechanism 20 and the trailer 30 from rotating too much and affecting the stability of the structure. For example, at the initial moment when the driving mechanism 110 drives the driving wheel mechanism 80 to move, the setting of the elastic mechanism can prevent the driving mechanism 110 from transmitting a large driving force to the driving wheel mechanism 80, which causes the trailer 30 and the cover mechanism 20 to rotate too much.

[0077] See also Fig.13 and Fig.14 The driving wheel mechanism 80 includes a driving shaft 81 and a driving wheel 82. The driving shaft 81 is rotatably mounted on the cover assembly 21, and the driving wheel 82 is sleeved outside the driving shaft 81 and cooperates with the track 120. The driving mechanism 110 is connected to the driving shaft 81 and can drive the driving shaft 81 to rotate relative to the cover assembly 21, thereby driving the driving wheel 82 to move on the track 120. When the driving wheel 82 moves on the track 120, it will drive the driven wheel 93 of the driven wheel mechanism 90 to move on the track 120, and finally make the cover mechanism 20 and the trailer 30 move along the first direction.

[0078] The driving wheel mechanism 80 also includes a first flange 83 and a second adjustment component 84, wherein the first flange 83 is connected to the driving wheel 82. The second adjustment component 84 is mounted on the driving shaft 81 to adjust the position of the driving wheel 82 in the axial direction of the driving shaft 81, so that the gap between the first flange 83 and the track 120 is within the first preset range. It should be noted that the axial direction of the driving shaft 81 is parallel to the third direction. During installation, the second adjustment component 84 adjusts the position of the driving wheel 82 on the driving shaft 81 to ensure that the gap between the first flange 83 and the track 120 in the third direction is within the first preset range, thereby ensuring the accuracy of the assembly of the driving wheel 82 and the track 120, and thus ensuring the sealing effect of the cover plate assembly 21 sealing the opening 11.

[0079] Further, the second adjustment component 84 includes a second mounting member 841 and a second adjustment member 842, wherein the second mounting member 841 is mounted on the driving shaft 81, and the second adjustment member 842 is mounted on the second mounting member 841, so as to adjust the position of the driving wheel 82 in the axial direction of the driving shaft 81. It is conceivable that in some other embodiments, the second adjustment component 84 may also omit the second mounting member 841, and in this case, the second adjustment member 842 is directly mounted on the driving shaft 81.

[0080] In some specific embodiments, the second mounting member 841 includes a fixing plate 8411 and a locking nut 8412. One axial end of the fixing plate 8411 abuts against the step portion of the driving shaft 81, and the locking nut 8412 is installed at the other axial end of the fixing plate 8411 and abuts against the axial end surface of the fixing plate 8411 to lock the fixing plate 8411 on the driving shaft 81.

[0081] The second adjusting member 842 includes an adjusting screw, which is passed through the fixing plate 8411 and is threadedly connected to the driving wheel 82. The position of the driving wheel 82 on the driving shaft 81 can be changed by screwing the adjusting screw.

[0082] In some embodiments, see Figure 15-17 The driven wheel mechanism 90 includes a driven shaft 91, an eccentric sleeve 92 and a driven wheel 93. The driven shaft 91 is connected to the trailer 30, the eccentric sleeve 92 is sleeved outside the driven shaft 91, and the driven wheel 93 is rotatably sleeved outside the eccentric sleeve 92 and matched with the track 120. Specifically, the positions of the driving shaft 81 and the trailer 30 in the circumferential direction are adjustable to adjust the position of the eccentric sleeve 92, thereby adjusting the position of the driven wheel 93 in the second direction, so that the driving wheel 82 and the driven wheel 93 are located in the same plane.

[0083] The driven wheel mechanism 90 also includes a second rib 94 and a third adjustment assembly 95, wherein the second rib 94 is connected to the driven wheel 93. The third adjustment assembly 95 is mounted on the driven shaft 91 to adjust the position of the driven wheel 93 in the axial direction of the driven shaft 91, so that the gap between the second rib 94 and the track 120 is within a second preset range. It should be noted that the axial direction of the driven shaft 91 is parallel to the third direction. During installation, the third adjustment assembly 95 adjusts the position of the driven wheel 93 on the driven shaft 91 to ensure that the gap between the second rib 94 and the track 120 in the third direction is within the second preset range, thereby ensuring the accuracy of the assembly of the driven wheel 93 and the track 120, and thus ensuring the sealing effect of the cover assembly 21 sealing the opening 11.

[0084] Further, the third adjustment assembly 95 includes a third mounting member 951 and a third adjustment member 952, wherein the third mounting member 951 is mounted on the driven shaft 91, and the third adjustment member 952 is mounted on the third mounting member 951, so as to adjust the position of the driven wheel 93 in the axial direction of the driven shaft 91. It is conceivable that in some other embodiments, the third adjustment assembly 95 may also omit the third mounting member 951, and in this case, the third adjustment member 952 is directly mounted on the driven shaft 91.

[0085] In some specific implementations, the third mounting member 951 may be arranged in the same manner as the second mounting member 841. Of course, in other specific implementations, the third mounting member 951 may also be arranged in other manners, which are not limited here.

[0086] The third adjusting member 952 includes an adjusting screw, which is passed through the third mounting member 951 and is threadedly connected to the eccentric sleeve 92. By screwing the adjusting screw, the position of the eccentric sleeve 92 on the driven shaft 91 can be changed, thereby changing the position of the driven wheel 93 on the driven shaft 91.

[0087] The driven wheel mechanism 90 further includes a limiting assembly 96, which is connected to the trailer 30, and the driven shaft 91 is installed on the trailer 30 through the limiting assembly 96. The limiting assembly 96 is used to limit the driven shaft 91 in the axial, radial and circumferential directions of the driven shaft 91, thereby ensuring the stability of the structure. It should be noted that during installation and commissioning, the setting of the limiting assembly 96 will not limit the adjustment of the circumferential position of the driven shaft 91 and the trailer 30, that is, the setting of the limiting assembly 96 will not limit the adjustment of the position of the driven wheel 93 in the second direction.

[0088] In some specific embodiments, the limiting assembly 96 includes a first mounting seat 961, a shaft ring 962, a second mounting seat 963, a rotating sleeve 964, a fixing ring 965, an outer disk 966, and a blocking disk 967. The first mounting seat 961 and the shaft ring 962 are arranged at one axial end of the driven shaft 91, and the second mounting seat 963, the rotating sleeve 964, the fixing ring 965, the outer disk 966, and the blocking disk 967 are arranged at the other axial end of the driven shaft 91.

[0089] The first mounting seat 961 is connected to the trailer 30, the collar 962 is disposed in the first mounting seat 961, and one end of the driven shaft 91 in the axial direction is disposed in the collar 962. The second mounting seat 963 is connected to the trailer 30, the rotating sleeve 964 is sleeved in the second mounting seat 963 and sleeved on the outside of the driven shaft 91, and the rotating sleeve 964 is key-connected with the driven shaft 91 to limit the driven shaft 91 in the circumferential direction.

[0090] The rotating sleeve 964 includes a first connecting portion 9641 and a second connecting portion 9642 connected to each other, and the diameter of the first connecting portion 9641 is larger than that of the second connecting portion 9642. The second connecting portion 9642 is located in the second mounting seat 963, the first connecting portion 9641 is located on the side of the second mounting seat 963 facing away from the first mounting seat 961 and abuts against its end surface, and the fixing ring 965 is sleeved outside the first connecting portion 9641. The blocking disk 967 is sleeved outside the driven shaft 91 and abuts against the end surface of the first connecting portion 9641 facing away from the second connecting portion 9642. The blocking disk 967 is partially embedded in the groove of the driven shaft 91 to limit the driven shaft 91 in the axial direction. The rotating sleeve 964, the blocking disk 967 and the shaft ring 962 jointly limit the driven shaft 91 in the radial direction.

[0091] It should be understood that in some other embodiments, the limiting assembly 96 may also adopt other configurations to achieve the purpose of limiting the driven shaft 91 in the axial, radial and circumferential directions, which is not limited here.

[0092] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0093] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A vacuum coating device, characterized in that: include: A cavity (10) having an opening (11) formed at one end in a first direction; A cover mechanism (20) and a trailer (30) are both supported and arranged on a support surface and are connected to each other in a second direction; the cover mechanism (20) is arranged at one end of the cavity (10) having the opening (11) in the first direction; and the trailer (30) is arranged at one end of the cover mechanism (20) away from the cavity (10) in the first direction; the cover mechanism (20) can drive the trailer (30) to move on the support surface along the first direction to open and close the opening (11); when the cover mechanism (20) closes the opening (11), the cover mechanism (20) and the cavity (10) together form a vacuum chamber; The trailer (30) is hinged to the cover mechanism (20) so as to be able to rotate relative to each other around a first axis extending along a third direction; the first direction, the second direction and the third direction intersect each other.

2. The vacuum coating device according to claim 1, characterized in that: The vacuum coating device comprises a pin shaft (40) and a joint bearing (51), wherein the pin shaft (40) is mounted on one of the cover plate mechanism (20) and the trailer (30), and the other of the cover plate mechanism (20) and the trailer (30) is rotatably connected to the pin shaft (40) via the joint bearing (51).

3. The vacuum coating device according to claim 1, characterized in that: The vacuum coating device further comprises an elastic mechanism, which is used to buffer the relative rotation between the cover plate mechanism (20) and the trailer (30).

4. The vacuum coating device according to claim 1, characterized in that: The vacuum coating device further comprises a guiding mechanism (60), through which the cover mechanism (20) is slidably matched with the cavity (10), and the guiding mechanism (60) is used to guide the cover mechanism (20) in the first direction and to support the cover mechanism (20) in the second direction.

5. The vacuum coating device according to claim 4, characterized in that: The guide mechanism (60) comprises a guide shaft (61) provided on one of the cavity (10) and the cover mechanism (20), and a roller (62) provided on the other; The guide shaft (61) extends along the first direction, and the roller (62) cooperates with the guide shaft (61) to guide the cover mechanism (20) in the first direction.

6. The vacuum coating device according to claim 5, characterized in that: The outer peripheral surface of the roller (62) is concave to form a circumferential groove (621), and the guide shaft (61) is arranged in the circumferential groove (621); the roller (62) is movably connected to the structure connected thereto in the axial direction, and the axial direction of the roller (62) is parallel to the third direction; and / or The guide mechanism (60) further comprises a swinging member (63), wherein the swinging member (63) is connected to the cavity (10) or the cover mechanism (20), and the roller (62) is mounted on the swinging member (63). The swinging member (63) is capable of swinging around a second axis extending along the third direction relative to a structure connected thereto.

7. The vacuum coating device according to claim 5, characterized in that: The guide mechanism (60) further comprises a first adjustment component (65), wherein the first adjustment component (65) comprises a first mounting member (651) and a first adjustment member (652), wherein the first mounting member (651) is connected to the cavity (10) or the cover mechanism (20), the roller (62) is mounted on the first mounting member (651), and the first adjustment member (652) is used to adjust the position of the first mounting member (651) relative to the cavity (10) or the cover mechanism (20) in the second direction.

8. The vacuum coating device according to claim 1, characterized in that: The vacuum coating device further comprises a driving wheel mechanism (80) and a driven wheel mechanism (90), wherein the driving wheel mechanism (80) is connected to the cover plate mechanism (20), and the driven wheel mechanism (90) is connected to the trailer (30); The vacuum coating device further comprises a track (120) arranged on the supporting surface, wherein the track (120) extends along the first direction so as to guide the driving wheel mechanism (80) and the driven wheel mechanism (90) along the first direction; the cover mechanism (20) and the trailer (30) are supported on the supporting surface via the driving wheel mechanism (80), the driven wheel mechanism (90) and the track (120).

9. The vacuum coating device according to claim 8, characterized in that: The driving wheel mechanism (80) comprises a driving shaft (81), a driving wheel (82) and a first rib (83); the driving shaft (81) is rotatably mounted on the cover mechanism (20); the driving wheel (82) is sleeved outside the driving shaft (81) and cooperates with the track (120); and the first rib (83) is connected to the driving wheel (82); The driving wheel mechanism (80) further comprises a second adjustment component (84), which is mounted on the driving shaft (81) and is used to adjust the position of the driving wheel (82) in the axial direction of the driving shaft (81) so that the gap between the first rib (83) and the track (120) is within a first preset range.

10. The vacuum coating device according to claim 9, characterized in that: The second adjustment component (84) comprises a second mounting member (841) and a second adjustment member (842), wherein the second mounting member (841) is mounted on the driving shaft (81), and the second adjustment member (842) is mounted on the second mounting member (841) for adjusting the axial position of the driving wheel (82) on the driving shaft (81).

11. The vacuum coating device according to claim 8, characterized in that: The driven wheel mechanism (90) comprises a driven shaft (91), an eccentric sleeve (92), a driven wheel (93) and a second rib (94); the driven shaft (91) is connected to the trailer (30); the eccentric sleeve (92) is sleeved outside the driven shaft (91); the driven wheel (93) is rotatably sleeved outside the eccentric sleeve (92) and cooperates with the track (120); the second rib (94) is connected to the driven wheel (93); the position of the driven shaft (91) and the trailer (30) in the circumferential direction is adjustable to adjust the position of the eccentric sleeve (92), thereby adjusting the position of the driven wheel (93) in the second direction; The driven wheel mechanism (90) further comprises a third adjustment component (95), which is mounted on the driven shaft (91) and is used to adjust the axial position of the driven wheel (93) on the driven shaft (91) so that the gap between the second rib (94) and the track (120) is within a second preset range.

12. The vacuum coating device according to claim 11, characterized in that: The driven wheel mechanism (90) further comprises a limiting assembly (96), wherein the limiting assembly (96) is connected to the trailer (30), and the driven shaft (91) is mounted on the trailer (30) via the limiting assembly (96), and the limiting assembly (96) is used to limit the driven shaft (91) in the axial, radial and circumferential directions of the driven shaft (91).

13. The vacuum coating device according to claim 11, characterized in that: The third adjustment component (95) includes a third mounting member (951) and a third adjustment member (952), wherein the third mounting member (951) is mounted on the driven shaft (91), and the third adjustment member (952) is mounted on the third mounting member (951) for adjusting the axial position of the eccentric sleeve (92) on the driven shaft (91), thereby adjusting the axial position of the driven wheel (93) on the driven shaft (91).

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