Full-automatic vacuum coating equipment

Abstract

The utility model discloses full-automatic vacuum coating equipment which comprises a vacuum coating equipment body and a filter box, a plurality of clamping blocks are arranged on the inner wall of the filter box, a filter screen is connected between every two connected clamping blocks in a sliding mode, a rotating rod is rotatably connected to the middle of the filter box, a connecting piece is fixedly connected to the outer portion of the rotating rod, and the connecting piece is fixedly connected to the inner wall of the filter box. The two sides of the connecting piece are fixedly connected with connecting rods, and one ends of the two connecting rods are fixedly connected with a cleaning plate. By means of the structure, conveyed gas is filtered through the filter screen, it is guaranteed that the gas outlet is blocked, the filter screen is cleaned through the cleaning plate in the rotating process, and the gas conveying effect can be guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a full-automatic vacuum coating device. Background Art

[0002] The working principle of vacuum coating is to evaporate the target material by heating it in a vacuum environment, and under the action of the electric field, these evaporated atoms or molecules are accelerated and bombard the substrate, thereby forming a thin film on the substrate surface. This process involves a variety of technologies, including physical vapor deposition, magnetron sputtering, ion plating, etc. Among them, physical vapor deposition technology uses low-voltage, high-current arc discharge to evaporate the target material, while magnetron sputtering technology uses magnetic field to confine and extend the movement path of electrons, increase the ionization rate of the working gas and effectively utilize the energy of electrons, thereby accelerating the sputtering deposition of target atoms.

[0003] At present, gas delivery is required in the process of vacuum coating. A gas delivery device refers to a device for delivering gas, which is often used in the process of vacuum coating. In the process system of vacuum coating, the gas delivery device mainly delivers inert gas into the vacuum chamber for coating the surface of the thin film. However, under the conditions of vacuum coating, the gas outlet of the existing gas delivery device is easily blocked, resulting in the failure of vacuum coating. Utility Model Content

[0004] The utility model aims to provide a fully automatic vacuum coating device. Under vacuum coating conditions, the gas outlet of the existing gas conveying device is easily blocked, resulting in the problem of vacuum coating failure.

[0005] To achieve the above-mentioned purpose, a fully automatic vacuum coating equipment is provided, comprising: a vacuum coating equipment body and a filter box, the inner wall of the filter box is provided with a plurality of blocks, a filter screen is slidably connected between two connected blocks, a rotating rod is rotatably connected to the middle of the filter box, a connecting piece is fixedly connected to the outside of the rotating rod, connecting rods are fixedly connected on both sides of the connecting piece, and cleaning plates are fixedly connected to one end of the two connecting rods.

[0006] According to the fully automatic vacuum coating equipment, the outside of the rotating rod is rotatably connected to a connecting sleeve, the outside of the connecting sleeve is fixedly connected to a fixing rod, and the other end of the fixing rod is fixedly connected to the inner wall of the filter box.

[0007] According to the fully automatic vacuum coating equipment, a driving motor is arranged outside the filter box, a rotating shaft is fixedly connected to the output end of the driving motor, a second bevel gear is fixedly connected to one end of the rotating shaft, and a first bevel gear is arranged outside the rotating rod.

[0008] According to the fully automatic vacuum coating equipment, a connecting plate is arranged outside the filter box, a side wall of the connecting plate is fixedly connected to the upper end of the filter net, and a handle is fixedly connected to the upper surface of the connecting plate.

[0009] According to the fully automatic vacuum coating equipment, a plurality of positioning holes are opened on the outside of the filter box, a plurality of positioning rods are fixedly connected to the side wall of the connecting plate, and the positioning rods cooperate with the positioning holes.

[0010] According to the fully automatic vacuum coating equipment, flanges are provided at both ends of the filter box, and the side walls of the flanges are connected to connecting pipes.

[0011] The above scheme has the beneficial effect: the utility model installs a filter box in the middle of the connecting pipe, installs a filter screen in the middle of the filter box, and uses the filter screen to filter the transported gas, thereby avoiding the blockage of the gas outlet affecting the coating effect.

[0012] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The utility model is further described below in conjunction with the accompanying drawings and embodiments;

[0014] Figure 1 This is a three-dimensional diagram of a fully automatic vacuum coating device of the utility model;

[0015] Figure 2 This is a front view of a fully automatic vacuum coating device of the utility model;

[0016] Figure 3 For this utility model Figure 2 The enlarged view of point A in the middle;

[0017] Figure 4 For this utility model Figure 2 Enlarged view of point B in the middle.

[0018] Legend:

[0019] 1. Vacuum coating equipment body; 2. Filter box; 3. Connecting pipe; 4. Flange; 5. Filter; 6. Cleaning plate; 7. Connecting rod; 8. Handle; 9. Connecting plate; 10. Driving motor; 11. Positioning hole; 12. Block; 13. Positioning rod; 14. Rotating rod; 15. Connecting piece; 16. Connecting sleeve; 17. First bevel gear; 18. Second bevel gear; 19. Rotating shaft; 20. Fixing rod. DETAILED DESCRIPTION

[0020] This section will describe in detail the specific embodiments of the utility model. The preferred embodiments of the utility model are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the utility model, but it cannot be understood as a limitation on the protection scope of the utility model.

[0021] Reference Figure 1-4 The utility model embodiment is a fully automatic vacuum coating equipment, which includes: a vacuum coating equipment body 1 and a filter box 2. The inner wall of the filter box 2 is provided with a plurality of blocks 12, which are convenient for positioning the filter screen 5. The filter screen 5 is slidably connected between two connected blocks 12, which is convenient for filtering the transported gas and avoiding blockage of the gas outlet. A rotating rod 14 is rotatably connected to the middle part of the filter box 2, and a connecting piece 15 is fixedly connected to the outside of the rotating rod 14. Connecting rods 7 are fixedly connected on both sides of the connecting piece 15. Cleaning plates 6 are fixedly connected to one end of the two connecting rods 7, which is convenient for cleaning the filter screen 5 and ensuring gas transportation.

[0022] The outside of the rotating rod 14 is rotatably connected with a connecting sleeve 16, and the outside of the connecting sleeve 16 is fixedly connected with a fixing rod 20, and the other end of the fixing rod 20 is fixedly connected to the inner wall of the filter box 2. A driving motor 10 is arranged on the outside of the filter box 2, and a rotating shaft 19 is fixedly connected to the output end of the driving motor 10, and a second bevel gear 18 is fixedly connected to one end of the rotating shaft 19. A first bevel gear 17 is arranged on the outside of the rotating rod 14, and the first bevel gear 17 and the second bevel gear 18 are meshed with each other to rotate the rotating rod 14. A connecting plate 9 is arranged on the outside of the filter box 2, and the connecting plate 9 is installed on the upper surface of the filter box 2 to prevent it from falling, and the connecting plate 9 and the filter The filter box 2 is connected to the filter screen 5 for convenient removal and replacement. The side wall of the connecting plate 9 is fixedly connected to the upper end of the filter screen 5. A handle 8 is fixedly connected to the upper surface of the connecting plate 9. A plurality of positioning holes 11 are provided on the outside of the filter box 2. The positioning rods 13 cooperate with the positioning holes 11 to facilitate positioning of the connecting plate 9. A sealing ring is provided at the connection between the connecting plate 9 and the filter box 2. The sealing ring can avoid gas leakage. A plurality of positioning rods 13 are fixedly connected to the side wall of the connecting plate 9. The positioning rods 13 cooperate with the positioning holes 11. Flanges 4 are provided at both ends of the filter box 2, and the side walls of the flanges 4 are connected to connecting pipes 3.

[0023] Working principle: When in use, the connecting pipe 3 is used to transport gas to the vacuum coating equipment body 1, the filter box 2 is installed in the middle of the connecting pipe 3, and the filter screen 5 is installed in the middle of the filter box 2, the filter screen 5 is used to filter the gas, and the driving motor 10 is used to drive the first bevel gear 17 and the second bevel gear 18 to rotate and drive the rotating rod 14 to rotate, and the cleaning plate 6 is rotated during the rotation. During the rotation, the cleaning plate 6 is used to clean the filter screen 5, which is convenient for gas transportation, and the filter screen 5 is used to filter impurities in the gas to avoid clogging of the gas outlet and affecting the coating effect.

[0024] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.

Claims

1. A fully automatic vacuum coating equipment, comprising: The vacuum coating equipment body (1) and the filter box (2) are characterized in that a plurality of blocks (12) are arranged on the inner wall of the filter box (2), a filter screen (5) is slidably connected between two of the blocks (12), a rotating rod (14) is rotatably connected to the middle of the filter box (2), a connecting piece (15) is fixedly connected to the outside of the rotating rod (14), connecting rods (7) are fixedly connected to both sides of the connecting piece (15), and a cleaning plate (6) is fixedly connected to one end of the two connecting rods (7).

2. The fully automatic vacuum coating equipment according to claim 1, characterized in that: The rotating rod (14) is rotatably connected to a connecting sleeve (16) on the outside, the connecting sleeve (16) is fixedly connected to a fixing rod (20) on the outside, and the other end of the fixing rod (20) is fixedly connected to the inner wall of the filter box (2).

3. The fully automatic vacuum coating equipment according to claim 1, characterized in that: A driving motor (10) is arranged outside the filter box (2); an output end of the driving motor (10) is fixedly connected to a rotating shaft (19); one end of the rotating shaft (19) is fixedly connected to a second bevel gear (18); and a first bevel gear (17) is arranged outside the rotating rod (14).

4. The fully automatic vacuum coating equipment according to claim 1, characterized in that: A connecting plate (9) is provided outside the filter box (2), a side wall of the connecting plate (9) is fixedly connected to the upper end of the filter screen (5), and a handle (8) is fixedly connected to the upper surface of the connecting plate (9).

5. The fully automatic vacuum coating equipment according to claim 4, characterized in that: A plurality of positioning holes (11) are provided on the outside of the filter box (2), a plurality of positioning rods (13) are fixedly connected to the side wall of the connecting plate (9), and the positioning rods (13) and the positioning holes (11) cooperate with each other.

6. The fully automatic vacuum coating equipment according to claim 1, characterized in that: Flanges (4) are provided at both ends of the filter box (2), and the side walls of the flanges (4) are connected to connecting pipes (3).

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