Device for adjusting centrality of seed rod of crystal growing furnace

Abstract

The utility model provides a seed rod centrality adjusting device for a crystal growing furnace, which belongs to the field of crystal processing and comprises a support, an adjuster is mounted at the top end of the support, a crystal growing furnace body is mounted on the left side of the support, and the adjuster penetrates through the top end of the crystal growing furnace body. The adjustor comprises a shell, a lead screw is rotationally connected into the shell, the top end of the lead screw penetrates through the shell, a rotary knob is fixedly connected to the top end of the lead screw, the rotary knob is matched with the shell, the adjustor can be supported through the support, the adjustor moves up and down, and therefore the centrality height can be conveniently adjusted in the crystal growth furnace body, the rotary knob drives the lead screw to rotate, the lead screw drives the threaded sleeve to move up and down, and the threaded sleeve drives the connecting rod and the fixing rod to move up and down, so that follow-up adjustment of the centrality height is facilitated, the centrality height can be adjusted more carefully through the lead screw, and the adjustment precision is higher.

Description

Technical Field

[0001] The utility model relates to the field of crystal processing, in particular to a device for adjusting the centrality of a seed crystal rod of a crystal growth furnace. Background Art

[0002] The growth of silicon single crystals by the Czochralski method is to put polycrystalline silicon raw materials into a quartz crucible, melt the silicon material through the high temperature generated by the graphite heater, then slightly cool the molten silicon liquid to produce a certain degree of supercooling, and then insert a silicon single crystal seed crystal into the surface of the melt. After the seed crystal and the melt are fused, the seed crystal is slowly rotated and lifted upward, and the silicon liquid rotates in the opposite direction and follows the rise, and the crystal will grow at the lower end of the seed crystal. By controlling the thermal field temperature and the crystal lifting speed, single crystal rods of a certain size are continuously grown. At present, most single crystal furnaces are designed to design the upper end face of the reel box to be perpendicular to the upper transmission rotation center, and the upper end face of the reel box is set as a horizontal reference. However, due to the processing and installation errors of multiple matching parts, the upper end face of the reel box is not perpendicular to the upper transmission rotation center, resulting in low accuracy of the final adjusted seed crystal plumb bob.

[0003] Chinese patent application number: 202023088729.9, provides a high-precision horizontal adjustment device for the transmission on a single crystal furnace. The solution uses a micrometer to hit the upper plane of the top plate, rotate the upper transmission, adjust the length of the connecting rod, and adjust the upper plane of the top plate to be perpendicular to the rotation center of the upper transmission; place the level on the upper plane of the top plate, adjust the support block, and the horizontal accuracy of the upper plane of the top plate can be adjusted to within 0.02mm / 1000mm; therefore, the structure is simple, easy to adjust, the measurement is intuitive, the value is accurate, and it can solve high-precision precision The problem of adjusting the plumb bob of the seed crystal in the single crystal furnace, wherein the top plate adjustment structure uses a pair of convex and concave spherical gaskets, specifically, screws are installed on the top plate, the screws pass through the top plate, and are connected to the connecting rod. A group of convex and concave ball pads are inserted into the screws, between the top plate and the connecting rod, and a nut is rotated at the lower end of the ball pad. When adjusting, the nut is loosened, and the screw is turned to adjust the height. After adjustment, the nut is locked to fix the length of the connecting rod. However, the method of fixing the position of the connecting rod by twisting the nut is more troublesome in actual operation, and the nut needs to be repeatedly operated, which consumes a lot of manpower and is not efficient enough.

[0004] Therefore, it is necessary to provide a device for adjusting the centrality of a seed crystal rod in a crystal growth furnace to solve the above technical problems. Utility Model Content

[0005] In order to solve the above technical problems, the utility model provides a device for adjusting the centrality of a seed crystal rod of a crystal growth furnace.

[0006] The utility model provides a device for adjusting the centrality of a seed crystal rod in a crystal growth furnace, comprising a bracket, an adjuster installed at the top of the bracket, a crystal growth furnace body installed on the left side of the bracket, and the adjuster passes through the top of the crystal growth furnace body; the adjuster comprises a shell, a screw rod is rotatably connected inside the shell, the top of the screw rod passes through the shell, the top of the screw rod is fixedly connected with a knob, the knob is adapted to the shell, the outer end of the screw rod is adapted to be connected with a threaded sleeve, the right end of the threaded sleeve is fixedly connected with a connecting rod, the left end of the threaded sleeve is fixedly connected with a fixing rod, and the fixing rod passes through the left end of the shell.

[0007] Preferably, a scale plate is installed at the right end of the shell, and a plurality of scale teeth arranged at equal intervals are opened at the right end of the scale plate.

[0008] Preferably, a limit rod is fixedly connected inside the shell, the limit rod passes through the connecting rod, the limit rod is slidably connected to the connecting rod, the upper and lower ends of the limit rod are fixedly connected to limit blocks, and the limit blocks are adapted to the connecting rod.

[0009] Preferably, the right end of the connecting rod is fixedly connected with an indicator needle, and the indicator needle passes through the right end of the scale plate and is matched with the scale teeth.

[0010] Preferably, the left end of the fixing rod is fixedly connected with a vertical shaft, and the vertical shaft passes through the top end of the crystal growth furnace body.

[0011] Preferably, the regulator further comprises a seed crystal barrel, wherein the seed crystal barrel is installed inside the crystal growth furnace body, and the seed crystal barrel is fixedly connected to the vertical shaft.

[0012] Compared with the related art, the device for adjusting the center degree of a seed crystal rod in a crystal growth furnace provided by the utility model has the following beneficial effects:

[0013] 1. A device for adjusting the center degree of a seed crystal rod in a crystal growth furnace. By turning a knob, the knob drives the lead screw to rotate, the lead screw drives the screw sleeve to move up and down, the screw sleeve drives the fixed rod to move up and down, the fixed rod drives the vertical shaft to move up and down, and the vertical shaft drives the seed crystal barrel to move up and down, so that the seed crystal barrel moves up and down in the crystal growth furnace body, thereby adjusting the center degree height.

[0014] 2. A device for adjusting the center degree of a seed crystal rod in a crystal growth furnace, wherein a threaded sleeve drives a connecting rod to move up and down, and the connecting rod drives an indicating needle to move up and down, and the indicating needle slides on the scale teeth in a scale plate. When adjusting the height, the user can observe the position of the indicating needle on the scale teeth and read the value on the scale teeth to determine the current height of the seed crystal barrel in the crystal growth furnace body. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1It is a schematic diagram of the overall three-dimensional structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the three-dimensional structure of the bracket and the regulator of the utility model;

[0017] Figure 3 It is a schematic diagram of the cutaway structure of the shell of the utility model;

[0018] Figure 4 It is a schematic diagram of the three-dimensional structure of the shell of the utility model;

[0019] Numbers in the figure: 1, bracket; 2, regulator; 3, crystal growth furnace body; 201, shell; 202, scale plate; 203, scale teeth; 204, screw; 205, limit rod; 206, limit block; 207, knob; 208, screw sleeve; 209, connecting rod; 210, indicator needle; 211, fixing rod; 212, vertical shaft; 213, seed crystal barrel. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0021] See also Figures 1 to 4 The embodiment of the utility model provides a device for adjusting the centrality of a seed crystal rod of a crystal growth furnace, comprising a support 1, an adjuster 2 is installed at the top of the support 1, a crystal growth furnace body 3 is installed on the left side of the support 1, and the adjuster 2 passes through the top of the crystal growth furnace body 3; the adjuster 2 comprises a shell 201, a screw rod 204 is rotatably connected inside the shell 201, the top of the screw rod 204 passes through the shell 201, a knob 207 is fixedly connected to the top of the screw rod 204, the knob 207 is adapted to the shell 201, the outer end of the screw rod 204 is adapted to be connected with a screw sleeve 208, the right end of the screw sleeve 208 is fixedly connected with a connecting rod 209, the left end of the screw sleeve 208 is fixedly connected with a fixing rod 211, and the fixing rod 211 passes through the left end of the shell 201;

[0022] The regulator 2 is supported by the bracket 1 and moves up and down, so that the center height can be adjusted in the crystal growth furnace body 3. The knob 207 is rotated, and the knob 207 drives the screw rod 204 to rotate. The screw rod 204 drives the screw sleeve 208 to move up and down. The screw sleeve 208 drives the connecting rod 209 and the fixed rod 211 to move up and down, so that the center height can be adjusted more finely through the screw rod 204, and the adjustment accuracy is higher.

[0023] A scale plate 202 is installed at the right end of the housing 201 , and a plurality of scale teeth 203 arranged at equal intervals are formed at the right end of the scale plate 202 .

[0024] A limiting rod 205 is fixedly connected inside the shell 201 , and the limiting rod 205 passes through the connecting rod 209 . The limiting rod 205 is slidably connected to the connecting rod 209 . The upper and lower ends of the limiting rod 205 are fixedly connected to limiting blocks 206 , and the limiting blocks 206 are adapted to the connecting rod 209 .

[0025] The right end of the connecting rod 209 is fixedly connected with an indicator needle 210 , and the indicator needle 210 passes through the right end of the scale plate 202 and is matched with the scale teeth 203 .

[0026] The left end of the fixing rod 211 is fixedly connected with a vertical shaft 212 , and the vertical shaft 212 passes through the top of the crystal growth furnace body 3 .

[0027] The regulator 2 further includes a seed crystal barrel 213 , which is installed inside the crystal growth furnace body 3 , and is fixedly connected to the vertical shaft 212 .

[0028] During operation, the knob 207 is turned, and the knob 207 drives the screw rod 204 to rotate, and the screw rod 204 drives the screw sleeve 208 to move up and down, and the screw sleeve 208 drives the fixed rod 211 to move up and down, and the fixed rod 211 drives the vertical shaft 212 to move up and down, and the vertical shaft 212 drives the seed crystal barrel 213 to move up and down, so that the seed crystal barrel 213 moves up and down in the crystal growth furnace body 3, so as to adjust the center height. At the same time, the screw sleeve 208 drives the connecting rod 209 to move up and down, and the connecting rod 209 drives the indicating needle 210 to move up and down, and the indicating needle 210 slides on the scale teeth 203 in the scale plate 202. When adjusting the height, the user can observe the position of the indicating needle 210 on the scale teeth 203 and read the value on the scale teeth 203 to determine the current height of the seed crystal barrel 213 in the crystal growth furnace body 3.

[0029] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0030] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for adjusting the centrality of a seed crystal rod in a crystal growth furnace, characterized in that: It comprises a support (1), a regulator (2) is installed on the top of the support (1), a crystal growth furnace body (3) is installed on the left side of the support (1), and the regulator (2) passes through the top of the crystal growth furnace body (3); The regulator (2) comprises a housing (201), the interior of the housing (201) is rotatably connected to a screw rod (204), the top end of the screw rod (204) passes through the housing (201), the top end of the screw rod (204) is fixedly connected to a knob (207), the knob (207) is adapted to the housing (201), the outer end of the screw rod (204) is adapted to be connected to a threaded sleeve (208), the right end of the threaded sleeve (208) is fixedly connected to a connecting rod (209), the left end of the threaded sleeve (208) is fixedly connected to a fixing rod (211), and the fixing rod (211) passes through the left end of the housing (201).

2. The device for adjusting the centrality of a seed rod of a crystal growth furnace according to claim 1, characterized in that: A scale plate (202) is installed at the right end of the housing (201), and a plurality of scale teeth (203) arranged at equal intervals are formed at the right end of the scale plate (202).

3. A device for adjusting the centrality of a seed rod of a crystal growth furnace according to claim 2, characterized in that: A limiting rod (205) is fixedly connected inside the shell (201), the limiting rod (205) passes through the connecting rod (209), the limiting rod (205) is slidably connected to the connecting rod (209), and the upper and lower ends of the limiting rod (205) are fixedly connected to limiting blocks (206), and the limiting blocks (206) are adapted to the connecting rod (209).

4. The device for adjusting the centrality of a seed rod of a crystal growth furnace according to claim 3, characterized in that: The right end of the connecting rod (209) is fixedly connected with an indicating needle (210), and the indicating needle (210) passes through the right end of the scale plate (202) and is matched with the scale teeth (203).

5. The device for adjusting the centrality of a seed rod of a crystal growth furnace according to claim 1, characterized in that: The left end of the fixed rod (211) is fixedly connected to a vertical shaft (212), and the vertical shaft (212) passes through the top end of the crystal growth furnace body (3).

6. The device for adjusting the centrality of a seed rod of a crystal growth furnace according to claim 1, characterized in that: The regulator (2) further comprises a seed crystal barrel (213), wherein the seed crystal barrel (213) is installed inside the crystal growth furnace body (3), and the seed crystal barrel (213) is fixedly connected to the vertical shaft (212).

Images