Silane waste gas purification equipment

Abstract

The utility model relates to silane waste gas purification equipment which comprises purification equipment and a pipeline connector arranged on the outer side of the purification equipment, a bent pipe fitting is installed at one end of the pipeline connector, and a straight pipe fitting is installed at the end, away from the purification equipment, of the bent pipe fitting. The elbow pipe fitting and the straight pipe fitting which are in threaded connection are matched with the spherical groove, the universal movable part and the positioning groove, and when the elbow pipe fitting and the straight pipe fitting are sequentially installed on the outer side of the pipeline connector in a threaded connection mode to conduct exhaust guiding, the elbow pipe fitting and the straight pipe fitting are connected in a threaded mode to conduct exhaust guiding. The universal movable pipe arranged on the outer side of the bent pipe fitting and the outer side of the straight pipe fitting can be fixedly connected with the positioning ring on the outer side of the previous pipeline in a buckling mode, the connecting strength between the pipelines is enhanced, the overall disassembly and assembly operation process is simple and convenient, time and manpower are greatly saved, and workers can conveniently maintain and clean the pipelines.

Description

Technical Field

[0001] The utility model relates to the technical field of silane waste gas treatment, in particular to a silane waste gas purification and refining device. Background Art

[0002] Silane refers to a compound of silicon and hydrogen. The main types of compounds are monosilane and disilane. Silane can provide a gas source for the silicon component for the production of high-purity polycrystalline silicon, single crystal silicon, microcrystalline silicon and other metal silicides. The main characteristics of silane are fine control and high purity, which cannot be replaced by other silicon source materials. It is mainly used in technical fields such as microelectronics and optoelectronics.

[0003] After a long period of use, a large amount of dust and particulate matter is likely to accumulate in the exhaust gas pipe of the silane waste gas purification device, reducing the utilization efficiency of the device, and requiring the device to be shut down for cleaning from time to time. The exhaust pipe of the existing silane waste gas purification device is generally composed of multiple sections, and the pipes are fixed by bolts. When the staff dismantle and install the pipe before and after cleaning the exhaust pipe, the disassembly and installation operations are cumbersome, the workload is large, and it takes a lot of time, which is very inconvenient. Utility Model Content

[0004] Based on the above description, the utility model provides a silane waste gas purification and refining device to solve the problem that the exhaust pipe of the existing silane waste gas purification and refining equipment is inconvenient to disassemble and install, and it is inconvenient to clean the pipe.

[0005] The technical solution of the utility model to solve the above-mentioned technical problems is as follows: a silane waste gas purification and refining device, comprising a purification and refining device and a pipe interface arranged on the outside of the purification and refining device, a bent pipe fitting is installed at one end of the pipe interface, a straight pipe fitting is installed at the end of the bent pipe fitting away from the purification and refining device, a positioning piece is arranged at the end of the pipe interface, the bent pipe fitting and the straight pipe fitting away from the purification and refining device, a rotationally adjustable fastener is arranged at the end of the bent pipe fitting and the straight pipe fitting close to the purification and refining device, the fastener is connected to the positioning piece and reinforces two adjacent pipe fittings.

[0006] On the basis of the above technical solution, the present invention can also be improved as follows.

[0007] Furthermore, a first thread groove is formed at one end of the pipe interface away from the purification and refining equipment, and a first thread ring is provided at one end of the bent pipe member and installed in the first thread groove.

[0008] Furthermore, a second thread groove is formed at one end of the bent pipe member away from the purification and refining equipment, a second thread ring is provided at one end of the straight pipe member and installed in the second thread groove, and a third thread groove is formed at one end of the straight pipe member away from the purification and refining equipment.

[0009] Furthermore, the positioning member is composed of a positioning ring and a positioning groove. The positioning ring is installed on the outside of the pipeline interface, the bent pipe fitting and the straight pipe fitting at one end away from the purification and refining equipment. The positioning groove is opened on the outside of the positioning ring and is distributed in a circular shape with equal distances around the center of the positioning ring. The positioning groove is C-shaped.

[0010] Furthermore, the fastener is composed of a mounting ring and a universal movable rod, the mounting ring is installed on the outside of the bent pipe and the straight pipe at one end close to the purification equipment, and a spherical groove is opened at the edge of the mounting ring close to the purification equipment. The spherical grooves are distributed in a circular shape with equal distances around the center of the mounting ring and correspond to the position of the positioning groove.

[0011] Furthermore, one end of the universal movable rod is installed in the spherical groove, and the other end of the universal movable rod is installed in the positioning groove corresponding to the extension of the spherical groove.

[0012] Compared with the prior art, the technical solution of this application has the following beneficial technical effects:

[0013] The utility model discloses a kind of curved pipe fittings and straight pipe fittings that are connected by threads, cooperate with spherical grooves, universal movable and positioning grooves, and the threaded connection mode is convenient for the disassembly and assembly operations of the curved pipe fittings and the straight pipe fittings to compose and disassemble the exhaust pipe. When the curved pipe fittings and the straight pipe fittings are installed on the outside of the pipe interface in sequence by means of threaded connection to guide the exhaust, the universal movable pipe arranged on the outside of the curved pipe fittings and the straight pipe fittings can be connected with the positioning ring on the outside of the previous pipe by means of buckling to form a fixation, thereby strengthening the strength of the connection between the pipes. Under the restriction of the fixed connection between the universal movable rod and the pipe interface, the pipe can only be disassembled after the connection of the universal movable rod is cancelled when it is rotated for disassembly, thus avoiding the safety hazard caused by the staff's inability to stably control when multiple pipes are disassembled while rotating at the same time. The overall disassembly and assembly operation process is simple and convenient, which greatly saves time and manpower and facilitates the staff to carry out pipeline maintenance and cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 A schematic diagram of the structure of a silane waste gas purification and refining device provided in an embodiment of the utility model;

[0015] Figure 2 This is a structural schematic diagram of the connection relationship between the bent pipe member and the straight pipe member in the embodiment of the utility model;

[0016] Figure 3 It is a schematic diagram of the exploded structure of the bent pipe fitting and the straight pipe fitting in the embodiment of the utility model;

[0017] Figure 4 It is a schematic diagram of the exploded structure of the mounting ring and the universal movable rod in the embodiment of the utility model;

[0018] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0019] 1. Purification and refining equipment; 2. Pipe interface; 21. First thread groove; 3. Bend pipe; 31. First thread ring; 32. Second thread groove; 4. Straight pipe; 41. Second thread ring; 42. Third thread groove; 5. Mounting ring; 51. Spherical groove; 6. Positioning ring; 61. Positioning groove; 7. Universal movable rod. DETAILED DESCRIPTION

[0020] In order to facilitate understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Embodiments of the present application are provided in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.

[0021] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0022] See also Figure 1-4 A silane waste gas purification and refining device of the utility model comprises a purification and refining device 1 and a pipe interface 2 arranged on the outside of the purification and refining device 1, a bent pipe fitting 3 is installed at one end of the pipe interface 2, a straight pipe fitting 4 is installed at the end of the bent pipe fitting 3 away from the purification and refining device 1, a positioning piece is arranged at the end of the pipe interface 2, the bent pipe fitting 3 and the straight pipe fitting 4 away from the purification and refining device 1, a rotationally adjustable fastener is arranged at the end of the bent pipe fitting 3 and the straight pipe fitting 4 close to the purification and refining device 1, and the fastener is connected to the positioning piece and reinforces two adjacent pipe fittings.

[0023] See also Figure 3A first thread groove 21 is provided at one end of the pipe interface 2 away from the purification and refining equipment 1, a first thread ring 31 is provided at one end of the bent pipe fitting 3 and is installed in the first thread groove 21, a second thread groove 32 is provided at one end of the bent pipe fitting 3 away from the purification and refining equipment 1, a second thread ring 41 is provided at one end of the straight pipe fitting 4 and is installed in the second thread groove 32, a third thread groove 42 is provided at one end of the straight pipe fitting 4 away from the purification and refining equipment 1, and the threaded connection facilitates the installation and disassembly of different types of pipes such as the bent pipe fitting 3 and the straight pipe fitting 4, and the pipe can also continue to be installed at the tail end of the straight pipe fitting 4, thereby extending the path of the exhaust pipe and guiding the exhaust gas to the designated area for discharge.

[0024] See also Figure 3 The positioning member is composed of a positioning ring 6 and a positioning groove 61. The positioning ring 6 is installed on the outside of the pipeline interface 2, the bent pipe 3 and the straight pipe 4 at one end away from the purification and refining equipment 1. The positioning grooves 61 are opened on the outside of the positioning ring 6 and are distributed in a ring with equal distances with the center of the positioning ring 6 as the center. The positioning grooves 61 are C-shaped. The C-shaped setting of the positioning groove 61 allows the universal movable rod 7 to be directly squeezed into the positioning groove 61 by buckling and pulling to form a buckled fixation with the positioning groove 61, or directly pulled out from the positioning groove 61 to separate from the positioning groove 61, canceling the fixed relationship, and the installation and disassembly operations are simple.

[0025] See also Figure 2 The fastener is composed of a mounting ring 5 and a universal movable rod 7. The mounting ring 5 is mounted on the outer side of the curved pipe 3 and the straight pipe 4, close to one end of the purification and refining equipment 1. A spherical groove 51 is provided at the edge of the mounting ring 5 close to the purification and refining equipment 1. The spherical grooves 51 are distributed in a circular shape with equal distances around the center of the mounting ring 5, and correspond to the position of the positioning groove 61. The curved surface of the inner wall of the spherical groove 51 is C-shaped. The universal movable rod 7 can be adjusted by rotating at multiple angles in the spherical groove 51 through one end, and the connection stability between the two is good, and the phenomenon of the universal movable rod 7 being separated from the spherical groove 51 will not occur. One end of the universal movable rod 7 is mounted in the spherical groove 51, and the other end of the universal movable rod 7 is mounted in the positioning groove 61 corresponding to the extension of the spherical groove 51. The universal movable rod 7 on the outside of the curved pipe fitting 3 and the straight pipe fitting 4 can be connected to the positioning groove 61 of the previous pipe positioning ring 6 by buckling to form a fixation, so as to strengthen the strength of the connection between the pipes after the pipes are connected by threads. Under the restriction of the fixed connection between the universal movable rod 7 and the pipe interface 2, when the pipes are rotated and disassembled, they can only be disassembled one by one after canceling the connection of the universal movable rod 7 on the outside of the pipe at the tail end of the current exhaust pipe. This can avoid the excessive burden caused by the simultaneous rotation and disassembly of multiple pipes, and the safety hazards caused by the inability of the staff to stably control them. When the exhaust pipes need to be disassembled at the same time, the universal movable rod 7 connected to the pipe interface 2 can be removed, and the curved pipe fitting 3 on the outside of the pipe interface 2 can be rotated to carry other pipes for disassembly, thereby saving time.

[0026] When used herein, the singular forms "a", "an", and "said / the" may also include plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "include / comprise" or "have" etc. specify the presence of stated features, wholes, steps, operations, components, parts or combinations thereof, but do not exclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts or combinations thereof.

[0027] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A silane waste gas purification device, comprising a purification device (1) and a pipeline interface (2) arranged outside the purification device (1), characterized in that: A bent pipe member (3) is installed at one end of the pipeline interface (2), and a straight pipe member (4) is installed at the end of the bent pipe member (3) away from the purification and refining equipment (1). Positioning members are provided on the outer sides of the pipeline interface (2), the bent pipe member (3) and the straight pipe member (4) at the end away from the purification and refining equipment (1). A rotatably adjustable fastening member is provided on the outer sides of the bent pipe member (3) and the straight pipe member (4) at the end close to the purification and refining equipment (1). The fastening member is connected to the positioning member and reinforces two adjacent pipe members.

2. The silane waste gas purification and refining equipment according to claim 1, characterized in that: A first thread groove (21) is formed at one end of the pipe interface (2) away from the purification and refining equipment (1), and a first thread ring (31) is provided at one end of the bent pipe member (3) and is installed in the first thread groove (21).

3. The silane waste gas purification and refining equipment according to claim 2, characterized in that: A second thread groove (32) is formed at one end of the bent pipe member (3) away from the purification and refining equipment (1); a second thread ring (41) is provided at one end of the straight pipe member (4) and is installed in the second thread groove (32); and a third thread groove (42) is formed at one end of the straight pipe member (4) away from the purification and refining equipment (1).

4. The silane waste gas purification and refining equipment according to claim 1, characterized in that: The positioning member is composed of a positioning ring (6) and a positioning groove (61); the positioning ring (6) is installed on the outside of the pipeline interface (2), the curved pipe member (3) and the straight pipe member (4) at one end away from the purification and refining equipment (1); the positioning groove (61) is arranged on the outside of the positioning ring (6) and is distributed in a circular shape with equal distances around the center of the positioning ring (6); and the positioning groove (61) is C-shaped.

5. The silane waste gas purification and refining equipment according to claim 4, characterized in that: The fastening member is composed of a mounting ring (5) and a universal movable rod (7); the mounting ring (5) is mounted on the outer side of the curved pipe member (3) and the straight pipe member (4) close to one end of the purification and refining device (1); a spherical groove (51) is provided at the edge of the mounting ring (5) close to one side of the purification and refining device (1); the spherical grooves (51) are distributed in a circular shape with equal distances around the center of the mounting ring (5) and correspond to the position of the positioning groove (61).

6. The silane waste gas purification and refining equipment according to claim 5, characterized in that: One end of the universal movable rod (7) is mounted in the spherical groove (51), and the other end of the universal movable rod (7) is mounted in the positioning groove (61) corresponding to the extension of the spherical groove (51).

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