Clamp, detection device and resistance detection equipment

Abstract

The utility model discloses a clamp, a detection device and resistance detection equipment. The clamp comprises a mounting piece, an adjusting device and a locking device. The mounting piece is provided with a containing cavity and a detection opening communicated with the containing cavity, the containing cavity is used for containing a main body part of the detection head, the detection opening is used for allowing a probe of the detection head to penetrate out in the first direction, the adjusting device comprises at least three adjusting pieces which are arranged in a non-collinear mode, and the adjusting pieces are movably connected to the detection opening of the mounting piece; the mounting part is used for abutting against the end, facing the probe, of the main body part, the driving adjusting part can adjust the angle of the detection head, the locking device comprises a locking part, and the locking part is movably connected to the mounting part and used for locking the detection head, so that in the using process, the angle of the detection head can be adjusted by driving the adjusting part to move, and the angle of the detection head can be adjusted. Therefore, the plane where the end parts of the four probes are located is approximately parallel to the to-be-detected surface, so that the probes are subjected to the same pressure during detection, and the probes are prevented from being crushed.

Description

Technical Field

[0001] The utility model relates to the technical field of resistance detection, in particular to a clamp, a detection device and resistance detection equipment. Background Art

[0002] The four-probe method is a high-precision test technology for measuring the resistivity of semiconductor materials. During the detection process, four equally spaced probes are placed on the surface of the semiconductor material. In some technologies, the probe head is fixedly connected to the bracket of the equipment, and the bottom of the probe head has four probes. The four probes are brought into contact with the semiconductor by moving the probe head up and down. However, due to factors such as installation accuracy or the processing progress of the connector, after the probe head is installed, the plane where the ends of the four probes are located may be at a certain angle to the plane to be detected of the semiconductor, so there is a risk of some probes being damaged due to excessive pressure during the detection process. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a clamp for mounting a detection head, which can adjust the angle of the detection head, thereby effectively reducing the risk of the probe being crushed.

[0004] The utility model also provides a detection device comprising the clamp.

[0005] The utility model also provides a resistance detection device comprising the clamp.

[0006] The clamp according to the first embodiment of the utility model includes: a mounting member, an adjusting device and a locking device.

[0007] The mounting member has a receiving cavity and a detection port connected to the receiving cavity, the receiving cavity is used to receive the detection head, the detection port is used to allow the probe of the detection head to pass through along a first direction, the adjusting device includes at least three adjusting members that are not arranged in a colinear manner, the adjusting member can be movably connected to the detection port of the mounting member, and is used to abut against the end of the main body facing the probe, and the adjusting member is driven to adjust the angle of the detection head, the locking device is connected to the mounting member, the locking device includes a locking member, and the locking member is used to lock the detection head.

[0008] The clamp according to the embodiment of the utility model has at least the following beneficial effects:

[0009] The clamp of this embodiment includes an adjusting member, which can abut against the detection head to adjust the angle of the detection head. Therefore, during use, the angle of the detection head can be adjusted by driving the adjusting member to move, so that the plane where the ends of the four probes are located is close to parallel to the surface to be detected, so that the pressure on each probe is the same during detection, thereby preventing the probe from being crushed. In addition, since the adjusting member is arranged at the detection port in this embodiment, the part where it abuts against the detection head is close to the head of the probe, so when adjusting the angle, the movement degree of the adjusting member is close to the movement of the probe, thereby improving the adjustment accuracy of the probe and further reducing the risk of the probe being crushed.

[0010] According to some embodiments of the present invention, the locking member is configured as an elastic member, one end of the elastic member is connected to the mounting member, and the other end is used to connect to the detection head, and the locking member is used to apply a force along a first direction to the detection head.

[0011] According to some embodiments of the utility model, the mounting member includes a first shell and a second shell, the first shell is detachably connected to the second shell to define the accommodating cavity, the second shell has the detection port, one end of the elastic member is connected to the first shell, and the other end faces the detection port, and is used to press against the end of the detection head facing away from the probe, and when the elastic member is compressed, the elastic member applies a force along the first direction to the detection head.

[0012] According to some embodiments of the present utility model, the locking device further includes a first protective member, the first protective member is connected to one end of the elastic member facing the detection port, and the first protective member is used to abut against the detection head.

[0013] According to some embodiments of the present invention, the first protective member has an installation groove at one end facing the elastic member, the end of the elastic member is inserted into the installation groove, and there is a gap between the first protective member and the side wall of the accommodating cavity.

[0014] According to some embodiments of the present invention, the elastic member is detachably connected to the mounting member.

[0015] According to some embodiments of the present invention, the mounting member has at least three threaded holes that are not arranged in a colinear manner, and each of the adjusting members is inserted through one of the threaded holes and is threadedly connected to the mounting member.

[0016] According to some embodiments of the present invention, the end of the adjusting member has a spherical surface, and the spherical surface is used to abut against the detection head.

[0017] The detection device according to the second embodiment of the utility model includes: a detection head and the clamp described in the first embodiment.

[0018] The detection head includes a main body and four probes, wherein the probes are connected to the main body, the main body is arranged in the accommodating cavity, and the probes extend from the detection port.

[0019] The detection device according to the embodiment of the utility model has at least the following beneficial effects:

[0020] By using the clamp of the first aspect embodiment, the adjusting member can abut against the detection head to adjust the angle of the detection head. Therefore, during use, the angle of the detection head can be adjusted by driving the adjusting member to move, so that the plane where the ends of the four probes are located is close to parallel to the surface to be detected, so that the pressure on each probe is the same during detection, thereby preventing the probe from being crushed, so as to increase the service life of the detection device. In addition, since the adjusting member is arranged at the detection port in this embodiment, the part where it abuts against the detection head is close to the head of the probe, so when adjusting the angle, the movement degree of the adjusting member is close to the movement of the probe, thereby improving the adjustment accuracy of the probe and further reducing the risk of the probe being crushed.

[0021] According to the third aspect of the present invention, the resistance detection device comprises: a bracket, a support platform and the detection device described in the second aspect, wherein the clamp is connected to the bracket, and the support platform is located below the detection device for supporting the test piece.

[0022] The resistance detection device according to the embodiment of the utility model has at least the following beneficial effects:

[0023] In the detection device of the second aspect embodiment, the adjusting member can abut against the detection head to adjust the angle of the detection head. Thus, during use, the angle of the detection head can be adjusted by driving the adjusting member to move, so that the plane where the ends of the four probes are located is close to parallel to the surface to be detected, so that the pressure on each probe is the same during detection, thereby preventing the probes from being crushed, so as to increase the service life of the resistance detection device. In addition, since the adjusting member is arranged at the detection port in this embodiment, the part where it abuts against the detection head is close to the head of the probe, so when adjusting the angle, the movement degree of the adjusting member is close to the movement of the probe, thereby improving the adjustment accuracy of the probe and further reducing the risk of the probe being crushed.

[0024] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:

[0026] Figure 1It is a structural schematic diagram of a clamp according to an embodiment of the first aspect of the utility model;

[0027] Figure 2 for Figure 1 A cross-sectional view of

[0028] Figure 3 A cross-sectional view of a detection device according to an embodiment of the second aspect of the utility model;

[0029] Figure 4 This is a structural schematic diagram of a resistance detection device according to an embodiment of the third aspect of the utility model.

[0030] Reference numerals:

[0031] Fixture 1000, detection device 2000, resistance detection equipment 3000;

[0032] The mounting member 100, the accommodating cavity 110, the detection port 120, the first housing 130, the first accommodating groove 131, the second housing 140, and the second accommodating groove 141;

[0033] Adjustment member 200;

[0034] Locking device 300, locking member 310, elastic member 320, first protective member 330;

[0035] Detection head 400, main body 410, probe 420;

[0036] Bracket 500, support platform 600. DETAILED DESCRIPTION

[0037] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0038] In the description of the present invention, it should be understood that descriptions involving orientation, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0039] In the description of the present utility model, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed" etc. are understood to exclude the number itself, and "above", "below", "within" etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used to distinguish the technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0040] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0041] The four-probe method is a high-precision test technology for measuring the resistivity of semiconductor materials. During the detection process, four equally spaced probes are placed on the surface of the semiconductor material. In some technologies, the probe head is fixedly connected to the bracket of the equipment, and the bottom of the probe head has four probes. The four probes are brought into contact with the semiconductor by moving the probe head up and down. However, due to factors such as installation accuracy or the processing progress of the connector, after the probe head is installed, the plane where the ends of the four probes are located may be at a certain angle to the plane to be detected of the semiconductor, so there is a risk of some probes being damaged due to excessive pressure during the detection process.

[0042] Based on this, the first embodiment of the utility model proposes a fixture 1000 for mounting the detection head 400, which can adjust the angle of the detection head 400 so that the plane where the ends of the four probes 420 of the detection head 400 are located is close to parallel to the surface to be detected, referring to Figures 1 to 3 , Figure 1 This is a schematic diagram of the structure of the clamp in the first embodiment of the utility model. Figure 2 for Figure 1 A cross-sectional view of Figure 3 This is a cross-sectional view of a detection device according to an embodiment of the second aspect of the utility model. The clamp 1000 of this embodiment includes: a mounting member 100 , an adjustment device and a locking device 300 .

[0043] The mounting member 100 has a receiving cavity 110 and a detection port 120 (eg, Figure 3As shown in FIG. 1 , the accommodating cavity 110 is used to accommodate the main body 410 of the detection head 400 device, and the detection port 120 is used for the probe 420 connected to the main body 410 to pass through along the first direction. The adjustment device includes at least three non-collinearly arranged adjustment members 200, which are movably connected to the detection port 120 of the mounting member 100 and are used to abut against the end of the main body 410 facing the probe 420. Driving the adjustment member 200 can adjust the angle of the detection head 400. For example, the side wall of the mounting member 100 has three connection holes connected to the accommodating chamber 110, and the fixture 1000 has three adjusting members 200, the top surface of the adjusting member 200 is set as an inclined surface, each adjusting member 200 is penetrated in a connection hole, and the inclined surface is abutted against the detection head 400, and the adjusting member 200 can move along the axial direction of the connection hole, thereby, the height of the part of the detection head 400 abutting against the inclined surface can be adjusted through the inclined surface, thereby, through the three adjusting members 200, the angle of the detection head 400 can be adjusted within a certain spatial range, thereby adjusting the angle of each probe 420, and then making the plane where the ends of the four probes 420 are located approach parallel to the surface to be tested of the part to be tested. Alternatively, in some embodiments, the mounting member 100 has at least three threaded holes that are not arranged in a colinear manner, and the threaded holes and the detection port 120 are located on the same inner wall of the accommodating chamber 110, and each adjusting member 200 is penetrated in a threaded hole and is threadedly connected to the mounting member 100. Therefore, the angle of the detection head 400 can be adjusted by rotating the adjustment member 200, which is simpler and more convenient to use.

[0044] The locking device 300 is connected to the mounting member 100, and the locking device 300 includes a locking member 310, and the locking member 310 is used to lock the position of the detection head 400. For example, the locking device 300 includes three locking members 310, and the three locking members 310 are distributed along the side wall of the accommodating cavity 110. When the position adjustment of the detection head 400 is completed, the three locking members 310 can be used to abut against the side of the detection head 400, so that the detection head 400 is clamped, or the clamp 1000 includes a locking member 310, and the locking member 310 is arranged opposite to the detection port 120. When the position of the detection head 400 is adjusted, the locking member 310 is used to abut against the end of the detection head 400 away from the probe 420 (such as Figure 3 As shown), the detection head 400 is clamped between the locking member 310 and the adjusting member 200.

[0045] Specifically, since the fixture 1000 of this embodiment can be used to install and adjust the angle of the detection head 400, when the fixture 1000 of this embodiment is used in the resistance detection device 3000, the angle of the detection head 400 can be adjusted by driving the adjustment member 200 to move, so that the plane where the ends of the four probes 420 are located is close to parallel to the surface to be detected. Therefore, after the four probes 420 contact the surface to be detected, the four probes 420 are squeezed to the same extent, so that the pressures on the four probes 420 are close to the same, thereby preventing some probes 420 from being crushed due to excessive force. Specifically, for example, the detection head 400 has four probes 420, A, B, C and D, and the A probe 420 is arranged opposite to the D probe 420, and the B probe 420 is arranged opposite to the C probe 420. If the detection head 400 is tilted toward the A probe 420 as a whole during use, the A probe 420 will first contact the surface to be measured when the detection head 400 is approached to the surface to be measured. As the detection head 400 continues to move until the D probe 420 contacts the surface to be measured, the A probe 420 will be subjected to greater pressure than the D probe 420. If the deflection angle of the detection head 400 is too large, the pressure will be greater, thereby increasing the risk of the A probe 420 being crushed. In addition, if the deflection angle of the detection head 400 is too large, it may also cause the D probe 420 to fail to contact the surface to be measured, thereby causing the resistance measurement to fail. The fixture 1000 of this embodiment can adjust the angle of the detection head 400, thereby not only effectively reducing the risk of the probe 420 being crushed, but also improving the reliability of the detection equipment.

[0046] Further, it can be known that, in this embodiment, the surface to be adjusted is the plane where the four probes 420 are located together, and is recorded as surface a, and the plane where the three points where the three adjustment members 200 and the detection head 400 are in contact is surface b. Along the normal direction of surface b, the closer the surface a is to the surface b, the closer the movement of surface a is to the movement of surface b during the adjustment process, thereby improving the adjustment accuracy of surface a. Based on this, in this embodiment, the adjustment member 200 is arranged at the detection port 120, so that the contact point between the adjustment member 200 and the detection head 400 is close to the position of the end of the probe 420, thereby improving the adjustment accuracy of the position of the adjustment probe 420, thereby improving the parallelism between the plane where the ends of the four probes 420 are located and the surface to be measured, thereby further reducing the risk of the probe 420 being crushed.

[0047] Reference Figure 2In some embodiments, the locking member 310 is configured as an elastic member 320. The elastic member 320 can be any elastic member such as a tension spring, a compression spring or an elastic band. One end of the elastic member 320 is connected to the mounting member 100, and the other end is used to connect with the detection head 400, and is used to apply a force along the first direction to the locking member 310, so that the detection head 400 is pressed against the adjustment member 200, so that the position of the detection head 400 is fixed. Specifically, it can be known that if the locking member 310 is a rigid member, the adjustment member 200 needs to be driven first when adjusting the angle of the detection head 400 to release the lock of the detection head 400. In this embodiment, the locking member 310 is configured as an elastic member 320. When adjusting the angle of the detection head 400, the elastic member 320 can be deformed adaptively, so that the angle of the detection head 400 is adjustable. Therefore, in this embodiment, when adjusting the angle of the detection head 400, there is no need to additionally operate the locking member 310, so that the clamp 1000 of this embodiment is more convenient to use. On the other hand, after the detection head 400 contacts the surface to be detected, the elastic member 320 can play a certain buffering role on the impact of the detection head 400, thereby further reducing the risk of the detection head being crushed.

[0048] Reference Figure 2In some embodiments, the mounting member 100 includes a first shell 130 and a second shell 140. The first shell 130 is detachably connected to the second shell 140 to define a receiving cavity 110. The second shell 140 has a detection port 120. One end of the elastic member 320 is connected to the first shell 130, and the other end faces the detection port 120, and is used to press against the end of the detection head 400 that is away from the probe 420. Specifically, for example, the first shell 130 is set to a flat plate structure, the second shell 140 has a second accommodating groove 141, the first shell 130 is connected to the second shell 140, and the second accommodating groove 141 is covered to define the accommodating cavity 110, or the first shell 130 has a first accommodating groove 131, the second shell 140 is set to a flat plate structure, the second shell 140 is connected to the first shell 130, and the first accommodating groove 131 is covered to define the accommodating cavity 110, or the first shell 130 has a first accommodating groove 131, the second shell 140 has a second accommodating groove 141, the second shell 140 is connected to the first shell 130, and the first accommodating groove 131 is covered to define the accommodating cavity 110. The groove 131 is connected to the second accommodating groove 141 to define the accommodating cavity 110. Taking this as an example for explanation, the elastic member 320 is, for example, a compression spring, or any structural member with compression rebound performance. One end of the elastic member 320 is arranged in the first accommodating groove 131. During the installation of the detection head 400, the detection head 400 is first arranged in the second accommodating groove 141, and then the first shell 130 is connected to the second shell 140. At the same time, the first elastic member 320 can be pressed against the side of the detection head 400 facing away from the probe 420, thereby completing the connection between the elastic member 320 and the detection head 400, thereby making the installation of the detection head 400 easier.

[0049] In some embodiments, the locking device 300 further includes a first protective member 330, which is connected to one end of the elastic member 320 facing the detection port 120. For example, the first protective member 330 has a mounting groove at one end facing the elastic member 320, and the end of the elastic member 320 is inserted into the mounting groove. The first protective member 330 is used to abut against the detection head 400. The first protective member 330 is used to separate the elastic member 320 and the detection head 400, which can avoid direct contact between the elastic member 320 and the detection head 400, reduce the wear of the elastic member 320 on the detection head 400, and further make the size of the first protective member 330 compatible with the detection head 400, so as to ensure that the detection head 400 has a sufficient force-bearing area, avoid excessive local pressure on the detection head 400, and further reduce the risk of damage to the detection head 400. Similarly, the adjustment device further includes a second protective member, which is used to be sleeved on the outside of the probe 420 and abut against the main body 410, and the adjustment member 200 abuts against the second protective member.

[0050] Reference Figure 2In some embodiments, there is a gap between the first protective member 330 and the side wall of the accommodating cavity 110. Therefore, when adjusting the angle of the detection head 400, the first protective member 330 can be adaptively adjusted to increase the contact area between the first protective member and the detection head 400, further reducing the risk of damage to the detection head 400 due to excessive pressure.

[0051] In some embodiments, the elastic member 320 is detachably connected to the clamp 1000. Therefore, when the elastic member 320 is deformed for a long time and becomes invalid, the elastic member 320 can be replaced without replacing the entire clamp 1000, thereby saving the use cost. In addition, elastic members 320 of different sizes can be selected according to different detection heads 400, so that the detection head 400 can be pressed against the adjustment member 200 under the elastic force of the elastic member 320. For example, when the detection head 400 is longer, a shorter elastic member 320 can be selected, and when the detection head 400 is shorter, a longer elastic member 320 can be selected to improve the practicality of the clamp 1000 of this embodiment.

[0052] In some embodiments, the end of the adjusting member 200 has a spherical surface, which is used to abut against the detection head 400. Specifically, it can be known that the spherical surface can rotate more smoothly on a plane. Based on this, in this embodiment, the end of the adjusting member 200 used to abut against the detection head 400 is set to a spherical surface, so that the detection head 400 can swing more smoothly, so that the angle adjustment of the detection head 400 is simpler and more convenient.

[0053] Reference Figure 3 The detection device 2000 of the second embodiment includes: a detection head 400 and a fixture 1000 of the first embodiment. The detection head 400 includes a main body 410 and four probes 420, the probes 420 are connected to the main body 410, the main body 410 is arranged in the accommodating cavity 110, and the probes 420 extend from the detection port 120. The adjusting member 200 in the fixture 1000 can support the detection head 400 to adjust the angle of the detection head 400. Therefore, during use, the angle of the detection head 400 can be adjusted by driving the adjusting member 200 to move, so that the plane where the ends of the four probes 420 are located is close to parallel to the surface to be detected, so that the pressure on each probe 420 during detection is the same, thereby preventing the probe 420 from being crushed, thereby improving the service life of the detection device 2000.

[0054] It should be noted that, since this embodiment adopts all the technical features of the clamp 1000 of the first aspect embodiment, this embodiment has all the beneficial effects brought by the first aspect embodiment, which will not be repeated here.

[0055] Based on the above embodiment, the detection head 400 also has four compression springs, one end of each spring is connected to a probe 420, and the other end is connected to the main body 410, further buffering the impact between the probe 420 and the surface to be measured, thereby effectively reducing the risk of damage to the probe 420.

[0056] Reference Figure 4 , Figure 4 The present invention is a schematic diagram of the structure of a resistance detection device according to a third embodiment of the present invention. The resistance detection device 3000 according to the third embodiment comprises: a bracket 500, a support table 600, and a detection device 2000 according to the second embodiment. The fixture 1000 of the detection device 2000 is connected to the bracket 500, and the support table 600 is located below the detection device 2000 and is used to support the part to be detected.

[0057] The adjusting member 200 in the detection device 2000 can abut against the detection head 400 to adjust the angle of the detection head 400. Therefore, during use, the adjusting member 200 can be driven to move to adjust the angle of the detection head 400, so that the plane where the ends of the four probes 420 are located is close to parallel to the surface to be detected, so that the pressure on each probe 420 during detection is the same, thereby preventing the probe 420 from being crushed, thereby increasing the service life of the resistance detection device 3000.

[0058] The above is a detailed description of the embodiment of the utility model in conjunction with the accompanying drawings, but the utility model is not limited to the above-mentioned embodiment, and various changes can be made without departing from the purpose of the utility model within the scope of knowledge possessed by ordinary technicians in the relevant technical field. In addition, in the description of the utility model, the description of the reference terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

Claims

1. A fixture, characterized in that, include: The mounting member has a receiving cavity and a detection port communicated with the receiving cavity, wherein the receiving cavity is used to receive the main body of the detection head, and the detection port is used to allow the probe connected to the main body to pass through along a first direction; An adjusting device, comprising at least three adjusting members arranged non-collinearly, wherein the adjusting members are movably connected to the detection port of the mounting member, and are used to abut against the end of the main body facing the probe, and the adjusting members are driven to adjust the angle of the detection head; A locking device is connected to the mounting member, wherein the locking device comprises a locking member, and the locking member is used to lock the detection head.

2. The clamp according to claim 1, characterized in that: The locking member is configured as an elastic member, one end of which is connected to the mounting member, and the other end of which is used to be connected to the detection head. The locking member is used to apply a force along a first direction to the detection head.

3. The clamp according to claim 2, characterized in that: The mounting member includes a first shell and a second shell, the first shell is detachably connected to the second shell to define the accommodating cavity, the second shell has the detection port, one end of the elastic member is connected to the first shell, and the other end faces the detection port, and is used to press against the end of the detection head facing away from the probe, when the elastic member is compressed, the elastic member applies a force along the first direction to the detection head.

4. The clamp according to claim 3, characterized in that: The locking device further comprises a first protective member, which is connected to one end of the elastic member facing the detection port, and is used for abutting against the detection head.

5. The clamp according to claim 4, characterized in that: A gap is formed between the first protection component and the side wall of the accommodating cavity.

6. The clamp according to claim 3, characterized in that: The elastic member is detachably connected to the mounting member.

7. The clamp according to claim 1, characterized in that: The mounting member has at least three threaded holes that are not arranged in a colinear manner, and each of the adjusting members is passed through one of the threaded holes and is threadedly connected to the mounting member.

8. The clamp according to claim 7, characterized in that: The end of the adjusting member has a spherical surface, and the spherical surface is used to abut against the detection head.

9. A detection device, characterized in that: include: The detection head comprises a main body and four probes, wherein the probes are connected to the main body; In the clamp described in any one of claims 1 to 8, the main body is disposed in the accommodating cavity, and the probe extends from the detection port.

10. Resistance detection equipment, characterized in that, include: Bracket; The detection device according to claim 9, wherein the clamp is connected to the bracket; The support platform is located below the detection device and is used to support the object to be detected.

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