Local evaporation clamp

Abstract

The utility model provides a clamp for local evaporation, which comprises a base plate and an umbrella-shaped support, the umbrella-shaped support is arranged above the base plate, a plurality of shade plates are arranged below the base plate, a base material to be evaporated is tiled and clamped between the base plate and the shade plates, two ends of the shade plates are detachably connected with the base plate, and the shade plates are arranged on the umbrella-shaped support. A plurality of evaporation grooves are formed in the shielding plates and used for conducting evaporation coating through the evaporation grooves, the evaporation grooves in the same shielding plate are evenly arranged at intervals, the widths and the lengths of the evaporation grooves in different shielding plates and the gaps between the evaporation grooves are different, the evaporation grooves are freely arranged according to requirements, and various kinds of evaporation are met.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, and more specifically to a fixture for local evaporation. Background Art

[0002] The vacuum evaporation machine evaporates the coating material (or film material) and gasifies it under vacuum conditions by means of electric current heating, electron beam bombardment heating and ion source bombardment, and then makes the gasified particles fly to the surface of the substrate and condense to form a film. Vacuum evaporation has the advantages of simple film formation method, high film purity and density, unique film structure and performance, etc., so it is widely used.

[0003] In the vacuum evaporation process, there are generally evaporation sources and umbrella-shaped fixtures arranged above the evaporation sources to carry the workpiece to be coated. The umbrella-shaped fixture fixes the workpiece to be coated, and during the evaporation process, in order to ensure the uniformity of the coating, the umbrella-shaped fixture is generally carried out, that is, the umbrella-shaped fixture is connected to the component of the vacuum evaporation machine that provides driving force for the umbrella frame fixture. After the coating is completed, the umbrella-shaped fixture is taken out. However, in actual applications, some customers do not need the entire fixture to be evaporated, and in the prior art, there is no device that facilitates local evaporation.

[0004] The utility model patent with publication number CN117127160A discloses a device for coating substrates over a large area, wherein the crucible assembly is arranged in the coating chamber, the substrate adjustment assembly is arranged in the coating chamber and is arranged opposite to the crucible assembly, and a correction plate assembly is arranged between the crucible assembly and the substrate adjustment assembly. Since the closer the crucible assembly is to the basic center projection position, the higher the effective evaporation efficiency, the coating thickness directly above the crucible assembly is always the thickest, and the farther away, the thinner. The correction plate assembly partially blocks the thicker coating area of ​​the evaporated coating of the crucible assembly through the shape of the correction plate, thereby reducing the coating thickness, thereby controlling the coating uniformity. The adjusting screw is used to adjust the height of the clamping device relative to the crucible assembly, and the uniformity of the substrate coating is better adjusted by cooperating with the adjusting screw and the correction plate assembly, with low cost and high efficiency.

[0005] In view of this, the utility model provides a fixture for local evaporation, which can freely set the evaporation style according to customer needs to meet various types of evaporation. Utility Model Content

[0006] In view of this, in order to solve the above problems, the utility model proposes a local evaporation fixture, including a substrate 3 and an umbrella-shaped bracket 2, the umbrella-shaped bracket 2 is arranged above the substrate 3, and a plurality of mask plates 4 are arranged below the substrate 3, and the substrate to be evaporated is clamped between the substrate 3 and the mask plates 4, and the two ends of the mask plates 4 are detachably connected to the substrate 3, and the mask plates 4 are provided with a plurality of evaporation grooves 44 for evaporation coating through the evaporation grooves 44, and the evaporation grooves 44 on the same mask plate 4 are evenly spaced, and the widths and lengths of the evaporation grooves 44 on different mask plates 4 are different, as well as the gaps between the evaporation grooves 44, which can be freely set according to needs to meet various types of evaporation.

[0007] A fixture for local evaporation, comprising a substrate 3 and an umbrella-shaped bracket 2, wherein the umbrella-shaped bracket 2 is arranged above the substrate 3, and is characterized in that: a plurality of mask plates 4 are arranged below the substrate 3, a substrate to be evaporated is flatly clamped between the substrate 3 and the mask plates 4, both ends of the mask plates 4 are detachably connected to the substrate 3, a plurality of evaporation grooves 44 are arranged on the mask plate 4 for evaporation coating through the evaporation grooves 44, the evaporation grooves 44 on the same mask plate 4 are evenly spaced, the widths and lengths of the evaporation grooves 44 on different mask plates 4 and the gaps between the evaporation grooves 44 are different, and can be freely arranged according to needs to meet various types of evaporation.

[0008] Furthermore, the substrate 3 includes a substrate bottom plate 31 and a substrate side plate 32, and the umbrella-shaped bracket 2 includes a keel frame 21, an adapter 22 and a limit block 23. The keel frame 21 is connected to the center point of the substrate side plate 32 through the adapter 22 and the limit block 23. The adapter 22 is L-shaped, and a slot 211 is provided at the bottom of the keel frame 21. One end of the adapter 22 is connected through the slot 211, and the other end of the adapter 22 is connected to the bottom of the limit block 23. The limit block 23 and the keel frame 21 are vertically connected through the adapter 22, so that the connection has a large force strength.

[0009] Furthermore, a limiting groove 233 is provided on one side of the limiting block 23 close to the substrate 3, and a limiting column 24 is connected through the limiting groove 233. The other end of the limiting column 24 is connected to the center point of the substrate side plate 32. A cut surface is provided on the side of the limiting column 24 to facilitate insertion into the limiting groove 233.

[0010] Furthermore, the substrate 3 is symmetrically provided with strip grooves 5 near both ends, the strip grooves 5 are perpendicular to the plane direction of the plurality of mask plates 4, and the substrate to be evaporated passes through the strip grooves 5 and is placed between the substrate 3 and the mask plates 4.

[0011] Furthermore, a substrate clamp fixing strip 6 is provided above the substrate 3 near the inner side of the strip-shaped groove 5 , and the substrate clamp fixing strip 6 is used to fix the two ends of the placed substrate through clips to prevent the substrate from sliding easily.

[0012] Furthermore, a plurality of reinforcing ribs 7 are provided on the upper portion of the base bottom plate 31, and the reinforcing ribs 7 include reinforcing rib cross beams 71 and reinforcing rib vertical beams 72. There are at least two reinforcing rib cross beams 71, and both ends of the reinforcing rib cross beams 71 are connected to the inner side of the base side plate 32. The reinforcing rib cross beams 71 are arranged in parallel with the base clip fixing strip 6, and the reinforcing rib vertical beams 72 are arranged between the reinforcing rib cross beams 71 and the base clip fixing strip 6 and the adjacent reinforcing rib cross beams 71. The reinforcing rib vertical beams 72 are arranged perpendicular to the reinforcing rib cross beams 71. The plurality of reinforcing rib cross beams 71 and the reinforcing rib vertical beams 72 enhance the structural strength of the base plate 3.

[0013] Furthermore, the cross sections of the reinforcing rib cross beam 71 and the reinforcing rib vertical beam 72 are both triangular, so that the structures of the reinforcing rib cross beam 71 and the reinforcing rib vertical beam 72 are stable.

[0014] Furthermore, a plurality of circular holes 33 are provided on the base plate 31, and the circular holes 33 are evenly spaced on the base plate 31 between the reinforcing rib cross beam 71, the base plate clamp fixing strip 6, and the reinforcing rib vertical beam 72. The circular holes 33 are used to reduce the weight of the base plate 3, making it easy to operate.

[0015] Furthermore, the top of the keel frame 21 is connected to the flange 1, and the upper part of the flange 1 is connected to an external driving device to drive the entire clamp.

[0016] Furthermore, a avoidance hole 34 is provided at the center of the substrate bottom plate 31 to allow the material evaporated from the evaporation source to pass through the avoidance hole 34, so as to facilitate the probe to detect the real-time film thickness of the evaporation.

[0017] Furthermore, a handle 8 is provided at the bottom of the base plate 3, and the handle 8 is used to push up the base plate 3 when removing the base plate 3, rotate it to split it, or rotate the angle of the base plate 3 when installing it, and then pull it down, so as to facilitate operation.

[0018] Beneficial effects of the utility model: The utility model proposes a fixture for local evaporation, including a substrate 3 and an umbrella-shaped bracket 2, the umbrella-shaped bracket 2 is arranged above the substrate 3, and a plurality of mask plates 4 are arranged below the substrate 3, and the substrate to be evaporated is clamped between the substrate 3 and the mask plates 4, and the two ends of the mask plates 4 are detachably connected to the substrate 3, and the mask plates 4 are provided with a plurality of evaporation grooves 44 for evaporation coating through the evaporation grooves 44, the evaporation grooves 44 on the same mask plate 4 are evenly spaced, and the widths and lengths of the evaporation grooves 44 on different mask plates 4 and the gaps between the evaporation grooves 44 are different, which can be freely set according to needs to meet various types of evaporation. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is an overall structural diagram of the local evaporation fixture of the utility model.

[0020] Figure 2 This is a bottom structural diagram of the local evaporation fixture of the utility model.

[0021] Figure 3 It is a schematic diagram of the structure of the un-umbrella-shaped support of the local evaporation fixture of the utility model.

[0022] Figure 4 This is a partial structural diagram of the local evaporation fixture of the utility model.

[0023] Figure 5 This is a structural diagram of the keel frame of the local vapor deposition fixture of the utility model.

[0024] Main component symbols

[0025] Flange 1, umbrella-shaped bracket 2, keel frame 21, slot 211, adapter 22, limit block 23, limit slot 233, limit column 24, substrate 3, substrate bottom plate 31, substrate side plate 32, circular hole 33, avoidance hole 34, mask plate 4, evaporation slot 44, strip slot 5, substrate clip fixing strip 6, reinforcing rib 7, reinforcing rib cross beam 71, reinforcing rib vertical beam 72, handle 8

[0026] The following specific implementation manner will further illustrate the present utility model in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0027] like Figure 1 As shown, it is the overall structure diagram of the local evaporation fixture of the utility model; Figure 2 As shown, it is a bottom structure diagram of the local evaporation fixture of the utility model; Figure 3 As shown, it is a schematic diagram of the un-umbrella-shaped bracket structure of the local evaporation fixture of the utility model; Figure 4 As shown, it is a partial structural diagram of the local evaporation fixture of the utility model; Figure 5 As shown, it is a skeleton structure diagram of the partial vapor deposition fixture of the present invention. Example

[0028] A fixture for local evaporation, comprising a substrate 3 and an umbrella-shaped bracket 2, wherein the umbrella-shaped bracket 2 is arranged above the substrate 3, and is characterized in that: a plurality of mask plates 4 are arranged below the substrate 3, a substrate to be evaporated is flatly clamped between the substrate 3 and the mask plates 4, both ends of the mask plates 4 are detachably connected to the substrate 3, a plurality of evaporation grooves 44 are arranged on the mask plate 4 for evaporation coating through the evaporation grooves 44, the evaporation grooves 44 on the same mask plate 4 are evenly spaced, the widths and lengths of the evaporation grooves 44 on different mask plates 4 and the gaps between the evaporation grooves 44 are different, and can be freely arranged according to needs to meet various types of evaporation.

[0029] The substrate 3 includes a substrate bottom plate 31 and a substrate side plate 32, and the umbrella-shaped bracket 2 includes a keel frame 21, an adapter 22 and a limit block 23. The keel frame 21 is connected to the center point of the substrate side plate 32 through the adapter 22 and the limit block 23. The adapter 22 is L-shaped, and a slot 211 is provided at the bottom of the keel frame 21. One end of the adapter 22 is connected through the slot 211, and the other end of the adapter 22 is connected to the bottom of the limit block 23. The limit block 23 and the keel frame 21 are vertically connected through the adapter 22, so that the connection has a large force strength.

[0030] The limiting block 23 is provided with a limiting groove 233 on one side close to the base plate 3, and the limiting column 24 is connected through the limiting groove 233. The other end of the limiting column 24 is connected to the center point of the base plate 32. The side of the limiting column 24 is provided with a cut surface to facilitate the insertion into the limiting groove 233.

[0031] The substrate 3 is symmetrically provided with strip grooves 5 near both ends. The strip grooves 5 are perpendicular to the plane direction of the plurality of mask plates 4. The substrate to be evaporated passes through the strip grooves 5 and is placed between the substrate 3 and the mask plates 4.

[0032] A substrate clamp fixing strip 6 is provided above the substrate 3 near the inner side of the strip-shaped groove 5 , and the substrate clamp fixing strip 6 is used to fix the two ends of the placed substrate by means of a clamp, so that the substrate is not easy to slide.

[0033] A plurality of reinforcing ribs 7 are provided on the upper portion of the base bottom plate 31, and the reinforcing ribs 7 include reinforcing rib cross beams 71 and reinforcing rib vertical beams 72. There are at least two reinforcing rib cross beams 71, and both ends of the reinforcing rib cross beams 71 are connected to the inner side of the base side plate 32. The reinforcing rib cross beams 71 are arranged in parallel with the base clip fixing strip 6, and the reinforcing rib vertical beams 72 are arranged between the reinforcing rib cross beams 71, the base clip fixing strip 6, and the adjacent reinforcing rib cross beams 71. The reinforcing rib vertical beams 72 are arranged perpendicular to the reinforcing rib cross beams 71. The plurality of reinforcing rib cross beams 71 and the reinforcing rib vertical beams 72 enhance the structural strength of the base plate 3.

[0034] The cross sections of the reinforcing rib cross beam 71 and the reinforcing rib vertical beam 72 are both triangular, so that the structures of the reinforcing rib cross beam 71 and the reinforcing rib vertical beam 72 are stable.

[0035] The base plate 31 is provided with a plurality of circular holes 33 , which are evenly spaced on the base plate 31 between the reinforcing rib cross beam 71 , the base plate clamp fixing strip 6 , and the reinforcing rib vertical beam 72 . The circular holes 33 are used to reduce the weight of the base plate 3 , making it easy to operate.

[0036] The top of the keel frame 21 is connected to the flange 1, and the upper part of the flange 1 is connected to an external driving device to drive the entire clamp.

[0037] The center of the substrate bottom plate 31 is provided with an avoidance hole 34 for allowing the material evaporated from the evaporation source to pass through the avoidance hole 34 , so as to facilitate the probe to detect the real-time film thickness of the evaporation.

[0038] A handle 8 is provided at the bottom of the base plate 3, and the handle 8 is used to push the base plate 3 up when removing the base plate 3, rotate it for splitting, or rotate the angle of the base plate 3 when installing it, and then pull it down, so as to facilitate operation.

[0039] Beneficial effects of the utility model: The utility model proposes a fixture for local evaporation, including a substrate 3 and an umbrella-shaped bracket 2, the umbrella-shaped bracket 2 is arranged above the substrate 3, and a plurality of mask plates 4 are arranged below the substrate 3, and the substrate to be evaporated is clamped between the substrate 3 and the mask plates 4, and the two ends of the mask plates 4 are detachably connected to the substrate 3, and the mask plates 4 are provided with a plurality of evaporation grooves 44 for evaporation coating through the evaporation grooves 44, the evaporation grooves 44 on the same mask plate 4 are evenly spaced, and the widths and lengths of the evaporation grooves 44 on different mask plates 4 and the gaps between the evaporation grooves 44 are different, which can be freely set according to needs to meet various types of evaporation.

[0040] The above-mentioned embodiments only express several implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A fixture for local evaporation, comprising a substrate (3) and an umbrella-shaped support (2), wherein the umbrella-shaped support (2) is arranged above the substrate (3), and is characterized in that: A plurality of shielding plates (4) are provided below the substrate (3); a base material to be evaporated is laid flat between the substrate (3) and the shielding plates (4); both ends of the shielding plates (4) are detachably connected to the substrate (3); a plurality of evaporation grooves (44) are provided on the shielding plates (4) for evaporation coating through the evaporation grooves (44); the evaporation grooves (44) on the same shielding plate (4) are evenly spaced; the widths and lengths of the evaporation grooves (44) on different shielding plates (4) and the gaps between the evaporation grooves (44) are different, and can be freely arranged according to needs to meet the requirements of various types of evaporation.

2. The fixture for local evaporation as claimed in claim 1, characterized in that: The base plate (3) comprises a base plate bottom plate (31) and a base plate side plate (32); the umbrella-shaped bracket (2) comprises a keel frame (21), an adapter (22) and a limit block (23); the keel frame (21) is connected to the center point of the base plate side plate (32) through the adapter (22) and the limit block (23); the adapter (22) is L-shaped; a slot (211) is provided at the bottom of the keel frame (21); one end of the adapter (22) is connected through the slot (211); the other end of the adapter (22) is connected to the bottom of the limit block (23); the limit block (23) and the keel frame (21) are vertically connected through the adapter (22).

3. The local evaporation fixture according to claim 2, characterized in that: The limiting block (23) is provided with a limiting groove (233) on one side close to the base plate (3), and is connected to the limiting column (24) through the limiting groove (233). The other end of the limiting column (24) is connected to the center point of the base plate side plate (32). The side of the limiting column (24) is provided with a cut surface to facilitate insertion into the limiting groove (233).

4. The fixture for local evaporation as claimed in claim 1, characterized in that: The substrate (3) is symmetrically provided with strip grooves (5) near both ends, the strip grooves (5) are perpendicular to the plane direction of the plurality of mask plates (4), and the substrate to be evaporated passes through the strip grooves (5) and is placed between the substrate (3) and the mask plates (4).

5. The fixture for local evaporation as claimed in claim 4, characterized in that: A substrate clamp fixing strip (6) is provided above the substrate (3) and close to the inner side of the strip-shaped groove (5), and the substrate clamp fixing strip (6) is used to fix the two ends of the placed substrate by means of a clamp.

6. The fixture for local evaporation as claimed in claim 2, characterized in that: A plurality of reinforcing ribs (7) are provided on the upper part of the base bottom plate (31), the reinforcing ribs (7) comprising reinforcing rib cross beams (71) and reinforcing rib vertical beams (72), at least two reinforcing rib cross beams (71), two ends of the reinforcing rib cross beams (71) are connected to the inner side of the base side plate (32), the reinforcing rib cross beams (71) are arranged in parallel with the base clip fixing strip (6), the reinforcing rib vertical beams (72) are arranged between the reinforcing rib cross beams (71) and the base clip fixing strip (6) and adjacent reinforcing rib cross beams (71), and the reinforcing rib vertical beams (72) are arranged perpendicular to the reinforcing rib cross beams (71).

7. The fixture for local evaporation as claimed in claim 6, characterized in that: The cross sections of the reinforcing rib cross beam (71) and the reinforcing rib vertical beam (72) are both triangular.

8. The fixture for local evaporation as claimed in claim 2, characterized in that: The base plate bottom plate (31) is provided with a plurality of circular holes (33), the circular holes (33) are evenly spaced and distributed on the base plate bottom plate (31) between the reinforcing rib cross beam (71), the base plate clip fixing strip (6), and the reinforcing rib vertical beam (72), and the circular holes (33) are used to reduce the weight of the base plate (3).

9. The fixture for local evaporation as claimed in claim 2, characterized in that: A avoidance hole (34) is provided at the center of the substrate bottom plate (31) for allowing the substance evaporated from the evaporation source to pass through the avoidance hole (34), thereby facilitating the detection of the real-time film thickness of the evaporation by the probe.

10. The fixture for local evaporation as claimed in claim 1, characterized in that: A handle (8) is provided at the bottom of the base plate (3).

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