Vacuum rotary conveying mechanism

Abstract

The utility model discloses a vacuum rotary conveying mechanism which comprises a rotating shaft vertically arranged in a vacuum chamber and of a hollow structure. The driving motor is linked with the rotating shaft; the shell is fixed to the periphery of the rotating shaft, a containing area used for containing the workpiece frame is defined by the shell, and a transfer opening allowing the workpiece frame to enter and exit from the containing area is formed in the shell; the isolation piece is fixed to the bottom of the rotating shaft and defines an isolation chamber, the isolation chamber is communicated with the external atmosphere through the interior of the rotating shaft, the outer side of the isolation piece is a vacuum side, and at least part of a pipeline in the vacuum side penetrates into the isolation piece, extends to the bottom of the rotating shaft and then extends out of the top of the rotating shaft through the interior of the rotating shaft; the conveying wheel set comprises a power part and a wheel set part, the power part is arranged in the isolation chamber, and the wheel set part extends out of the isolation chamber to be used for bearing the workpiece frame. Compared with the prior art, the vacuum rotary conveying mechanism provided by the utility model is convenient for wiring of a pipeline in the vacuum chamber and the outside, and meanwhile, vacuum leakage caused by wiring is avoided.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum coating equipment, and in particular to a vacuum rotating transmission mechanism. Background Art

[0002] Vacuum coating equipment is a commonly used equipment for vacuum coating. During the coating process, it is necessary to follow the predetermined process sequence and connect through a transmission mechanism, so that the product (workpiece rack) can flow between different processes, that is, the line. The transmission mechanism of traditional vacuum coating equipment requires the workpiece rack to translate or rotate at the end of the process line and in the atmospheric environment, and return to the origin through a return line of the same length of the line to load and unload the workpiece, but this structure has the following problems: there may be contamination in the atmospheric environment, and a higher clean room needs to be built; the line is long and occupies more area; the moving line is too long and the operation efficiency is low.

[0003] At present, the rotating transmission mechanism can better solve the problems existing in the traditional transmission mechanism. For example, patent CN203307428U discloses a vacuum rotating transmission mechanism of a vacuum coating machine, including a rotating table arranged in a vacuum chamber and a rotating drive mechanism arranged outside the top of the vacuum chamber, and a transmission wheel assembly for carrying and transmitting the workpiece rack is provided at the bottom. Although the vacuum rotating transmission mechanism can effectively rotate the workpiece rack, there are problems such as difficulty in arranging pipelines in the equipment and troublesome maintenance of the transmission wheel assembly. Utility Model Content

[0004] In view of the problems in the prior art, the present application provides a vacuum rotating transmission mechanism that facilitates the connection of pipelines inside a vacuum chamber with external wiring.

[0005] The vacuum rotary conveying mechanism in the present application is used to convey and rotate the workpiece rack in the vacuum chamber, and the vacuum rotary conveying mechanism includes:

[0006] The rotating shaft is vertically arranged in the vacuum chamber and has a hollow structure;

[0007] A driving motor, linked to the rotating shaft;

[0008] A shell body is fixed to the outer periphery of the rotating shaft and encloses a receiving area for placing a workpiece rack, and a transfer port for the workpiece rack to enter and exit the receiving area is opened on the shell body;

[0009] An isolation member is fixed to the bottom of the rotating shaft and encloses an isolation chamber, wherein the isolation chamber is connected to the external atmosphere through the interior of the rotating shaft, the outer side of the isolation member is a vacuum side, and at least part of the pipeline in the vacuum chamber penetrates into the interior of the isolation member and extends to the bottom of the rotating shaft, and then extends out of the top of the rotating shaft through the interior of the rotating shaft;

[0010] The transmission wheel set comprises a power part and a wheel set part, wherein the power part is arranged in the isolation chamber, and the wheel set part extends out of the isolation chamber to carry the workpiece rack.

[0011] Several optional methods are also provided below, but they are not intended to be additional limitations on the above-mentioned overall solution, but are merely further supplements or preferences. Under the premise that there are no technical or logical contradictions, each optional method can be combined with the above-mentioned overall solution separately, and multiple optional methods can also be combined.

[0012] Optionally, a through hole for the pipeline to pass through is opened on the isolation member, and a through-channel for the pipeline to extend to the bottom of the rotating shaft is also provided inside the isolation member.

[0013] Optionally, pipelines are arranged along the inner wall of the vacuum chamber and along the periphery of the transfer wheel assembly, and the pipelines penetrate into the interior of the isolation member and extend to the outside through the rotating shaft.

[0014] Optionally, a first magnetic fluid is arranged between the rotating shaft and the shell, the first magnetic fluid is a hollow structure, and the rotating shaft penetrates into the first magnetic fluid and extends out of the shell.

[0015] Optionally, the vacuum rotary transmission mechanism comprises a rotary top plate and a rotary bottom plate arranged in the vacuum chamber, wherein the top of the rotating shaft is fixed to the rotary top plate and extends out of the rotary top plate, the driving motor is arranged outside the shell, and the top of the rotating shaft extends out of the shell to cooperate with the driving motor;

[0016] The bottom of the rotating shaft is fixed to the rotating chassis and extends out of the rotating chassis.

[0017] Optionally, the isolating member radially penetrates the rotating chassis, wherein the rotating shaft is located at a radial center portion.

[0018] Optionally, two support columns are further provided at both ends along the radial direction, the top end of each support column is fixedly connected to the rotating top plate, and the bottom end of each support column is fixedly connected to the isolation member.

[0019] Optionally, two groups of transmission wheel groups are provided in parallel, and the power parts of each group are respectively located at two ends of the isolation chamber in the radial direction, and the wheel group parts of each group extend out of the isolation member;

[0020] The shell body is provided with a transfer port corresponding to each transmission wheel group.

[0021] Optionally, the isolation element includes:

[0022] A main body, a space inside which the transmission wheel set is accommodated, and a bottom of the rotating shaft extends into the main body and communicates with the space;

[0023] The two side plates close the two sides of the main body to form the isolation chamber, and at least one of the two side plates is detachably connected to the main body.

[0024] Optionally, the wheel set includes a driving wheel and a driven wheel, and the driven wheel is linked with the driving wheel and passes through the side plates at corresponding positions in a rotating sealing manner.

[0025] Optionally, a guide piece is provided on the detachably connected side panel, and a guide groove cooperating with the guide piece is provided on the main body.

[0026] Compared with the prior art, the vacuum rotary transmission mechanism provided by the present application facilitates the connection between pipelines in the vacuum chamber and the outside, while avoiding vacuum leakage caused by the connection. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a schematic diagram of the structure of a vacuum rotary transmission mechanism in one embodiment of the present application;

[0028] Figure 2 for Figure 1 A cross-sectional view of

[0029] Figure 3 It is a partial structural diagram of the vacuum rotary transmission mechanism;

[0030] Figure 4 is another partial structural diagram of the vacuum rotary transmission mechanism;

[0031] Figure 5 This is a schematic structural diagram of a rotating shaft and a main body in one embodiment;

[0032] Figure 6 It is a partial structural diagram of a transmission wheel set and an isolation member in one embodiment.

[0033] The reference numerals in the figures are described as follows:

[0034] 110, rotating shaft; 111, first magnetic fluid; 120, driving motor; 130, indexer; 140, housing; 141, transfer port; 142, bearing; 143, heating device; 144, top wall; 145, bottom wall; 146, side wall; 150, spacer; 151, through hole; 152, guide channel; 153, main body; 1531, guide groove; 154, first side plate; 155, second side plate; 156, guide member; 160, transmission wheel group; 161, power part; 162, wheel group part; 1621, driving wheel; 1622, driven wheel; 163, second magnetic fluid; 170, rotating top plate; 171, reinforcing rib; 180, rotating bottom plate; 181, half plate; 182, accommodating groove; 183, reinforcing rib; 190, supporting column;

[0035] 200. Workpiece rack. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0037] It should be noted that when a component is referred to as being "connected" to another component, it may be directly connected to the other component or there may be a central component. When a component is referred to as being "disposed on" another component, it may be directly disposed on the other component or there may be a central component at the same time.

[0038] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used herein includes any and all combinations of one or more of the related listed items.

[0039] See also Figures 1 to 6 , an embodiment of the present application provides a vacuum rotary conveying mechanism for conveying and rotating a workpiece rack in a vacuum chamber, the vacuum rotary conveying mechanism comprising a rotating shaft 110, a driving motor 120, a shell 140, an isolating member 150 and a conveying wheel set 160; wherein the rotating shaft 110 is a hollow structure and is vertically arranged in the vacuum chamber; the driving motor 120 is linked with the rotating shaft 110 to drive the rotating shaft 110 to rotate; the shell 140 is fixed to the outer periphery of the rotating shaft 110 and surrounds a receiving area for placing the workpiece rack, and a transfer port 141 is provided on the shell 140 for the workpiece to enter and exit the receiving area; the isolating member 150 is fixed to the bottom of the rotating shaft 110 and surrounds an isolation chamber, the isolation chamber is connected to the external atmosphere through the inside of the rotating shaft 110, the outside of the isolating member 150 is a vacuum side, at least part of the pipeline inside the vacuum chamber penetrates into the isolating member 150 and extends to the bottom of the rotating shaft 110, and then extends out of the top of the rotating shaft 110 through the inside of the rotating shaft 110. The transmission wheel assembly 160 includes a power portion 161 and a wheel assembly portion 162 , wherein the power portion 161 is disposed in the isolation chamber, and the wheel assembly portion 162 extends out of the isolation chamber to carry the workpiece rack.

[0040] Usually, cooling pipelines and circuit wires connected to various devices are arranged along the inner wall of the vacuum chamber and along the periphery of the transmission wheel assembly 160, wherein the function of the cooling pipeline is to water-cool the corresponding parts during operation. To facilitate the connection of these pipelines with the outside and to avoid vacuum leakage caused by the connection, these pipelines penetrate the isolation member 150 and extend to the bottom of the rotating shaft 110, and then extend from the top of the rotating shaft 110 through the inside of the rotating shaft 110. The pipelines are flexible cables and pipes, and are connected from the top of the rotating shaft 110 by an electric slip ring or a water slip ring.

[0041] A heating device 143 is also disposed on the outer periphery of the rotating shaft 110 , and a circuit of the heating device 143 may also extend out of the housing 140 to the outside through the isolation member 150 .

[0042] See also Figure 4 , 5 In the embodiment shown, the isolating member 150 is provided with a through hole 151 for the pipeline to pass through, and the isolating member 150 is further provided with a through passage 152 for the pipeline to extend to the bottom of the rotating shaft 110. There can be multiple through holes 151, which are distributed on both sides of the rotating shaft 110 at intervals.

[0043] The vacuum rotary transmission mechanism further includes a rotary top plate 170 and a rotary bottom plate 180 disposed in the vacuum chamber, wherein the top of the rotary shaft 110 is fixed to the rotary top plate 170 and extends out of the rotary top plate 170, the driving motor 120 is disposed outside the housing 140, and the top of the rotary shaft 110 extends out of the housing 140 to cooperate with the driving motor 120. In addition, to ensure structural strength, a reinforcing rib 171 may be provided on the top surface of the rotary top plate 170, and a reinforcing rib 183 may be provided on the bottom surface of the rotary bottom plate 180.

[0044] Furthermore, the housing 140 includes a top wall 144, a bottom wall 145 and a side wall 146, which enclose a vacuum chamber. A first magnetic fluid 111 is disposed between the rotating shaft 110 and the housing 140 (the top wall 144 of the housing 140). The first magnetic fluid 111 is a hollow structure and is sleeved on the outside of the rotating shaft 110. The rotating shaft 110 extends out of the housing 140 through the first magnetic fluid 111 to prevent vacuum leakage in the vacuum chamber.

[0045] See also Figure 4 In the illustrated embodiment, the isolation member 150 radially penetrates the rotating chassis 180, wherein the rotating shaft 110 is located at the center of the radial direction, and two support columns 190 are provided at both ends along the radial direction, and the top of each support column 190 is fixedly connected to the rotating top plate 170, and the bottom of each support column 190 is fixedly connected to the isolation member 150.

[0046] See also Figure 2The bottom of the isolating member 150 is also provided with a bearing 142, one end of the bearing 142 is fixedly connected to the bottom wall 145 of the isolating member 150, and the other end is fixedly connected to the bottom wall 145 of the housing 140, for the purpose of rotational support. The bearing 142 can be a cross roller bearing 142.

[0047] The driving motor 120 is, for example, a variable frequency motor; a divider 130 is also provided between the driving motor 120 and the rotating shaft 110 for precisely controlling the rotation angle of the rotating shaft 110. The power part 161 includes a motor. The driving motor 120 and the divider 130 at the top can drive the rotating shaft 110, the rotating top plate 170, the rotating top plate 170 and the workpiece rack to rotate 180°.

[0048] In the embodiments shown in Figures 3 and 6, two transmission wheel groups 160 are arranged in parallel, the power part 161 of each group is located in the isolation chamber, and the wheel group part 162 of each group extends out of the isolation member 150. A transfer port 141 is arranged on the housing 140 corresponding to each transmission wheel group 160. Further, the two transfer ports 141 are located on the same side. Figure 1 .

[0049] The wheel set part 162 includes a driving wheel 1621 and a driven wheel 1622, wherein the driving wheel 1621 is located in the isolation chamber and is linked with the power part 161, and the driven wheel 1622 is located outside the isolation chamber for conveying the workpiece rack, and the driven wheel 1622 is linked with the driving wheel 1621 and is arranged on both sides of the isolation member 150 in a rotating sealing manner. Specifically, a second magnetic fluid 163 is arranged between the driving wheel 1621 and the inner wall of the isolation member 150 to achieve a rotating seal.

[0050] Furthermore, the power part 161 of each transmission wheel group 160 is respectively located at both ends of the isolation member 150 along the radial direction, that is, the wheel group part 162 of each transmission wheel group 160 moves in opposite directions, so that the vacuum chamber can simultaneously receive and send out the workpiece rack.

[0051] See also Figure 4 In the embodiment described, the isolation member 150 includes a main body 153 and two side plates (a first side plate 154 and a second side plate 155), the main body 153 has a space for accommodating the power part 161 and the driven wheel 1622, and the two side plates close the main body 153 to form the above-mentioned isolation chamber. To facilitate the maintenance of internal equipment, at least one side plate of the two side plates is detachably connected to one side of the main body 153. Further, in the case of setting two sets of transmission wheel groups 160, the two side plates are detachably connected to the corresponding sides of the main body.

[0052] To facilitate installation and removal of the side panels, a guide member 156 is provided on the corresponding side panel, and the guide member 156 is, for example, a guide column. A guide groove 1531 cooperating with the guide member 156 is provided in the main body 153. The guide member 156 can be a guide column.

[0053] See also Figure 4 In the illustrated embodiment, the rotating chassis 180 includes two half-discs 181 spaced apart on both sides of the isolating member 150, and each half-disc 181 is connected to a corresponding side plate. Each half-disc 181 and the corresponding side plate can be fixedly connected or detachably connected. A receiving groove 182 is arranged on one side of each half-disc 181 close to the isolating member 150, and each driven wheel is located in the corresponding receiving groove 182.

[0054] The vacuum rotary transmission mechanism provided by the present application facilitates the connection between the pipeline in the vacuum chamber and the outside, and avoids vacuum leakage caused by the connection. In addition, the side plate of the isolation member 150 and the main body 153 in the present application are detachably connected, which is convenient for internal maintenance.

[0055] The technical features of the above-mentioned embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification. When the technical features in different embodiments are embodied in the same figure, it can be regarded that the figure also discloses the combination examples of the various embodiments involved.

[0056] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. A vacuum rotary conveying mechanism, used to convey and rotate a workpiece rack in a vacuum chamber, characterized in that: The vacuum rotary transmission mechanism comprises: The rotating shaft is vertically arranged in the vacuum chamber and has a hollow structure; A driving motor, linked to the rotating shaft; A shell body is fixed to the outer periphery of the rotating shaft and encloses a receiving area for placing a workpiece rack, and a transfer port for the workpiece rack to enter and exit the receiving area is opened on the shell body; An isolation member is fixed to the bottom of the rotating shaft and encloses an isolation chamber, wherein the isolation chamber is connected to the external atmosphere through the interior of the rotating shaft, the outer side of the isolation member is a vacuum side, and at least part of the pipeline in the vacuum chamber penetrates into the interior of the isolation member and extends to the bottom of the rotating shaft, and then extends out of the top of the rotating shaft through the interior of the rotating shaft; The transmission wheel set comprises a power part and a wheel set part, wherein the power part is arranged in the isolation chamber, and the wheel set part extends out of the isolation chamber to carry the workpiece rack.

2. The vacuum rotary transmission mechanism according to claim 1, characterized in that: The isolating member is provided with a through hole for the pipeline to pass through, and the isolating member is also provided with a through passage for the pipeline to extend to the bottom of the rotating shaft.

3. The vacuum rotary transmission mechanism according to claim 1, characterized in that: Pipelines are arranged along the inner wall of the vacuum chamber and along the periphery of the transfer wheel assembly. The pipelines penetrate into the interior of the isolation member and extend to the outside through the rotating shaft.

4. The vacuum rotary transmission mechanism according to claim 1, characterized in that: A first magnetic fluid is arranged between the rotating shaft and the shell. The first magnetic fluid is a hollow structure. The rotating shaft penetrates into the first magnetic fluid and extends out of the shell.

5. The vacuum rotary transmission mechanism according to claim 1, characterized in that: The vacuum rotary transmission mechanism comprises a rotary top plate and a rotary bottom plate arranged in the vacuum chamber, wherein the top of the rotary shaft is fixed to the rotary top plate and extends out of the rotary top plate, the driving motor is arranged outside the shell, and the top of the rotary shaft extends out of the shell to cooperate with the driving motor; The bottom of the rotating shaft is fixed to the rotating chassis and extends out of the rotating chassis.

6. The vacuum rotary transmission mechanism according to claim 5, characterized in that: The isolating member radially penetrates the rotating chassis, wherein the rotating shaft is located at the center of the rotating chassis in the radial direction.

7. The vacuum rotary transmission mechanism according to claim 6, characterized in that: Two support columns are also provided at both ends along the radial direction, the top end of each support column is fixedly connected to the rotating top plate, and the bottom end of each support column is fixedly connected to the isolation member.

8. The vacuum rotary transmission mechanism according to claim 6, characterized in that: The transmission wheel groups are provided in two parallel groups, the power parts of each group are respectively located at the two ends of the isolation chamber in the radial direction, and the wheel group parts of each group extend out of the isolation piece; The shell body is provided with a transfer port corresponding to each transmission wheel group.

9. The vacuum rotary transmission mechanism according to claim 1, characterized in that: The isolating element comprises: A main body, a space inside which the transmission wheel set is accommodated, and a bottom of the rotating shaft extends into the main body and communicates with the space; The two side plates close the two sides of the main body to form the isolation chamber, and at least one of the two side plates is detachably connected to the main body.

10. The vacuum rotary transmission mechanism according to claim 9, characterized in that: The wheel set part comprises a driving wheel and a driven wheel, and the driven wheel is linked with the driving wheel and passes through the side plates at corresponding positions in a rotating sealing manner.

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