Coating film assembling device

Abstract

The utility model provides a film coating assembly device. The coating assembling device comprises a fixing assembly and an ion absorption assembly. The fixing assembly is configured to be capable of fixing materials. The ion absorption assembly comprises a first absorption part and a second absorption part. The first absorbing piece and the second absorbing piece are connected with the fixing assembly. And the first absorbing piece and the second absorbing piece are separately arranged with two ends of the material at intervals. The first absorption part and the second absorption part are configured to be capable of being connected with voltage so as to absorb part of ions to be deposited at the two ends of a material during film plating. According to the film coating assembly device, the uniformity of material film coating can be improved.

Description

Technical Field

[0001] The present application relates to the field of film coating technology, and in particular to a film coating assembly device. Background Art

[0002] During the coating process of materials, the target releases ions through physical or chemical means, and the material absorbs the ions after being energized, and the ions are deposited on the surface of the material to form a thin film. The target is usually set toward the coating surface of the material. When the material is energized, an electric field and a magnetic field are generated, and the electric field and the magnetic field change at the edge structures at both ends of the material, so that more ions are deposited at the edge structures at both ends of the material, resulting in poor uniformity of the material coating. Utility Model Content

[0003] In view of this, the present application provides a coating assembly device to improve the uniformity of material coating.

[0004] One embodiment of the present application provides a coating assembly device. The coating assembly device includes a fixing component and an ion absorption component. The fixing component is configured to fix a material. The ion absorption component includes a first absorption member and a second absorption member. The first absorption member and the second absorption member are respectively connected to the fixing component. And the first absorption member and the second absorption member are respectively arranged at intervals from the two ends of the material. The first absorption member and the second absorption member are configured to be able to be connected to a voltage to absorb part of the ions that will be deposited on the two ends of the material during coating.

[0005] In the above embodiment, the fixing component fixes the material so that the material receives the ions released by the target material, thereby performing film coating. The ion absorption component can also receive the ions released by the target material by connecting the voltage. And by arranging the first absorption component and the second absorption component of the ion absorption component at intervals from the two ends of the material respectively, the first absorption component can be close to one end of the material, and the second absorption component can be close to the other end of the material, and the electric field and magnetic field distribution near the two ends of the material are changed after power is turned on. When coating, some ions enriched near the two ends of the material can be plundered and absorbed to avoid all being deposited at the two ends of the material, which is conducive to reducing the possibility of excessive thickness of the film layer at the two ends of the material, thereby improving the uniformity of the material coating.

[0006] In some embodiments of the present application, a first direction is defined to be parallel to a distribution direction of the first absorbent and the second absorbent. The fixing assembly includes a fixing seat, a first connecting member, and a second connecting member. The first connecting member is connected to the fixing seat. The first connecting member is configured to connect materials. The second connecting member is connected to the fixing seat. The second connecting member is spaced apart from the first connecting member in a direction perpendicular to the first direction. The first absorbent and the second absorbent are respectively connected to the second connecting member.

[0007] In the above embodiment, the material and the ion absorption component are fixed respectively by the first connecting member and the second connecting member, so that the assembly of the material and the assembly of the ion absorption component are independent of each other, which is conducive to improving the speed of replacing and adjusting the material or the ion absorption component, thereby improving the coating efficiency. Usually, the distribution direction of the target material and the material is perpendicular to the first direction, and the distribution direction of the second connecting member and the first connecting member is perpendicular to the first direction, so that the first connecting member is located between the second connecting member and the target material in the direction perpendicular to the first direction, so that the material is located between the ion absorption component and the target material in the direction perpendicular to the first direction, so that when the ions move from the target material to the material, the ion absorption component is reduced from grabbing the ions that have not reached the deposition position of the material in advance, which is conducive to improving the uniformity of the coating.

[0008] In some embodiments of the present application, a plurality of first connecting members are provided. The plurality of first connecting members are distributed in a ring. A plurality of second connecting members are provided. The plurality of second connecting members are distributed in a ring. The axis extension directions of the rings in which the plurality of first connecting members and the plurality of second connecting members are distributed are parallel to the first direction. The first absorbing member is annular and is disposed in a ring on one side of the plurality of second connecting members facing the plurality of first connecting members. The second absorbing member is annular and is disposed in a ring on one side of the plurality of second connecting members facing the plurality of first connecting members.

[0009] In the above embodiment, multiple first connecting members are distributed in a ring shape, the first absorbing member is arranged in a ring shape, and the second absorbing member is arranged in a ring shape. On the one hand, the number of materials arranged in the coating assembly device is increased to improve the efficiency of coating; on the other hand, the material on any first connecting member can pass through the two adjacent first connecting members and the material to balance the electric field and the magnetic field, thereby reducing the possibility of ion enrichment on the opposite sides of the material in a direction perpendicular to the first direction, which is beneficial to improving the uniformity of material coating.

[0010] In some embodiments of the present application, the first connecting member includes a first connecting rod, a first fixing portion, and a second fixing portion. The first connecting rod is connected to the fixing seat. The first fixing portion and the second fixing portion are respectively connected to the first connecting rod. The first fixing portion and the second fixing portion are spaced apart along the first direction. Along the first direction, a fixing area for fixing a material is formed between the first fixing portion and the second fixing portion.

[0011] In the above embodiment, the first fixing part and the second fixing part are fixed to the fixing seat through the first connecting rod, and the first fixing part and the second fixing part are arranged at both ends of the material along the first direction, so as to fix the material in the fixed area, improve the stability of the material fixation, and help to improve the uniformity of the material coating.

[0012] In some embodiments of the present application, in the first direction, a side of the first absorbent member facing the second absorbent member is flush with one side of the fixing area, and a side of the second absorbent member facing the first absorbent member is flush with the other side of the fixing area.

[0013] In the above embodiment, on the one hand, in the first direction, the distance between the first absorber and the second absorber and the two ends of the material along the first direction is pulled as close as possible, thereby improving the ion capture capability of the ion absorption component to the ions near the two ends of the material, which is beneficial to improving the uniformity of the material coating. On the other hand, in the direction in which the ions move from the target material to the fixed area, it is avoided that part of the structure of the first absorber or the second absorber is blocked by the fixed area and cannot absorb the ions normally, thereby improving the utilization rate of the first absorber and the second absorber.

[0014] In some embodiments of the present application, the extension length of the first absorbent in the first direction is defined as L1. The extension length of the second absorbent in the first direction is defined as L2. The extension length of the fixing region in the first direction is defined as L3. Wherein, 0.1L3≤L1≤0.2L3, 0.1L3≤L2≤0.2L3.

[0015] In the above embodiment, by limiting the structural size of the first absorber and the second absorber in the first direction, the ability of the first absorber and the second absorber to capture ions in the edge area of ​​the material is limited, which reduces the possibility that the first absorber or the second absorber has too large a capture capacity and robs the material of ions for normal coating, and also reduces the possibility that the first absorber or the second absorber has too small a capture capacity and cannot absorb excess ions, thereby improving the uniformity of material coating.

[0016] In some embodiments of the present application, the first fixing portion and / or the second fixing portion are movably mounted on the first connecting rod and can be locked with the first connecting rod to adjust the extension length of the fixing area in the first direction. The first absorbent and / or the second absorbent are movably mounted on the second connecting member and can be locked with the second connecting member to adjust the spacing distance between the first absorbent and the second absorbent in the first direction.

[0017] In the above embodiment, by adjusting the extension length of the fixing area in the first direction, the extension length of the fixing area in the first direction can be adapted to different materials, so that the first fixing part and the second fixing part can stably fix materials of different sizes. At the same time, by adjusting the spacing between the first absorbent and the second absorbent in the first direction, the first absorbent and the second absorbent can be adjusted to the two ends of materials of different sizes in the first direction. Thereby, the adaptability of the coating assembly device to materials of different sizes is improved.

[0018] In some embodiments of the present application, the first connecting member can rotate relative to the fixing seat. The extending direction of the axis of rotation of the first connecting member is parallel to the first direction.

[0019] In the above embodiment, the rotation of the first connecting member drives the fixed material to rotate, so that the peripheral surface of the material between the two ends along the first direction has the opportunity to face the target material, so as to improve the uniformity of the material coating. And each position of the end surface of the material at both ends in the first direction can be close to or away from the ion attraction component, so as to improve the uniformity of the coating.

[0020] In some embodiments of the present application, the second connecting member includes a second connecting rod, a third fixing portion and a fourth fixing portion. The third fixing portion connects the first absorbing member and the second connecting rod. The fourth fixing portion connects the second absorbing member and the second connecting rod.

[0021] In the above embodiment, the first absorber is fixed to the second connecting rod by the third fixing portion, and the second absorber is fixed to the second connecting rod by the fourth fixing portion, thereby facilitating the independent assembly or disassembly of the first absorber and the second absorber, and facilitating the flexible adjustment of the first absorber and the second absorber according to actual needs.

[0022] In some embodiments of the present application, the fixing seat includes a first seat body and a second seat body. The first seat body and the second seat body are spaced apart in a first direction. The first seat body and the second seat body are respectively connected to a first connecting member. The first seat body and the second seat body are respectively connected to a second connecting member.

[0023] In the above embodiment, the first seat body simultaneously connects one end of the first connecting member and one end of the second connecting member, and the second seat body simultaneously connects the other end of the first connecting member and the other end of the second connecting member, thereby improving the stability of the connection between the first connecting member and the second connecting member, thereby improving the stability of the ion absorption component and the material fixation, which is beneficial to improving the uniformity of the material coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope.

[0025] Figure 1 A schematic diagram of the structure of a coating assembly device and material matching provided in one embodiment of the present application;

[0026] Figure 2 for Figure 1 Another perspective of the coating assembly device with some structures omitted and a schematic diagram of the structure of the material and target material coordination;

[0027] Figure 3 for Figure 1 Another perspective of the coating assembly device with some structures omitted and a schematic diagram of the structure of the material coordination;

[0028] Figure 4 for Figure 3 A magnified view of part A;

[0029] Figure 5 for Figure 3 Enlarged view of part B.

[0030] Description of main component symbols:

[0031] Coating assembly device 100

[0032] Fixing component 1

[0033] Fixed seat 11

[0034] The first seat body 111

[0035] Transfer unit 1111

[0036] The second seat body 112

[0037] The first connecting member 12

[0038] First connecting rod 121

[0039] The first fixing portion 122

[0040] The second fixing portion 123

[0041] Fixed area 124

[0042] The second connecting member 13

[0043] Second connecting rod 131

[0044] The third fixing portion 132

[0045] Fourth fixing portion 133

[0046] Ion absorption component 2

[0047] First absorbent member 21

[0048] Second absorbent member 22

[0049] Material 200

[0050] Target 300

[0051] First direction X DETAILED DESCRIPTION

[0052] The technical solutions in the embodiments of the present application will be described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all of the embodiments.

[0053] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0054] In the description of the present application, it should be noted that the terms "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0055] As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0056] Furthermore, the terms “first,” “second,” “third,” etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

[0057] An embodiment of the present application provides a coating assembly device. The coating assembly device includes a fixing component and an ion absorption component. The fixing component is configured to fix a material. The ion absorption component includes a first absorption member and a second absorption member. The first absorption member and the second absorption member are respectively connected to the fixing component. And the first absorption member and the second absorption member are respectively arranged at intervals from the two ends of the material. The first absorption member and the second absorption member are configured to be able to be connected to a voltage to absorb part of the ions that will be deposited on the two ends of the material during coating.

[0058] The fixed component fixes the material so that the material can receive the ions released by the target material, thereby performing film coating. The ion absorption component can also receive the ions released by the target material by connecting the voltage. And by setting the first absorption component and the second absorption component of the ion absorption component at intervals from the two ends of the material respectively, the first absorption component can be close to one end of the material, and the second absorption component can be close to the other end of the material, and the electric field and magnetic field distribution near the two ends of the material are changed after power is turned on. During film coating, some ions enriched near the two ends of the material can be plundered and absorbed to avoid all being deposited at the two ends of the material, which is conducive to reducing the possibility of excessive thickness of the film layer at the two ends of the material, thereby improving the uniformity of the material coating.

[0059] Some embodiments of the present application are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0060] See also Figure 1One embodiment of the present application provides a coating assembly device 100, which is arranged in a coating reaction chamber (not shown) to assemble a material 200 into the coating reaction chamber. A target material 300 is arranged in the coating reaction chamber, and the target material 300 releases ions to the material 200 for coating.

[0061] In some embodiments, the material 200 includes but is not limited to 3C products or bathroom products, such as watches, collections, portable computers, etc.

[0062] In some embodiments, the coating method applicable to the coating assembly 100 includes physical vapor deposition (PVD) and chemical vapor deposition (CVD). As an exemplary example, the coating method applied by the coating assembly 100 includes but is not limited to plasma enhanced chemical vapor deposition (PECVD) and the like.

[0063] In the related art, the PECVD process uses plasma to generate glow discharge on the cathode of the chamber, and introduces excessive gas. The gas undergoes chemical and plasma reactions, and finally forms a diamond-like carbon (DLC) film on the surface of the material 200. The changes in the magnetic field and electric field will affect the uniformity of the film layer of the PECVD process and the color difference performance of the material 200. The electric field distribution in the chamber has an "edge effect", and the ion distribution at the edge of the material 200 is more dense, resulting in a thicker thickness of the corresponding DLC ​​film, which affects the color difference uniformity.

[0064] See also Figures 1 to 3 In some embodiments, the coating assembly 100 includes a fixing component 1 and an ion absorption component 2 .

[0065] The fixing component 1 is configured to fix the material 200. The fixing component 1 fixes the material 200 so that the material 200 receives ions released by the target material 300, thereby performing film coating. The fixing component 1 fixing the material 200 does not mean that the material 200 cannot move, but means that the material 200 cannot separate from the fixing component 1 without the action of external force.

[0066] The ion absorption component 2 includes a first absorption member 21 and a second absorption member 22. The first absorption member 21 and the second absorption member 22 are respectively connected to the fixing component 1. The first absorption member 21 and the second absorption member 22 are respectively arranged at intervals from the two ends of the material 200. The first direction X is defined to be parallel to the distribution direction of the first absorption member 21 and the second absorption member 22. The first absorption member 21 and the second absorption member 22 are configured to be able to be connected to a voltage to absorb part of the ions that will be deposited on the two ends of the material 200 during film coating.

[0067] The ion absorption component 2 can also receive ions released by the target material 300 by connecting the voltage. And by arranging the first absorption component 21 and the second absorption component 22 of the ion absorption component 2 at intervals, the first absorption component 21 can be close to one end of the material 200, and the second absorption component 22 can be close to the other end of the material 200, and the electric field and magnetic field distribution near the two ends of the material 200 can be changed after power is turned on, so that when coating, some ions enriched near the two ends of the material 200 can be plundered and absorbed to avoid all being deposited at the two ends of the material 200, which is conducive to reducing the possibility of excessive thickness of the film layer at the two ends of the material 200, thereby improving the uniformity of the coating of the material 200.

[0068] It is understandable that in some embodiments, the ion absorption component 2 and the material 200 are connected to the same voltage so that the ion absorption component 2 absorbs the ions enriched near the two ends of the material 200 .

[0069] See also Figure 2 , Figure 4 and Figure 5 It can be understood that in some embodiments, in a direction perpendicular to the first direction X, the ion absorption component 2 is configured to be at a distance from the target material 300 that is greater than the distance between the material 200 and the target material 300, so as to reduce the possibility of excessive ion plundering by the ion absorption component 2, which is beneficial to improving the uniformity of the coating of the material 200.

[0070] It can be understood that in some embodiments, the material 200 can be an integrated structure formed by one component, or a split structure composed of multiple components.

[0071] See also Figures 1 to 3 In some embodiments, the fixing assembly 1 includes a fixing seat 11, a first connecting member 12, and a second connecting member 13. The first connecting member 12 is connected to the fixing seat 11. The first connecting member 12 is configured to connect the material 200. The second connecting member 13 is connected to the fixing seat 11. The second connecting member 13 and the first connecting member 12 are spaced apart in a direction perpendicular to the first direction X. The first absorbent 21 and the second absorbent 22 are respectively connected to the second connecting member 13.

[0072] The material 200 and the ion absorption component 2 are fixed by the first connecting member 12 and the second connecting member 13 respectively, so that the assembly of the material 200 and the assembly of the ion absorption component 2 are independent of each other, which is conducive to improving the speed of replacing and adjusting the material 200 or the ion absorption component 2, thereby improving the coating efficiency. Usually, the distribution direction of the target material 300 and the material 200 is perpendicular to the first direction X, and the distribution direction of the second connecting member 13 and the first connecting member 12 is perpendicular to the first direction X, so that the first connecting member 12 is located between the second connecting member 13 and the target material 300 in the direction perpendicular to the first direction X, so that the material 200 is located between the ion absorption component 2 and the target material 300 in the direction perpendicular to the first direction X, so that when the ions move from the target material 300 to the material 200, the ion absorption component 2 is reduced to grab the ions that have not reached the deposition position of the material 200 in advance, which is conducive to improving the uniformity of the coating.

[0073] In some embodiments, the first connector 12 is configured to be electrically connected to the material 200. The second connector 13 is electrically connected to the first absorber 21 and the second absorber 22. The fixing base 11 is electrically connected to the first connector 12 and the second connector 13. Thus, the ion absorption component 2 and the material 200 are connected to the same voltage.

[0074] In other embodiments, the second connecting member 13 may be omitted, and the ion absorption component 2 is connected to the first connecting member 12 .

[0075] See also Figure 1 In some embodiments, the fixing seat 11 includes a first seat body 111 and a second seat body 112. The first seat body 111 and the second seat body 112 are spaced apart in the first direction X. The first seat body 111 and the second seat body 112 are respectively connected to the first connecting member 12. The first seat body 111 and the second seat body 112 are respectively connected to the second connecting member 13.

[0076] The first base body 111 simultaneously connects one end of the first connecting member 12 and one end of the second connecting member 13, and the second base body 112 simultaneously connects the other end of the first connecting member 12 and the other end of the second connecting member 13, thereby improving the stability of the connection between the first connecting member 12 and the second connecting member 13, thereby improving the stability of fixing the ion absorption component 2 and the material 200, which is beneficial to improving the uniformity of the coating of the material 200.

[0077] See also Figure 3In some embodiments, the first connecting member 12 includes a first connecting rod 121, a first fixing portion 122, and a second fixing portion 123. The first connecting rod 121 is connected to the fixing seat 11. The first fixing portion 122 and the second fixing portion 123 are respectively connected to the first connecting rod 121. The first fixing portion 122 and the second fixing portion 123 are spaced apart along the first direction X. Along the first direction X, a fixing area 124 for fixing the material 200 is formed between the first fixing portion 122 and the second fixing portion 123. It can be understood that in some embodiments, the two ends of the first connecting rod 121 are respectively connected to the first seat body 111 and the second seat body 112.

[0078] The first fixing portion 122 and the second fixing portion 123 are fixed to the fixing seat 11 through the first connecting rod 121. The first fixing portion 122 and the second fixing portion 123 are arranged at both ends of the material 200 along the first direction X, so as to fix the material 200 in the fixing area 124, thereby improving the stability of the fixing of the material 200 and facilitating improving the uniformity of the coating of the material 200.

[0079] See also Figure 1 In some embodiments, the second connecting member 13 includes a second connecting rod 131, a third fixing portion 132 and a fourth fixing portion 133. The third fixing portion 132 connects the first absorbing member 21 and the second connecting rod 131. The fourth fixing portion 133 connects the second absorbing member 22 and the second connecting rod 131. It can be understood that in some embodiments, the two ends of the second connecting rod 131 are respectively connected to the first seat body 111 and the second seat body 112.

[0080] The first absorber 21 is fixed to the second connecting rod 131 through the third fixing portion 132, and the second absorber 22 is fixed to the second connecting rod 131 through the fourth fixing portion 133, so that the first absorber 21 and the second absorber 22 can be assembled or disassembled independently of each other, and the first absorber 21 and the second absorber 22 can be flexibly adjusted according to actual needs.

[0081] See also Figure 1 In some embodiments, the first fixing portion 122 and / or the second fixing portion 123 are movably mounted on the first connecting rod 121 and can be locked with the first connecting rod 121 to adjust the extension length of the fixing area 124 in the first direction X. The first absorbent member 21 and / or the second absorbent member 22 are movably mounted on the second connecting member 13 and can be locked with the second connecting member 13 to adjust the spacing distance between the first absorbent member 21 and the second absorbent member 22 in the first direction X. It can be understood that in some embodiments, the third fixing portion 132 locks the first absorbent member 21 to the second connecting rod 131, and the fourth fixing portion 133 fixes the second absorbent member 22 to the second connecting rod 131.

[0082] By adjusting the extension length of the fixing area 124 in the first direction X, the extension length of the fixing area 124 in the first direction X can be adapted to different materials 200, so that the first fixing portion 122 and the second fixing portion 123 can stably fix materials 200 of different sizes. At the same time, by adjusting the spacing between the first absorbent 21 and the second absorbent 22 in the first direction X, the first absorbent 21 and the second absorbent 22 can be adjusted to the two ends of materials 200 of different sizes in the first direction X. Thus, the adaptability of the coating assembly device 100 to materials 200 of different sizes is improved.

[0083] See also Figures 1 to 3 In some embodiments, a plurality of first connectors 12 are provided. The plurality of first connectors 12 are distributed in a ring shape. A plurality of second connectors 13 are provided. The plurality of second connectors 13 are distributed in a ring shape. The axis extension directions of the ring shapes in which the plurality of first connectors 12 and the plurality of second connectors 13 are distributed are both parallel to the first direction X. The first absorbent 21 is annular and is disposed in a ring shape on one side of the plurality of second connectors 13 facing the plurality of first connectors 12. The second absorbent 22 is annular and is disposed in a ring shape on one side of the plurality of second connectors 13 facing the plurality of first connectors 12.

[0084] By distributing multiple first connecting members 12 in a ring shape, arranging the first absorbing member 21 in a ring shape, and arranging the second absorbing member 22 in a ring shape, on the one hand, the number of materials 200 arranged in the coating assembly device 100 is increased to improve the coating efficiency; on the other hand, the material 200 on any first connecting member 12 can balance the electric field and the magnetic field through the two adjacent first connecting members 12 and the material 200, thereby reducing the possibility of ion enrichment on the opposite sides of the material 200 perpendicular to the first direction X, which is beneficial to improving the uniformity of the coating of the material 200.

[0085] See also Figure 2 It can be understood that in some embodiments, the outer side of the ring in which the plurality of first connecting members 12 are distributed is configured to set the target material 300, and the plurality of second connecting members 13 are located on the inner side of the ring in which the plurality of first connecting members 12 are distributed. In other embodiments, the inner side of the ring in which the plurality of first connecting members 12 are distributed is configured to set the target material 300, and the plurality of second connecting members 13 are located on the outer side of the ring in which the plurality of first connecting members 12 are distributed.

[0086] See also Figure 1 In some embodiments, the first connecting member 12 can rotate relative to the fixing seat 11. The axis a of the first connecting member 12 rotates in a direction parallel to the first direction X.

[0087] The first connecting member 12 rotates to drive the fixed material 200 to rotate, so that the peripheral surface of the material 200 between the two ends along the first direction X has the opportunity to face the target 300, so as to improve the uniformity of the coating of the material 200. And each position of the end surface of the two ends of the material 200 in the first direction X can be close to or away from the ion attraction component, so as to improve the uniformity of the coating.

[0088] In some embodiments, the coating assembly device 100 further includes a driving member (not shown) that drives the first connecting member 12 to rotate.

[0089] See also Figure 1 and Figure 2 In some embodiments, the fixing seat 11 is provided with a transfer portion 1111. The transfer portion 1111 is configured to connect to an external driving device (not shown) to rotate the fixing seat 11. The axis b of the fixing seat 11 rotation coincides with the axis of the ring in which the plurality of first connecting members 12 are distributed.

[0090] The rotation of the fixing seat 11 drives the plurality of first connecting members 12 to rotate together around the axis b, so that the targets 300 can be arranged at intervals, which is beneficial to reducing the number of targets 300 to be arranged, thereby reducing production costs.

[0091] See also Figure 1 and Figure 2 In some embodiments, the first base body 111 is provided with a through hole to form a transfer portion 1111 .

[0092] In some embodiments, the driving member is connected to an external driving device through a transmission connection, such as a gear transmission. The external driving device drives the fixing base 11 to rotate and drives the first connecting member 12 to rotate relative to the fixing base 11 at the same time.

[0093] See also Figures 3 to 5 In some embodiments, in the first direction X, the side of the first absorbent member 21 facing the second absorbent member 22 is flush with one side of the fixing area 124 , and the side of the second absorbent member 22 facing the first absorbent member 21 is flush with the other side of the fixing area 124 .

[0094] On the one hand, in the first direction X, the distance between the first absorber 21 and the second absorber 22 and the two ends of the material 200 along the first direction X is pulled as close as possible, so as to improve the ion capture capability of the ion absorption component 2 for the ions near the two ends of the material 200, which is beneficial to improve the uniformity of the coating of the material 200. On the other hand, in the direction where the ions move from the target material 300 to the fixed area 124, it is avoided that part of the structure of the first absorber 21 or the second absorber 22 is blocked by the fixed area 124 and cannot absorb the ions normally, thereby improving the utilization rate of the first absorber 21 and the second absorber 22.

[0095] See also Figures 3 to 5It can be understood that in some embodiments, in a direction perpendicular to the first direction X, the side of the first absorbent member 21 facing the first connecting member 12 is flush with the side of the fixing area 124 close to the second connecting member 13, and the side of the second absorbent member 22 facing the first connecting member 12 is flush with the side of the fixing area 124 close to the second connecting member 13.

[0096] See also Figure 3 In some embodiments, the extension length of the first absorbent member 21 in the first direction X is defined as L1. The extension length of the second absorbent member 22 in the first direction X is defined as L2. The extension length of the fixing area 124 in the first direction X is defined as L3. Wherein, 0.1L3≤L1≤0.2L3, 0.1L3≤L2≤0.2L3. Moreover, L1 and L2 may be equal or different.

[0097] By limiting the structural size of the first absorber 21 and the second absorber 22 in the first direction X, the ability of the first absorber 21 and the second absorber 22 to capture ions in the edge area of ​​the material 200 is limited, which reduces the possibility that the first absorber 21 or the second absorber 22 has too large a capture ability and robs the material 200 of ions for normal coating, and reduces the possibility that the first absorber 21 or the second absorber 22 has too small a capture ability and cannot absorb excess ions, thereby improving the uniformity of the coating of the material 200.

[0098] Table 1 is a comparison result of the color difference uniformity of the coating of the material 200 when the ion absorption component 2 is not set and when the ion absorption component 2 is set:

[0099]

[0100] Among them, the first test deviation value is the black and white deviation value of the material 200 at different positions, and the first test deviation value range is the difference between the maximum black and white deviation value and the minimum black and white deviation value; the second test deviation value is the red and green deviation value of the material 200 at different positions, and the second test deviation value range is the difference between the maximum red and green deviation value and the minimum red and green deviation value; the third test deviation value is the yellow and blue deviation value of the material 200 at different positions, and the third test deviation value range is the difference between the maximum yellow and blue deviation value and the minimum yellow and blue deviation value.

[0101] It can be seen from the comparison results in Table 1 that after the first absorber 21 and the second absorber 22 are provided, the uniformity of the coating of the material 200 is significantly improved.

[0102] In some embodiments, the coating assembly 100 is made of metal. It is conductive and corrosion-resistant, so as to facilitate cleaning of ions deposited on the coating assembly 100 of the material 200. The fixing seat 11, the first connecting member 12, the second connecting member 13 and the ion absorption component 2 can be the same metal or different metals. As an illustrative example, the first seat body 111 or the second seat body 112 of the fixing seat 11 is connected to a negative bias voltage, and the first connecting member 12 and the second connecting member 13 are electrically connected to the fixing seat 11, so that the first absorption member 21, the second absorption member 22 and the material 200 are all connected to the negative bias voltage.

[0103] As an illustrative example, the material of the coating assembly device 100 includes but is not limited to stainless steel 304, stainless steel 316, etc., which can have good electrical conductivity and good corrosion resistance.

[0104] In addition, those skilled in the art should recognize that the above embodiments are only used to illustrate the present application and are not intended to be limiting of the present application. As long as they are within the spirit and scope of the present application, appropriate changes and modifications to the above embodiments are within the scope of the present application.

Claims

1. A coating assembly device, characterized in that: include: A fixing assembly configured to fix the material; The ion absorption component includes a first absorption member and a second absorption member, wherein the first absorption member and the second absorption member are respectively connected to the fixed component, and the first absorption member and the second absorption member are respectively spaced apart from the two ends of the material, and the first absorption member and the second absorption member are configured to be able to be connected to a voltage to absorb part of the ions that will be deposited on the two ends of the material during coating.

2. The coating assembly device according to claim 1, characterized in that: A first direction is defined to be parallel to a distribution direction of the first absorbent and the second absorbent, the fixing assembly comprises a fixing seat, a first connecting member and a second connecting member, the first connecting member is connected to the fixing seat, the first connecting member is configured to connect the material, the second connecting member is connected to the fixing seat, the second connecting member and the first connecting member are spaced apart and distributed perpendicular to the first direction, and the first absorbent and the second absorbent are respectively connected to the second connecting member.

3. The coating assembly device according to claim 2, characterized in that: There are a plurality of first connecting members, which are distributed in a ring shape; there are a plurality of second connecting members, which are distributed in a ring shape; and the axes of the ring shapes in which the plurality of first connecting members and the plurality of second connecting members are distributed are extended in directions parallel to the first direction. The first absorbing member is annular and is disposed on one side of the second connecting members facing the first connecting members. The second absorbing member is annular and is disposed on one side of the second connecting members facing the first connecting members.

4. The coating assembly device according to claim 2, characterized in that: The first connecting member includes a first connecting rod, a first fixing portion and a second fixing portion, the first connecting rod is connected to the fixing seat, the first fixing portion and the second fixing portion are respectively connected to the first connecting rod, the first fixing portion and the second fixing portion are spaced apart along the first direction, and along the first direction, a fixing area for fixing the material is formed between the first fixing portion and the second fixing portion.

5. The coating assembly device according to claim 4, characterized in that: In the first direction, a side of the first absorbent member facing the second absorbent member is flush with one side of the fixing region, and a side of the second absorbent member facing the first absorbent member is flush with the other side of the fixing region.

6. The coating assembly device according to claim 4, characterized in that: An extension length of the first absorbent in the first direction is defined as L1, an extension length of the second absorbent in the first direction is defined as L2, and an extension length of the fixing region in the first direction is defined as L3, wherein 0.1L3≤L1≤0.2L3, 0.1L3≤L2≤0.2L3.

7. The coating assembly device according to claim 4, characterized in that: The first fixing portion and / or the second fixing portion is movably mounted on the first connecting rod and can be locked with the first connecting rod to adjust the extension length of the fixing area in the first direction; The first absorbent member and / or the second absorbent member is movably mounted on the second connecting member and can be locked with the second connecting member to adjust the spacing distance between the first absorbent member and the second absorbent member in the first direction.

8. The coating assembly device according to any one of claims 2 to 7, characterized in that: The first connecting member can rotate relative to the fixing seat, and the extending direction of the axis of rotation of the first connecting member is parallel to the first direction.

9. The coating assembly device according to any one of claims 2 to 7, characterized in that: The second connecting member includes a second connecting rod, a third fixing portion and a fourth fixing portion, the third fixing portion connecting the first absorbing member and the second connecting rod, and the fourth fixing portion connecting the second absorbing member and the second connecting rod.

10. The coating assembly device according to any one of claims 2 to 7, characterized in that: The fixing seat includes a first seat body and a second seat body, the first seat body and the second seat body are spaced apart in the first direction, the first seat body and the second seat body are respectively connected to the first connecting member, and the first seat body and the second seat body are respectively connected to the second connecting member.

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