Electrolytic polishing hanger for high-purity valve body

Abstract

The utility model provides a high purity valve body electrolytic polishing hanger, including first anode plate, insulating plate, cathode frame, the insulating plate is provided at the top of first anode plate, the cathode frame is installed at the top of insulating plate, the top of cathode frame is provided with two sets of second titanium needle, the second titanium needle is provided with two sets of second titanium needle. A high-purity valve is arranged on the top of the insulating plate and located on the inner side of the cathode frame, the second titanium needle is matched with the high-purity valve in an inserted mode, a copper hanging buckle is fixedly installed on the side, away from the insulating plate, of the first anode plate, side edge limiting assemblies are arranged on the two sides of the top of the cathode frame correspondingly, and the side edge limiting assemblies are used for limiting the two sides of the high-purity valve. Third mounting holes are formed in the tops of the two sides of the cathode frame, and a sixth mounting hole located in one side of the second titanium needle is formed in the front face of the cathode frame. According to the titanium needle integrated hanger, the independent operation steps of equipment and the hanger can be reduced through the adaptive titanium needle integrated hanger, so that the problem that the inner surface and the outer surface need to be operated separately in the existing electrolytic polishing process is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of electrolytic polishing, in particular to a high-purity valve body electrolytic polishing hanger. Background Art

[0002] A high-purity valve body refers to a valve used to control the flow of gas in a high-purity gas system. In order to improve the surface finish, electrolytic polishing can make the valve body surface very smooth and flat and reduce surface roughness, which helps to reduce the chance of particle adhesion and accumulation, thereby better ensuring the purity of the high-purity fluid and removing surface impurities and contaminants. It can effectively remove tiny impurities and oxides on the surface of the valve body, further ensuring that the valve body will not introduce new pollution, maintain a high-purity environment, enhance corrosion resistance, and form a more uniform and denser passivation layer on the surface, thereby improving the corrosion resistance of the valve body under high-purity conditions, extending service life, and improving fluid fluidity. A smooth surface is conducive to a smoother flow of high-purity fluids, reducing resistance and turbulence, and has a positive impact on the performance and efficiency of the system.

[0003] In order to meet the standard requirements of the semiconductor industry, the existing technology first electropolishes the outside of the valve body, and then electropolishes the inner hole flow channel separately. Separate equipment and hangers are required to match the inner hole, which is time-consuming and labor-intensive. Some even need to be completed manually, and the polishing effect is also unstable.

[0004] The present invention designs four titanium needles for the inner hole of the valve body, and then integrates them on a hanger, so that the outer surface of the valve body and the inner hole flow channel can be electropolished at the same time. The hanger is placed on the automated electropolishing equipment as a whole. Only the parameters need to be set to make a valve body that meets the semiconductor industry standard requirements, avoiding the influence of human operation. Utility Model Content

[0005] In view of the shortcomings of the prior art, the purpose of the utility model is to provide a high-purity valve body electrolytic polishing hanger, which can be integrated with a matching titanium needle to reduce the independent operation steps of the equipment and the hanger, so as to solve the problem that the existing electrolytic polishing requires separate operation of the inner and outer surfaces.

[0006] In order to achieve the above-mentioned purpose, the utility model is realized through the following technical scheme: a high-purity valve body electrolytic polishing hanger, comprising a first anode plate, an insulating plate, and a cathode frame, wherein the insulating plate is arranged on the top of the first anode plate, the cathode frame is installed on the top of the insulating plate, two groups of second titanium needles are arranged on the top of the cathode frame, a high-purity valve is arranged on the top of the insulating plate and on the inner side of the cathode frame, the second titanium needle is plugged into the high-purity valve, a copper buckle is fixedly installed on the side of the first anode plate away from the insulating plate, side limit assemblies are arranged on both sides of the top of the cathode frame, the side limit assemblies are used to limit the two sides of the high-purity valve, third mounting holes are opened on the top of both sides of the cathode frame, and a sixth mounting hole located on one side of the second titanium needle is opened on the front of the cathode frame, the internal thread of the sixth mounting hole is connected with a third bolt, and the third bolt is used in conjunction with the second titanium needle.

[0007] Furthermore, the side limit assembly includes a mounting seat and a first titanium needle, the first titanium needle is slidably inserted in the mounting seat, the mounting seat is installed on both sides of the top of the cathode frame, and the first titanium needle is plugged into the high-purity valve.

[0008] Furthermore, a second bolt for locking the first titanium needle is threadedly connected to the top of the mounting seat, and the second bolt is used in conjunction with the first titanium needle.

[0009] Furthermore, a first mounting hole is provided on both sides of the top of the first anode plate close to one side of the insulating plate, the internal thread of the first mounting hole is connected with a first bolt, and a second mounting hole is provided on both sides of the top of the insulating plate, and the first anode plate is threadedly fixed to the second mounting hole by a first bolt passing through the first mounting hole.

[0010] Furthermore, two groups of second inner holes of the valve body are opened on the top of the high-purity valve, and the two groups of second inner holes of the valve body are plug-fitted with the second titanium needles. One group of the second inner holes of the valve body is located at the center of the high-purity valve, and the other group of the second inner holes of the valve body is located on one side of the center. Both sides of the high-purity valve are opened with first inner holes of the valve body, and the first inner holes of the valve body are plug-fitted with the first titanium needle.

[0011] Furthermore, fourth mounting holes are provided on both sides of the top of the cathode frame, and a fifth mounting hole located inside the fourth mounting hole is provided on the top of the cathode frame. The top of the cathode frame can be fixedly mounted with external bolts and a mounting seat through the fourth mounting hole and the fifth mounting hole.

[0012] Beneficial effects of the utility model: the utility model realizes internal flow guidance and self-limiting of the high-purity valve through two groups of second titanium needles and side limit assemblies, which are integrated on a hanger, so that the outer surface and inner hole flow channel of the valve body can be electropolished at the same time. The hanger is placed on the automated electropolishing equipment as a whole. It only needs to set the parameters to make a valve body that meets the semiconductor industry standard requirements, thereby improving the electropolishing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Other features, objects and advantages of the present invention will become more apparent by reading the detailed description of non-limiting embodiments with reference to the following drawings:

[0014] Figure 1 It is a schematic diagram of the structure of the utility model;

[0015] Figure 2 is a schematic diagram of the three-dimensional structure of the first anode plate;

[0016] Figure 3 for Figure 2 Schematic diagram of the explosion three-dimensional structure.

[0017] In the figure: 1. first anode plate; 101. first mounting hole; 102. copper buckle; 103. first bolt; 11. bracket; 12. second anode plate; 2. insulating plate; 201. second mounting hole; 3. cathode frame; 31. third mounting hole; 4. mounting seat; 401. second bolt; 41. fourth mounting hole; 42. fifth mounting hole; 5. first titanium needle; 6. second titanium needle; 61. sixth mounting hole; 611. third bolt; 7. high-purity valve; 71. first inner hole of valve body; 72. second inner hole of valve body. DETAILED DESCRIPTION

[0018] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0019] Embodiment 1

[0020] See also Figure 2 , Figure 2 It is a structural schematic diagram of the utility model.

[0021] A high-purity valve body electrolytic polishing hanger comprises a first anode plate 1, an insulating plate 2, and a cathode frame 3, wherein the insulating plate 2 is arranged on the top of the first anode plate 1, the cathode frame 3 is installed on the top of the insulating plate 2, two groups of second titanium needles 6 are arranged on the top of the cathode frame 3, a high-purity valve 7 is arranged on the top of the insulating plate 2 and on the inner side of the cathode frame 3, the second titanium needle 6 is plugged into the high-purity valve 7, a copper buckle 102 is fixedly installed on the side of the first anode plate 1 away from the insulating plate 2, side limit assemblies are arranged on both sides of the top of the cathode frame 3, and the side limit assemblies are used to limit the two sides of the high-purity valve 7, third mounting holes 31 are opened on the top of both sides of the cathode frame 3, and a sixth mounting hole 61 located on one side of the second titanium needle 6 is opened on the front of the cathode frame 3, and the internal thread of the sixth mounting hole 61 is connected with a third bolt 611, and the third bolt 611 is used in conjunction with the second titanium needle 6.

[0022] See also Figure 2 and Figure 3 , Figure 2 is a schematic diagram of the three-dimensional structure of the first anode plate; Figure 3 for Figure 2 Schematic diagram of the explosion three-dimensional structure.

[0023] The side limiting assembly includes a mounting seat 4 and a first titanium needle 5. The first titanium needle 5 is slidably inserted into the interior of the mounting seat 4. The mounting seat 4 is installed on both sides of the top of the cathode frame 3. The first titanium needle 5 is plugged into and matched with the high-purity valve 7. The mounting seat 4 can be installed on both sides of the cathode frame 3. After the first titanium needle 5 is plugged in and installed, the high-purity valve 7 can be limited on the side. At the same time, the inserted position can facilitate the guided electrolytic polishing of the internal flow channel.

[0024] The top threaded connection of the mounting seat 4 is provided with a second bolt 401 for locking the first titanium needle 5, and the second bolt 401 is used in conjunction with the first titanium needle 5; the second bolt 401 can be rotated downward to press the first titanium needle 5 that is slidably inserted into the high-purity valve 7, thereby ensuring that the flow channel of the high-purity valve 7 is guided for electrolytic polishing and improving processing efficiency.

[0025] A first mounting hole 101 is provided on both sides of the top of the first anode plate 1 close to the insulating plate 2, and a first bolt 103 is connected to the inner thread of the first mounting hole 101. A second mounting hole 201 is provided on both sides of the top of the insulating plate 2, and the first anode plate 1 is threadedly fixed to the second mounting hole 201 by the first bolt 103 penetrating through the first mounting hole 101; the first mounting hole 101 can facilitate the threaded connection of the first bolt 103, and the second mounting hole 201 facilitates the first bolt 103 to penetrate through the first mounting hole 101 and then be threadedly connected thereto, so as to facilitate the connection and fixation of the first anode plate 1 and the insulating plate 2.

[0026] Two groups of valve body second inner holes 72 are provided at the top of the high-purity valve 7, and the two groups of valve body second inner holes 72 are plugged into and matched with the second titanium needle 6. One group of valve body second inner holes 72 is located at the center of the high-purity valve 7, and the other group of valve body second inner holes 72 is located on one side of the center. Valve body first inner holes 71 are provided on both sides of the high-purity valve 7, and the valve body first inner holes 71 are plugged into and matched with the first titanium needle 5. The valve body second inner holes 72 and the valve body first inner holes 71 can limit the high-purity valve 7 through the two groups of second titanium needles 6 and the two groups of first titanium needles 5, and at the same time, guide the flow channel inside the high-purity valve 7 for electrolytic polishing, thereby reducing the polishing steps.

[0027] Fourth mounting holes 41 are provided on both sides of the top of the cathode frame 3, and a fifth mounting hole 42 located inside the fourth mounting hole 41 is provided on the top of the cathode frame 3. The top of the cathode frame 3 can be fixedly mounted on the mounting seat 4 by means of the fourth mounting holes 41 and the fifth mounting holes 42 in cooperation with external bolts; the fourth mounting holes 41 and the fifth mounting holes 42 facilitate the operator to rotate the mounting position of the mounting seat 4 according to the valve body specifications, thereby improving the adaptability during electrolytic polishing.

[0028] Embodiment 2

[0029] See also Figure 1 , Figure 1 It is a structural schematic diagram of the utility model.

[0030] A high-purity valve body electrolytic polishing hanger, comprising a hanger 11 and a second anode plate 12, wherein two groups of the second anode plates 12 are provided and are fixedly mounted inside the hanger 11, and a plurality of insulating plates 2 are provided, wherein the plurality of insulating plates 2 are fixedly mounted on the top of the second anode plate 12 by external bolts and are equidistantly distributed on the top of the second anode plate 12;

[0031] Several insulating plates 2 can be installed on the top of the second anode plate 12 in an integrated manner, which is suitable for use in large-scale operations of small valve bodies. The four titanium needles are limited by two groups of second titanium needles 6 and two groups of first titanium needles 5 to ensure that the surface is polished during electrolytic polishing and the internal flow channel can also be guided and polished by the four titanium needles.

[0032] Working principle: After the insulating plate 2 is fully installed on the second anode plate 12 inside the hanger 11, it can be hung on the bottom of the hanger 11 through the copper hook 102. At the same time, the hanger 11 cooperates with the crane in the workshop for hoisting and use, and is hoisted into the electrolytic cell for electrolytic polishing. Before installation, the high-purity valve 7 is placed on the top of the insulating plate 2 and then the high-purity valve 7 is plugged and limited by inserting two groups of second titanium needles 6 and two groups of first titanium needles 5. The two groups of second titanium needles 6 are inserted into the second inner hole 72 of the valve body, and the two groups of first titanium needles 5 are inserted into the first inner hole 71 of the valve body. During electrolytic polishing, the flow can be diverted to the flow channel of the high-purity valve 7, reducing the polishing steps. The two-step electrolytic polishing steps can be completed by a set of hangers, and there is no need to polish the internal flow channel after external polishing. The second titanium needle 6 and the first titanium needle 5 can be used to achieve diversion, and the second titanium needle 6 can be installed and tightened by twisting the third bolt 611.

[0033] The above shows and describes the basic principles and main features of the utility model and the advantages of the utility model. For those skilled in the art, it is obvious that the utility model is not limited to the details of the above exemplary embodiments, and can be implemented in other specific forms without departing from the spirit or basic features of the utility model. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the utility model is defined by the attached claims rather than the above description, and it is intended to include all changes within the meaning and scope of the equivalent elements of the claims. Any figure mark in the claims should not be regarded as limiting the claims involved.

[0034] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A high-purity valve body electrolytic polishing rack, comprising a first anode plate (1), an insulating plate (2), and a cathode frame (3), characterized in that: The insulating plate (2) is arranged on the top of the first anode plate (1), the cathode frame (3) is installed on the top of the insulating plate (2), two groups of second titanium needles (6) are arranged on the top of the cathode frame (3), a high-purity valve (7) is arranged on the top of the insulating plate (2) and on the inner side of the cathode frame (3), the second titanium needle (6) is plugged into and matched with the high-purity valve (7), a copper buckle (102) is fixedly installed on the side of the first anode plate (1) away from the insulating plate (2), side limit assemblies are arranged on both sides of the top of the cathode frame (3), and the side limit assemblies are used to limit the two sides of the high-purity valve (7), third mounting holes (31) are opened on the top of both sides of the cathode frame (3), and a sixth mounting hole (61) is opened on the front of the cathode frame (3) and is located on one side of the second titanium needle (6), and the internal thread of the sixth mounting hole (61) is connected with a third bolt (611), and the third bolt (611) is used in combination with the second titanium needle (6).

2. The high-purity valve body electrolytic polishing rack according to claim 1, characterized in that: The side limit assembly comprises a mounting seat (4) and a first titanium needle (5), wherein the first titanium needle (5) is slidably inserted into the interior of the mounting seat (4), the mounting seat (4) is installed on both sides of the top of the cathode frame (3), and the first titanium needle (5) is plugged into and matched with the high-purity valve (7).

3. A high-purity valve body electrolytic polishing hanger according to claim 2, characterized in that: The top of the mounting seat (4) is threadedly connected with a second bolt (401) for locking the first titanium needle (5), and the second bolt (401) is used in conjunction with the first titanium needle (5).

4. The high-purity valve body electrolytic polishing rack according to claim 1, characterized in that: First mounting holes (101) are provided on both sides of the top of the first anode plate (1) close to the insulating plate (2), the first mounting holes (101) are internally threadedly connected with first bolts (103), second mounting holes (201) are provided on both sides of the top of the insulating plate (2), and the first anode plate (1) is threadedly fixed to the second mounting holes (201) by first bolts (103) passing through the first mounting holes (101).

5. The high-purity valve body electrolytic polishing rack according to claim 1, characterized in that: Two groups of second inner holes (72) of the valve body are provided at the top of the high-purity valve (7), and the two groups of second inner holes (72) of the valve body are plugged into and matched with the second titanium needle (6). One group of the second inner holes (72) of the valve body is located at the center of the high-purity valve (7), and the other group of the second inner holes (72) of the valve body is located on one side of the center. Both sides of the high-purity valve (7) are provided with first inner holes (71) of the valve body, and the first inner holes (71) of the valve body are plugged into and matched with the first titanium needle (5).

6. The high-purity valve body electrolytic polishing rack according to claim 1, characterized in that: Fourth mounting holes (41) are provided on both sides of the top of the cathode frame (3), and a fifth mounting hole (42) located inside the fourth mounting hole (41) is provided on the top of the cathode frame (3). The top of the cathode frame (3) can be fixedly mounted on the mounting seat (4) by means of the fourth mounting hole (41) and the fifth mounting hole (42) in cooperation with external bolts.

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