Ventilation pipeline for semiconductor industrial factory building

Abstract

The utility model discloses a semi-conductor industrial factory building ventilation pipeline, which comprises a ventilation main pipeline, one end of the ventilation main pipeline is respectively provided with a first ventilation branch pipe and a second ventilation branch pipe, a quick release pipeline structure is internally provided with a wind blocking valve plate, and the surfaces of the two ends of the quick release pipeline structure are respectively provided with a flange structure. A supporting beam plate is installed on the surface of the upper end of the ventilation main pipeline, a servo motor is installed on the supporting beam plate, the output end of the servo motor is fixedly connected with a steering connecting rod through a transmission shaft, and one end of the steering connecting rod is fixedly connected with the air blocking valve plate through a rotating shaft. According to the utility model, the convenient quick-release pipeline structure is arranged, so that the quick-release pipeline structure can be quickly mounted and fixed on the ventilation branch pipe, and the servo motor is matched with the steering connecting rod structure, so that the air blocking valve plate in the quick-release pipeline structure can be controlled and adjusted, and the air blocking valve plate is promoted to rotate to adjust the ventilation quantity in the pipeline; and the air volume in the industrial factory building can be conveniently controlled and adjusted.

Description

Technical Field

[0001] The utility model relates to the technical field of ventilation ducts, in particular to a ventilation duct for semiconductor industrial plants. Background Art

[0002] Factory ventilation uses ventilation machinery and equipment to remove waste heat that affects human health, excess heat in personnel activity areas, excessive heat generated by production machinery, dirty gases and harmful gases, and introduces outdoor air flow (mainly from natural wind) to allow the factory to obtain sufficient fresh air and improve the environment and air quality in the factory. Factory ventilation effectively solves indoor air quality, improves human comfort and increases production.

[0003] The Chinese authorized patent document with publication number CN217737433U relates to the technical field of ventilation ducts, and discloses a ventilation duct for an integral plant in the metal manufacturing industry, comprising a duct body, a movable groove is provided in the middle of one end of the duct body, an impurity collection structure is provided in the inner cavity of the movable groove, the impurity collection structure comprises a collection box and a lifting rod connected to the collection box, a sealing cover is connected to the top of the movable groove, the sealing cover is adapted to the impurity collection structure, and a connecting block is connected to the bottom of the movable groove. In the ventilation duct for an integral plant in the metal manufacturing industry, through the provision of the impurity collection structure, impurities in the fluid flowing through the impurity collection structure can be intercepted by an impurity filter net, and the intercepted impurities fall into the collection box, preventing the impurities from accumulating in the pipeline, thereby blocking the pipeline and affecting the use of the pipeline, and the staff can quickly take out the collection box through the lifting rod to clean the impurities therein, which is convenient for the use of the impurity collection structure.

[0004] The above-mentioned prior art is unable to quickly adjust and control the ventilation volume inside the industrial plant, so it is necessary to develop a ventilation duct for semiconductor industrial plants to solve the above-mentioned technical problems. Utility Model Content

[0005] The utility model aims to provide a ventilation duct for semiconductor industrial plants to solve the problem that the existing technology proposed in the above background technology cannot quickly adjust and control the ventilation volume inside the industrial plant.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a ventilation duct for a semiconductor industrial plant, comprising a ventilation main duct, wherein a first ventilation branch pipe and a second ventilation branch pipe are respectively arranged at one end of the ventilation main duct, and a quick-release duct structure is arranged at the front end of the first ventilation branch pipe and the second ventilation branch pipe, and a windshield valve plate is installed inside the quick-release duct structure, and flange structures are arranged on the surfaces of both ends of the quick-release duct structure, and a support beam is installed on the upper end surface of the ventilation main duct, and a servo motor is installed on the support beam, and the output end of the servo motor is fixedly connected to a steering link via a transmission shaft, and one end of the steering link is fixedly connected to the windshield valve plate via a rotating shaft.

[0007] Preferably, the quick-release pipe structure is sealed and connected to the first ventilation branch pipe and the second ventilation branch pipe respectively through a flange structure.

[0008] Preferably, an electric control box is installed on the upper end of the support beam, and a power supply is installed inside the electric control box.

[0009] Preferably, a bearing base is provided at the inner bottom end of the quick-release pipe structure.

[0010] Preferably, a bearing assembly is installed inside the bearing base, and the bearing assembly is correspondingly connected to the rotating shaft.

[0011] Preferably, the windshield valve plate is a disc-shaped structure, and the windshield valve plate matches the inner diameter of the quick-release pipe structure.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The utility model is provided with a convenient quick-release pipe structure, which can be quickly installed and fixed on the ventilation branch pipe. By utilizing a servo motor in conjunction with a steering link structure, it can be used to control and adjust the wind shield valve plate inside the quick-release pipe structure, causing the wind shield valve plate to rotate to adjust the size of the gap between it and the inside of the pipe, thereby being able to adjust and control the ventilation volume inside the pipe, thereby facilitating the adjustment of the air volume inside the industrial plant, achieving the advantage of convenient adjustment and control. The entire ventilation duct structure is easy to form, and the connection is tight and stable. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0015] Figure 2 It is a schematic diagram of the front-end structure of the utility model;

[0016] Figure 3 It is a schematic diagram of the exploded structure of the utility model;

[0017] Figure 4It is a partial structural schematic diagram of the utility model.

[0018] In the figure: 1. ventilation main duct; 2. first ventilation branch pipe; 3. support beam; 4. electric control box; 5. quick-release pipe structure; 6. flange structure; 7. second ventilation branch pipe; 8. power supply; 9. servo motor; 10. transmission shaft; 11. steering link; 12. rotating shaft; 13. wind shield valve plate; 14. bearing base. DETAILED DESCRIPTION

[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0020] See also Figure 1-4 The utility model provides an embodiment: a ventilation duct for a semiconductor industrial plant, comprising a ventilation main duct 1, one end of which is respectively provided with a first ventilation branch pipe 2 and a second ventilation branch pipe 7, the front ends of the first ventilation branch pipe 2 and the second ventilation branch pipe 7 are provided with a quick-release duct structure 5, a windshield valve plate 13 is installed inside the quick-release duct structure 5, and flange structures 6 are provided on both end surfaces of the quick-release duct structure 5, a support beam 3 is installed on the upper end surface of the ventilation main duct 1, a servo motor 9 is installed on the support beam 3, the output end of the servo motor 9 is fixedly connected to a steering link 11 through a transmission shaft 10, and one end of the steering link 11 is fixedly connected to the windshield valve plate 13 through a rotating shaft 12.

[0021] Furthermore, the quick-disassembly pipe structure 5 is sealed and connected to the first ventilation branch pipe 2 and the second ventilation branch pipe 7 respectively through the flange structure 6, which has the advantages of convenient and quick installation and fixation, and at the same time has the advantages of tight connection and good sealing.

[0022] Furthermore, an electric control box 4 is installed at the upper end of the supporting beam 3 , and a power supply 8 is installed inside the electric control box 4 , and the power supply 8 can provide power for the servo motor 9 .

[0023] Furthermore, a bearing base 14 is provided at the inner bottom end of the quick-disassembly pipe structure 5 , so as to facilitate installation and fixation of the rotating shaft at the bottom end of the wind shield valve plate 13 .

[0024] Furthermore, a bearing assembly is installed inside the bearing base 14 , and the bearing assembly is correspondingly connected to the rotating shaft 12 .

[0025] Furthermore, the windshield valve plate 13 is a disc-shaped structure, and the windshield valve plate 13 matches the inner diameter of the quick-release pipe structure 5, so as to facilitate the control of the ventilation gap between the windshield valve plate 13 and the quick-release pipe structure 5, thereby controlling and adjusting the ventilation volume.

[0026] Working principle: When in use, one end of the ventilation main duct 1 is respectively provided with a first ventilation branch duct 2 and a second ventilation branch duct 7, and the front ends of the first ventilation branch duct 2 and the second ventilation branch duct 7 are both provided with a quick-release duct structure 5, which is sealed and connected to the first ventilation branch duct 2 and the second ventilation branch duct 7 through a flange structure 6, respectively, and has the advantages of convenient and quick installation and fixing, and at the same time has the advantages of tight connection and good sealing. A windshield valve plate 13 is installed inside the quick-release duct structure 5, and a support beam plate 3 is installed on the upper end surface of the ventilation main duct 1, and a servo motor 9 is installed on the support beam plate 3, and the output end of the servo motor 9 is connected to the first ventilation branch duct 2 and the second ventilation branch duct 7 through a transmission shaft 10. A steering link 11 is fixedly connected, and one end of the steering link 11 is fixedly connected to a windshield valve plate 13 via a rotating shaft 12. By utilizing a servo motor 9 in conjunction with the steering link 11 structure, the servo motor 9 drives and controls the steering link 11 for transmission, and the steering link 11 drives the windshield valve plate 13 to rotate and adjust via the rotating shaft, which can be used to control and adjust the windshield valve plate 13 inside the quick-release pipe structure 5, causing the windshield valve plate 13 to rotate to adjust the size of the gap between it and the inside of the pipe, thereby being able to adjust and control the ventilation volume inside the pipe, thereby facilitating the air volume control inside the industrial plant, achieving the advantage of convenient adjustment and control.

[0027] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0028] The standard parts used in this application document can all be purchased from the market, and the specific connection methods of each part are connected by conventional means such as mature bolts, rivets, welding, etc. in the prior art. In addition, the machinery, parts and equipment all adopt conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, so no specific description is given here.

[0029] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A ventilation duct for a semiconductor industrial plant, comprising a ventilation main duct (1), characterized in that: A first ventilation branch pipe (2) and a second ventilation branch pipe (7) are respectively arranged at one end of the main ventilation pipe (1); a quick-release pipe structure (5) is arranged at the front end of each of the first ventilation branch pipe (2) and the second ventilation branch pipe (7); a windshield valve plate (13) is installed inside the quick-release pipe structure (5); flange structures (6) are arranged on both end surfaces of the quick-release pipe structure (5); a support beam plate (3) is installed on the upper end surface of the main ventilation pipe (1); a servo motor (9) is installed on the support beam plate (3); an output end of the servo motor (9) is fixedly connected to a steering rod (11) via a transmission shaft (10); one end of the steering rod (11) is fixedly connected to the windshield valve plate (13) via a rotating shaft (12).

2. A semiconductor industrial plant ventilation duct according to claim 1, characterized in that: The quick-release pipe structure (5) is respectively sealedly connected to the first ventilation branch pipe (2) and the second ventilation branch pipe (7) via a flange structure (6).

3. The semiconductor industrial plant ventilation duct according to claim 1, characterized in that: An electric control box (4) is installed at the upper end of the support beam plate (3), and a power supply (8) is installed inside the electric control box (4).

4. The semiconductor industrial plant ventilation duct according to claim 1, characterized in that: A bearing base (14) is provided at the inner bottom end of the quick-release pipe structure (5).

5. The semiconductor industrial plant ventilation duct according to claim 4, characterized in that: A bearing assembly is installed inside the bearing base (14), and the bearing assembly is correspondingly connected to the rotating shaft (12).

6. The semiconductor industrial plant ventilation duct according to claim 1, characterized in that: The windshield valve plate (13) is a disc-shaped structure, and the windshield valve plate (13) matches the inner diameter of the quick-release pipe structure (5).

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