Etching liquid filtering device

Abstract

The utility model discloses an etching liquid filtering device which comprises a filtering tank, a filtering cavity is formed in the filtering tank, a top cover is arranged at the top of the filtering tank, a plug is fixedly connected to the bottom of the top cover, a fixing rod is fixedly connected to the bottom of the plug, and a filtering frame is fixedly connected to the bottom end of the fixing rod. A filtering frame is arranged on the top cover, a filtering net is arranged on the filtering frame, a liquid inlet and a liquid outlet are formed in the filtering tank, a motor is arranged on the top cover, the output end of the motor is fixedly connected with a rotating rod, a cleaning frame is fixedly connected to the rotating rod, and bristles are arranged on the cleaning frame. According to the automatic cleaning device, the motor, the rotating rod, the cleaning frame, the bristles and the like are arranged, so that the filter screen structure can be automatically cleaned, impurities adhered to the filter screen can be cleaned, the smoothness of meshes of the filter screen is ensured, and the filter structure can be conveniently cleaned by the structure.

Description

Technical Field

[0001] The utility model relates to the technical field of etching liquid filtering, in particular to an etching liquid filtering device. Background Art

[0002] Semiconductor phosphoric acid etching is a commonly used micro-nano processing technology used to prepare semiconductor devices and integrated circuits. Phosphoric acid etching is a wet etching method that can change the morphology and structure of the semiconductor surface by etching in a phosphoric acid solution. After the etching solution is used, impurities will be mixed in the liquid, so a filtering device is needed to filter it.

[0003] In some traditional etching liquid filtering devices, the filtering structures are mostly fixed in the filtering tank body. When cleaning, the filtering structure needs to be removed from the tank body for cleaning, and the cleaning method lacks convenience. Utility Model Content

[0004] The utility model aims to solve the shortcomings in the prior art and provides an etching liquid filtering device.

[0005] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: an etching liquid filtering device, comprising a filter tank, a filter cavity is arranged in the filter tank, and a top cover is arranged on the top of the filter tank, a plug is fixedly connected to the bottom of the top cover, a fixing rod is fixedly connected to the bottom of the plug, a filter frame is fixedly connected to the bottom end of the fixing rod, a filter net is arranged on the filter frame, a liquid inlet and a liquid outlet are respectively arranged on the filter tank, a motor is arranged on the top cover, a rotating rod is fixedly connected to the output end of the motor, a cleaning frame is fixedly connected to the rotating rod, bristles are arranged on the cleaning frame, a fixing block 1 is fixedly connected to both sides of the top cover, a fixing block 2 is fixedly connected to both sides of the filter tank, and a fixing mechanism is arranged between the fixing block 1 and the fixing block 2.

[0006] As a further description of the above technical solution:

[0007] The plug and the filter cavity are arranged in a nested manner.

[0008] As a further description of the above technical solution:

[0009] A slag discharge port is arranged near the bottom of the filter tank, and a sealing plug is arranged in the slag discharge port.

[0010] As a further description of the above technical solution:

[0011] The rotating rod passes through the center of the filter screen. There are two groups of cleaning frames located at the upper and lower sides of the filter screen. The bristles on the two cleaning frames are fitted to the filter screen.

[0012] As a further description of the above technical solution:

[0013] An outer cover frame is arranged on the top of the top cover and located outside the motor, and a handle is fixedly connected to the top of the top cover.

[0014] As a further description of the above technical solution:

[0015] The fixing mechanism includes a docking block fixedly connected to the bottom of the fixed block one and a docking groove arranged at the top of the fixed block two, the docking block and the fixed block are provided with built-in cavities at corresponding positions, and a moving block and a spring are respectively arranged in the built-in cavities, and the outer surface of the moving block away from the spring is fixedly connected with a push block and a pin block at both ends, and the inner wall of the docking groove is provided with a pin groove.

[0016] As a further description of the above technical solution:

[0017] The docking block and the docking groove are plug-fitted, the pin block and the pin groove are plug-fitted, and one side of the bottom of the pin block is arranged in an inclined surface.

[0018] The utility model has the following beneficial effects:

[0019] The etching liquid filtering device is characterized in that the etching liquid to be filtered enters the filtering chamber through the liquid inlet, the etching liquid capacity in the filtering chamber increases, the liquid level rises, and the etching liquid automatically passes through the filter screen to filter out the impurities therein, and the filtered etching liquid is automatically discharged from the liquid outlet position, thereby completing the smooth filtering work of the etching liquid; through the arrangement of the motor, the rotating rod, the cleaning frame, the bristles and other structures, the automatic cleaning work of the filter screen structure can be realized, so that the impurities adhering to the filter screen can be cleaned off, and the mesh of the filter screen is ensured to be unobstructed, and the structure can realize the convenient cleaning of the filter structure, without the troublesome operation of disassembling the filter structure for cleaning of the conventional filtering device, thereby reducing the cleaning frequency and improving the cleaning work efficiency; through the arrangement of the fixing block 1, the fixing block 2 and the fixing mechanism, the entire top cover can be stably covered on the top of the filter tank, ensuring that the filtering structure and the cleaning structure can be used normally, and at the same time, it can be conveniently disassembled and opened, so as to facilitate the regular cleaning operation of the internal structure of the entire filter tank, and the structure is simple to disassemble and operate, and is flexible and convenient to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic diagram of the overall structure of an etching liquid filtering device proposed by the utility model;

[0021] Figure 2 This is a front view of an etching liquid filtering device proposed by the utility model;

[0022] Figure 3 The utility model provides an etching liquid filtering device Figure 2 A is an enlarged view of the middle image.

[0023] Legend:

[0024] 1. Filter tank; 2. Filter cavity; 3. Top cover; 4. Plug; 5. Fixed rod; 6. Filter frame; 7. Filter screen; 8. Liquid inlet; 9. Liquid outlet; 10. Slag outlet; 11. Sealing plug; 12. Motor; 13. Rotating rod; 14. Cleaning frame; 15. Brush; 16. Cover frame; 17. Handle; 18. Fixed block 1; 19. Fixed block 2; 20. Docking block; 21. Built-in cavity; 22. Moving block; 23. Spring; 24. Push block; 25. Pin block; 26. Docking groove; 27. Pin groove. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] In the description of the present utility model, it should be noted that the orientation or position relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present utility model; the terms "first", "second", and "third" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance. In addition, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0027] Reference Figure 1-3The utility model provides an embodiment of an etching liquid filtering device, comprising a filter tank 1, a filter chamber 2 is arranged in the filter tank 1, and a top cover 3 is arranged on the top of the filter tank 1, a plug 4 is fixedly connected to the bottom of the top cover 3, the plug 4 and the filter chamber 2 are nested and matched, and the setting of the plug 4 can ensure the tightness of the top cover 3 covering the filter tank 1, a fixing rod 5 is fixedly connected to the bottom of the plug 4, and a filter frame 6 is fixedly connected to the bottom end of the fixing rod 5, and the outer surface of the filter frame 6 and the inner wall of the filter chamber 2 are fitted and slidably arranged, a filter screen 7 is arranged on the filter frame 6, and a liquid inlet 8 and a liquid outlet 9 are respectively arranged on the filter tank 1, and the liquid inlet 8 and the liquid outlet 9 are in the form of connecting pipe heads, which are convenient for docking with pipelines, and the liquid inlet 8 and the liquid outlet 9 are located on both sides of the filter tank 1, the liquid inlet 8 is located below the filter frame 6, and the liquid outlet 9 is located above the filter frame 6, and a motor 12 is arranged on the top cover 3, and a rotating rod 13 is fixedly connected to the output end of the motor 12. A cleaning frame 14 is fixedly connected to the rod 13, and bristles 15 are arranged on the cleaning frame 14. The rotating rod 13 passes through the center of the filter screen 7. There are two groups of cleaning frames 14 and they are located at the upper and lower sides of the filter screen 7. The bristles 15 on the two cleaning frames 14 are fitted with the filter screen 7. The motor 12 drives the rotating rod 13 to rotate, and the rotating rod 13 drives the two cleaning frames 14 to rotate. The bristles 15 on the two cleaning frames 14 can automatically clean the filter screen 7, and can effectively clean out the impurities adhering to and clogging the mesh of the filter screen 7, ensure the patency of the mesh, and realize the automatic cleaning of the filtering structure. Fixed blocks 18 are fixedly connected to both sides of the top cover 3, and fixed blocks 2 19 are fixedly connected to both sides of the filter tank 1. A fixing mechanism is arranged between the fixed block 18 and the fixed block 2 19. The fixed block 18 and the fixed block 2 19 cooperate with the setting of the fixing mechanism, so that the top cover 3 and the filter tank 1 can be stably connected together, and can also be conveniently disassembled and opened.

[0028] A slag discharge port 10 is provided near the bottom of the filter tank 1, and a sealing plug 11 is provided in the slag discharge port 10. The setting of the slag discharge port 10 can facilitate regular cleaning and discharge of impurities deposited in the filter chamber 2.

[0029] An outer cover frame 16 is provided at the top of the top cover 3 and outside the motor 12 , and a handle 17 is fixedly connected to the top of the top cover 3 . The outer cover frame 16 can shield and protect the motor 12 , and the handle 17 can facilitate the disassembly and assembly of the top cover 3 .

[0030] The fixing mechanism includes a docking block 20 fixedly connected to the bottom of the fixed block 18 and a docking groove 26 arranged at the top of the fixed block 2 19. The docking block 20 and the fixed block 18 are provided with a built-in cavity 21 at the corresponding position. A moving block 22 and a spring 23 are respectively arranged in the built-in cavity 21. The outer surface of the moving block 22 is away from the spring 23. The two ends are respectively fixedly connected with a push block 24 and a pin block 25. The inner wall of the docking groove 26 is provided with a pin groove 27. The docking block 20 and the docking groove 26 are arranged for plug-in matching, and the pin block 25 and the pin groove 27 are arranged for plug-in matching. The bottom side of the pin block 25 is arranged in an inclined form. When installed, the top cover 3 covers the top of the filter tank 1 , the docking block 20 is inserted into the docking groove 26. When inserted, the inclined surface at the bottom of the pin block 25 will first contact the inner wall opening of the docking groove 26. Through extrusion, the inclined surface will play a guiding effect, causing it to slide and shrink and push the moving block 22 to compress the spring 23. After the docking block 20 is inserted into the docking groove 26, the spring 23 resets and pushes the moving block 22 to drive the pin block 25 to insert into the pin groove 27, and the installation of the fixing mechanism can be completed, so that the top cover 3 can be firmly covered on the top of the filter tank 1. When disassembling, press the push block 24, and the push block 24 pushes the moving block 22 to drive the pin block 25 to leave the pin groove 27, so that the fixing mechanism can be opened, and the docking block 20 can be pulled out to complete the disassembly operation of the structure.

[0031] Working principle: When using the etching liquid filtering device, the etching liquid to be filtered enters the filter chamber 2 from the liquid inlet 8, the capacity of the etching liquid in the filter chamber 2 increases and the liquid level moves up, and when the etching liquid passes through the filter 7, the impurities therein can be automatically filtered out, and the filtered etching liquid is discharged through the liquid outlet 9, and the motor 12 is started. The motor 12 drives the rotating rod 13 to rotate, and the rotating rod 13 drives the cleaning frame 14 to rotate, and the cleaning frame 14 drives the bristles 15 to automatically clean the surface of the filter 7, so that the adhered impurities can be swept away, ensuring that the mesh of the filter 7 is unobstructed, thereby ensuring its filtering efficiency, and realizing automatic and convenient cleaning of the filtering structure.

[0032] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An etching liquid filtering device, comprising a filtering tank (1), characterized in that: The filter tank (1) is provided with a filter chamber (2), and a top cover (3) is provided on the top of the filter tank (1), a plug (4) is fixedly connected to the bottom of the top cover (3), a fixing rod (5) is fixedly connected to the bottom of the plug (4), a filter frame (6) is fixedly connected to the bottom end of the fixing rod (5), a filter screen (7) is provided on the filter frame (6), a liquid inlet (8) and a liquid outlet (9) are respectively provided on the filter tank (1), and the top cover (3) is fixedly connected to the bottom end of the filter frame (6). A motor (12) is arranged on the top, the output end of the motor (12) is fixedly connected to a rotating rod (13), the rotating rod (13) is fixedly connected to a cleaning frame (14), the cleaning frame (14) is provided with bristles (15), both sides of the top cover (3) are fixedly connected to a fixing block 1 (18), both sides of the filter tank (1) are fixedly connected to a fixing block 2 (19), and a fixing mechanism is arranged between the fixing block 1 (18) and the fixing block 2 (19).

2. The etching liquid filtering device according to claim 1, characterized in that: The plug (4) and the filter cavity (2) are arranged in a nested manner.

3. The etching liquid filtering device according to claim 1, characterized in that: The filter tank (1) is provided with a slag discharge port (10) near the bottom, and a sealing plug (11) is provided in the slag discharge port (10).

4. The etching liquid filtering device according to claim 1, characterized in that: The rotating rod (13) passes through the center of the filter (7), and there are two groups of cleaning frames (14) located at the upper and lower sides of the filter (7). The bristles (15) on the two cleaning frames (14) are fitted to the filter (7).

5. The etching liquid filtering device according to claim 1, characterized in that: An outer cover frame (16) is provided at the top of the top cover (3) and located outside the motor (12), and a handle (17) is fixedly connected to the top of the top cover (3).

6. The etching liquid filtering device according to claim 1, characterized in that: The fixing mechanism comprises a docking block (20) fixedly connected to the bottom of the first fixed block (18) and a docking groove (26) arranged on the top of the second fixed block (19); the docking block (20) and the fixed block (18) are provided with built-in cavities (21) at corresponding positions; a moving block (22) and a spring (23) are respectively arranged in the built-in cavities (21); a push block (24) and a pin block (25) are respectively fixedly connected at two ends of the outer surface of the moving block (22) away from the spring (23); and a pin groove (27) is arranged on the inner wall of the docking groove (26).

7. The etching liquid filtering device according to claim 6, characterized in that: The docking block (20) and the docking groove (26) are plug-fitted, the pin block (25) and the pin groove (27) are plug-fitted, and one side of the bottom of the pin block (25) is arranged in the form of an inclined surface.

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