Limiting assembly for chamber pipeline and reaction chamber

Abstract

The utility model provides a limiting assembly for a chamber pipeline and a reaction chamber. The limiting assembly used for the cavity pipeline comprises an adapter used for communicating an air source with an air inlet pipeline; the limiting part is provided with a limiting space matched with the adapter, the adapter is located in the limiting space and matched with the limiting part in a limiting mode, and the limiting part is used for supporting the adapter in the first direction and limiting displacement of the adapter in the second direction intersecting with the first direction. According to the limiting assembly disclosed by the utility model, the adapter and the limiting piece are arranged, so that the air inlet pipeline is indirectly limited. Compared with the prior art, due to the fact that the limiting piece is matched with the adapter in the limiting mode, acting force cannot be directly applied to the air inlet pipeline, the risk that quartz is damaged due to the fact that external force is too large or temperature changes in the limiting process is effectively reduced, and the limiting reliability is improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, and in particular to a limiting component for chamber pipelines and a reaction chamber. Background Art

[0002] Vertical heat treatment equipment is a key device for film formation on the surface of semiconductor wafers. It forms a semiconductor film layer on the surface of the wafer by continuously or alternately supplying process gases. In order to form high-quality product wafers, the space requirements for the reaction chamber are more stringent.

[0003] like Figure 1 The vertical furnace reaction chamber shown includes: a process tube 1, an air inlet tube 2, a wafer boat 3 and a stopper assembly 4. The air inlet tube 2 and the wafer boat 3 are arranged in the process tube 1, and the bottom of the air inlet tube 2 is fixed by the stopper assembly 4.

[0004] like Figure 2 As shown, the limit assembly 4 includes: a limit bracket 5, a fastening bolt 6, a stop nut 7, and an adjusting bolt 8. A porous connector 9 is provided at the bottom of the process pipe 1, and the limit bracket 5 is fixedly connected to the porous connector 9 by the fastening bolt 6. The air intake pipe 2 is located in the fixing groove of the limit bracket and is limited to the air intake pipe. The limit bracket 5 is supported on the air intake pipe 2, and the adjusting bolt 8 is provided at the bottom of the limit bracket 5. Each adjusting bolt corresponds to the air intake pipe 2, and the nut of the adjusting bolt 8 is pressed against the bottom of the air intake pipe. By changing the height of the adjusting bolt, the angle of the air intake pipe is adjusted.

[0005] Since the air inlet pipe is made of quartz, and the limit bracket and the adjusting bolt are both made of metal, if the limit bracket and the adjusting bolt encounter excessive external force or insufficient quartz strength during contact with the air inlet pipe, the quartz may be easily damaged, resulting in process gas leakage, thus affecting product quality. Utility Model Content

[0006] The utility model aims to at least solve the problem in the prior art that the quartz is easily damaged during the contact between the limit bracket and the air inlet pipe, resulting in leakage of process gas, and proposes a limit component for chamber pipelines and a reaction chamber.

[0007] In order to achieve the purpose of the utility model, a limit assembly for a chamber pipeline is provided, including: an adapter for connecting an air source and an air inlet pipeline; a limit member having a limit space matching the adapter, the adapter being located in the limit space and cooperating with the limit member in a limit position, the limit member being used to support the adapter in a first direction and limit the displacement of the adapter in a second direction intersecting the first direction.

[0008] Optionally, the adapter includes: an adapter part, arranged in the limiting space; a first connection part, connected to the adapter part, the first connection part is used to connect to the air intake pipeline in the first direction; a second connection part, connected to the adapter part, the second connection part is used to connect to the air source in a third direction, and the first direction, the second direction and the third direction intersect each other.

[0009] Optionally, the limiting member includes: a mounting plate for supporting the adapter; a limiting seat detachably connected to the mounting plate, the limiting seat having a limiting groove for limiting the movement of the adapter in the second third direction, and the limiting seat and the mounting plate together form the limiting space.

[0010] Optionally, there are multiple limit seats, and each limit seat is independently connected to the mounting plate.

[0011] Optionally, there are multiple adapters, and the multiple adapters are arranged in a one-to-one correspondence with the multiple limit seats.

[0012] Optionally, the limiting member further includes: a first connecting member, which is detachably connected to the mounting plate and the limiting seat respectively.

[0013] Optionally, the limit seat includes: a limit block, which is detachably connected to the mounting plate, and there are two limit blocks, which are spaced apart along the third direction; a connecting plate, which is arranged between the two limit blocks along the first direction, and the connecting plate is respectively connected to the two limit blocks, and the two limit blocks and the connecting plate form the limit groove.

[0014] Optionally, the limiting assembly further includes: an adjusting member, which is movably disposed on the mounting plate, and the adjusting member abuts against the adapter.

[0015] Optionally, an observation portion connected to the limiting groove is provided on the outer wall of the limiting seat, and the observation portion is used to observe the contact condition between the adjusting member and the adapter.

[0016] Optionally, the limit seat is integrally formed by turning.

[0017] Optionally, the limit assembly also includes: a second connecting member connected to the limit member, the second connecting member being used to achieve a detachable connection between the limit member and the inner furnace tube of the reaction chamber; and a positioning member, sleeved on the second connecting member, the positioning member being used to position the assembly position of the limit member in the first direction.

[0018] According to a second aspect of the present utility model, a reaction chamber is also disclosed, comprising:

[0019] The inner furnace tube comprises: a furnace tube body and a mounting ring connected to the bottom of the furnace tube body; an air intake pipeline is arranged in the furnace tube body; the above-mentioned limiting component is arranged at the bottom of the inner furnace tube, the limiting component is connected to the mounting ring, and the adapter is respectively connected to the gas source and the air intake pipeline.

[0020] The limit assembly of the utility model is provided with an adapter and a limiter. When in use, the gas source and the air intake pipeline can be connected through the adapter first, and then the adapter is supported by the limiter and the adapter is limited in the second direction, thereby indirectly limiting the air intake pipeline. Compared with the prior art, since the limiter cooperates with the adapter to limit, no force is directly applied to the air intake pipeline, which effectively reduces the risk of quartz damage caused by excessive external force or temperature changes during the limiting process, and improves the reliability of the limiting. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of a vertical furnace reaction chamber in the prior art;

[0022] Figure 2 It is a structural schematic diagram of a limit assembly of a vertical furnace reaction chamber in the prior art;

[0023] Figure 3 This is an exploded view of the limit assembly of the first embodiment of the utility model;

[0024] Figure 4 This is a schematic diagram of the structure of the limit assembly of the first embodiment of the utility model;

[0025] Figure 5 It is a structural schematic diagram of a limit seat of a limit assembly in Embodiment 1 of the utility model;

[0026] Figure 6 A top view of a limiting seat of a limiting assembly according to Embodiment 1 of the utility model in a first direction;

[0027] Figure 7 It is a side view of the limiting assembly of the first embodiment of the utility model in the second direction;

[0028] Figure 8 It is a structural schematic diagram of the observation portion of the limiting seat of the limiting assembly of the first embodiment of the utility model;

[0029] Fig. 9 This is a schematic structural diagram of a reaction chamber according to Embodiment 1 of the present utility model;

[0030] Fig.10 It is a schematic diagram of the assembly of the stopper and the inner furnace tube of the reaction chamber of the first embodiment of the utility model;

[0031] List of reference numerals:

[0032] 10. adapter; 11. adapter portion; 111. flow guide channel; 12. first connecting portion;

[0033] 13. Second connecting part; 20. Limiting member; 21. Mounting plate; 22. Limiting seat; 221. Limiting groove; 222. Limiting block; 223. Connecting plate; 224. Observation part; 225. Mounting hole; 226. Limiting end face; 23. First connecting part; 30. Adjusting member; 31. Adjusting bolt; 32. Locking nut; 33. Elastic pad; 40. Second connecting part; 50. Positioning member; 110. Outer furnace tube; 120. Inner furnace tube; 121. Furnace tube body; 122. Mounting ring; 123. Avoiding groove; 200. Air intake pipe. DETAILED DESCRIPTION

[0034] In order to enable those skilled in the art to better understand the technical solution of the present invention, the position limiting assembly for chamber pipeline and the reaction chamber provided by the present invention are described in detail below in conjunction with the accompanying drawings.

[0035] like Figure 3 As shown, the first embodiment of the utility model discloses a limiting assembly for chamber pipelines, including: an adapter 10 and a limiting member 20. The adapter 10 is used to connect the gas source (not shown in the figure) with the air inlet pipeline 200; the limiting member 20 has a limiting space matching the adapter 10, the adapter 10 is located in the limiting space and is limitedly matched with the limiting member 20, and the limiting member 20 is used to support the adapter 10 in a first direction and limit the displacement of the adapter 10 in a second direction intersecting the first direction.

[0036] The position limiting assembly of the utility model is provided with an adapter 10 and a position limiting member 20. When in use, the adapter 10 can be used to first connect the gas source and the air intake pipe 200, and then the position limiting member 20 can be used to support the adapter 10 and limit the adapter 10 in the second direction, thereby indirectly limiting the air intake pipe 200. Compared with the prior art, since the position limiting member 20 is limited with the adapter 10, no force is directly applied to the air intake pipe 200, which effectively reduces the risk of quartz damage caused by excessive external force or temperature changes during the limiting process, and improves the reliability of the limiting.

[0037] like Figure 3 As shown, the adapter 10 includes: an adapter 11, a first connection part 12, and a second connection part 13. The first connection part 12 is connected to the adapter 11, and the first connection part 12 is used to connect to the air intake pipeline 200 in the first direction; the second connection part 13 is connected to the adapter 11, and the second connection part 13 is used to connect to the air source in the third direction, and the first direction, the second direction, and the third direction intersect each other. The adapter 11 is a cube, and has an L-shaped guide channel 111 (see Figure 7 ), both ends of the guide channel 111 extend to the surface of the adapter 11 respectively. The first connecting portion 12 is tubular, connected to the adapter 11 along a first direction and communicated with the first end of the guide channel 111; the second connecting portion 13 is tubular, connected to the adapter 11 along a third direction and communicated with the second end of the guide channel 111.

[0038] like Figure 3 As shown, the limiting member 20 includes: a mounting plate 21 and a limiting seat 22, the mounting plate 21 is used to support the adapter 10; Figure 4 As shown, the limit seat 22 is detachably connected to the mounting plate 21, and the limit seat 22 has a limit groove 221 for limiting the movement of the adapter 10 in the second direction. The limit seat 22 and the mounting plate 21 together form a limit space. By setting the mounting plate 21, a supporting force can be provided to support the adapter 10 in the first direction. By connecting the limit seat 22 to the mounting plate 21, the mounting plate 21 can limit the adapter 10, thereby preventing the adapter 10 from moving in the second direction. Moreover, since the limit seat 22 is detachably connected to the mounting plate 21, the installation and replacement of the limit seat 22 are convenient.

[0039] like Figure 3 As shown, in this embodiment, there are multiple limit seats 22, each of which is independently connected to the mounting plate 21. Figure 3 When disassembling or assembling one of the multiple pipelines, only the corresponding limit seat 22 needs to be removed without removing the entire limit assembly, thereby reducing maintenance costs and difficulty.

[0040] It can be understood that in this embodiment, there are multiple adapters 10, and the multiple adapters 10 are arranged in a one-to-one correspondence with the multiple limiting seats 22, so as to achieve support and limiting of the multiple air intake pipelines 200.

[0041] like Figure 4 As shown, the limiting member 20 further includes: a first connecting member 23, the first connecting member 23 is detachably connected to the mounting plate 21 and the limiting seat 22, respectively, and the mounting plate 21 and the limiting seat 22 are detachably connected through the first connecting member 23. It can be understood that in this embodiment, the first connecting member 23 is a bolt, and the bolt is self- Figure 4 The lower part of the middle mounting plate 21 is passed upward through the through hole on the mounting plate 21, and the limit seat 22 is located at Figure 4 The upper portion of the middle mounting plate 21 is provided with a mounting hole 225 (see Figure 5 ), a thread is provided inside the mounting hole 225, and the bolt cooperates with the thread of the mounting hole 225, so as to fix the mounting plate 21 and the limiting seat 22 together.

[0042] It is not difficult to see that the first connecting member 23 has an assembled state in which the mounting plate 21 is fixedly connected to the limiting seat 22, and a disassembled state in which the mounting plate 21 and the limiting seat 22 are separated. When the first connecting member 23 (that is, the bolt in this embodiment) fixes the mounting plate 21 and the limiting seat 22, it is in the assembled state; when the bolt is unscrewed to separate it from the mounting plate 21 and the limiting seat 22, the bolt is in the disassembled state, and in the disassembled state of the first connecting member 23, as shown in FIG. Figure 3 As shown, the limiting seat 22 can move relative to the adapter 10 along the third direction and detach from the adapter 10 and the mounting plate 21, thereby separating the limiting seat 22 from the mounting plate 21 to facilitate further operations on the pipeline.

[0043] like Figure 5 As shown, in this embodiment, the limit seat 22 includes: a limit block 222 and a connecting plate 223. The limit block 222 is detachably connected to the mounting plate 21. There are two limit blocks 222, and the two limit blocks 222 are arranged at intervals along the second direction; the connecting plate 223 is arranged between the two limit blocks 222 along the first direction, and the connecting plate 223 is respectively connected to the two limit blocks 222, and the two limit blocks 222 and the connecting plate 223 form a limit groove 221. The end surface of the limit block 222 in contact with the mounting plate 21 is provided with a mounting hole 225 that matches the first connecting member 23.

[0044] like Figure 6 As shown, two end faces of the two limiting blocks 222 that are arranged opposite to each other form a limiting end face 226, and the two limiting end faces 226 are parallel to each other. The end face of the connecting plate 223 located on one side of the limiting groove 221 is perpendicular to the two limiting end faces 226 to form a limiting groove 221 that matches the profile of the adapter 11. When the adapter 10 is in limited cooperation with the limiting seat 22, the adapter 11 is located in the limiting groove 221, thereby achieving limited cooperation in the second direction. At the same time, since the notch of the limiting groove 221 faces the third direction and the two limiting end faces 226 are parallel to each other, the limiting seat 22 and the adapter 11 can move relative to each other in the third direction, so that the adapter 11 can enter the limiting groove 221 or detach from the limiting groove 221.

[0045] like Figure 5 As shown, it can be understood that, in this embodiment, the limiting groove 221 is a through groove extending along the first direction, so the adapter 10 can actually move along the first direction in the limiting groove 221.

[0046] In this embodiment, in order to improve the size accuracy of the limit seat 22, the limit seat 22 is integrally formed by turning. However, this is not restrictive, and in some other embodiments not shown in the figure, the limit seat 22 can also be integrally formed by other methods such as casting.

[0047] like Figure 3 and Figure 4 As shown, in this embodiment, the limit assembly further includes: an adjusting member 30, which is movably arranged on the mounting plate 21, and the adjusting member 30 abuts against the adapter 10, and the adjusting member 30 adjusts the position of the adapter 10 in the first direction by movement. By setting the adjusting member 30, the position of the adapter 10 in the first direction can be adjusted by the adjusting member 30, thereby indirectly adjusting the position of the pipeline connected to the adapter 10. Since the adjusting member 30 directly abuts against the adapter 10, it will not directly contact the pipeline, which can effectively avoid the risk of quartz breakage caused by excessive external force during the adjustment process, thereby improving the reliability of the adjustment process.

[0048] In this embodiment, the adjusting member 30 includes an adjusting bolt 31, a locking nut 32 and an elastic pad 33. Figure 7 As shown, the adjusting bolt 31 is passed through the mounting plate 21 from top to bottom, the nut of the adjusting bolt 31 is pressed against the lower end surface of the adapter 11, the locking nut 32 is located below the mounting plate 21 and is threadedly connected to the adjusting bolt 31, and the elastic pad 33 is sleeved on the adjusting bolt 31 and is located between the locking nut 32 and the mounting plate 21 to prevent the locking nut 32 from loosening.

[0049] like Figure 8 As shown, an observation portion 224 connected to the limiting groove 221 is provided on the outer wall of the limiting seat 22, and the observation portion 224 is used to observe the contact between the adjusting member 30 and the adapter 10. In this embodiment, the connecting plate 223 is spaced apart from the mounting plate 21 by a distance, so that an observation groove is formed on the limiting seat 22. After the limiting seat 22 is assembled on the mounting plate 21, the position of the observation groove corresponds to the position where the adjusting member 30 contacts the adapter 10, so that the contact between the adjusting member 30 and the adapter 10 can be observed conveniently through the observation groove.

[0050] It should be noted that, in the present embodiment, the observation portion 224 is an observation slot, but this is not restrictive. In some other embodiments not shown in the figure, the observation portion 224 can also be an observation hole arranged on the connecting plate 223 or the limiting block 222. As long as it is connected to the inside of the limiting slot 221 and facilitates observation of the contact condition between the adjusting member 30 and the adapter 10, it is within the protection scope of the present utility model.

[0051] like Figure 3 and Figure 4As shown, the limiting assembly further includes: a second connecting member 40 and a positioning member 50. The second connecting member 40 is connected to the limiting member 20, and the second connecting member 40 is used to realize a detachable connection between the limiting member 20 and the inner furnace tube 120 of the reaction chamber. The positioning member 50 is sleeved on the second connecting member 40, and the positioning member 50 is used to locate the assembly position of the limiting member 20 in the first direction. By providing the second connecting member 40 and the positioning member 50, the limiting member 20 can be installed to a predetermined position through the positioning member 50, thereby improving the accuracy and efficiency of assembly.

[0052] The following is a detailed description of the assembly position and method of the limit assembly based on the specific usage scenarios of the limit assembly:

[0053] like Fig. 9 and Fig.10 The first embodiment of the utility model shown in the figure further discloses a reaction chamber, comprising: an inner furnace tube 120, an air intake pipeline 200 and the above-mentioned limiting assembly. The inner furnace tube 120 comprises: a furnace tube body 121 and a mounting ring 122 connected to the bottom of the furnace tube body 121; the air intake pipeline 200 is arranged in the furnace tube body 121; the limiting assembly is arranged at the bottom of the inner furnace tube 120, the limiting member 20 is connected to the mounting ring 122, and the adapter 10 is respectively connected to the gas source and the air intake pipeline 200.

[0054] The reaction chamber of the utility model is provided with a limit assembly, and the adapter 10 in the limit assembly can be used to connect the gas source and the air inlet pipeline 200, and then the adapter 10 is supported by the limit member 20 and the adapter 10 is limited in the second direction, thereby indirectly achieving the limit of the air inlet pipeline 200. Compared with the prior art, since the limit member 20 is limited with the adapter 10, no force is directly applied to the air inlet pipeline 200, which effectively reduces the risk of quartz damage caused by excessive external force or temperature change during the limit process, and improves the limit reliability.

[0055] In addition, by providing the mounting ring 122 , the limiting member 20 is connected to the mounting ring 122 , so that the limiting member 20 does not directly contact the inner furnace tube 120 , thereby effectively protecting the inner furnace tube 120 and preventing the inner furnace tube 120 from being damaged.

[0056] It is understandable that if Fig. 9 As shown, in this embodiment, the reaction chamber further includes: an outer furnace tube 110 , and an inner furnace tube 120 is arranged inside the outer furnace tube 110 .

[0057] like Fig.10As shown, the position limiting assembly further includes: a second connecting member 40 and a positioning member 50. The second connecting member 40 is inserted into the mounting plate 21 of the position limiting member 20, and the mounting plate 21 is detachably connected to the mounting ring 122 at the bottom of the furnace tube body 121 through the second connecting member 40; the positioning member 50 is sleeved on the second connecting member 40, and the positioning member 50 is used to locate the assembly position of the position limiting member 20 in the first direction. By providing the second connecting member 40 and the positioning member 50, the position limiting member 20 can be installed to a predetermined position through the positioning member 50, thereby improving the accuracy and efficiency of assembly.

[0058] Specifically, if Fig.10 As shown, in this embodiment, the second connecting member 40 is a connecting bolt, and the positioning member 50 is a limiting sleeve. Fig.10 The second connecting member 40 is inserted from bottom to top on the mounting plate 21, and a screw hole is provided on the mounting ring 122. The bolt is threadedly connected with the screw hole, so as to fix the mounting plate 21 on the mounting ring 122. It is not difficult to see that by providing the mounting ring 122, it can be ensured that the second connecting member 40 will only contact and thread with the mounting ring 122, thereby preventing the second connecting member 40 from contacting with the furnace tube body 121, playing a protective role, and reducing the risk of damage to the furnace tube body 121.

[0059] Please combine Figure 3 and Figure 4 A avoidance groove 123 for placing the air intake pipeline 200 is arranged on the inner wall of the furnace tube body 121 along the first direction, and the avoidance groove 123 extends from the bottom to the top of the furnace tube body 121. The bottom of the furnace tube body 121 also has an air source inlet corresponding to the avoidance groove 123. The mounting plate 21 is arranged at the bottom of the inner furnace tube 120 and corresponds to the position of the avoidance groove 123. During assembly, the mounting plate 21 is first assembled on the mounting ring 122 at the bottom of the furnace tube body 121. The position of the assembled mounting plate 21 corresponds to the position of the gas source inlet. After the gas source enters the inner furnace tube 120 along the third direction through the gas source inlet, it just extends to the position of the adapter 10 on the mounting plate 21, so as to facilitate the connection with the second connection part 13 of the adapter 10. After the gas source is connected to the adapter 10, it is connected to the air intake pipeline 200 connected to the first connection part 12 and arranged along the first direction through the guide channel 111, so that the process gas of the gas source enters the inner furnace tube 120. Since the adapter 10 is just located above the mounting plate 21, the adapter 10 can be supported by the mounting plate 21, and the adapter 10 can be limited in the second direction by the limit seat 22, thereby indirectly limiting the air intake pipeline 200 in the second direction. It can be seen that by arranging the mounting plate 21 at the bottom of the furnace tube body 121 and corresponding to the position of the gas source inlet, the assembly of the adapter 10 and the gas source is more convenient, and the subsequent installation and replacement of the limiting seat 22 is also convenient.

[0060] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A limiter assembly for a chamber pipeline, characterized in that: include: An adapter (10) for connecting an air source with an air intake pipeline (200); The limiting member (20) has a limiting space matching the adapter (10); the adapter (10) is located in the limiting space and cooperates with the limiting member (20); the limiting member (20) is used to support the adapter (10) in a first direction and limit the displacement of the adapter (10) in a second direction intersecting the first direction.

2. The limit assembly according to claim 1, characterized in that: The adapter (10) comprises: A transfer portion (11) is arranged in the limiting space; A first connecting portion (12) connected to the adapter portion (11), the first connecting portion (12) being used to connect to the air intake pipeline (200) in the first direction; The second connection portion (13) is connected to the adapter portion (11), and the second connection portion (13) is used to connect to the gas source in a third direction, and the first direction, the second direction and the third direction intersect each other.

3. The limit assembly according to claim 1, characterized in that: The limiting member (20) comprises: A mounting plate (21) for supporting the adapter (10); A limit seat (22) is detachably connected to the mounting plate (21); the limit seat (22) has a limit groove (221) for limiting the movement of the adapter (10) in the second direction; the limit seat (22) and the mounting plate (21) together form the limit space.

4. The limiting assembly according to claim 3, characterized in that: There are a plurality of limit seats (22), and each limit seat (22) is independently connected to the mounting plate (21).

5. The limiting assembly according to claim 4, characterized in that: There are a plurality of adapters (10), and the plurality of adapters (10) are arranged in a one-to-one correspondence with the plurality of limit seats (22).

6. The limiting assembly according to claim 3, characterized in that: The limiting member (20) further comprises: The first connecting member (23) is detachably connected to the mounting plate (21) and the limiting seat (22) respectively.

7. The limiting assembly according to claim 3, characterized in that: The limiting seat (22) comprises: A limit block (222) is detachably connected to the mounting plate (21), wherein there are two limit blocks (222), and the two limit blocks (222) are spaced apart along the second direction; A connecting plate (223) is arranged between the two limiting blocks (222) along a first direction, and the connecting plate (223) is respectively connected to the two limiting blocks (222), and the two limiting blocks (222) and the connecting plate (223) form the limiting groove (221).

8. The limiting assembly according to claim 3, characterized in that: The limiting component also includes: The adjusting member (30) is movably arranged on the mounting plate (21), and the adjusting member (30) abuts against the adapter (10).

9. The limiting assembly according to claim 8, characterized in that: An observation portion (224) in communication with the limiting groove (221) is provided on the outer wall of the limiting seat (22), and the observation portion (224) is used to observe the contact condition between the adjusting member (30) and the adapter (10).

10. The limiting assembly according to claim 3, characterized in that: The limiting seat (22) is integrally formed by turning.

11. The limiter assembly according to claim 1, characterized in that: The limiting component also includes: a second connecting member (40) connected to the limiting member (20), the second connecting member (40) being used to realize a detachable connection between the limiting member (20) and the inner furnace tube (120) of the reaction chamber; A positioning member (50) is sleeved on the second connecting member (40), and the positioning member (50) is used to locate the assembly position of the limiting member (20) in the first direction.

12. A reaction chamber, characterized in that: include: The inner furnace tube (120) comprises: a furnace tube body (121) and a mounting ring (122) connected to the bottom of the furnace tube body (121); An air intake pipeline (200) is arranged in the furnace tube body (121); The limiting assembly according to any one of claims 1 to 11 is arranged at the bottom of the inner furnace tube (120), the limiting member (20) is connected to the mounting ring (122), and the adapter (10) is respectively connected to the gas source and the air intake pipeline (200).

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