Test fixture

By designing a test fixture for side push-slide flange and self-locking assembly, the problems of shading and low efficiency when fixing the RF slides are solved, efficient fixing and good grounding of the RF slides are achieved, and the testing efficiency and effect are improved.

CN222353952UActive Publication Date: 2025-01-14SHENZHEN SHIDAI SUXIN TECH CO LTD
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Patent Information

Application Number
CN202420576484.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-03-22
Publication Date
2025-01-14
Estimated Expiration
2034-03-22

AI Technical Summary

Technical Problem

Existing RF test fixtures have problems of occlusion obstacles and low testing efficiency when fixing RF slides, especially because the difference in RF slide components layout requires frequent modification of fixtures, resulting in poor detection efficiency and effect.

Method used

A test fixture was designed, using side push-slide flange and using self-locking components to achieve efficient fixation of radio frequency slides through the coordination of elastic parts and locking parts, avoiding obstruction of detection parts, and without the need to do it for different layouts. Modification improves testing efficiency and effectiveness.

Benefits of technology

It realizes efficient fixing and good grounding effect of the radio frequency slide, improves testing efficiency and effect, avoids adaptive modifications to the layout of different components, and ensures high efficiency and accuracy of detection.

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Abstract

The utility model belongs to the technical field of testing, and discloses a testing clamp which comprises a slide flange. The base is provided with a first mounting groove and a second mounting groove, the slide glass flange is arranged in the first mounting groove, and the slide glass flange is in sliding fit with the base along the first mounting groove; the self-locking assembly is arranged in the second mounting groove, the self-locking assembly comprises an elastic piece and a locking piece, the elastic piece is mounted on the inner wall of the second mounting groove, the locking piece is in sliding fit with the second mounting groove to compress or release the elastic piece, the movement direction of the locking piece is consistent with the movement direction of the slide glass flange, and the locking piece is connected with the slide glass flange in a clamped mode; the locking piece is configured to be capable of being switched between a normal state and a locking state, and the slide glass flange drives the locking piece to slide and compress the elastic piece, so that the locking piece is switched from the normal state to the locking state to lock the slide glass flange and the base. According to the invention, the test efficiency and the test effect of the radio frequency slide glass are improved.
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Description

Technical Field

[0001] The present application relates to the technical field of detection, and more specifically, to a test fixture. Background Art

[0002] RF chip is a substrate used to package and protect RF devices. RF chip is usually made of high-frequency materials and has good electromagnetic properties and mechanical strength. RF chip is widely used in wireless communication, radar, satellite communication and other fields.

[0003] The RF carrier is small in size and is combined with the system by direct welding in actual application. There are no screw holes for fixing, and the front is full of active devices, bonding wires, ceramic substrates and other fragile components. Various indicators need to be tested before the RF carrier is shipped, and the RF carrier needs to be fixed in a non-destructive way during the test. In related technical means, due to its characteristics, the RF carrier needs to be assisted by a test fixture during testing. Existing RF test fixtures often use upper and lower clamping to fix the RF carrier for testing. In actual use, the upper and lower clamping to fix the RF carrier causes the fixture to block various components on the RF carrier during testing. On the other hand, due to the differences in the layout of various components on the RF carrier, the corresponding test fixture needs to be adaptively modified for RF carriers with different layouts during testing, resulting in the defects of low test efficiency and poor test results in the overall test process. Utility Model Content

[0004] The embodiment of the present application provides a test fixture that can improve test efficiency and test results.

[0005] A test fixture provided in this application adopts the following technical solution:

[0006] A test fixture, comprising:

[0007] A carrier flange, used for carrying a radio frequency carrier;

[0008] The base is provided with a first mounting groove and a second mounting groove, the wafer carrier flange is arranged in the first mounting groove, and the wafer carrier flange is slidably matched with the base along the first mounting groove;

[0009] A self-locking component is arranged in the second mounting groove, the self-locking component comprises an elastic member and a locking member, the elastic member is installed on the inner wall of the second mounting groove, the locking member and the second mounting groove are slidably matched to compress or release the elastic member, the movement direction of the locking member is consistent with the movement direction of the wafer carrier flange, and the locking member is clamped with the wafer carrier flange;

[0010] The locking member is configured to be switchable between a normal state and a locked state, and the wafer carrier flange drives the locking member to slide and compress the elastic member, so that the locking member switches from a normal state to a locked state to lock the wafer carrier flange and the base.

[0011] Optionally, it also includes multiple grounding contacts, the base is provided with multiple installation positions, the grounding contacts are arranged one by one at the installation positions, and one end of the grounding contact is fixedly connected to the base, and when the locking piece is in a locked state, the end of the grounding contact that is not connected to the base is pressed against the carrier flange.

[0012] Optionally, along the loading direction of the carrier flange, a guide portion is provided at one end of the grounding contact away from the base. During the movement of the carrier flange, the guide portion guides the deformation direction of the grounding contact so that the grounding contact is always located between the carrier flange and the base.

[0013] Optionally, the locking member includes a slider, the slider is provided with a protrusion for clamping the carrier flange, the carrier flange is provided with a clamping groove on the end face corresponding to the slider, and the protrusion is located in the clamping groove; when the locking member is in a locked state, the protrusion presses against the inner wall of the clamping groove to limit the carrier flange.

[0014] Optionally, an avoidance groove is provided on the end surface of the wafer carrier flange corresponding to the slider, and the slider is located in the avoidance groove to reduce the occupied space.

[0015] Optionally, the locking member further comprises a sliding rod, one end of which is connected to the base, and the sliding rod rotates around the connection point on one surface of the base; the slider is provided with a locking sliding groove, and one end of the sliding rod away from the base slides in the locking sliding groove;

[0016] A first locking position is provided in the locking groove. When one end of the sliding rod away from the base is located at the first locking position, the sliding rod presses against the sliding block, and the locking member is in a locked state to lock the carrier flange and the base. When one end of the sliding rod away from the base is located at any position of the locking groove excluding the first locking position, the sliding rod slides in cooperation with the sliding block, and the locking member is in a normal state.

[0017] Optionally, one end of the sliding rod away from the base slides in the locking sliding groove in a clockwise or counterclockwise direction.

[0018] Optionally, a second locking point is provided in the locking groove, and the movement path from the second locking point to the first locking point is the first groove. A first guide surface is provided at the bottom of the first groove, and along the movement path of the sliding rod, the distance between the first guide surface and the carrier flange gradually decreases to guide the end of the sliding rod away from the base from the second locking point to the first locking point.

[0019] Optionally, the movement path from the first locking point to the second locking point is a second slide groove, and a second guide surface is provided at the bottom of the second slide groove. Along the movement path of the sliding rod, the distance between the second guide surface and the carrier flange gradually decreases to guide the end of the sliding rod away from the base from the first locking point to the second locking point.

[0020] Optionally, a slide rail is provided on the inner wall of the first mounting groove, and a movable slide groove is provided on the end surface of the wafer carrier flange corresponding to the first mounting groove, and the slide rail is located in the movable slide groove and slidably cooperates with the movable slide groove.

[0021] It can be seen from the above technical solutions that the embodiments of the present application have the following advantages:

[0022] The above-mentioned test fixture fixes the RF carrier by pushing the carrier flange from the side and then using a self-locking assembly to fix the carrier flange. That is, when a force is applied to the side wall of the carrier flange, the carrier flange drives the locking part along the first mounting groove to move along the second mounting groove. During the movement, the locking part gradually compresses the elastic part so that the locking part switches from the normal state to the locked state to lock the carrier flange and the base, thereby completing the efficient installation of the RF carrier. The above-mentioned test fixture does not cause any obstruction to the detection. At the same time, for RF carriers with different component layouts, the self-locking assembly does not need to be modified, thereby improving the test efficiency and test effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 This is a schematic diagram of the overall structure of a test fixture locking a radio frequency carrier disclosed in an embodiment of the present application;

[0024] Figure 2 A schematic diagram of the structure of a test fixture disclosed in an embodiment of the present application showing a radio frequency carrier;

[0025] Figure 3 A schematic diagram of the structure of a test fixture with a prominent base disclosed in an embodiment of the present application;

[0026] Figure 4 A structural cross-sectional view of a test fixture device disclosed in an embodiment of the present application highlighting the cooperation between a radio frequency carrier and a self-locking component;

[0027] Figure 5 A structural schematic diagram of a test fixture device disclosed in an embodiment of the present application showing a self-locking component;

[0028] Figure 6 A structural schematic diagram of a test fixture device disclosed in an embodiment of the present application with a locking member highlighted;

[0029] Figure 7 A schematic diagram of the structure of a test fixture for unlocking a radio frequency carrier disclosed in an embodiment of the present application.

[0030] Description of reference numerals:

[0031] 1. Film carrier flange; 11. Snap-in groove; 12. Avoidance groove; 13. Moving slide groove;

[0032] 2. Base; 21. First mounting slot; 211. Slide rail; 22. Second mounting slot; 23. Mounting position;

[0033] 3. Self-locking component; 31. Elastic member; 32. Locking member; 321. Sliding block; 3211. Protrusion; 3212. Locking slide groove; 3213. First locking point; 3214. Second locking point; 3215. First slide groove; 3216. Second slide groove; 322. Sliding rod; 3221. Mounting end; 3222. Sliding end;

[0034] 4. Ground contact; 41. Guide portion. DETAILED DESCRIPTION

[0035] The present application is further described in detail below in conjunction with the accompanying drawings.

[0036] The embodiment of the present application provides a test fixture for providing auxiliary fixation for the test of the RF carrier, so as to facilitate the testing of various indicators of the RF carrier.

[0037] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0038] The terms "first", "second", "third", "fourth", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions.

[0039] For ease of understanding, the test fixture in the embodiment of the present application is described below. Figure 1 An embodiment of the test fixture in the embodiment of the present application includes a carrier flange 1, a base 2 and a self-locking component 3. The carrier flange 1 is prepared at the same time as the RF carrier is produced and is used to carry the RF carrier. The carrier flange 1 and the self-locking component 3 are both installed on the base 2. The self-locking component 3 is used to lock the carrier flange 1 on the base 2, thereby achieving the effect of fixing the RF carrier and facilitating the detection of the RF carrier.

[0040] See also Figures 1 to 3 The base 2 is generally in the shape of a rectangular parallelepiped and is made of metal. The base 2 is provided with a first mounting groove 21 for mounting the wafer flange 1 and a second mounting groove 22 for mounting the self-locking assembly 3. In this embodiment, the first mounting groove 21 is located at the central axis of the base 2, and two second mounting grooves 22 are provided, which are respectively located on both sides of the first mounting groove 21 and are used to mount two sets of self-locking assemblies 3. The two sets of self-locking assemblies 3 act together on the two ends of the wafer flange 1 and the base 2 to maintain the stability when the wafer flange 1 and the base 2 are locked.

[0041] The wafer carrier flange 1 is arranged in the first mounting groove 21, and the wafer carrier flange 1 slides and cooperates with the base 2 along the first mounting groove 21. The self-locking component 3 is arranged in the second mounting groove 22, and the self-locking component 3 slides and cooperates with the base 2 along the second mounting groove 22. Further, a slide rail 211 is arranged on the inner wall of the first mounting groove 21, and a movable slide groove 13 is arranged on the end face of the wafer carrier flange 1 corresponding to the first mounting groove 21. The slide rail 211 is located in the movable slide groove 13 and slides and cooperates with the movable slide groove 13. The length direction of the slide rail 211 is consistent with the loading direction of the wafer carrier flange 1. The slide rail 211 and the slide groove cooperate to reduce the friction force during the sliding process between the wafer carrier flange 1 and the base 2. On the other hand, the slide rail 211 guides the movement of the wafer carrier flange 1, so that the movement path of the wafer carrier flange 1 is always a straight line to avoid deviation.

[0042] See also Figure 1 and Figure 2 An avoidance groove 12 is provided on the end surface of the wafer carrier flange 1 corresponding to the self-locking component 3. Two avoidance grooves 12 are provided. The avoidance grooves 12 are arranged one-to-one corresponding to the self-locking components 3. Part of the self-locking components 3 are located in the avoidance grooves 12 to reduce the occupied space, thereby reducing the volume of the overall fixture.

[0043] See also Figure 3 and Figure 4The self-locking assembly 3 includes an elastic member 31 and a locking member 32. The elastic member 31 is installed on the inner wall of the second mounting groove 22. The locking member 32 slides with the second mounting groove 22 to compress or release the elastic member 31. The movement direction of the locking member 32 is consistent with the movement direction of the wafer flange 1. The locking member 32 is clamped with the wafer flange 1. The locking member 32 is configured to be switchable between a normal state and a locked state. The wafer flange 1 drives the locking member 32 to slide and compress the elastic member 31, so that the locking member 32 switches from a normal state to a locked state to lock the wafer flange 1 and the base 2. Specifically, a mounting column is provided on the inner wall of the second mounting groove 22. The mounting column passes through one end of the elastic member 31 to define the installation position of the elastic member 31. The axial direction of the elastic member 31 is consistent with the movement direction of the locking member 32, and the axial direction of the elastic member 31 is aligned with the locking member 32, so that the locking member 32 slides along the second mounting groove 22 to compress or release the elastic member 31.

[0044] When a force is applied to the side wall of the wafer carrier flange 1, the wafer carrier flange 1 drives the locking member 32 to move along the second mounting groove 22 along the first mounting groove 21. The locking member 32 gradually compresses the elastic member 31 during the movement, so that the locking member 32 switches from the normal state to the locking state to lock the wafer carrier flange 1 and the base 2, completing the efficient installation of the RF wafer. The above-mentioned test fixture fixes the RF wafer by pushing the wafer carrier flange 1 from the side and then using the self-locking component 3 to fix the bottom of the wafer carrier flange 1. There is no obstruction to the detection. At the same time, for RF wafers with different component layouts, the locking member 32 does not need to be modified, which improves the test efficiency and test effect of the overall test process.

[0045] See also Figures 2 to 6 The locking member 32 includes a slider 321 and a slide rod 322. The slider 321 is provided with a protrusion 3211 for clamping the carrier flange 1. The end face of the carrier flange 1 corresponding to the slider 321 is provided with a clamping groove 11. The protrusion 3211 is located in the clamping groove 11. When the locking member 32 is in a locked state, the protrusion 3211 presses against the inner wall of the clamping groove 11 to limit the carrier flange 1, so that the carrier flange 1 is fixed relative to the base 2 to achieve the effect of locking the carrier flange 1 and the base 2.

[0046] One end of the slide bar 322 is connected to the base 2, and the slide bar 322 rotates around the connection point on one surface of the base 2; the slider 321 is provided with a locking slot 3212, and the end of the slide bar 322 away from the base 2 slides in the locking slot 3212, and the end of the slide bar 322 away from the base 2 slides in the locking slot 3212 in a clockwise or counterclockwise direction. In this embodiment, the end of the slide bar 322 away from the base 2 slides in the locking slot 3212 in a clockwise direction, the end of the slide bar 322 connected to the base 2 is the mounting end 3221, and the end of the slide bar 322 away from the base 2 is the sliding end 3222, and the movement trajectory of the sliding end 3222 in the locking slot 3212 is similar to a heart shape.

[0047] The locking slide groove 3212 is provided with a first locking point 3213 and a second locking point 3214, the second locking point 3214 is located at the high end of the locking slide groove 3212, and the first locking point 3213 is located below the second locking point 3214. When the sliding end 3222 is located at the first locking point 3213, the sliding rod 322 presses against the slider 321, and the locking member 32 is in a locked state to lock the wafer flange 1 and the base 2; when the sliding end 3222 is located at any position in the locking slide groove 3212 excluding the first locking point 3213, the sliding rod 322 and the slider 321 slide and cooperate, and the locking member 32 is in a normal state; when the sliding end 3222 is located at the second locking point 3214, the movable stroke of the slider 321 is at its maximum.

[0048] See also Figure 1 and Figure 7 The cam 321 is pressed against the top of the support frame 322 to push the slider 321 to the left of the support frame 322, and the slider 321 is pressed against the bottom of the support frame 322 to push the slider 321 to the right of the support frame 322.

[0049] When the detection of the RF carrier is completed and the carrier flange 1 needs to be unlocked, the carrier flange 1 continues to apply force to the side wall of the carrier flange 1, so that the carrier flange 1 continues to drive the slider 321 to move toward the elastic member 31, so as to further compress the elastic member 31, increase the distance between the slider 321 and the mounting end 3221 of the slide bar 322, and provide movement conditions for the sliding end 3222 to disengage from the first locking position 3213; the sliding end 3222 disengages from the first locking position 3213 to release the slide bar 322 from the slider 321 , the locking member 32 switches from the locked state to the normal state, i.e., the lock between the carrier flange 1 and the base 2 is released; at this time, the force applied to the carrier flange 1 is removed, and under the restoring force of the elastic member 31, the slider 321 moves toward the mounting end 3221, and the slider 321 drives the carrier flange 1 to move synchronously, and the distance between the slider 321 and the mounting end 3221 gradually decreases, and the sliding end 3222 then moves along the locking groove 3212 toward the second clamping point 3214 to reach the maximum movement stroke.

[0050] See also Figure 5 In order to facilitate the switching of the sliding end 3222 between the first locking point 3213 and the second locking point 3214, the locking slide groove 3212 includes a first slide groove 3215 and a second slide groove 3216. The movement path from the second locking point 3214 to the first locking point 3213 is the first slide groove 3215. The bottom of the first slide groove 3215 is provided with a first guide surface. Along the movement path of the sliding rod 322, the distance between the first guide surface and the carrier flange 1 gradually decreases to guide the end of the sliding rod 322 away from the base 2, that is, the sliding end 3222, from the second locking point 3214 to the first locking point 3213. The movement path from the first locking point 3213 to the second locking point 3214 is the second slide groove 3216. A second guide surface is provided at the bottom of the second slide groove 3216. Along the movement path of the sliding rod 322, the distance between the second guide surface and the carrier flange 1 gradually decreases to guide the sliding rod 322 away from one end of the base 2, i.e., the sliding end 3222, from the first locking point 3213 to the second locking point 3214.

[0051] See also Figure 3 , the RF carrier needs a good grounding effect during testing. Since there is a large gap between the RF carrier and the base 2, it is easy to cause poor carrier grounding effect. Therefore, in this embodiment, the test fixture is also provided with a plurality of grounding contacts 4, and the base 2 is provided with a plurality of mounting positions 23 for mounting a plurality of grounding contacts 4. The plurality of mounting positions 23 are evenly and spacedly distributed, and the grounding contacts 4 are arranged one by one at the mounting positions 23, and one end of the grounding contact 4 is fixedly connected to the base 2. The mounting position 23 is located at the bottom of the first mounting groove 21, and the grounding contact 4 is made of metal material. When the locking member 32 is in the locked state, the end of the grounding contact 4 that is not connected to the base 2 is pressed against the carrier flange 1, providing a good grounding effect for the RF carrier during testing.

[0052] Furthermore, along the loading direction of the wafer flange 1, a guide portion 41 is provided at one end of the grounding contact 4 away from the base 2. The guide portion 41 is used to ensure that the grounding contact 4 is always located between the wafer flange 1 and the base 2 during the movement of the wafer flange 1, and the guide portion 41 is pressed against the wafer flange 1. During the assembly of the wafer flange 1, the front end of the wafer flange 1 first contacts the grounding contact 4 when moving along the first mounting groove 21. Under the applied force, the front end of the wafer flange 1 gradually presses against the guide portion 41. The guide portion 41 guides the deformation direction of the grounding contact 4, causing the grounding contact 4 to deform, and always keeps the grounding contact 4 between the wafer flange 1 and the base 2, and presses against the wafer flange 1 to connect the base 2 and the wafer flange 1 to achieve the grounding effect.

[0053] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereby. The same parts are represented by the same figure marks. It should be noted that the words "front", "rear", "left", "right", "up" and "down" used in the above description refer to the directions in the drawings, and the words "inside" and "outside" refer to the directions toward or away from the geometric center of a specific component, respectively. Therefore: all equivalent changes made according to the structure, shape, and principle of the present application should be covered within the protection scope of the present application.

Claims

1. A test fixture, characterized in that: include: A wafer carrier flange (1), used for carrying a radio frequency wafer; The base (2) is provided with a first mounting groove (21) and a second mounting groove (22), the wafer carrier flange (1) is arranged in the first mounting groove (21), and the wafer carrier flange (1) is slidably matched with the base (2) along the first mounting groove (21); A self-locking component (3) is arranged in the second mounting groove (22), and the self-locking component (3) comprises an elastic member (31) and a locking member (32). The elastic member (31) is installed on the inner wall of the second mounting groove (22), and the locking member (32) is slidably matched with the second mounting groove (22) to compress or release the elastic member (31). The movement direction of the locking member (32) is consistent with the movement direction of the wafer carrier flange (1), and the locking member (32) is clamped with the wafer carrier flange (1); The locking member (32) is configured to be switchable between a normal state and a locked state, and the wafer carrier flange (1) drives the locking member (32) to slide and compress the elastic member (31), so that the locking member (32) switches from a normal state to a locked state to lock the wafer carrier flange (1) and the base (2).

2. A test fixture according to claim 1, characterized in that: It also includes a plurality of grounding contacts (4), the base (2) is provided with a plurality of mounting positions (23), the grounding contacts (4) are arranged one by one at the mounting positions (23), and one end of the grounding contact (4) is fixedly connected to the base (2), and when the locking member (32) is in a locked state, the end of the grounding contact (4) that is not connected to the base (2) is pressed against the wafer carrier flange (1).

3. A test fixture according to claim 2, characterized in that: Along the loading direction of the wafer carrier flange (1), a guide portion (41) is provided at one end of the grounding contact (4) away from the base (2); during the movement of the wafer carrier flange (1), the guide portion (41) guides the deformation direction of the grounding contact (4) so ​​that the grounding contact (4) is always located between the wafer carrier flange (1) and the base (2).

4. A test fixture according to claim 1, characterized in that: The locking member (32) comprises a slider (321), the slider (321) is provided with a protrusion (3211) for clamping the wafer carrier flange (1), the wafer carrier flange (1) is provided with a clamping groove (11) at the end surface corresponding to the slider (321), and the protrusion (3211) is located in the clamping groove (11); when the locking member (32) is in a locked state, the protrusion (3211) presses against the inner wall of the clamping groove (11) to limit the wafer carrier flange (1).

5. A test fixture according to claim 4, characterized in that: The end surface of the wafer carrier flange (1) corresponding to the slider (321) is provided with an avoidance groove (12), and the slider (321) is located in the avoidance groove (12) to reduce the occupied space.

6. A test fixture according to claim 5, characterized in that: The locking member (32) further comprises a sliding rod (322), one end of which is connected to the base (2), and the sliding rod (322) rotates around the connection point on a surface of the base (2); the sliding block (321) is provided with a locking sliding groove (3212), and one end of the sliding rod (322) away from the base (2) slides in the locking sliding groove (3212); A first locking point (3213) is provided in the locking groove (3212). When the end of the sliding rod (322) away from the base (2) is located at the first locking point (3213), the sliding rod (322) presses against the slider (321), and the locking member (32) is in a locked state to lock the wafer carrier flange (1) and the base (2); when the end of the sliding rod (322) away from the base (2) is located at any position of the locking groove (3212) excluding the first locking point (3213), the sliding rod (322) slides and cooperates with the slider (321), and the locking member (32) is in a normal state.

7. A test fixture according to claim 6, characterized in that: One end of the sliding rod (322) away from the base (2) slides in the locking sliding groove (3212) in a clockwise or counterclockwise direction.

8. A test fixture according to claim 6, characterized in that: A second locking point (3214) is provided in the locking slide groove (3212), and the movement path from the second locking point (3214) to the first locking point (3213) is the first slide groove (3215). A first guide surface is provided at the bottom of the first slide groove (3215), and along the movement path of the slide rod (322), the distance between the first guide surface and the wafer carrier flange (1) gradually decreases, so as to guide the end of the slide rod (322) away from the base (2) from the second locking point (3214) to the first locking point (3213).

9. A test fixture according to claim 8, characterized in that: The movement path from the first locking point (3213) to the second locking point (3214) is a second slide groove (3216), and a second guide surface is provided at the bottom of the second slide groove (3216). The distance between the second guide surface and the carrier flange (1) gradually decreases to guide the end of the slide rod (322) away from the base (2) from the first locking point (3213) to the second locking point (3214).

10. The test fixture according to claim 1, characterized in that: The inner wall of the first mounting groove (21) is provided with a slide rail (211), and the end surface of the wafer carrier flange (1) corresponding to the first mounting groove (21) is provided with a movable slide groove (13), and the slide rail (211) is located in the movable slide groove (13) and is slidably matched with the movable slide groove (13).