Square resistance testing device with film thickness testing function

Abstract

The utility model discloses a sheet resistance testing device with a film thickness testing function, which comprises a shell and a detection component, and is characterized in that a top plate is arranged at the top of the shell, a detection plate is arranged at the bottom of the top plate, a sheet resistance detection probe and a film thickness detection probe are respectively arranged at the bottom of the detection plate, and a display screen is arranged on the side wall of the shell; a motor at the top of a shell is started to drive a threaded rod to rotate, a lead screw structure is used for pushing a detection plate to drive a sheet resistance detection probe and a film thickness detection probe to move at the same time, when the sheet resistance detection probe tests different point positions, the film thickness detection probe is used for synchronously conducting film thickness testing, and a display screen is used for displaying sheet resistance, namely the film thickness value at the same time. And meanwhile, the additionally arranged probe does not occupy the space of the machine table.

Description

Technical Field

[0001] The utility model relates to the technical field of film thickness testing, in particular to a square resistance testing device with film thickness testing function. Background Art

[0002] Topcon is an advanced solar cell manufacturing process that aims to increase the efficiency of solar cells and reduce manufacturing costs. As the global demand for renewable energy continues to increase, Topcon has become an important concept in the solar industry. Topcon cells utilize a process called Selective Emitter (SE) that adds a thin layer of phosphosilicate glass to the surface of the solar cell. This phosphosilicate glass layer can reduce surface recombination and increase open circuit voltage. In addition, Topcon cells also use a process called Passivated Contact (PC) to reduce carrier recombination and increase short circuit current by adding a thin layer of phosphosilicate glass and a metal layer to the surface of the cell.

[0003] In the Topcon oxidation process, there will be an online square resistance test after unloading, but the existing online square resistance test device does not have a film thickness test, and cannot monitor the product film thickness in real time. It is difficult to detect abnormal appearance in time. When tracing the abnormality, it is difficult to determine the furnace tube and specific temperature zone where the problem occurs. Utility Model Content

[0004] The purpose of this section is to summarize some aspects of the embodiments of the utility model and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the abstract of the specification and the name of the utility model of this application to avoid blurring the purpose of this section, the abstract of the specification and the name of the utility model, and such simplifications or omissions cannot be used to limit the scope of the utility model.

[0005] In view of the above problems and / or the problems existing in the existing square resistance testing device with film thickness testing function, the present utility model is proposed.

[0006] Therefore, the purpose of the utility model is to provide a square resistance testing device with film thickness testing function, by arranging a top plate on the top of the shell, a detection plate at the bottom of the top plate, square resistance detection probes and film thickness detection probes at the bottom of the detection plate, respectively, and a display screen on the side wall of the shell. By starting the motor on the top of the shell to drive the threaded rod to rotate, the screw rod structure is used to push the detection plate and simultaneously drive the square resistance detection probe and the film thickness detection probe to move. When the square resistance detection probe tests different points, the film thickness detection probe is used to synchronize the film thickness test, and the display screen is used to simultaneously display the square resistance and film thickness values, which will not reduce the production capacity of the machine, and the installation of probes will not occupy the machine space.

[0007] In order to solve the above technical problems, according to one aspect of the present invention, the present invention provides the following technical solutions:

[0008] A square resistance testing device with film thickness testing function, comprising:

[0009] A housing, wherein a support plate is mounted on the top of the housing, a top plate is mounted on the top of the support plate, a guide groove is provided on the top of the top plate, two first fixing plates are symmetrically mounted on the top of the top plate, a motor is mounted on the side wall of one of the first fixing plates, an output end of the motor extends between the two first fixing plates and is mounted with a threaded rod, and a display screen is mounted on the side wall of the housing;

[0010] The detection assembly includes a detection plate slidably connected to the bottom of the top plate and a slider installed on the top of the detection plate and extending from the guide groove. A square resistance detection probe and a film thickness detection probe are installed at the bottom of the detection plate. A threaded hole is opened on the side wall of the slider, and the threaded rod rotates through the threaded hole.

[0011] As a preferred solution of the square resistance test device with film thickness test function described in the utility model, a one-way rack is installed on the side wall of the top plate;

[0012] The axial gear of the said first gear is meshed with the axial gear of the said first gear, and the axial gear of the said first gear is meshed with the axial gear of the said first gear.

[0013] As a preferred solution of a square resistance testing device with film thickness testing function described in the utility model, a slide plate is provided at the bottom of the detection plate, the slide plate is located between the two second fixed plates, a wiping cloth is installed on the top of the slide plate, a reciprocating threaded hole is opened on the side wall of the slide plate, and the reciprocating threaded rod rotates through the reciprocating threaded hole.

[0014] As a preferred solution of the square resistance testing device with film thickness testing function described in the utility model, it also includes a wire retracting assembly, which includes a knob rotatably connected to the side wall of the shell, a winding roller installed on the side wall of the knob, and a wire wound around the roller body of the winding roller, one end of the wire is connected to the shell, and the other end of the wire is installed with a plug.

[0015] As an optimal solution of the square resistance testing device with film thickness testing function described in the utility model, a torsion spring is installed on the side wall of the knob, one end of the torsion spring abuts against the knob, and the other end of the torsion spring abuts against the shell, and a circle of dense teeth is provided on the outer wall of the knob.

[0016] As a preferred solution of a square resistance testing device with film thickness testing function described in the utility model, it also includes a limit assembly, which includes a fixed frame installed on the side wall of the shell and a limit block slidably connected to the inside of the fixed frame, the fixed frame is open on one side facing the knob, a spring is installed on the side wall of the limit block, the other end of the spring is connected to the inner wall of the fixed frame, the other side wall of the limit block is provided with a limit groove cooperating with the knob, and the inner wall of the limit groove is provided with dense tooth grooves.

[0017] Compared with the prior art: a top plate is arranged on the top of the shell, a detection plate is arranged at the bottom of the top plate, a square resistance detection probe and a film thickness detection probe are respectively arranged at the bottom of the detection plate, and a display screen is arranged on the side wall of the shell. By starting the motor on the top of the shell to drive the threaded rod to rotate, the detection plate is pushed by the screw structure to simultaneously drive the square resistance detection probe and the film thickness detection probe to move. When the square resistance detection probe tests different points, the film thickness detection probe is used to synchronize the film thickness test, and the display screen is used to simultaneously display the square resistance and film thickness values, which will not reduce the production capacity of the machine, and the installation of probes will not occupy the machine space. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solution of the implementation of the utility model, the utility model will be described in detail below in combination with the drawings and detailed implementation. Obviously, the drawings described below are only some implementations of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative labor. Among them:

[0019] Figure 1 This is an overall structural diagram of a square resistance test device with film thickness test function according to the utility model;

[0020] Figure 2 This is a rear view structural diagram of a square resistance test device with film thickness test function of the utility model;

[0021] Figure 3 This is a structural diagram of a detection component of a square resistance test device with film thickness test function of the utility model;

[0022] Figure 4 This is a structural diagram of a retractable wire assembly of a square resistance test device with film thickness test function according to the utility model;

[0023] Figure 5 This utility model is a square resistance test device with film thickness test function Figure 2 Structural diagram at point A in the middle. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific implementation methods of the present invention are described in detail below with reference to the accompanying drawings.

[0025] Secondly, the present invention is described in detail with reference to the schematic diagram. When describing the implementation of the present invention, for the sake of convenience, the cross-sectional diagram showing the device structure will not be partially enlarged according to the general proportion, and the schematic diagram is only an example, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.

[0026] In order to make the purpose, technical solution and advantages of the present invention more clear, the implementation mode of the present invention will be further described in detail below with reference to the accompanying drawings.

[0027] The utility model provides a square resistance testing device with film thickness testing function, by arranging a top plate on the top of a shell, a detection plate on the bottom of the top plate, square resistance detection probes and film thickness detection probes on the bottom of the detection plate, respectively, and a display screen on the side wall of the shell. By starting a motor on the top of the shell to drive a threaded rod to rotate, a screw rod structure is used to push the detection plate and simultaneously drive the square resistance detection probe and the film thickness detection probe to move. When the square resistance detection probe tests different points, the film thickness detection probe is used to synchronize the film thickness test, and the display screen is used to simultaneously display the square resistance and the film thickness values, which will not reduce the production capacity of the machine, and the installation of probes will not occupy the machine space.

[0028] Figure 1-5 The figure shows a schematic diagram of a structure of a square resistance test device with film thickness test function according to the present invention. Figure 1-Figure 5 In this embodiment, a square resistance testing device with film thickness testing function includes a housing 100, a detection component 200, a retractable wire component 300 and a limit component 400.

[0029] A support plate 110 is installed on the top of the shell 100, and a top plate 120 is installed on the top of the support plate 110. A guide groove 120a is opened on the top of the top plate 120, and two first fixed plates 130 are symmetrically installed on the top of the top plate 120. A motor 130a is installed on the side wall of one of the first fixed plates 130, and the output end of the motor 130a extends between the two first fixed plates 130 and is installed with a threaded rod 130b. A display screen 140 is installed on the side wall of the shell 100, and a one-way rack 120b is installed on the side wall of the top plate 120.

[0030] The detection assembly 200 includes a detection plate 210 slidably connected to the bottom of the top plate 120 and a slider 220 installed on the top of the detection plate 210 and extending from the guide groove 120a. A square resistance detection probe 210a and a film thickness detection probe 210b are installed at the bottom of the detection plate 210. A threaded hole 220a is opened on the side wall of the slider 220. The threaded rod 130b rotates through the threaded hole 220a. Two second fixed plates 230 are symmetrically installed at the bottom of the detection plate 210. A reciprocating threaded rod 230a is rotatably connected between the two second fixed plates 230. One end of the reciprocating threaded rod 230a extends out of the side wall of the second fixed plate 230 and is installed with a second pulley 230a-1. The side wall of the second fixed plate 230 is rotatably connected to the first pulley 230b, the first pulley 230b is connected to the second pulley 230a-1 by a belt, the side wall of the first pulley 230b is installed with a first bevel gear 230b-1, the side wall of the detection plate 210 is rotatably connected with a one-way gear 240, the one-way gear 240 is meshed with the one-way rack 120b, and the bottom of the one-way gear 240 is installed with a third pulley 240a, the side wall of the detection plate 210 is also rotatably connected with a fourth pulley 240b, the fourth pulley 240b is connected to the third pulley 240a by a belt, the bottom of the fourth pulley 240b is installed with a second bevel gear 240b-1, the second bevel gear 240b-1 is meshed with the first bevel gear 230b-1, and the bottom of the detection plate 210 is provided with a sliding The slide plate 250 is located between the two second fixed plates 230. A wiping cloth 250a is installed on the top of the slide plate 250. A reciprocating threaded hole 250b is opened on the side wall of the slide plate 250. The reciprocating threaded rod 230a rotates and penetrates the reciprocating threaded hole 250b. When testing, the motor 130a is started to drive the threaded rod 130b to rotate. When the threaded rod 130b rotates, the lead screw structure is used to push the slider 220 and the testing plate 210 to reciprocate horizontally. When the testing plate 210 moves, it drives the square resistance detection probe 210a and the film thickness detection probe 210b to move. After the movement is completed, the square resistance detection probe 210a and the film thickness detection probe 210b respectively perform square resistance and film thickness tests, and transmit the test results to the display screen 140 to display the values. When 210 moves to the left, it drives the one-way gear 240 to move. At this time, the straight edge of the one-way gear 240 abuts against the straight edge of the one-way rack 120b. The one-way rack 120b drives the one-way gear 240 to rotate. When the one-way gear 240 rotates, it drives the third pulley 240a to rotate. The third pulley 240a drives the fourth pulley 240b and the second bevel gear 240b-1 to rotate by using a belt. The second bevel gear 240b-1 drives the first bevel gear 230b-1 and the first pulley 230b to rotate. The first pulley 230b drives the second pulley 230a-1 and the reciprocating threaded rod 230a to rotate by using a belt. When the reciprocating threaded rod 230a rotates, the lead screw structure is used to push the slide plate 250 and the wiping cloth 250a to move back and forth.The wipe 250a cleans the square resistance detection probe 210a and the film thickness detection probe 210b to remove dust from the surface of the square resistance detection probe 210a and the film thickness detection probe 210b.

[0031] The wire retracting assembly 300 includes a knob 310 rotatably connected to the side wall of the housing 100, a winding roller 320 installed on the side wall of the knob 310, and a wire 330 wound around the roller body of the winding roller 320. One end of the wire 330 is connected to the housing 100, and a plug 330a is installed at the other end of the wire 330. A torsion spring 310a is installed on the side wall of the knob 310, and one end of the torsion spring 310a abuts against the knob 310, and the other end of the torsion spring 310a abuts against the housing. 100 abuts, and a circle of densely packed teeth is provided on the outer wall of the knob 310. By pulling the plug 330a and pulling the wire 330, the winding roller 320 and the knob 310 are driven to rotate. When the knob 310 rotates, the torsion spring 310a is squeezed to connect the plug 330a to the socket. When use is completed, the plug 330a is separated from the socket, and the torsion spring 310a rebounds to push the knob 310 and the winding roller 320 to rotate, and the wire 330 is rewound around the roller body of the winding roller 320.

[0032] The limiting assembly 400 includes a fixed frame 410 installed on the side wall of the shell 100 and a limiting block 420 slidably connected to the inside of the fixed frame 410. The fixed frame 410 is open on one side facing the knob 310. A spring 420a is installed on the side wall of the limiting block 420. The other end of the spring 420a is connected to the inner wall of the fixed frame 410. A limiting groove 420b matching the knob 310 is provided on the other side wall of the limiting block 420. The inner wall of the limiting groove 420b is provided with dense tooth grooves. When the plug 330a needs to be connected to the socket, the limiting block 420 is pulled to slide into the fixed frame 410 and squeeze the spring 420a. The knob 310 is separated from the inside of the limiting groove 420b. At this time, the plug 330a is pulled to drive the winding roller 3 20 and knob 310 are rotated, and after the plug 330a is connected to the socket, the limit block 420 is released, and the spring 420a rebounds to push the limit block 420 to move toward the knob 310 until the knob 310 is embedded in the limit groove 420b, and the outer wall teeth of the knob 310 and the inner wall teeth of the limit groove 420b are engaged with each other to limit the rotation direction of the knob 310 and the winding roller 320. When the wire 330 needs to be wound up, the limit block 420 is pulled into the fixed frame 410, and the knob 310 is separated from the limit groove 420b. The torsion spring 310a rebounds and drives the winding roller 320 to reverse, so that the wire 330 can be wound up, thereby preventing the wire 330 from being entangled and knotted during storage.

[0033] Combination Figure 1-Figure 5, a square resistance test device with film thickness test function in this embodiment, when in use, pull the limit block 420 into the fixed frame 410 and squeeze the spring 420a, pull the plug 330a to drive the winding roller 320 and the knob 310 to rotate and squeeze the torsion spring 310a, after the plug 330a is connected to the socket, release the limit block 420, the spring 420a rebounds and pushes the limit block 420 to move in the direction of the knob 310, the knob 310 is embedded in the limit groove 420b, the knob 310 and the winding roller 320 are limited in rotation direction, and the motor 13 is started. 0a drives the threaded rod 130b to rotate, and the screw structure is used to push the slider 220 and the detection plate 210 to drive the square resistance detection probe 210a and the film thickness detection probe 210b to move horizontally, and the square resistance detection probe 210a and the film thickness detection probe 210b are positioned. After the square resistance detection probe 210a and the film thickness detection probe 210b detect the square resistance and film thickness respectively, the detection values ​​are displayed on the display screen 140. The film thickness test can be performed while the square resistance test is performed, which ensures the quality of the product and facilitates timely handling of appearance abnormalities of the product.

[0034] Although the present invention has been described above with reference to the embodiments, various modifications may be made thereto and parts thereof may be replaced with equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the various features in the embodiments disclosed in the present invention may be used in combination with each other in any manner, and the fact that these combinations are not exhaustively described in this specification is only for the sake of omitting space and saving resources. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A square resistance test device with film thickness test function, characterized in that: include: A shell (100), wherein a support plate (110) is mounted on the top of the shell (100), a top plate (120) is mounted on the top of the support plate (110), a guide groove (120a) is provided on the top of the top plate (120), two first fixing plates (130) are symmetrically mounted on the top of the top plate (120), a motor (130a) is mounted on the side wall of one of the first fixing plates (130), an output end of the motor (130a) extends between the two first fixing plates (130) and is mounted with a threaded rod (130b), and a display screen (140) is mounted on the side wall of the shell (100); The detection assembly (200) comprises a detection plate (210) slidably connected to the bottom of the top plate (120) and a slider (220) mounted on the top of the detection plate (210) and extending from the guide groove (120a); a square resistance detection probe (210a) and a film thickness detection probe (210b) are mounted on the bottom of the detection plate (210); a threaded hole (220a) is provided on the side wall of the slider (220); and the threaded rod (130b) rotates through the threaded hole (220a).

2. A square resistance test device with film thickness test function according to claim 1, characterized in that: A one-way rack (120b) is installed on the side wall of the top plate (120); Two second fixed plates (230) are symmetrically mounted at the bottom of the detection plate (210); a reciprocating threaded rod (230a) is rotatably connected between the two second fixed plates (230); one end of the reciprocating threaded rod (230a) extends out of the side wall of the second fixed plate (230) and is mounted with a second belt pulley (230a-1); a first belt pulley (230b) is rotatably connected to the side wall of the second fixed plate (230); the first belt pulley (230b) and the second belt pulley (230a-1) are connected via a belt; a first bevel gear (230b-1) is mounted on the side wall of the first belt pulley (230b); The side wall of the detection plate (210) is rotatably connected to a one-way gear (240), the one-way gear (240) is meshed with the one-way rack (120b), a third belt pulley (240a) is installed at the bottom of the one-way gear (240), and the side wall of the detection plate (210) is also rotatably connected to a fourth belt pulley (240b), the fourth belt pulley (240b) is connected to the third belt pulley (240a) via a belt, a second bevel gear (240b-1) is installed at the bottom of the fourth belt pulley (240b), and the second bevel gear (240b-1) is meshed with the first bevel gear (230b-1).

3. The square resistance test device with film thickness test function according to claim 2, characterized in that: A slide plate (250) is provided at the bottom of the detection plate (210), the slide plate (250) is located between the two second fixing plates (230), a wiping cloth (250a) is installed on the top of the slide plate (250), a reciprocating threaded hole (250b) is provided on the side wall of the slide plate (250), and the reciprocating threaded rod (230a) rotates through the reciprocating threaded hole (250b).

4. The square resistance test device with film thickness test function according to claim 1, characterized in that: The invention also comprises a wire retracting and releasing assembly (300), wherein the wire retracting and releasing assembly (300) comprises a knob (310) rotatably connected to the side wall of the housing (100), a winding roller (320) installed on the side wall of the knob (310), and a wire (330) wound around the roller body of the winding roller (320), wherein one end of the wire (330) is connected to the housing (100), and a plug (330a) is installed at the other end of the wire (330).

5. The square resistance test device with film thickness test function according to claim 4, characterized in that: A torsion spring (310a) is installed on the side wall of the knob (310), one end of the torsion spring (310a) abuts against the knob (310), and the other end of the torsion spring (310a) abuts against the housing (100), and a circle of densely packed teeth is provided on the outer wall of the knob (310).

6. The square resistance test device with film thickness test function according to claim 5, characterized in that: The invention also comprises a limit assembly (400), wherein the limit assembly (400) comprises a fixed frame (410) mounted on the side wall of the housing (100) and a limit block (420) slidably connected to the inside of the fixed frame (410), wherein the fixed frame (410) is open on one side facing the knob (310), a spring (420a) is mounted on the side wall of the limit block (420), the other end of the spring (420a) is connected to the inner wall of the fixed frame (410), and the other side wall of the limit block (420) is provided with a limit groove (420b) cooperating with the knob (310), and the inner wall of the limit groove (420b) is provided with dense tooth grooves.

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