Baffle structure of observation window of vacuum cavity

Abstract

The utility model discloses a baffle structure of an observation window of a vacuum cavity, which comprises a baffle used for shielding the observation window, the baffle is arranged on the inner side of the vacuum cavity in a swinging manner, a groove is arranged on one side of the baffle close to the cavity wall, a driving lever is arranged in the groove in a matched manner, the driving lever is connected with a swinging mechanism used for driving the driving lever to swing, and the swinging mechanism is used for driving the driving lever to swing. The swing mechanism penetrates through the cavity wall to extend to the outer side of the vacuum cavity and is sealed with the cavity wall through magnetic fluid, and the width of the groove is larger than that of the shifting rod. The utility model has the advantages that the structure is simple, heat transfer can be reduced, a cooling pipeline is prevented from being additionally arranged, and the production cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a baffle structure of a vacuum cavity observation window. Background Art

[0002] During the vacuum coating process, the observation window baffle plays an important role. It can effectively protect the operator's sight and reduce eye damage caused by material splashing or sudden brightness changes. The hand-driven structure design of the vacuum observation window baffle can be opened or closed without breaking the vacuum, which helps save time and improve production efficiency. The baffle can also effectively reduce the deposition of materials on the observation window glass to ensure the clarity and life of the window.

[0003] Generally, the handle on the atmosphere side is directly connected to the baffle on the vacuum side through a magnetic fluid, and the magnetic fluid is driven to rotate the baffle by shaking the handle, thereby achieving the effect of opening and closing the baffle. Vacuum coating and other processes often require a high temperature environment. Since the observation window baffle is directly connected to the magnetic fluid, the heat on the baffle will be directly transferred to the magnetic fluid through the connection between the baffle and the magnetic fluid, causing the temperature of the magnetic fluid to rise. The heat resistance of magnetic fluid is relatively poor. When the temperature is too high, it is necessary to add a cooling pipe to the magnetic fluid, which increases the cost. Utility Model Content

[0004] The technical problem to be solved by the utility model is to overcome the deficiencies of the prior art and provide a baffle structure for a vacuum chamber observation window which has a simple structure, can reduce heat transfer, avoid adding cooling pipes, and reduce production costs.

[0005] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0006] A baffle structure for an observation window of a vacuum chamber comprises a baffle for covering the observation window, wherein the baffle is swingably arranged on the inner side of the vacuum chamber, a groove is arranged on the side of the baffle close to the chamber wall, a lever is arranged in the groove, the lever is connected to a swing mechanism for swinging the lever, the swing mechanism extends through the chamber wall to the outer side of the vacuum chamber, and is sealed with the chamber wall by a magnetic fluid, and the width of the groove is greater than the width of the lever.

[0007] As a further improvement of the above technical solution:

[0008] The swing mechanism comprises a swing rod, one end of which is connected to the shifting rod, and the other end of which is connected to the rotating shaft, and the other end of which passes through the cavity wall and the magnetic fluid in sequence.

[0009] A crank is provided at one end of the rotating shaft outside the vacuum chamber.

[0010] A connecting flange is arranged outside the vacuum chamber, the magnetic fluid is connected to the connecting flange, and the rotating shaft is passed through the connecting flange and can rotate relative to the connecting flange.

[0011] A sealing ring is arranged between the magnetic fluid and the connecting flange.

[0012] A counterweight block is arranged on the swing rod.

[0013] Locking bends are provided on both sides of the top of the groove, and the locking bends are used to temporarily lock the lever.

[0014] The baffle comprises a baffle body, and a shielding eave is provided on a side of the baffle body close to the observation window.

[0015] The baffle body is pear-shaped, with the bottom corresponding to the observation window, and the groove and the swing mechanism are located above the observation window.

[0016] A hanging rod is arranged on the cavity wall of the vacuum cavity, and the baffle is rotatably connected to the hanging rod.

[0017] Compared with the prior art, the beneficial effects of the utility model are:

[0018] The baffle structure of the vacuum chamber observation window disclosed by the utility model has the following advantages: when it is necessary to observe the situation in the vacuum chamber, the swing mechanism drives the lever to swing, and the lever abuts against the side wall of the groove, thereby driving the baffle to swing and exposing the vacuum window; after the observation is completed, the swing mechanism drives the lever to swing in the opposite direction to reset the baffle; and the width of the groove is greater than the width of the lever, so when the baffle is in a naturally closed state, a gap is left between the lever and the side wall of the groove, and there is no direct contact, thereby reducing the heat transfer from the vacuum chamber to the magnetic fluid, avoiding the need to add an additional cooling pipeline due to the high temperature of the magnetic fluid, and reducing the production cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic cross-sectional structure diagram of the baffle structure of the vacuum chamber observation window of the utility model.

[0020] Figure 2 It is a three-dimensional structural schematic diagram of the vacuum chamber observation window of the utility model.

[0021] The numbers in the figure represent: 1. baffle; 11. groove; 111. locking bend; 12. baffle body; 13. shielding eaves; 14. hanging rod; 2. lever; 3. swing mechanism; 31. swing rod; 32. rotating shaft; 33. crank; 4. magnetic fluid; 5. connecting flange; 6. sealing ring; 7. counterweight. DETAILED DESCRIPTION

[0022] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0023] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0024] In the present invention, unless otherwise clearly specified and limited, the terms "assemble", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0025] Figure 1 and Figure 2 An embodiment of the utility model is shown. The baffle structure of the vacuum chamber observation window of this embodiment includes a baffle 1 for covering the observation window. The baffle 1 is swingably arranged on the inner side of the vacuum chamber. A groove 11 is provided on the side of the baffle 1 close to the chamber wall. A lever 2 is provided in the groove 11. The lever 2 is connected to a swing mechanism 3 for swinging the lever 2. The swing mechanism 3 extends through the chamber wall to the outside of the vacuum chamber and is sealed with the chamber wall by a magnetic fluid 4. The width of the groove 11 is greater than the width of the lever 2.

[0026] The baffle structure of the vacuum chamber observation window is that when it is necessary to observe the situation inside the vacuum chamber, the swing mechanism 3 drives the lever 2 to swing, and the lever 2 presses against the side wall of the groove 11, thereby driving the baffle 1 to swing and expose the vacuum window. After the observation is completed, the swing mechanism 3 drives the lever 2 to swing in the opposite direction to reset the baffle 1. The width of the groove 11 is greater than the width of the lever 2. Therefore, when the baffle 1 is in a naturally closed state, a gap is left between the lever 2 and the side wall of the groove 11, and there is no direct contact, thereby reducing the heat transfer from the vacuum chamber to the magnetic fluid 4, avoiding the need to add an additional cooling pipeline due to the high temperature of the magnetic fluid 4, and reducing the production cost.

[0027] In this embodiment, the swing mechanism 3 includes a swing rod 31, one end of the swing rod 31 is connected to the lever 2, and the other end is connected to the rotating shaft 32, and the other end of the rotating shaft 32 sequentially passes through the cavity wall and the magnetic fluid 4. The rotating shaft 32 drives the swing rod 31 to swing, thereby driving the lever 2 to swing and abut against the groove 11, and then drives the baffle 1 to swing, thereby removing the obstruction of the observation window.

[0028] In this embodiment, a crank 33 is provided at one end of the rotating shaft 32 outside the vacuum chamber. The rotating shaft 32 is rotated by the crank 33, which has a simple structure, low cost and convenient operation.

[0029] In this embodiment, a connection flange 5 is provided outside the vacuum cavity, the magnetic fluid 4 is connected to the connection flange 5, and the rotating shaft 32 is passed through the connection flange 5 and can rotate relative to the connection flange 5. The magnetic fluid 4 is prevented from directly contacting the cavity wall, further reducing the heat transfer from the vacuum cavity to the magnetic fluid 4.

[0030] In this embodiment, a sealing ring 6 is provided between the magnetic fluid 4 and the connecting flange 5 to ensure the sealing performance in the vacuum chamber.

[0031] In this embodiment, a counterweight 7 is provided on the swing rod 31 to ensure that the swing rod 31 and the lever 2 can return to the initial position when the baffle 1 is naturally closed, that is, to ensure that there is a gap between the lever 2 and the side wall of the groove 11 in this state.

[0032] In this embodiment, locking bends 111 are provided on both sides of the top of the groove 11, and the locking bends 111 are used to temporarily lock the lever 2. When the lever 2 swings into the locking bend 111, the swing of the lever 2 can be temporarily locked, so that the baffle 1 can remain unobstructed from the observation window when not under force, saving effort while not affecting the operator's observation of the inside of the vacuum chamber through the observation window. When the baffle 1 needs to be closed, it only needs to apply a reverse torque to overcome the friction between the limit groove and the lever 2 to release the temporary lock.

[0033] In this embodiment, the baffle 1 includes a baffle body 12, and a shielding eave 13 is provided on one side of the baffle body 12 close to the observation window. The shielding eave 13 shields the side of the observation window to prevent strong light or materials in the vacuum chamber from passing through the observation window through the side, further improving the shielding effect of the observation window.

[0034] In this embodiment, the baffle body 12 is pear-shaped, with the bottom corresponding to the observation window, and the groove 11 and the swing mechanism 3 are located above the observation window, which can ensure the shielding effect when the baffle 1 is closed, and also ensure that the swing mechanism 3 does not affect the observation field when the baffle 1 is opened.

[0035] In this embodiment, a hanging rod 14 is provided on the cavity wall of the vacuum cavity, and the baffle 1 is rotatably connected to the hanging rod 14, so as to facilitate the installation of the baffle 1.

[0036] Although the present invention has been disclosed as a preferred embodiment, it is not intended to limit the present invention. Any technician familiar with the art can use the above disclosed technical content to make many possible changes and modifications to the technical solution of the present invention without departing from the scope of the technical solution of the present invention, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention should fall within the scope of protection of the technical solution of the present invention.

Claims

1. A baffle structure for a vacuum chamber observation window, characterized in that: The invention comprises a baffle (1) for shielding an observation window, wherein the baffle (1) is swingably arranged inside a vacuum chamber, a groove (11) is arranged on a side of the baffle (1) close to the chamber wall, a lever (2) is arranged in the groove (11), the lever (2) is connected to a swing mechanism (3) for swinging the lever (2), the swing mechanism (3) extends through the chamber wall to the outside of the vacuum chamber, and is sealed with the chamber wall by a magnetic fluid (4), and the width of the groove (11) is greater than the width of the lever (2).

2. The baffle structure of the vacuum chamber observation window according to claim 1, characterized in that: The swing mechanism (3) comprises a swing rod (31), one end of the swing rod (31) is connected to the lever (2), and the other end is connected to the rotating shaft (32), and the other end of the rotating shaft (32) passes through the cavity wall and the magnetic fluid (4) in sequence.

3. The baffle structure of the vacuum chamber observation window according to claim 2, characterized in that: A crank (33) is provided at one end of the rotating shaft (32) outside the vacuum chamber.

4. The baffle structure of the vacuum chamber observation window according to claim 2, characterized in that: A connecting flange (5) is provided on the outside of the vacuum chamber, the magnetic fluid (4) is connected to the connecting flange (5), and the rotating shaft (32) is passed through the connecting flange (5) and can rotate relative to the connecting flange (5).

5. The baffle structure of the vacuum chamber observation window according to claim 4, characterized in that: A sealing ring (6) is provided between the magnetic fluid (4) and the connecting flange (5).

6. The baffle structure of the vacuum chamber observation window according to claim 2, characterized in that: A counterweight block (7) is provided on the swing rod (31).

7. The baffle structure of the vacuum chamber observation window according to any one of claims 1 to 6, characterized in that: Both sides of the top of the groove (11) are provided with locking bends (111), and the locking bends (111) are used to temporarily lock the lever (2).

8. The baffle structure of the vacuum chamber observation window according to any one of claims 1 to 6, characterized in that: The baffle (1) comprises a baffle body (12), and a shielding eave (13) is provided on a side of the baffle body (12) close to the observation window.

9. The baffle structure of the vacuum chamber observation window according to claim 8, characterized in that: The baffle body (12) is pear-shaped, with a bottom corresponding to the observation window, and the groove (11) and the swing mechanism (3) are located above the observation window.

10. The baffle structure of the vacuum chamber observation window according to any one of claims 1 to 6, characterized in that: A hanging rod (14) is provided on the cavity wall of the vacuum cavity, and the baffle (1) is rotatably connected to the hanging rod (14).

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