Air floating rotary table

Abstract

The utility model relates to an air floating rotary table. The air floating rotary table comprises a base, an air floating module and a driving module, the air floating module comprises an air floating bearing sleeve, a spindle rotor and a plurality of first throttlers, the first throttlers are arranged on the air floating bearing sleeve, air outlets of the first throttlers are distributed in the upper surface of the air floating bearing sleeve, and the air floating bearing sleeve is installed on the base. The air bearing sleeve is provided with an air cavity communicated with the first throttler, the air cavity is used for introducing compressed air, the main shaft rotor comprises a first shaft body and a shaft cover connected with the first shaft body, the first shaft body is rotatably arranged in the air bearing sleeve, and the shaft cover covers the upper surface of the air bearing sleeve; the driving module is mounted on the base, and the output end is in transmission connection with the spindle rotor for driving the spindle rotor to rotate around the axis. Through the arrangement, the upper surface of the air bearing sleeve and the lower surface of the shaft cover form a single-sided thrust bearing, so that the problems of stress deformation of the air floating rotary table and increased machining and assembling errors caused by the adoption of a double-thrust-bearing form by the existing air floating rotary table are solved.

Description

Technical Field

[0001] The present application relates to the technical field of air-floating turntables, and in particular to air-floating turntables. Background Art

[0002] The air static pressure bearing uses the gas with constant pressure provided by the outside as the lubricating medium. There is no direct contact between the bearing and the rotating shaft, and the space between the two is filled with compressed gas. Therefore, the friction coefficient between the bearing and the rotating shaft is small, the torque required at the start is small, and the air film has a homogenizing effect. The rotation accuracy of the air static pressure bearing system often exceeds the processing accuracy of the rotating shaft itself. The above advantages make the air static pressure bearing particularly suitable for high-precision applications.

[0003] As a type of air static pressure bearing, air bearing turntable is usually used in high-end testing and manufacturing industries such as wafer testing, biological testing, high-precision metrology, optical testing, and MEMS (Micro-Electro-Mechanical System) / nanotechnology equipment manufacturing. At present, air bearing turntables mostly use double thrust bearings. When installing double thrust bearings, screws are required. On the one hand, the installation position of the screws is prone to stress deformation, and on the other hand, it will introduce more processing errors and assembly errors. Utility Model Content

[0004] Based on this, it is necessary to provide an air-floating turntable to address the problem that the current air-floating turntable mostly adopts double thrust bearings, which easily leads to stress deformation of the air-floating turntable and increased processing and assembly errors.

[0005] An air-floating turntable, comprising a base, an air-floating module and a driving module, wherein:

[0006] The air flotation module includes an air flotation bearing sleeve, a spindle rotor and a plurality of first throttles, wherein the first throttle is arranged on the air flotation bearing sleeve, and the air outlet of the first throttle is distributed on the upper surface of the air flotation bearing sleeve, the air flotation bearing sleeve is installed on the base, an air cavity connected to the first throttle is opened on the air flotation bearing sleeve, and the air cavity is used to introduce compressed gas, the spindle rotor includes a first shaft body and a shaft cover connected to the first shaft body, the first shaft body is rotatably arranged in the air flotation bearing sleeve, and the shaft cover is arranged on the upper surface of the air flotation bearing sleeve;

[0007] The driving module is installed on the base and the output end is transmission-connected with the main shaft rotor, so as to drive the main shaft rotor to rotate around its own axis.

[0008] The above-mentioned air-floating turntable is provided with a plurality of first throttles on the upper surface of the air-floating bearing sleeve, and the shaft cover is provided on the upper surface of the air-floating bearing sleeve. After the compressed gas passes through the first throttle and enters between the upper surface of the air-floating bearing sleeve and the lower surface of the shaft cover, a thrust air film can be formed, and the thrust air film makes the main shaft rotor float. When the driving module drives the main shaft rotor to rotate, the thrust air film avoids friction between the main shaft rotor and the air-floating bearing sleeve, thereby improving the rotation accuracy of the main shaft rotor. Moreover, the upper surface of the air-floating bearing sleeve and the lower surface of the shaft cover form a single-sided thrust bearing, thereby avoiding the problems of stress deformation, increased processing and assembly errors of the air-floating turntable caused by the current use of double thrust bearings in the air-floating turntable.

[0009] In one embodiment, the air flotation module further includes a plurality of second throttles disposed on the air flotation bearing sleeve, the air outlets of the second throttles are distributed on the inner surface of the air flotation bearing sleeve, and the second throttles are communicated with the air cavity.

[0010] In one embodiment, the driving module includes a driving member and a belt transmission assembly. The driving member is arranged on the base and located outside the air flotation module. The output end of the driving member is transmission-connected to the belt transmission assembly, and the belt transmission assembly is installed on the spindle rotor.

[0011] In one embodiment, the driving module further includes a reducer, which is connected to an output end of the driving member and is installed on the belt transmission assembly.

[0012] In one embodiment, the belt drive assembly includes a driving wheel, a driven wheel and a transmission belt, the driving wheel is connected to the output end of the driving member, the driven wheel is connected to the spindle rotor, and the transmission belt is sleeved on the driving wheel and the driven wheel.

[0013] In one embodiment, the spindle rotor further includes a second shaft body, which is disposed on a side of the first shaft body away from the shaft cover, the second shaft body and the first shaft body are rotatably disposed in the air bearing sleeve, and the second shaft body is connected to the belt drive assembly.

[0014] In one embodiment, the air-floating turntable includes a monitoring module and a control module, wherein:

[0015] The monitoring module includes a speed measuring instrument, which is installed on the driving member and is used to measure the speed information of the driving member;

[0016] The control module is in communication connection with the speed measuring instrument and the driving member, and the control module is used for controlling the rotation speed of the driving member according to the speed information.

[0017] In one embodiment, the monitoring module further includes a feedback component, the feedback component includes a circular grating and a grating reading head, the grating reading head is mounted on the base, the circular grating is mounted on the spindle rotor, and the grating reading head is arranged opposite to the circular grating.

[0018] In one embodiment, the air bearing sleeve is provided with a first mounting hole, the first mounting hole is opened on the upper surface of the air bearing sleeve, and the first mounting hole is used to mount the first throttle.

[0019] In one embodiment, the air bearing sleeve is further provided with a second mounting hole, the second mounting hole is opened on the inner surface of the air bearing sleeve, and the second mounting hole is used for mounting the second throttle. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] FIG1 is a schematic diagram of the structure of the air-floating turntable provided in the present application.

[0021] in:

[0022] 10. Air float turntable;

[0023] 100, base;

[0024] 200, air flotation module; 210, air flotation bearing sleeve; 211, air cavity; 220, spindle rotor; 221, first shaft body; 222, shaft cover; 223, second shaft body; 230, first throttle; 240, second throttle;

[0025] 300, driving module; 310, driving member; 320, belt transmission assembly; 321, driving wheel; 322, driven wheel; 323, transmission belt; 330, reducer;

[0026] 400, monitoring module; 410, speed measuring instrument; 420, feedback component; 421, circular grating; 422, grating reading head. DETAILED DESCRIPTION

[0027] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0028] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0029] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0030] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0031] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0032] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0033] Referring to FIG. 1 , FIG. 1 shows a schematic diagram of the structure of an air-floating turntable 10 in an embodiment of the present application. The air-floating turntable 10 provided in an embodiment of the present application is generally used in high-end detection and manufacturing industries such as wafer detection, biological detection, high-precision metrology, optical detection, and MEMS / nanotechnology equipment manufacturing. The air-floating turntable 10 includes a base 100, an air-floating module 200, and a drive module 300. The air-floating module 200 includes an air-floating bearing sleeve 210, a spindle rotor 220, and a plurality of first throttles 230. The spindle rotor 220 includes a first shaft body 221 and a shaft cover 222.

[0034] The first throttle 230 is arranged on the air bearing sleeve 210, and the air outlet of the first throttle 230 is distributed on the upper surface of the air bearing sleeve 210. In the specific arrangement, the air outlets of the multiple first throttles 230 can be spaced and distributed along the circumferential direction of the upper surface of the air bearing sleeve 210. The air bearing sleeve 210 is installed on the base 100. The air bearing sleeve 210 is provided with an air cavity 211 connected to the first throttle 230, and the air cavity 211 is used to pass compressed gas. Through the above arrangement, the compressed gas enters the first throttle 230 through the air cavity 211, and the first throttle 230 controls the amount of gas discharged by the compressed gas.

[0035] The first shaft body 221 is connected to the shaft cover 222. The first shaft body 221 is rotatably arranged in the air bearing sleeve 210. The shaft cover 222 is arranged on the upper surface of the air bearing sleeve 210. Through the above arrangement, the compressed gas enters the gap between the upper surface of the air bearing sleeve 210 and the lower surface of the shaft cover 222 through the first throttle 230 and forms a thrust gas film. The spindle rotor 220 floats along its own axial direction under the action of the thrust gas film, and the thrust gas film provides axial bearing capacity for the spindle rotor 220. It should be noted that the material of the spindle rotor 220 is generally steel, and the weight of the spindle rotor 220 provides axial preload. It is not necessary to set a magnet on the spindle rotor 220 and vacuum adsorption for vacuum preload, so as to avoid the external airflow and magnetic field unevenness and the deformation of the workpiece when vacuum preload is used. The disturbance to the rotation of the spindle rotor 220 is avoided, and the rotation accuracy of the spindle rotor 220 is guaranteed to the maximum extent.

[0036] The driving module 300 is mounted on the base 100 and the output end of the driving module 300 is in transmission connection with the spindle rotor 220. The driving module 300 is used to drive the spindle rotor 220 to rotate around its own axis. Through the above arrangement, when the driving module 300 drives the spindle rotor 220 to rotate, the thrust air film prevents the spindle rotor 220 from rubbing against the air bearing sleeve 210, thereby improving the rotation accuracy of the spindle rotor 220 and having high dynamic stability.

[0037] The above-mentioned air-floating turntable 10 is provided with a plurality of first throttles 230 on the upper surface of the air-floating bearing sleeve 210, and the shaft cover 222 is provided on the upper surface of the air-floating bearing sleeve 210. After the compressed gas passes through the first throttle 230 and enters between the upper surface of the air-floating bearing sleeve 210 and the lower surface of the shaft cover 222, a thrust film can be formed, and the thrust film makes the spindle rotor 220 float. When the driving module 300 drives the spindle rotor 220 to rotate, the thrust film prevents the spindle rotor 220 from rubbing against the air-floating bearing sleeve 210, thereby improving the rotation accuracy of the spindle rotor 220. Moreover, the upper surface of the air-floating bearing sleeve 210 and the lower surface of the shaft cover 222 form a single-sided thrust bearing, and no screws are required, thereby avoiding the problems of stress deformation, increased processing and assembly errors of the air-floating turntable caused by the use of double thrust bearings in the current air-floating turntable.

[0038] In order to provide radial rigidity for the rotation of the main shaft rotor 220, in a preferred embodiment, the air flotation module 200 further includes a plurality of second throttles 240 disposed on the air flotation bearing sleeve 210, the air outlets of the second throttles 240 are distributed on the inner surface of the air flotation bearing sleeve 210, and the second throttles 240 are connected to the air cavity 211. In a specific configuration, the air outlets of the plurality of second throttles 240 can be distributed at intervals along the circumference of the inner surface of the air flotation bearing sleeve 210, and the plurality of second throttles 240 on the same circumference are a group, and the inner surface of the air flotation bearing sleeve 210 can be provided with a plurality of second throttle groups along its own axial direction.

[0039] Through the above arrangement, the compressed gas will also enter the second throttle 240 through the air cavity 211, and the second throttle 240 controls the amount of gas discharged by the compressed gas. It should be noted that the compressed gas entering between the inner surface of the air-floating bearing sleeve 210 and the outer surface of the first shaft body 221 through the second throttle 240 forms a hydrostatic bearing air film. When the driving module 300 drives the spindle rotor 220 to rotate, the hydrostatic bearing air film further avoids friction between the spindle rotor 220 and the air-floating bearing sleeve 210, thereby improving the rotation accuracy of the spindle rotor 220; on the other hand, the hydrostatic bearing air film exerts a radial force on the spindle rotor 220, providing radial stiffness for the spindle rotor 220 and improving the stability of the rotation of the spindle rotor 220.

[0040] It should be emphasized that the current air-floating turntable will set a motor in the air-floating bearing sleeve, which makes the cogging effect of the motor obvious, and the cogging effect and the heat, jitter, noise and other problems generated during the operation of the motor will directly affect the rotation accuracy of the spindle rotor. Based on this, in order to improve the rotation accuracy of the spindle rotor 220, a preferred embodiment is that the drive module 300 includes a drive member 310 and a belt transmission assembly 320, the drive member 310 is arranged on the base 100 and the drive member 310 is located outside the air-floating module 200, the output end of the drive member 310 is connected to the belt transmission assembly 320, and the belt transmission assembly 320 is installed on the spindle rotor 220. In the specific setting, the drive member 310 is generally set as a DC motor. Through the above arrangement, the DC motor is arranged on the outside of the air bearing sleeve 210 and the spindle rotor 220. The DC motor drives the spindle rotor 220 to rotate through the belt transmission assembly 320. The DC motor is not directly connected to the air bearing sleeve 210 and the spindle rotor 220, thereby avoiding the problem of the motor affecting the rotation accuracy of the spindle rotor caused by the motor being arranged in the traditional air bearing sleeve, thereby reducing the axial rotation error and radial rotation error of the spindle rotor, and isolating the measurement error caused by the heat generated by the motor.

[0041] In order to ensure the stability of the rotational motion of the spindle rotor 220, specifically, the driving module 300 further includes a reducer 330, which is connected to the output end of the driving member 310 and is installed on the belt transmission assembly 320. Through the above arrangement, the driving member 310 drives the belt transmission assembly 320 to rotate at a preset speed through the reducer 330, thereby driving the spindle rotor 220 connected to the belt transmission assembly 320 to rotate.

[0042] In order to make it easier for the belt transmission assembly 320 to connect the driving member 310 and the main shaft rotor 220, specifically, the belt transmission assembly 320 includes a driving wheel 321, a driven wheel 322 and a transmission belt 323, wherein the driving wheel 321 is connected to the output end of the driving member 310, the driven wheel 322 is connected to the main shaft rotor 220, and the transmission belt 323 is sleeved on the driving wheel 321 and the driven wheel 322. In specific configuration, the belt transmission assembly 320 connects the reducer 330 and the main shaft rotor 220, the reducer 330 is connected to the output end of the driving member 310, and the end of the reducer 330 away from the driving member 310 is connected to the driving wheel 321. It should be noted that the transmission belt 323 can be a flexible member such as a belt. Through the above arrangement, the driving member 310 drives the driving wheel 321 to rotate at a preset speed through the reducer 330, thereby driving the transmission belt 323 connected to the driving wheel 321 to rotate, and the transmission belt 323 will drive the driven wheel 322 to rotate, and then drive the spindle rotor 220 connected to the driven wheel 322 to rotate. It should be emphasized that by setting a flexible member such as the transmission belt 323 to transmit the power of the driving member 310 to the spindle rotor 220, it is avoided that when the driving member 310 and the spindle rotor 220 are rigidly connected, the driving member 310 is affected by the interference pulse jitter on the rotational motion of the spindle rotor 220. The flexible connection form of the transmission belt 323 is conducive to eliminating the influence of the movement fluctuation of the driving member 310 and its own vibration on the movement of the spindle rotor 220.

[0043] In order to design the spindle rotor 220 more conveniently, specifically, the spindle rotor 220 further includes a second shaft body 223, the second shaft body 223 is arranged on the side of the first shaft body 221 away from the shaft cover 222, the second shaft body 223 and the first shaft body 221 are rotatably arranged in the air bearing sleeve 210, and the second shaft body 223 is connected to the belt transmission assembly 320. In the specific setting, the second shaft body 223 is nested inside the driven wheel 322. It should be noted that the shaft cover 222, the first shaft body 221 and the second shaft body 223 in the spindle rotor 220 can be integrally formed, and the cross-section of the shaft cover 222 and the first shaft body 221 is generally T-shaped.

[0044] In order to more conveniently realize the uniform and stable movement of the main shaft rotor 220, specifically, the air-floating turntable 10 includes a monitoring module 400 and a control module. The monitoring module 400 includes a speed measuring instrument 410, which is installed on the driving member 310 and is used to measure the speed information of the driving member 310. The control module is connected to the speed measuring instrument 410 and the driving member 310 for communication, and the control module is used to control the rotation speed of the driving member 310 according to the speed information. In a specific setting, the speed measuring instrument 410 can be a rotary encoder. Through the above setting, the rotary encoder is used to monitor and feedback the speed information of the driving member 310, and the control module adjusts the rotation speed of the driving member 310 according to the speed information fed back by the rotary encoder to ensure that the driving member 310 rotates at a uniform speed, thereby driving the main shaft rotor 220 to move at a uniform speed.

[0045] In order to more conveniently obtain the precise position of the spindle rotor 220 during the movement, more specifically, the monitoring module 400 further includes a feedback component 420, the feedback component 420 includes a circular grating 421 and a grating reading head 422, the grating reading head 422 is mounted on the base 100, the circular grating 421 is mounted on the spindle rotor 220, and the grating reading head 422 is arranged opposite to the circular grating 421. During specific operation, the circular grating 421 rotates with the spindle rotor 220, and the grating reading head 422 can accurately feedback the rotation degree and accurate position of the spindle rotor 220 by reading the scale on the circular grating 421. The feedback component 420 can specifically cooperate with the probe to detect the workpiece morphology error. The specific process is that the workpiece is placed on the spindle rotor 220, and when the workpiece moves with the spindle rotor 220, the workpiece will move relative to the probe, and the morphology recorded by the probe corresponds to the position recorded by the grating reading head 422, and the processing error of the workpiece morphology can be accurately fed back.

[0046] It should be noted that in the traditional air-floating turntable, the feedback component is also connected to the control module for communication, and the feedback component is also used to feedback the speed of the driving member. The control module controls the rotation speed of the driving member through the speed of the driving member fed back by the feedback component. However, the feedback component directly set on the air-floating module cannot well reflect the speed fluctuation of the driving member, resulting in a decrease in the accuracy of the rotational motion of the spindle rotor, and cannot be used on high-precision measurement equipment. The present application uses the rotary encoder to feedback the speed information of the driving member 310, and the feedback component 420 does not participate in the closed-loop feedback adjustment between the driving member 310 and the control module. The feedback component 420 is used to accurately feedback the movement position of the spindle rotor 220.

[0047] In order to more conveniently install the first throttle 230, in a preferred embodiment, the air bearing sleeve 210 is provided with a first mounting hole, the first mounting hole is opened on the upper surface of the air bearing sleeve 210, and the first mounting hole is used to install the first throttle 230. In a specific setting, the number of the first mounting holes is the same as the number of the first throttle 230, and the plurality of first mounting holes can be distributed at intervals along the circumferential direction of the upper surface of the air bearing sleeve 210.

[0048] In order to more conveniently install the second throttle 240, specifically, the air bearing sleeve 210 is further provided with a second mounting hole, which is opened on the inner surface of the air bearing sleeve 210, and is used to install the second throttle 240. In specific settings, the number of the second mounting holes is the same as the number of the second throttles 240, and the plurality of second mounting holes can be distributed at intervals along the circumference of the inner surface of the air bearing sleeve 210, and the plurality of second mounting holes on the same circumference are a group of second mounting holes, and the inner surface of the air bearing sleeve 210 can be provided with a plurality of groups of second mounting holes along its own axial direction.

[0049] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0050] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. An air-floating turntable (10), characterized in that: The air-floating turntable (10) comprises a base (100), an air-floating module (200) and a driving module (300), wherein: The air-floating module (200) comprises an air-floating bearing sleeve (210), a main shaft rotor (220) and a plurality of first throttles (230), wherein the first throttles (230) are arranged on the air-floating bearing sleeve (210), and the gas outlets of the first throttles (230) are distributed on the upper surface of the air-floating bearing sleeve (210), the air-floating bearing sleeve (210) is installed on the base (100), an air cavity (211) connected to the first throttles (230) is opened on the air-floating bearing sleeve (210), and the air cavity (211) is used to introduce compressed gas, the main shaft rotor (220) comprises a first shaft body (221) and a shaft cover (222) connected to the first shaft body (221), the first shaft body (221) is rotatably arranged in the air-floating bearing sleeve (210), and the shaft cover (222) is arranged on the upper surface of the air-floating bearing sleeve (210); The driving module (300) is mounted on the base (100) and an output end is drivingly connected to the main shaft rotor (220) for driving the main shaft rotor (220) to rotate around its own axis.

2. The air-floating turntable (10) according to claim 1, characterized in that: The air flotation module (200) further comprises a plurality of second throttles (240) arranged on the air flotation bearing sleeve (210), the air outlets of the second throttles (240) being distributed on the inner surface of the air flotation bearing sleeve (210), and the second throttles (240) being in communication with the air cavity (211).

3. The air-floating turntable (10) according to claim 1, characterized in that: The driving module (300) comprises a driving member (310) and a belt transmission assembly (320); the driving member (310) is arranged on the base (100) and is located outside the air flotation module (200); the output end of the driving member (310) is drivingly connected to the belt transmission assembly (320); and the belt transmission assembly (320) is installed on the main shaft rotor (220).

4. The air-floating turntable (10) according to claim 3, characterized in that: The driving module (300) further comprises a reducer (330), wherein the reducer (330) is connected to the output end of the driving member (310), and the reducer (330) is installed on the belt transmission assembly (320).

5. The air-floating turntable (10) according to claim 3, characterized in that: The belt transmission assembly (320) comprises a driving wheel (321), a driven wheel (322) and a transmission belt (323); the driving wheel (321) is connected to the output end of the driving member (310); the driven wheel (322) is connected to the main shaft rotor (220); and the transmission belt (323) is sleeved on the driving wheel (321) and the driven wheel (322).

6. The air-floating turntable (10) according to claim 3, characterized in that: The spindle rotor (220) further comprises a second shaft (223), wherein the second shaft (223) is arranged on a side of the first shaft (221) away from the shaft cover (222), the second shaft (223) and the first shaft (221) are rotatably arranged in the air bearing sleeve (210), and the second shaft (223) is connected to the belt transmission assembly (320).

7. The air-floating turntable (10) according to claim 3, characterized in that: The air-floating turntable (10) comprises a monitoring module (400) and a control module, wherein: The monitoring module (400) comprises a speed measuring instrument (410), wherein the speed measuring instrument (410) is installed on the driving member (310), and the speed measuring instrument (410) is used to measure speed information of the driving member (310); The control module is in communication connection with the speed measuring instrument (410) and the driving member (310), and the control module is used to control the rotation speed of the driving member (310) according to the speed information.

8. The air-floating turntable (10) according to claim 7, characterized in that: The monitoring module (400) further includes a feedback component (420), wherein the feedback component (420) includes a circular grating (421) and a grating reading head (422), wherein the grating reading head (422) is mounted on the base (100), and the circular grating (421) is mounted on the spindle rotor (220), and the grating reading head (422) is arranged opposite to the circular grating (421).

9. The air-floating turntable (10) according to claim 1, characterized in that: The air-floating bearing sleeve (210) is provided with a first mounting hole, the first mounting hole is opened on the upper surface of the air-floating bearing sleeve (210), and the first mounting hole is used for mounting the first throttle (230).

10. The air-floating turntable (10) according to claim 2, characterized in that: The air bearing sleeve (210) is further provided with a second mounting hole, the second mounting hole opening on the inner surface of the air bearing sleeve (210), and the second mounting hole is used for mounting the second throttle (240).

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