Feeding device of evaporation coating equipment

Abstract

The utility model provides a feeding device of evaporation coating equipment, which comprises a vacuum cavity, and a blanking component, a pushing component and an evaporation component are sequentially arranged in the vacuum cavity; wherein the blanking assembly comprises a star-shaped valve, the star-shaped valve is rotatably arranged in the vacuum cavity and comprises a rotor and a plurality of partition plates arranged on the circumferential surface of the rotor; the surrounding plate is rotatably arranged on the peripheral side of the star-shaped valve in a surrounding mode, and a notch is formed in the surrounding plate. According to the technical scheme, continuous material supplementing is achieved, the liquid level height of the crucible is controlled to be in a stable state, meanwhile, the evaporation distance is controlled, and the coating quality is further improved.

Description

Technical Field

[0001] The invention generally relates to the field of evaporation coating, and in particular to a feeding device for evaporation coating equipment. Background Art

[0002] Vacuum evaporation coating refers to a technology that obtains a thin film by heating a certain substance and evaporating it on the surface of a substrate material under vacuum conditions. Usually, the evaporating substance is placed in the crucible of the evaporation source and heated and evaporated by the evaporation source heating device.

[0003] A vacuum evaporation coating device before improvement, which sets the material to be evaporated into a filament shape, and continuously transports the filamentary evaporation material into the crucible through a clamping mechanism.

[0004] Due to the clamping force in this method, some soft and sticky materials such as metal lithium wire are easily deformed or broken when clamped, thus affecting continuous feeding. Utility Model Content

[0005] According to the present invention, in view of the problems existing in the above-mentioned prior art, a feeding device of an evaporation coating device is provided, wherein the feeding device includes a vacuum chamber, wherein a blanking assembly, a pushing assembly, and an evaporation assembly are sequentially arranged in the vacuum chamber; wherein the blanking assembly includes: a star valve, which is rotatably arranged in the vacuum chamber, and includes a rotor, and a plurality of partitions arranged on the circumference of the rotor; and a surrounding plate, which is rotatably arranged around the circumference of the star valve, and has a notch arranged thereon. By having the above-mentioned technical features, the evaporation material can be quantitatively added into the space formed by each adjacent two partitions and the surrounding plate through the mutual cooperation of the surrounding plate and the star valve, and in the process of evaporation coating, according to the evaporation efficiency in the crucible and the rotation of the star valve, the evaporation material is added into the crucible in a timely and quantitative manner, which not only realizes continuous feeding, but also makes the liquid level of the crucible controlled in a stable state, controls the evaporation distance, and further improves the coating quality.

[0006] In some embodiments, the blanking assembly further comprises: a plug valve, which is located below the star valve. Thus, by opening and closing the vacuum plug, the manual material replenishment process does not affect the vacuum environment of the evaporation coating in the vacuum chamber, so that the device can achieve continuous material replenishment and ensure the production capacity of vacuum coating.

[0007] In some embodiments, the blanking assembly further includes: a flip valve, which is located between the star valve and the plug valve, and includes a flap, which is rotatably connected in the vacuum chamber; a second driving member, which is located on one side of the flap and is interconnected with the flap, and is used to drive the flap to flip. Therefore, the setting of the flip valve plays a role in receiving the material on the one hand, and on the other hand, it prevents the material from falling directly on the valve core of the plug valve, causing damage to the plug valve, thereby affecting the normal supply of the evaporation coating equipment.

[0008] In some embodiments, the pusher assembly includes: a transfer chamber, which is located below the gate valve and is provided with a material port and a discharge port; a pusher rod, which is inserted through the side wall of the transfer chamber and is slidably connected to the transfer chamber; and a pusher cylinder, whose end is connected to the pusher rod. Thus, the pusher assembly realizes the function of transferring the material toward the crucible, and its overall structure is relatively simple, and its driving part is located outside the vacuum chamber, which is convenient for maintenance and replacement.

[0009] In some embodiments, the pusher assembly further comprises: a bellows, which is located outside the transfer chamber and sleeved outside the pusher rod, one end of which is sealed with the side wall of the transfer chamber, and the other end is sealed with the connection area between the pusher rod and the pusher cylinder. Thus, the bellows not only ensures the vacuum environment of the pusher operation, but also has low cost and is easy to maintain and replace.

[0010] In some embodiments, the transfer chamber is provided with an interlayer, and the interlayer is filled with a coolant. Since the transfer chamber and the crucible are interconnected, the hot air in the crucible can easily affect the environment of the evaporation material in the transfer chamber, causing the metal to melt quickly, and the complete transfer of the evaporation material cannot be guaranteed. Therefore, the provision of the coolant greatly slows down the melting speed of the metal, thereby ensuring the integrity of the metal during the transfer process.

[0011] In some embodiments, the evaporation component includes a partitioning partition, which is inserted into the crucible and divides the crucible into a main evaporation zone and a pre-evaporation zone. The pre-evaporation zone is located below the pusher component, and the partitioning partition is provided with a liquid through hole; a preheating partition is erected above the pre-evaporation zone, and the preheating partition is provided with a liquid leakage hole. As a result, the evaporated material falls onto the preheating partition, where it is melted by the crucible temperature and drips from the liquid leakage hole of the preheating partition. Due to the different evaporation temperatures of different materials, impurities with low evaporation temperatures evaporate first on the preheating partition to form impurity vapor. Due to the separation effect of the partitioning partition, the impurity vapor will not be plated on the surface of the workpiece; impurities with high evaporation temperatures will not be evaporated to form solid particles, so that the impurities can be cleaned regularly, thereby achieving the pre-purification of the material.

[0012] In some embodiments, the side wall of the vacuum chamber includes a fixed wall and a sliding wall sealed with the fixed wall, the sliding wall is located above the gate valve, and a translation cylinder connected to the sliding wall to drive the sliding wall to move is provided outside the vacuum chamber. Thus, when the star valve is replenished, the star valve and the enclosure structure can be driven to move out of the vacuum chamber through the operation of the translation cylinder, thereby improving the replenishment efficiency of the staff and further improving the replenishment efficiency of the evaporation coating equipment.

[0013] In some embodiments, the surfaces of the blanking assembly, the pushing assembly, and the evaporation assembly that are in contact with the evaporation material are all provided with an anti-sticking layer, thereby preventing the metal from adhering to the surface of the device during the feeding process, thereby reducing the damage to the device caused by the adhesion of the metal to the device.

[0014] In some embodiments, the blanking assembly and the pushing assembly are provided with one or more than two. Thus, the staff can reduce the manual feeding through the cooperation of multiple blanking assemblies, accurately control the crucible liquid level, and further improve the evaporation coating quality.

[0015] It should be understood that the contents described in the novel content section are not intended to limit the key or important features of the embodiments of the present disclosure, nor are they intended to limit the scope of the present disclosure. Other features of the present disclosure will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 The overall structural diagram of a lithium metal evaporation coating device provided in Example 1 of the present invention is shown;

[0017] Figure 2 The schematic diagram of the structure of the blanking assembly provided in the first embodiment of the present invention is shown;

[0018] Figure 3 The schematic diagram of the structure of the driving part in the blanking assembly provided in the embodiment 1 of the present invention is shown;

[0019] Figure 4 The schematic diagram of the structure of the pusher assembly provided in the first embodiment of the present invention is shown;

[0020] Figure 5 The schematic diagram of the structure of the evaporation assembly provided in the first embodiment of the present invention is shown;

[0021] Figure 6 The schematic diagram of the structure of the driving part in the blanking assembly provided in the second embodiment of the present invention is shown;

[0022] Figure 7 The schematic diagram of the structure after the driving part of the blanking assembly provided in the second embodiment of the present invention moves is shown;

[0023] Figure 8 The figure shows the overall structure of a lithium metal evaporation coating device provided in Example 3 of the present invention.

[0024] Explanation of symbols

[0025] 1. Vacuum chamber; 11. Feeding port; 12. Vacuum pumping device; 13. Fixed wall; 14. Sliding wall; 2. Blanking assembly; 21. Star valve; 211. Rotor; 212. Partition; 22. Enclosure; 221. Notch; 23. Star valve motor; 24. Peripheral motor; 25. Transmission assembly; 251. Driving wheel; 252. Driven wheel; 253. Transmission belt; 27. Overturn valve; 271. Flip plate; 272. Second driving member; 28. Gate valve; 281. Insert plate; 282, first driving member; 3, pusher assembly; 31, transfer chamber; 311, material port; 312, discharge port; 32, pusher rod; 33, pusher plate; 34, linear bearing; 35, pusher cylinder; 36, bellows; 37, coolant; 4, evaporation assembly; 41, partition partition; 411, liquid hole; 42, preheating partition; 421, liquid leakage hole; 5, crucible; 51, main evaporation zone; 52, pre-evaporation zone; 61, track; 62, translation cylinder. DETAILED DESCRIPTION

[0026] Below, the preferred embodiments (or implementation methods) of the present invention are described in detail with reference to the accompanying drawings.

[0027] The present invention provides a feeding device for evaporation coating equipment, which includes a vacuum chamber 1, and a blanking assembly 2, a pushing assembly 3, and an evaporation assembly 4 which are sequentially arranged in the vacuum chamber 1 from top to bottom. Through the cooperation of several devices, continuous feeding of evaporation materials is achieved, and ultimately the quality of evaporation coating is guaranteed.

[0028] Refer to the following Figure 1-Figure 8 A feeding device of an evaporation coating device provided in an embodiment of the present invention is described.

[0029] Figure 1 The overall structure diagram of a lithium metal evaporation coating device provided by Example 1 of the present invention is shown. Figure 1 As shown, a feeding device of an evaporation coating device provided in this embodiment includes a vacuum chamber 1, and a feeding port 11 is provided at the top of the vacuum chamber 1 for adding evaporation materials; a vacuum pumping device 12 for adjusting the vacuum environment in the vacuum chamber 1 is also provided on one side of the vacuum chamber 1. A blanking assembly 2, a pushing assembly 3, and an evaporation assembly 4 are sequentially arranged in the vacuum chamber 1 from top to bottom, thereby realizing batch addition and continuous circulation of evaporation materials without affecting the vacuum working environment of the crucible 5, as well as precise control of the liquid level of the crucible 5, further improving the quality of evaporation coating.

[0030] Figure 2 The structure diagram of the blanking assembly 2 provided in the embodiment 1 of the present invention is shown. Figure 3 The schematic diagram of the structure of the driving part in the blanking assembly 2 provided in the embodiment 1 of the present invention is shown. Figure 2 and Figure 3 As shown, the blanking assembly 2 includes a star valve 21, a surrounding plate 22, a flip valve 27, and a plug valve 28. The star valve 21 includes a rotor 211 rotatably connected to the side wall of the vacuum chamber 1. The rotor 211 is cylindrical or a regular polygonal column, and a plurality of partitions 212 are evenly arranged on its outer circumference, and the two sides of the partition 212 are closed structures. The surrounding plate 22 is an arc-shaped plate, and a notch 221 is formed between its two ends. It is coaxially arranged on the peripheral side of the star valve 21, and the inner wall of the surrounding plate 22 and the edge of the partition 212 are in contact with each other, so that a closed material storage space is formed between the adjacent partitions 212 and the surrounding plate 22. The star valve motor 23 and the peripheral motor 24 can be separately fixed on both sides of the star valve 21. Specifically, the blanking assembly 2 can also include a star valve motor 23 and a peripheral motor 24 for driving the rotation of the star valve 21 and the enclosure 22, wherein the output shaft of the star valve motor 23 is coaxially fixed to the star valve 21, and the output shaft of the peripheral motor 24 is coaxially fixed to the enclosure 22.

[0031] When the star valve 21 is finished feeding and its internal space needs to be supplemented, the peripheral motor 24 can be used to control the rotation of the enclosure 22, so that the gap 221 of the enclosure 22 rotates to the top and corresponds to one of the storage spaces, and then the evaporation material can be added to the vacuum chamber 1 through the feeding port 11, and then the star valve motor 23 drives the star valve 21 to rotate, so that the gap 221 of the enclosure 22 corresponds to the adjacent storage space, and the evaporation material is added. Repeat the above operation, add evaporation material to multiple storage spaces on the star valve 21, but keep the last storage space in an unfilled state, and then rotate the peripheral motor 24 and the star valve motor 23 together, so that the gap 221 of the enclosure 22 faces directly downward, and when feeding and dropping are needed, just turn the star valve motor.

[0032] Specifically, since the star valve 21 can add a fixed number of particles when replenishing the material, the weight of each particle can be controlled to be between 0.5% and 1% when the particles are made, thereby reducing the deviation of the weight of the material in each storage space when the star valve 21 is dropping the material. The number of particles added determines the storage capacity of each storage space, and the number of partitions 212 determines the frequency and amount of online feeding. If it is necessary to finely control the liquid level in the crucible 5, the number of partitions 212 can be increased or the storage capacity of each storage space can be reduced. Otherwise, the storage capacity of each storage space can be increased. If the storage space is not large enough, the size of the partition 212 can be increased.

[0033] The above-mentioned flip valve 27 includes a flap 271 and a second driving member 272. The flap 271 is located below the enclosure 22 and is rotatably connected to the inner wall of the vacuum chamber 1. When the flap 271 is in the initial state, it is arranged horizontally and blocks the flow channel of the vacuum chamber 1. The second driving member 272 can be selected as a motor, which is located on one side of the flap 271, and its output shaft is fixed to the flap 271, and the flap 271 is driven by the second driving member 272 to drive the flap 271 to rotate forward or reverse. The plug valve 28 is located below the flip valve 27, and includes a plug 281 and a first driving member 282. The plug 281 is arranged horizontally, and a slideway fixed to the inner wall of the vacuum chamber 1 is arranged on both sides thereof, so as to realize the horizontal displacement of the plug 281. The first driving member 282 can be a cylinder, an electric push rod, or a driving structure realized by a motor screw or the like. The plug 281 is driven to move horizontally by the first driving member 282, so that the area below the plug valve 28 is continuously in a vacuum environment. Since the gate valve 28 is a key component for obtaining a high vacuum environment, when it is closed, it can ensure that one side of the valve is in a high vacuum state and the other side is in a low vacuum state or a normal pressure state. The internal structure of the gate valve 28 is relatively precise. When it is in a closed state, any debris falling will cause damage to the gate valve 28. Therefore, when the gate valve 28 is not opened, the above-mentioned flip valve 27 is in a closed state.

[0034] Specifically, before the star valve 21 is refilled, the gate valve 28 is in a closed state to ensure that the area below the gate valve 28 is in a vacuum environment. At this time, the staff can add evaporation materials quantitatively into the star valve 21 through the feed port 11; after the evaporation materials are replenished, the feed port 11 of the vacuum chamber 1 is closed, and the area above the gate valve 28 is evacuated through the vacuum pumping device 12. The gate valve 28 is opened after the space above the gate valve 28 and the space below the gate valve 28 are at the same vacuum degree. During the refilling and vacuuming process, the flip valve 27 is always in a closed state. After the vacuuming is completed and the gate valve 28 is opened, the flip valve 27 is opened. The mutual cooperation of the two valves can prevent the material from directly falling onto the valve core of the gate valve 28 during the refilling process, causing damage to the gate valve 28, which affects the normal refilling of the evaporation coating equipment.

[0035] The blanking assembly 2 can also be optimized as follows: the star valve motor 23, the peripheral motor 24, the first driving member 282 and the second driving member 272 can be arranged outside the vacuum chamber 1, or the star valve motor 23 and the peripheral motor 24 can be arranged on the same side, and the peripheral motor 24 is connected to the enclosure 22 through the transmission assembly 25. The transmission assembly 25 includes a driving wheel 251 coaxially fixed to the peripheral motor 24, a driven wheel 252 coaxially fixed to one side of the enclosure 22, and a transmission belt 253 simultaneously sleeved on the driving wheel 251 and the driven wheel 252, and the peripheral motor 24 drives the transmission assembly 25 and drives the enclosure 22 to rotate. The transmission assembly 25 can also be realized by transmission components such as gears and transmission chains. The first driving member 282 and the second driving member 272 can also be arranged on the same side, and the output shaft of the first driving member 282 passes through the side wall of the vacuum chamber 1 and is fixed to the plug plate 281, while the output shaft of the second driving member 272 passes through the side wall of the vacuum chamber 1 and is fixed to the flap 271. The first driving member 282 and the second driving member 272 can be inspected and maintained without changing the vacuum environment in the vacuum chamber 1, thereby improving maintenance efficiency.

[0036] Figure 4 FIG. 1 shows a schematic diagram of the structure of the pusher assembly 3 provided in Example 1 of the present invention. Figure 4 As shown, the pusher assembly 3 includes a transfer chamber 31, a pusher rod 32, and a pusher cylinder 35. The transfer chamber 31 is a strip-shaped channel and is horizontally located below the vacuum chamber 1. A material port 311 interconnected with the vacuum chamber 1 is provided on the top of the transfer chamber 31, and a discharge port 312 interconnected with the vacuum environment of the crucible 5 is provided at the tail of the transfer chamber 31. The pusher rod 32 penetrates into the transfer chamber 31 from one end of the transfer chamber 31 where the material port 311 is provided and is connected by sliding along the depth of the transfer chamber 31. The pusher cylinder 35 is fixed outside the transfer chamber 31, and the end of its piston rod is interconnected with the other end of the pusher rod 32, so that the pusher rod 32 is displaced in the transfer chamber 31 by the extension and contraction of the pusher cylinder 35.

[0037] In order to improve the pushing efficiency of the pushing rod 32 , a pushing plate 33 is fixed to the end of the pushing rod 32 located in the transfer chamber 31 , thereby increasing the contact area with the evaporated material and improving the pushing efficiency.

[0038] In order to ensure the stability of the push rod 32 during its movement, a linear bearing 34 is provided at the point where the push rod 32 and the transfer chamber 31 are penetrated. The push rod 32 is penetrated inside the linear bearing 34 , thereby playing a guiding and supporting role for the push rod 32 .

[0039] In order to prevent the high temperature environment in the crucible 5 from being transmitted to the transfer chamber 31 and causing the melting of the metallic lithium, the side walls of the transfer chamber 31 are provided with an interlayer, and the interlayer is filled with flowing coolant 37, thereby reducing the ambient temperature inside the transfer chamber 31, so that the evaporated material remains in a fixed state after falling into the transfer chamber 31, thereby improving the integrity of the material push and reducing the inaccurate liquid level control caused by the melting of the material.

[0040] The pusher assembly 3 can also be optimized as follows: a bellows 36 can be sleeved on the pusher rod 32 located outside the transfer chamber 31, one end of the bellows 36 is sealed and fixed to the side wall of the transfer chamber 31, and the other end of the bellows 36 is sealed and fixed to the connection area between the pusher rod 32 and the pusher cylinder 35, so that when the pusher rod 32 slides, the transfer chamber 31 is guaranteed to be in a vacuum sealed environment. In addition, in order to facilitate the maintenance and repair of the pusher cylinder 35, the pusher cylinder 35 is fixed outside the vacuum chamber 1, which greatly increases the maintenance and repair efficiency of the pusher cylinder 35.

[0041] Figure 5 FIG. 4 is a schematic diagram showing the structure of the evaporation assembly 4 provided in Example 1 of the present invention. Figure 5 As shown, the evaporation assembly 4 includes a partition partition 41 and a preheating partition 42. The partition partition 41 is inserted into the crucible 5 from the top of the crucible 5, and its peripheral side is fixedly connected to the inner wall of the crucible 5, and the crucible 5 is divided into a main evaporation zone 51 and a pre-evaporation zone 52, and a liquid through hole 411 is provided on the partition partition 41 to ensure the reciprocating flow of the melt in the main evaporation zone 51 and the pre-evaporation zone 52. Due to the setting of the preheating partition 42, it can be ensured that the impurities with a lower melting point in the lithium metal evaporate first in the preheating zone, and the impurities with a higher melting point remain in the state of solid particles on the preheating partition 42 for subsequent regular cleaning. In this way, the purity of the metallic lithium in the evaporation zone can be ensured to be high, thereby achieving the purification of the lithium metal.

[0042] Since lithium metal has high viscosity, in order to prevent lithium particles from adhering to the equipment, the surfaces of all parts in the blanking assembly 2, the pushing assembly 3, and the evaporation assembly 4 that are in contact with the lithium particles are provided with an anti-sticking layer. The anti-sticking layer can be made of chrome plating, nickel plating, or quartz glass and other materials that do not react with metallic lithium and have a smooth surface. In this way, the surface of the parts is not only smooth and does not stick to lithium, but also can prevent it from reacting with lithium.

[0043] Figure 6 A schematic structural diagram of the driving portion of the blanking assembly 2 provided in Example 2 of the present invention is shown. Figure 7 FIG. 2 shows a schematic diagram of the structure of the blanking assembly 2 after the driving part moves according to the second embodiment of the present invention. Figure 6 Figure 7As shown, the difference between Example 2 and Example 1 is that the side wall of the vacuum chamber 1 is a combined wall, and includes a fixed wall 13 and a sliding wall 14 sealed with the fixed wall 13, the sliding wall 14 is located above the plug valve 28, and the star valve motor 23, the peripheral motor 24, the enclosure 22, and the star valve 21 are all fixed on the sliding wall 14. Two mutually parallel tracks 61 are also set up outside the vacuum chamber 1, and the sliding wall 14 can slide on the track 61. A translation cylinder 62 parallel to the track 61 is also fixed outside the vacuum chamber 1, and the end of the cylinder piston rod is fixed on the sliding wall 14. The sliding wall 14 is driven to move on the track 61 through the operation of the translation cylinder 62, thereby realizing the operation of moving the enclosure 22 and the star valve 21 out of the vacuum chamber 1 as a whole, so as to quickly fill each storage space with evaporation materials.

[0044] Figure 8 The overall structure diagram of a lithium metal evaporation coating device provided by Example 3 of the present invention is shown. Figure 8 As shown, the difference between Example 3 and Example 1 is that a lithium metal evaporation coating equipment includes the feeding device, and the feeding device is provided with one or more. In this embodiment, the feeding device is taken as two as an example, and is located on both sides of the crucible 5, thereby greatly reducing the feeding time, thereby increasing the feeding frequency, and further realizing the precise control of the liquid level height in the crucible 5.

[0045] In the description of this specification, the terms "connection", "installation", "fixation" and the like should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0046] The above are only preferred embodiments of the present application and are not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A feeding device for evaporation coating equipment, characterized in that: The feeding device comprises a vacuum chamber (1), wherein a blanking assembly (2), a pushing assembly (3), and an evaporation assembly (4) are sequentially arranged in the vacuum chamber (1); Wherein, the blanking assembly (2) comprises: A star valve (21) rotatably disposed in the vacuum chamber (1) and comprising a rotor (211) and a plurality of partitions (212) arranged on the circumference of the rotor (211); and The enclosing plate (22) is rotatably arranged around the circumference of the star valve (21) and has a notch (221) arranged thereon.

2. The feeding device of the evaporation coating equipment according to claim 1, characterized in that: The blanking assembly (2) further comprises: a gate valve (28), wherein the gate valve (28) is located below the star valve (21).

3. The feeding device of the evaporation coating equipment according to claim 2, characterized in that: The blanking assembly (2) further comprises: a flip valve (27), wherein the flip valve (27) is located between the star valve (21) and the gate valve (28), and comprises A flap (271) rotatably connected in the vacuum chamber (1); The second driving member (272) is located on one side of the flip plate (271) and is interconnected with the flip plate (271), and is used to drive the flip plate (271) to flip.

4. The feeding device of the evaporation coating equipment according to claim 2, characterized in that: The pusher assembly (3) comprises: A transfer chamber (31), which is located below the gate valve (28) and is provided with a material port (311) and a material discharge port (312); A push rod (32) is disposed through the side wall of the transfer chamber (31) and is slidably connected to the transfer chamber (31); The end of the push cylinder (35) is connected to the push rod (32).

5. The feeding device of the evaporation coating equipment according to claim 4, characterized in that: The pusher assembly (3) further comprises: The bellows (36) is located outside the transfer chamber (31) and is sleeved on the outside of the push rod (32). One end of the bellows is sealed with the side wall of the transfer chamber (31), and the other end is sealed with the connection area between the push rod (32) and the push cylinder (35).

6. The feeding device of the evaporation coating equipment according to claim 4, characterized in that: An interlayer is provided in the transfer chamber (31), and a cooling liquid (37) is poured into the interlayer.

7. The feeding device of the evaporation coating equipment according to claim 1, characterized in that: The evaporation component (4) comprises A partitioning baffle (41) is inserted into the crucible (5) and divides the crucible (5) into a main evaporation zone (51) and a pre-evaporation zone (52), wherein the pre-evaporation zone (52) is located below the pushing assembly (3), and a liquid through hole (411) is provided on the partitioning baffle (41); A preheating baffle (42) is erected above the pre-evaporation zone (52), and a liquid leakage hole (421) is provided on the preheating baffle (42).

8. The feeding device of the evaporation coating equipment according to claim 2, characterized in that: The side wall of the vacuum chamber (1) comprises a fixed wall (13) and a sliding wall (14) sealed with the fixed wall (13); the sliding wall (14) is located above the gate valve (28); and a translation cylinder (62) connected to the sliding wall (14) and driving the sliding wall (14) to move is arranged outside the vacuum chamber (1).

9. A feeding device for evaporation coating equipment according to any one of claims 1 to 8, characterized in that: The surfaces of the blanking component (2), the pushing component (3) and the evaporation component (4) that are in contact with the evaporation material are all provided with an anti-sticking layer.

10. A feeding device for evaporation coating equipment according to any one of claims 1 to 8, characterized in that: The blanking assembly (2) and the pushing assembly (3) are each provided with one or more than two.

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