Coating device with movable crucible

Abstract

The coating device comprises a winding device, a coating chamber and a crucible device, the winding device is arranged on the peripheral side of the coating chamber and is provided with a coating drum rotatably arranged above the coating chamber, an opening is formed in the upper end of the coating chamber, and the crucible device is arranged in the coating drum. The coating drum can enter the coating chamber through the opening, an electronic gun is arranged on one side of the coating chamber, the crucible device comprises a crucible, a crucible frame, a coating track and a driving device, a loading and unloading track is arranged on the crucible frame, the driving device can drive the crucible frame to move, and when the electronic gun scans materials in the crucible, the loading and unloading track is loaded and unloaded on the crucible frame. And the crucible can move along the film coating track, so that film coating steam can be continuously attached to a base material of the film coating drum. According to the utility model, the problem of crosstalk between the coating chamber process gas and the pretreatment coating process gas is avoided, and meanwhile, the movable crucible can also avoid the problem of discontinuous coating caused by the limited scanning range of the electron beam.

Description

Technical Field

[0001] The utility model relates to an electron beam coating device, in particular to a coating device with a movable crucible. Background Art

[0002] Electron beam evaporation is a technology that uses accelerated electrons to bombard coating materials, causing the coating materials to evaporate and adhere to the substrate. The electron beam coating device is generally composed of an electron gun, a vacuum chamber, a crucible, and a winding device for controlling the movement of the substrate.

[0003] However, the existing electron beam coating devices have many shortcomings when they are implemented, because they often need to be adjusted according to the conditions of the substrate and the actual working conditions. For example: ① In the existing electron beam coating devices, when coating, the high-energy electron beam emitted by the electron gun is often scanned linearly at the same position of the crucible, which makes the coating material in the crucible unevenly heated. It often happens that the coating material in a certain area of ​​the crucible has been completely evaporated, while other places have not yet completely evaporated, which will affect the coating effect and the sustainability of the coating. ② Some coating devices will set the winding device in the vacuum chamber, such as the prior art: a double-sided electron beam evaporation winding coating device CN115584473A, which sets all devices in the vacuum chamber without isolation, but if the substrate needs to be pre-processed or post-processed before or after the coating process, it will be affected by the gas crosstalk generated in the coating link, which will seriously affect the performance of the product.

[0004] In order to solve this problem, this scheme designs a coating device with a movable crucible. Utility Model Content

[0005] In order to solve the above technical problems, an embodiment of the utility model provides a coating device with a movable crucible, comprising: a winding device, a coating chamber and a crucible device.

[0006] The winding device is arranged on the peripheral side of the coating chamber, and includes a coating drum rotatably arranged above the coating chamber. An opening is arranged at the upper end of the coating chamber, and the coating drum can enter the coating chamber through the opening.

[0007] An electron gun is provided on one side of the coating chamber, and the crucible device includes a crucible, a crucible stand, a coating track and a driving device. The crucible stand is provided with a loading and unloading track, and the crucible is movably arranged on the crucible stand via the loading and unloading track. The coating track is arranged inside the coating chamber, and the driving device can drive the crucible stand to move. When the electron gun scans the material in the crucible, the crucible can follow and move along the coating track, so that the coating vapor can continuously adhere to the substrate on the coating drum.

[0008] Wherein, the winding device also includes: an unwinding roller, a first flattening roller, a tension roller, a second flattening roller and a winding roller.

[0009] The unwinding roller and the first flattening roller are arranged in front of the coating drum, and the transmission shaft of the unwinding roller is driven by the first motor, so that the substrate wound on the unwinding roller can be sequentially transported to the coating drum through the first flattening roller;

[0010] The tension roller, the second flattening roller and the winding roller are arranged behind the coating drum, and the winding roller is driven by the second motor, so that the substrate after coating can pass through the tension roller, the second flattening roller and the winding roller backwards and complete winding.

[0011] Wherein, a pretreatment device is arranged between the unwinding roller and the first flattening roller, and the pretreatment device is used to enhance the adhesion of the substrate to the coating material.

[0012] Wherein, a post-processing device is provided between the coating drum and the tension roller, and the post-processing device is used to eliminate the residual charge of the electron beam on the coating surface of the substrate.

[0013] Wherein, a detection mechanism is provided between the coating drum and the tension roller, the detection mechanism is connected with the electron gun in a feedback control manner, and the detection mechanism is used to test the light transmittance or OD (optical density) value of the substrate after coating.

[0014] The opening size of the upper end of the coating chamber is 2 mm to 10 mm larger than the cross-sectional diameter of the coating drum portion entering the coating chamber.

[0015] Wherein, the coating chamber is connected to a vacuum negative pressure device and a cold trap device.

[0016] Wherein, a refrigerant is provided inside the coating drum, and the refrigerant is used to accommodate a refrigerant medium and is connected to a heat exchanger.

[0017] Wherein, the electron gun is a Pierce-type axial electron gun.

[0018] The implementation of the utility model has the following beneficial effects: ① The crucible is set on the crucible rack, and the loading and unloading track is used to realize the loading and unloading of the crucible material. At the same time, the coating track and the driving device are used, so that during coating, the crucible can move along the direction of the substrate movement, so that the electron beam can scan all the coating materials in the crucible, and achieve continuous coating, avoiding the problem of affecting the coating effect due to the limited scanning range of the electron beam. ② The winding device is set on the outside of the coating chamber, and the substrate is coated on the part where the coating drum enters the coating chamber. In addition, the opening above the coating chamber forms a slit-type airtightness at the part where the coating drum enters, so that it can only allow the substrate to pass through and maintain airtightness. In addition, a pre-treatment device, a post-treatment device and a detection device are also set on the working cycle of the winding device, thereby avoiding the intermediate products generated by these devices from entering the coating chamber and affecting the coating effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the utility model;

[0020] Figure 2 It is a schematic diagram of the crucible device of the utility model;

[0021] Figure 3 Schematic diagram of the electron gun in this embodiment. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solutions and advantages of the utility model clearer, the utility model will be further described in detail below with reference to the accompanying drawings.

[0023] like Figure 1 As shown, a coating device with a movable crucible includes: a winding device 1, a coating chamber 2 and a crucible device 3.

[0024] The winding device 1 is arranged on the circumferential side of the coating chamber 2, and includes a coating drum 11 rotatably arranged above the coating chamber. An opening 21 is provided at the upper end of the coating chamber 2, and the coating drum 11 can enter the coating chamber 2 through the opening 21.

[0025] The winding device 1 is used to deliver the substrate to be coated into the coating chamber for coating and to wind up the film material after coating. During the process, the pre-treatment device 41, post-treatment device 42 and detection mechanism 43 arranged on the work flow line of the winding device 1 are used to process and detect the product.

[0026] It should be particularly pointed out that the opening 21 at the upper end of the coating chamber is 2mm~10mm larger than the cross-sectional diameter of the coating drum part entering the coating chamber, so that the opening can allow the substrate wound on the coating drum to pass through, while maximizing the airtightness to prevent the gas produced during the coating process from escaping and affecting the pretreatment, post-treatment and subsequent winding links.

[0027] like Figure 1 , Figure 2 As shown, an electron gun 22 is provided on one side of the coating chamber 2, and the crucible device 3 includes a crucible 31, a crucible stand 32, a coating track 33 and a driving device. The crucible stand 32 is provided with a loading and unloading track, and the crucible 31 is movably arranged on the crucible stand 32 through the loading and unloading track.

[0028] It is pointed out here that the connection method between the crucible 31 and the crucible rack 32 in this embodiment is similar to that of a drawer, that is, a sliding connection is made with the loading and unloading track through a pulley, and then it is pulled and moved in a direction perpendicular to the loading and unloading track. Because the crucible 31 is heavy, a traction mechanism is generally provided to drag the crucible 31 to move on the loading and unloading track. Since the loading and unloading track is arranged inside the crucible rack and has a relatively conventional structure, it is not shown in the figure.

[0029] The coating track 33 is arranged inside the coating chamber 2, and the driving device can drive the crucible rack 32 to move along the coating track 33. In the present embodiment, the driving device is a motor arranged under the crucible rack 32, which can drive the pulley under the crucible rack 32 to slide, and then when the electron gun 22 scans the material in the crucible 31, the crucible 31 can move along the coating track 33, so that the coating vapor can continuously adhere to the substrate on the coating drum 11.

[0030] More preferably, an unwinding roller 12 , a first flattening roller 13 , a tension roller 14 , a second flattening roller 15 and a winding roller 16 .

[0031] The unwinding roller 12 and the first flattening roller 13 are arranged in front of the coating drum 11. The transmission shaft of the unwinding roller 12 is driven by the first motor, so that the substrate wound on the unwinding roller 12 can be sequentially conveyed to the coating drum 11 through the first flattening roller 13.

[0032] The tension roller 14, the second flattening roller 15 and the winding roller 16 are arranged behind the coating drum 11, and the winding roller 16 is driven by the second motor, so that the substrate after coating can pass through the tension roller, the second flattening roller and the winding roller backwards and complete winding.

[0033] The unwinding roller 12 is used to wind and release the uncoated substrate. The first flattening roller 13 and the second flattening roller 15 are used to flatten the film material to ensure the flatness of the film material. The tension roller 14 is used to measure and control the winding force and tension stability between the coating drum 11 and the winding roller 16. The winding roller 16 is used to wind the coated film material and obtain the final product.

[0034] A pretreatment device 41 is provided between the unwinding roller 12 and the first flattening roller 13. It should be noted that the pretreatment device 41 of this embodiment can perform plasma treatment on the surface of the substrate and plate NiCr, SUS, Si, SiN and other materials on the substrate. On the one hand, it is used to activate the surface of the substrate, and on the other hand, it is used to enhance the adhesion of the substrate to the coating material.

[0035] A post-processing device 42 is provided between the coating drum 11 and the tension roller 14, and the post-processing device 42 is used to eliminate the residual charge of the electron beam on the coating surface of the substrate to prevent the coated film material from being adsorbed on the coating drum due to charge and being difficult to detach.

[0036] A detection mechanism 43 is provided between the coating drum 11 and the tension roller 14. The detection mechanism 43 is connected to the electron gun 22 in a feedback control manner. The detection mechanism 43 is used to test the transmittance or OD (optical density) value of the substrate after coating. The detection system 43 can feed back the detected transmittance or OD (optical density) value of the film material to the control system of the electron gun 22, thereby controlling the strength of the electron beam emitted by the electron gun 22, thereby adjusting the uniformity of the coating process.

[0037] It should be noted that the pre-processing device 41, post-processing device 42 and detection mechanism 43 mentioned in this embodiment are all existing and conventional devices and technical solutions in the field of coating technology. This application only follows their technical solutions and implements them in this solution, so they will not be explained in detail.

[0038] More preferably, the coating chamber 2 is connected to a vacuum negative pressure device and a cold trap device, wherein the vacuum negative pressure device is used to provide a negative pressure environment in the coating chamber 2, and the cold trap device is used to process condensed water molecules in the coating chamber, thereby achieving a vacuum and dry environment in the coating chamber 2. The vacuum negative pressure device and the cold trap device of this embodiment are conventional setting means in the field of coating equipment and will not be described additionally.

[0039] Preferably, a refrigerant is provided inside the coating drum 11, and the refrigerant is used to accommodate a refrigerant medium and is connected to a heat exchanger. The refrigerant is used to maintain the coating drum in a low temperature environment during the coating process to prevent the coating substrate from being thermally deformed due to the influence of high temperature on the coating drum.

[0040] like Figure 3 As shown, the electron gun is a 22 Pierce-type axial electron gun, and its gun body is composed of: a cathode filament 211, a grid 222, an anode 223, a focusing coil 224, and an XY deflection coil 225.

[0041] The cathode filament 211 is made of high-temperature metals such as tungsten and tantalum. When it is connected to a power source and heated to incandescence, electrons are emitted from the metal surface of the filament to heat the tantalum block and emit thermal electrons. These electrons are first gathered into an electron beam by the grid 222, and then accelerated by the anode. After passing through the central hole of the anode 223, the fully accelerated and gradually divergent electron beam is gathered by the magnetic field of the focusing coil 224, and finally reaches the focusing point on the coating material in the crucible 31 after being deflected by the XY deflection coil 225.

[0042] Of course, the above embodiments are only for illustrating the technical concept and features of the utility model, and their purpose is to enable people familiar with the technology to understand the content of the utility model and implement it accordingly, and they cannot be used to limit the protection scope of the utility model. Any modifications made according to the spirit of the main technical solution of the utility model should be included in the protection scope of the utility model.

Claims

1. A coating device with a movable crucible, characterized in that: include: A winding device (1), a coating chamber (2) and a crucible device (3); The winding device (1) is arranged on the peripheral side of the coating chamber (2) and has a coating drum (11) rotatably arranged above the coating chamber. An opening (21) is provided at the upper end of the coating chamber (2), so that the coating drum (11) can enter the coating chamber (2) through the opening (21); An electron gun (22) is provided on one side of the coating chamber (2); the crucible device (3) comprises a crucible (31), a crucible stand (32), a coating track (33) and a driving device; the crucible stand (32) is provided with a loading and unloading track; the crucible (31) is movably arranged on the crucible stand (32) via the loading and unloading track; the coating track (33) is arranged inside the coating chamber (2); the driving device can drive the crucible stand (32) to move along the coating track (33); and when the electron gun (22) scans the material in the crucible (31), the crucible (31) can move along the coating track (33), so that the coating vapor can continuously adhere to the substrate of the coating drum (11).

2. A coating device with a movable crucible according to claim 1, characterized in that: The winding device (1) further comprises: an unwinding roller (12), a first flattening roller (13), a tension roller (14), a second flattening roller (15) and a winding roller (16); The unwinding roller (12) and the first flattening roller (13) are arranged in front of the coating drum (11), and the transmission shaft of the unwinding roller (12) is driven by a first motor, so that the substrate wound on the unwinding roller (12) can be sequentially transported to the coating drum (11) through the first flattening roller (13); The tension roller (14), the second flattening roller (15) and the winding roller (16) are arranged behind the coating drum (11), and the winding roller (16) is driven by a second motor, so that the substrate after coating can pass through the tension roller (14), the second flattening roller (15) and the winding roller (16) backwards and complete winding.

3. A coating device with a movable crucible according to claim 2, characterized in that: A pretreatment device (41) is provided between the unwinding roller (12) and the first flattening roller (13), and the pretreatment device (41) is used to enhance the adhesion of the substrate to the coating material.

4. The coating device with a movable crucible according to claim 2, characterized in that: A post-processing device (42) is provided between the coating drum (11) and the tension roller (14), and the post-processing device (42) is used to eliminate residual charges of the electron beam on the coating surface of the substrate.

5. The coating device with a movable crucible according to claim 2, characterized in that: A detection mechanism (43) is provided between the coating drum (11) and the tension roller (14); the detection mechanism (43) is connected to the electron gun (22) in a feedback control manner; the detection mechanism (43) is used to test the light transmittance or OD value of the substrate after coating.

6. The coating device with a movable crucible according to claim 1, characterized in that: The opening size of the upper end of the coating chamber (2) is 2 mm to 10 mm larger than the cross-sectional diameter of the portion of the coating drum (11) entering the coating chamber (2).

7. The coating device with a movable crucible according to claim 1, characterized in that: The coating chamber (2) is connected to a vacuum negative pressure device and a cold trap device.

8. The coating device with a movable crucible according to claim 1, characterized in that: A refrigerant is provided inside the coating drum (11), and the refrigerant is used to accommodate a refrigerant medium and is connected to a heat exchanger.

9. The coating device with a movable crucible according to claim 1, characterized in that: The electron gun (22) is a Pierce-type axial electron gun, and comprises a cathode filament (211), a grid (222), an anode (223), a focusing coil (224), and an XY deflection coil (225).

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