Material shifting module for process material sheets

Abstract

The utility model discloses a material shifting module for process material sheets, which comprises a base, two groups of first support frames are fixedly connected to the top end of one side of the base, two groups of second support frames are fixedly connected to the top end of the other side of the base, and two groups of protective baffles are fixedly connected between the first support frames and between the second support frames. A first sliding table and a second sliding table are movably connected between the protective baffles from left to right, and a T-shaped hanging table is arranged between the first sliding table and the second sliding table in an attached mode. According to the material shifting module for the procedure material sheets, through the arrangement of the first sliding table, the second sliding table, the T-shaped hanging table, the external connection inserting plate, the connection outer groove, the sensor and the fastening bolt, the material shifting use accuracy is improved, it is guaranteed that the material shifting process is stable, the material sheets are clamped and are not conveyed by mistake, and the problems that when the material sheets are clamped, an alarm cannot be given to stop material shifting, and material shifting claws need to be detached when the material sheets are taken out are solved; the overall maintenance steps are complex and tedious, and the operation of workers is inconvenient.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor material sheet cutting and forming, in particular to a material shifting module for process material sheets. Background Art

[0002] As an important link in the upstream of the semiconductor industry chain, semiconductor materials play a key role in the chip manufacturing process. The semiconductor cutting process is a part of the semiconductor device manufacturing process. Its main function is to cut semiconductor wafers into small pieces for chip manufacturing.

[0003] The material-selecting module currently used cannot alarm and stop material selection when the material is stuck. The material-selecting claws need to be disassembled to remove the material. The overall maintenance steps are complicated and cumbersome, which is inconvenient for staff to operate.

[0004] Therefore, a new type of process material stripping module is proposed to solve the above problems. Utility Model Content

[0005] The utility model aims to provide a material-picking module for a process sheet, so as to solve the problems in the above-mentioned background technology that when the sheet is stuck, an alarm cannot be given to stop the material-picking, the sheet needs to be removed by disassembling the material-picking claws, and the overall maintenance steps are complicated and cumbersome, which is inconvenient for the staff to operate.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a material-pickup module for a process sheet, comprising a base, two groups of first support frames are fixedly connected to the top of one side of the base, two groups of second support frames are fixedly connected to the top of the other side of the base, two groups of protective baffles are fixedly connected between the first support frames and between the second support frames, and a first slide and a second slide are movably connected between the protective baffles from left to right;

[0007] A T-shaped hanging platform is arranged between the first slide and the second slide, the bottom ends of both sides of the T-shaped hanging platform are located at the bottom of the first slide and the second slide, the front end and the rear end of the bottom of both sides of the T-shaped hanging platform are movably connected with external plug-in boards, the top of the external plug-in board is sleeved and installed on the outside of the protective baffle, the top of the external plug-in board is vertically penetrated by a fastening bolt, the top of the fastening bolt is fixedly connected with a second knob, and the first slide and the second slide are symmetrically distributed about the vertical center line of the base;

[0008] Preferably, connecting outer grooves are opened on both sides of the T-shaped hanging platform, the side walls inside the connecting outer grooves are fixedly connected with sensors, the bottom end of the protective baffle is fixedly connected with a fixed bottom column, and the bottom end of the fixed bottom column is fixedly connected to the top end of the base.

[0009] Preferably, the front ends of the tops of the first support frame and the second support frame are fixedly connected to mounting seats, a sliding rod is laterally installed inside the mounting seats, the top end of one side of the base is fixedly connected to a control drive module, and the side wall of the control drive module is fixedly connected to a linkage shaft.

[0010] Preferably, a transmission belt is sleeved between the outside of the linkage shaft and the outside of the slide rod, the outside of the slide rod is fixedly connected to multiple sets of fixed rings, the top of the fixed ring is slidably connected to a material pushing claw, and the side wall of the material pushing claw is fixedly connected to a power cylinder.

[0011] Preferably, two sets of connecting seats are fixedly connected to the bottom ends of both sides of the base, a sleeve is fixedly connected to the top end of the connecting seat, a mounting bolt is vertically penetrated inside the sleeve, a first knob is fixedly connected to the top end of the mounting bolt, the bottom of the mounting bolt is pointed, and the bottom of the mounting bolt passes through the interior of the connecting seat.

[0012] Preferably, a limiting groove is provided at the bottom end of the base, and a clamping seat is fixedly connected to the four corners inside the limiting groove. A non-slip bottom pad is provided inside the limiting groove, and the four corners of the non-slip bottom pad form a clamping connection with the inside of the clamping seat.

[0013] Compared with the prior art, the utility model has the following beneficial effects: the material shifting module of the material sheet in this process not only realizes the stable material shifting function, realizes the convenient disassembly function, but also realizes the installation and fixing function;

[0014] (1) A first slide, a second slide, a T-shaped hanging platform, an external plug-in board, a connecting outer groove, a sensor and a fastening bolt are provided, and a T-shaped hanging platform is fitted and connected between the first slide and the second slide, so as to ensure that the first slide and the second slide are in independent operating spaces and do not affect each other. At the same time, the T-shaped hanging platform is turned over and inserted into the outside of the protective baffle by using the external plug-in board movably connected at both ends. The external plug-in board and the protective baffle can be assembled and fixed by rotating and moving the fastening bolts, so as to ensure that the T-shaped hanging platform will not be offset during use, thereby improving the accuracy of use. At the same time, the T-shaped hanging platform can be provided with all-round fixed support. The position between the first slide and the second slide can be detected by using the sensor. If the position of the first slide and the second slide deviates during the material selection process, it is determined to be a stuck material;

[0015] (2) A mounting seat, a slide bar, a transmission belt, a linkage shaft, a first support frame and a second support frame are provided, and the outside of the slide bar is fixedly connected to multiple sets of fixing rings, and the power cylinder can provide the material-prying power of the material-prying claw. The slide bar transversely penetrates the inside of the multiple sets of mounting seats to provide fixed support for the outside of the slide bar to prevent the slide bar from falling off. The linkage shaft and the transmission belt cooperate with each other to drive the slide bar to rotate stably inside the mounting seat, and the material-prying claw is rotated outward by a certain angle, which is convenient for subsequent maintenance and repair of the material-prying claw without disassembling the material-prying claw, thereby optimizing the operation steps;

[0016] (3) By providing a connecting seat, a sleeve, a mounting bolt, a first knob, a non-slip bottom pad and a clamping seat, the base can be fixedly installed in the equipment by rotating downward using multiple sets of mounting bolts, thereby enhancing the firm connection between the base and the equipment and expanding the application range of the overall structure. The sleeve can provide a guide for the movement of the mounting bolts, and the non-slip bottom pad can be used to enhance the anti-slip property of the bottom surface of the base, enhance the stability of the base surface, and prevent the base from sliding during use and affecting the overall processing effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a front view cross-sectional structural schematic diagram of the utility model;

[0018] Figure 2 This is a schematic diagram of the top view structure of the T-shaped hanging platform of the utility model;

[0019] Figure 3 For the utility model Figure 1 A schematic diagram of the enlarged structure of the local section at point A in the middle;

[0020] Figure 4 The utility model is a schematic diagram of the anti-skid bottom pad when viewed from above.

[0021] In the figure: 1. base; 2. connecting seat; 3. sleeve; 4. first knob; 5. protective baffle; 6. first support frame; 7. material removal claw; 8. power cylinder; 9. connecting outer groove; 10. mounting seat; 11. mounting bolts; 12. slide bar; 13. fixed bottom column; 14. fixing ring; 15. sensor; 16. transmission belt; 17. linkage shaft; 18. control drive module; 19. first slide; 20. external plug-in board; 21. second knob; 22. T-shaped hanging platform; 23. second support frame; 24. second slide; 25. fastening bolts; 26. clamping seat; 27. limiting groove; 28. anti-slip bottom pad. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] Example 1: Please refer to Figure 1-4 A material-picking module for a process sheet includes a base 1, two groups of first support frames 6 are fixedly connected to the top of one side of the base 1, two groups of second support frames 23 are fixedly connected to the top of the other side of the base 1, two groups of protective baffles 5 are fixedly connected between the first support frames 6 and the second support frames 23, and a first slide 19 and a second slide 24 are movably connected between the protective baffles 5 from left to right;

[0024] A T-shaped hanging platform 22 is arranged between the first slide 19 and the second slide 24, the bottom ends of both sides of the T-shaped hanging platform 22 are located at the bottom of the first slide 19 and the second slide 24, the front end and the rear end of the bottom of both sides of the T-shaped hanging platform 22 are movably connected with an external plug-in board 20, the top of the external plug-in board 20 is sleeved and installed to the outside of the protective baffle 5, the top of the external plug-in board 20 is vertically penetrated by a fastening bolt 25, the top of the fastening bolt 25 is fixedly connected with a second knob 21, and the first slide 19 and the second slide 24 are symmetrically distributed about the vertical center line of the base 1;

[0025] The two sides of the T-shaped hanging platform 22 are provided with connecting outer grooves 9, the side walls of the connecting outer grooves 9 are fixedly connected with sensors 15, the bottom end of the protective baffle 5 is fixedly connected with a fixed bottom column 13, and the bottom end of the fixed bottom column 13 is fixedly connected with the top end of the base 1;

[0026] Specifically, Figure 1 and Figure 2 As shown, when in use, the T-shaped hanging platform 22 is installed between the first slide 19 and the second slide 24, and the multiple sets of external plug-in boards 20 are turned over and inserted into the outside of the protective baffle 5. After turning the second knob 21 in sequence, the fastening bolts 25 are driven to move downward, passing through the top of the external plug-in board 20 and the protective baffle 5, and the T-shaped hanging platform 22 is fixed. The first slide 19 is separated from the second slide 24 by the T-shaped hanging platform 22. The sensor 15 is used to detect the position between the first slide 19 and the second slide 24. If the position of the first slide 19 and the second slide 24 deviates during the material selection process, it is determined to be a material jam, and the power cylinder 8 immediately stops the material selection and retreats.

[0027] Embodiment 2: The front ends of the tops of the first support frame 6 and the second support frame 23 are fixedly connected with a mounting seat 10, a slide bar 12 is horizontally installed inside the mounting seat 10, a control drive module 18 is fixedly connected to the top of one side of the base 1, and a linkage shaft 17 is fixedly connected to the side wall of the control drive module 18;

[0028] A transmission belt 16 is sleeved between the outside of the linkage shaft 17 and the outside of the slide bar 12. The outside of the slide bar 12 is fixedly connected with multiple sets of fixing rings 14. The top of the fixing ring 14 is slidably connected with a material-moving claw 7. The side wall of the material-moving claw 7 is fixedly connected with a power cylinder 8.

[0029] Specifically, Figure 1 and Figure 3 As shown, when in use, the outside of the slide bar 12 is fixedly connected with multiple sets of fixing rings 14, and the material is removed by multiple sets of material removal claws 7. The slide bar 12 transversely penetrates the interior of multiple sets of mounting seats 10. When material jam occurs, the linkage shaft 17 can be driven to rotate by controlling the drive module 18, and the transmission belt 16 can be used to drive the slide bar 12 to rotate accordingly. The slide bar 12 can be rotated, and after rotation, the material removal claws 7 rise up to make space for removing the material sheets, which is also convenient for maintenance.

[0030] Embodiment 3: Two sets of connecting seats 2 are fixedly connected to the bottom ends of both sides of the base 1, and a sleeve 3 is fixedly connected to the top of the connecting seat 2. A mounting bolt 11 is vertically penetrated inside the sleeve 3, and a first knob 4 is fixedly connected to the top of the mounting bolt 11. The bottom of the mounting bolt 11 is pointed, and the bottom of the mounting bolt 11 penetrates the inside of the connecting seat 2;

[0031] A limiting groove 27 is provided at the bottom end of the base 1, and a clamping seat 26 is fixedly connected to the four corners of the limiting groove 27. An anti-skid bottom pad 28 is provided inside the limiting groove 27, and the four corners of the anti-skid bottom pad 28 are clamped and connected with the inside of the clamping seat 26;

[0032] Specifically, Figure 1 and Figure 4 As shown, when in use, the anti-skid bottom pad 28 is placed into the limiting groove 27 until the four corners of the outside of the anti-skid bottom pad 28 are snap-fitted and fixed in the corresponding snap-fit ​​seat 26 to provide anti-skid support for the base 1. The base 1 is placed on the operating table surface of the equipment, and the first knob 4 is turned in turn. The first knob 4 drives the mounting bolt 11 to pass through the inside of the connecting seat 2 to fix the base 1 in all directions.

[0033] Working principle: When the utility model is in use, the anti-skid bottom pad 28 is placed inside the limiting groove 27 until the four corners of the outside of the anti-skid bottom pad 28 are snap-fitted and fixed inside the corresponding snap-fit ​​seat 26, the base 1 is placed on the operating table surface of the equipment, and the first knob 4 is turned in sequence. The first knob 4 drives the mounting bolt 11 to penetrate the inside of the connecting seat 2 to fix the base 1 in all directions. The outside of the slide bar 12 is fixedly connected with multiple sets of fixing rings 14, and the T-shaped hanging platform 22 is fitted and installed between the first slide 19 and the second slide 24. The multiple sets of external plug-in boards 20 are turned over and inserted into the outside of the protective baffle 5. After the second knob 21 is turned in sequence, the fastening bolts 25 are driven to move downward, penetrate the top of the external plug-in board 20 and the protective baffle 5, and fix the T-shaped hanging platform 22. The sensor 15 is used to detect the position between the first slide 19 and the second slide 24. If the position of the first slide 19 and the second slide 24 deviates during the material selection process, it is determined to be a stuck material, and the power cylinder 8 immediately stops the material selection and retreats.

[0034] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

Claims

1. A material-selecting module for a process sheet, comprising a base (1), characterized in that: Two groups of first support frames (6) are fixedly connected to the top of one side of the base (1), and two groups of second support frames (23) are fixedly connected to the top of the other side of the base (1); two groups of protective baffles (5) are fixedly connected between the first support frames (6) and between the second support frames (23); and a first slide (19) and a second slide (24) are movably connected between the protective baffles (5) from left to right; A T-shaped hanging platform (22) is arranged between the first slide (19) and the second slide (24), and the bottom ends of both sides of the T-shaped hanging platform (22) are located at the bottom of the first slide (19) and the second slide (24). The front end and the rear end of the bottom of both sides of the T-shaped hanging platform (22) are movably connected with an external plug-in board (20), and the top of the external plug-in board (20) is sleeved and installed on the outside of the protective baffle (5). A fastening bolt (25) is vertically penetrated through the top of the external plug-in board (20), and the top of the fastening bolt (25) is fixedly connected with a second knob (21). The first slide (19) and the second slide (24) are symmetrically distributed about the vertical center line of the base (1).

2. The material stripping module for a process sheet according to claim 1, characterized in that: The T-shaped hanging platform (22) is provided with connecting outer grooves (9) on both sides, the side walls inside the connecting outer grooves (9) are fixedly connected to sensors (15), the bottom end of the protective baffle (5) is fixedly connected to a fixed bottom column (13), and the bottom end of the fixed bottom column (13) is fixedly connected to the top end of the base (1).

3. The material stripping module for a process sheet according to claim 1, characterized in that: The front ends of the tops of the first support frame (6) and the second support frame (23) are fixedly connected to a mounting seat (10), a sliding rod (12) is transversely installed inside the mounting seat (10), the top end of one side of the base (1) is fixedly connected to a control drive module (18), and the side wall of the control drive module (18) is fixedly connected to a linkage shaft (17).

4. The material stripping module for a process sheet according to claim 3, characterized in that: A transmission belt (16) is sleeved between the outside of the linkage shaft (17) and the outside of the slide rod (12); the outside of the slide rod (12) is fixedly connected to a plurality of sets of fixing rings (14); the top of the fixing ring (14) is slidably connected to a material-moving claw (7); and the side wall of the material-moving claw (7) is fixedly connected to a power cylinder (8).

5. The material stripping module for a process sheet according to claim 1, characterized in that: Two groups of connecting seats (2) are fixedly connected to the bottom ends of both sides of the base (1), and a sleeve (3) is fixedly connected to the top end of the connecting seat (2). A mounting bolt (11) is vertically penetrated inside the sleeve (3), and a first knob (4) is fixedly connected to the top end of the mounting bolt (11). The bottom of the mounting bolt (11) is pointed, and the bottom of the mounting bolt (11) penetrates the inside of the connecting seat (2).

6. The material stripping module for a process sheet according to claim 1, characterized in that: A limiting groove (27) is provided at the bottom end of the base (1), and a clamping seat (26) is fixedly connected to the four corners inside the limiting groove (27). An anti-slip bottom pad (28) is provided inside the limiting groove (27), and the four corners of the anti-slip bottom pad (28) are in clamping connection with the inside of the clamping seat (26).

Images