Cleaning device and cleaning texturing equipment

Abstract

The utility model discloses a cleaning device and cleaning and texturing equipment, and relates to the technical field of solar cell production equipment. The cleaning device comprises a cleaning tank, a heat exchange assembly and a circulation loop. The cleaning tank comprises a main tank and an overflow tank, and the overflow tank is communicated with the main tank; two ends of the circulation loop are respectively communicated with the main tank and the overflow tank; the heat exchange assembly is arranged in the overflow groove. The utility model further provides cleaning and texturing equipment which comprises the cleaning device. The problems that the current heat exchange efficiency is low, and the heat exchange effect is poor can be solved at least, and the heat exchange efficiency and the heat exchange effect can be improved.

Description

Technical Field

[0001] The present application belongs to the technical field of solar cell production equipment, and relates to a cleaning device and a cleaning and texturing equipment. Background Art

[0002] At present, in solar silicon wafer cleaning equipment, the liquid composition in the pre-cleaning tank is usually HF+HCL+O 3 , pre-clean the silicon wafers. During the cleaning process, the temperature of the solution has a great influence on the ozone concentration in the tank. Therefore, the temperature of the solution in the tank needs to be controlled within a certain range. The temperature of the solution in the tank should not be too low or too high. The pre-cleaning solution needs to be temperature-controlled to maintain the stability of the ozone concentration.

[0003] In the related art, some pre-cleaning tanks are equipped with heat exchangers such as tubular heat exchangers to control the temperature of the liquid medicine to achieve the purpose of stabilizing the ozone concentration. The liquid medicine is extracted by a circulating pump, cooled by a heat exchanger, and the ozone produced by the ozone generator is dissolved into the liquid medicine pipe after circulating cooling, and then circulated back to the tank to ensure that the ozone concentration meets the process requirements.

[0004] However, due to the limited space in the pipeline area, the volume of the heat exchanger is compressed when it is arranged in the pipeline area, resulting in the heat exchange tubes in the heat exchanger being arranged tightly, affecting the heat exchange efficiency. In addition, when scale is generated on the inner wall of the heat exchange tube, it is difficult to maintain. Over time, the heat exchange effect is affected, and it is impossible to achieve precise control of the temperature of the chemical solution, which in turn affects the ozone concentration.

[0005] Therefore, there is an urgent need to find effective solutions to solve the above problems. Utility Model Content

[0006] The utility model aims to solve at least one of the above technical problems to a certain extent. To this end, the utility model proposes a cleaning device and a cleaning and velveting equipment, which can at least alleviate the current problems of low heat exchange efficiency and poor heat exchange effect, and can improve the heat exchange efficiency and heat exchange effect.

[0007] In order to solve the above technical problems, this application is implemented as follows:

[0008] According to an embodiment of the utility model, a cleaning device is provided, which includes: a cleaning tank, a heat exchange component and a circulation loop;

[0009] The cleaning tank comprises a main tank and an overflow tank, wherein the overflow tank is connected to the main tank;

[0010] The two ends of the circulation loop are respectively connected to the main tank and the overflow tank;

[0011] The heat exchange component is arranged in the overflow tank.

[0012] In addition, the cleaning device according to the utility model may also have the following additional technical features:

[0013] In some embodiments, the heat exchange assembly includes at least one group of heat exchange tubes, and each group of heat exchange tubes is coiled and arranged in the overflow tank.

[0014] In some of the embodiments, each group of the heat exchange tubes includes a plurality of the heat exchange tubes, and the plurality of the heat exchange tubes are arranged along a direction from the bottom of the overflow tank to the slot opening.

[0015] In some embodiments, a plurality of support members are disposed in the overflow tank, and the plurality of support members are arranged at intervals in the direction in which each of the heat exchange tubes is coiled and extended;

[0016] Each of the supporting members is provided with a plurality of through holes, and the plurality of heat exchange tubes pass through the plurality of through holes of each of the supporting members correspondingly, and each of the heat exchange tubes passes through the corresponding through holes on the plurality of supporting members in sequence.

[0017] In some embodiments, the heat exchange assembly further includes an input flange and an output flange respectively disposed outside the overflow tank, the input flange being provided with an input port, and the output flange being provided with an output port;

[0018] One end of each of the plurality of heat exchange tubes is connected to the input flange and communicated with the input port, and the other end of each of the plurality of heat exchange tubes is connected to the output flange and communicated with the output port.

[0019] In some of the embodiments, the cleaning device further comprises a first sealing plate and a second sealing plate, wherein the first sealing plate and the second sealing plate are respectively connected to the outer wall of the overflow tank;

[0020] The first sealing plate is provided with a plurality of first mounting holes, each of which is connected with a first ferrule, and one end of each of the heat exchange tubes is correspondingly inserted into the first ferrule;

[0021] The second sealing plate is provided with a plurality of second mounting holes, each of the second mounting holes is connected with a second ferrule, and the other end of each of the heat exchange tubes is correspondingly inserted into the second ferrule.

[0022] In some embodiments, in the first direction, the overflow grooves are distributed on both sides of the main groove, and in the second direction, the overflow grooves are distributed on one side of the main groove, wherein the first direction, the second direction, and the direction from the bottom of the overflow groove to the groove opening are perpendicular to each other;

[0023] Each group of the heat exchange tubes is distributed in two side regions of the main tank in the first direction and in one side region in the second direction.

[0024] In some of the embodiments, the heat exchange assembly includes a plurality of groups of the heat exchange tubes;

[0025] In the first direction, the plurality of groups of heat exchange tubes are staggered; and / or,

[0026] In the second direction, the plurality of groups of heat exchange tubes are staggered.

[0027] In some of the embodiments, the heat exchange tube is a transparent tube.

[0028] In some of the embodiments, the cleaning device further comprises an ozone generator;

[0029] The ozone generator is connected in the circulation loop.

[0030] In some of the embodiments, a filter element is disposed at the bottom of the overflow tank, and the filter element is disposed corresponding to the inlet end of the circulation loop.

[0031] According to an embodiment of the utility model, a cleaning and texturing device is also provided, which includes the aforementioned cleaning device.

[0032] Implementing the technical solution of this application has at least the following beneficial effects:

[0033] According to the cleaning device provided by the present application, the cleaning liquid in the overflow tank is directly heat exchanged by the heat exchange component arranged in the overflow tank to meet the temperature requirement of the cleaning liquid, and the cleaning liquid in the overflow tank is extracted through the circulation loop, and the cleaning liquid is oxygenated by the ozone generator connected to the circulation loop, so that the ozone concentration requirement in the cleaning liquid can be met. Compared with the method of arranging the heat exchanger outside the pre-cleaning tank in the prior art, the present application arranges the heat exchange component in the overflow tank, which can avoid the occupation of the pipeline area by the heat exchange component, thereby effectively avoiding the problem that the volume of the heat exchange component is compressed due to the limited space in the pipeline area, thereby affecting the arrangement of the heat exchange tubes and ultimately affecting the heat exchange efficiency; and after scale is generated in the heat exchange component, the heat exchange component can be directly removed for repair or replacement, thereby facilitating maintenance, and effectively alleviating the problem that the scale generated due to the difficulty of repairing the heat exchange component affects the heat exchange effect, so it can be beneficial to the precise control of the temperature of the cleaning liquid and ensure that the ozone concentration is not affected.

[0034] Additional aspects and advantages of the present application will be given in part in the following description, and in part will become apparent from the following description, or will be understood through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 A schematic diagram of a cleaning device disclosed in an embodiment of the present application;

[0036] Figure 2 A schematic diagram of the cleaning tank and heat exchange assembly disclosed in the embodiment of the present application;

[0037] Figure 3 A first perspective view of the cleaning tank and other structures disclosed in the embodiment of the present application;

[0038] Figure 4 A second perspective view of the cleaning tank and other structures disclosed in the embodiment of the present application;

[0039] Figure 5 It is a schematic diagram of the structure of the heat exchange component and the like disclosed in the embodiment of the present application;

[0040] Figure 6 Schematic diagram of the staggered distribution of some heat exchange components disclosed in the embodiments of the present application.

[0041] Description of reference numerals:

[0042] 10-cleaning tank; 110-main tank; 120-overflow tank; 121-support member; 1211-through hole; 130-overflow hole;

[0043] 20-heat exchange component; 210-heat exchange tube; 220-input flange; 221-input port; 230-output flange; 231-output port;

[0044] 30-circulation loop;

[0045] 40-Ozone generator;

[0046] 51-first sealing plate; 52-second sealing plate;

[0047] 61-first ferrule; 62-second ferrule;

[0048] 70-filter element;

[0049] 81-input pipeline; 82-output pipeline. DETAILED DESCRIPTION

[0050] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0051] The terms "first", "second", etc. in the specification and claims of the present application are used to distinguish similar objects, and are not used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable under appropriate circumstances, so that the embodiments of the present application can be implemented in an order other than those illustrated or described here, and the objects distinguished by "first", "second", etc. are generally of one type, and the number of objects is not limited. For example, the first object can be one or more. In addition, "and / or" in the specification and claims represents at least one of the connected objects, and the character " / " generally indicates that the objects associated with each other are in an "or" relationship.

[0052] The embodiments of the present application are described in detail below through specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0053] As mentioned in the background technology, a cleaning tank structure is proposed in the related technology, which uses a pump to extract the cleaning liquid in the tank, oxygenates the cleaning liquid through an ozone generator, and then exchanges heat with the cleaning liquid through an external heat exchanger, and the cleaning liquid after oxygenation and heat exchange flows back to the tank. However, the larger the liquid tank, the larger the tubular heat exchanger needs to be equipped, and the larger space needs to be reserved in the pipeline area to place the tubular heat exchanger. The space in the pipeline area is limited, and the pipeline layout is more difficult.

[0054] Therefore, the above method will cause the heat exchanger to be affected by the cramped space in the pipeline area, making the heat exchange tubes in the heat exchanger tightly arranged; in addition, after long-term operation, scale will be generated in the heat exchange tubes, and the heat exchange tubes need to be cleaned to prevent affecting the heat exchange effect. However, since the heat exchange tubes are tightly arranged and difficult to maintain, the precise control of the cleaning liquid temperature will be affected in the long run, thereby affecting the ozone concentration. In addition, the tight arrangement of the heat exchange tubes will also increase the difficulty of arranging the heat exchange tubes. If the heat exchanger shell is damaged and the liquid leaks, there will also be certain safety hazards.

[0055] Based on the above problems, the present application provides a cleaning device, which can effectively alleviate the above problems. The cleaning device provided can be used in the field of solar cell production, such as in cleaning and texturing equipment, for cleaning silicon wafers; in addition, the cleaning device can also be used in other fields or equipment, and the embodiments of the present application do not impose specific restrictions on the specific use scenarios and working conditions of the cleaning device.

[0056] like Figures 1 to 6 As shown, the provided cleaning device includes a cleaning tank 10 , a heat exchange component 20 , a circulation loop 30 and an ozone generator 40 .

[0057] The cleaning tank 10 includes a main tank 110 and an overflow tank 120, and the overflow tank 120 is connected to the main tank 110. The main tank 110 is mainly used to contain cleaning liquid so as to clean the silicon wafer (such as pre-cleaning) with the cleaning liquid, and the overflow tank 120 is used to contain the cleaning liquid overflowing from the main tank 110 to ensure the sufficiency of the cleaning liquid.

[0058] In the cleaning tank 10, the main tank 110 will have certain reactions during the cleaning process, which will cause heat release and increase the temperature of the cleaning liquid, that is, the liquid medicine, which will seriously affect the concentration of ozone in the liquid medicine. Once the ozone concentration decreases, the efficiency of the entire cleaning will decrease. Therefore, it is necessary to control the temperature of the liquid medicine in the main tank 110.

[0059] In addition, during the cleaning process of the silicon wafer, the temperature of the cleaning liquid and the ozone concentration in the cleaning liquid can also be controlled to meet the process requirements for cleaning the silicon wafer. In order to ensure that the ozone concentration in the cleaning liquid is appropriate, an ozone generator 40 can be added, and the ozone generator 40 is connected to the circulation loop 30, and the two ends of the circulation loop 30 are respectively connected to the main tank 110 and the overflow tank 120. Therefore, the cleaning liquid overflowing into the overflow tank 120 can be returned to the main tank 110 through the circulation loop 30, thereby realizing the recycling of the cleaning liquid to achieve the purpose of saving the cleaning liquid; and in the process of the cleaning liquid flowing, the circulating cleaning liquid can be oxygenated by the ozone generator 40, so that part of the ozone can be dissolved in the cleaning liquid, and return to the main tank 110 with the cleaning liquid, so as to facilitate the cleaning of the silicon wafer again.

[0060] Optionally, the circulation loop 30 may include a circulation pipe and a circulation pump, the circulation pump is connected to the circulation pipe, one end of the circulation pipe is connected to the overflow tank 120, and the other end of the circulation pipe is connected to the main tank 110. Under the driving action of the circulation pump, the cleaning liquid in the overflow tank 120 can continuously flow back to the main tank 110 through the circulation pipe, and the cleaning liquid in the main tank 110 continuously overflows into the overflow tank 120, thereby realizing the circulation of the cleaning liquid.

[0061] Since the concentration of ozone dissolved in the cleaning liquid is affected by the temperature of the cleaning liquid, the temperature of the cleaning liquid needs to be accurately controlled to ensure the accurate concentration of ozone in the cleaning liquid. Therefore, the heat exchange component 20 is arranged in the overflow tank 120, which can perform real-time heat exchange on the cleaning liquid in the overflow tank 120, thereby ensuring the temperature of the cleaning liquid, and further ensuring the amount of ozone dissolved in the cleaning liquid.

[0062] The embodiment of the present application directly exchanges heat for the cleaning liquid in the overflow tank 120 through the heat exchange component 20 disposed in the overflow tank 120 to meet the temperature requirement for the cleaning liquid, and extracts the cleaning liquid in the overflow tank 120 through the circulation loop 30, and oxygenates the cleaning liquid through the ozone generator 40 connected to the circulation loop 30, thereby meeting the ozone concentration requirement in the cleaning liquid.

[0063] Compared with the prior art method of setting the heat exchanger outside the pre-cleaning tank, the present application sets the heat exchange component 20 in the overflow tank 120, which can avoid the occupation of the pipeline area by the heat exchange component 20, thereby effectively avoiding the problem that the volume of the heat exchange component 20 is compressed due to the limited space in the pipeline area, thereby affecting the arrangement of the heat exchange tubes 210 and ultimately affecting the heat exchange efficiency; and, after scale is generated in the heat exchange component 20, the heat exchange component 20 can be directly removed for repair or replacement, thereby facilitating maintenance, and effectively alleviating the problem that the heat exchange component 20 is not easy to repair, so that the scale generated affects the heat exchange effect, and thus it can be beneficial to the precise control of the cleaning liquid temperature to ensure that the ozone concentration is not affected.

[0064] Thus, by converting the external heat exchange method in the prior art to heat exchange in the tank, a heat exchange component 20 such as a heat exchange component 20 including a coiled PFA tube is set in the overflow tank 120 of the cleaning tank 10, and cooling water is circulated through the PFA tube in the tank to accurately control the temperature of the liquid medicine. The liquid medicine in the overflow tank 120 that meets the temperature control requirements is circulated with the liquid medicine in the main tank 110 through a pump, and ozone required by the product process is added as needed in the circulation loop 30, so that the concentration of chemicals and ozone in the main tank 110 can be more uniform.

[0065] Optionally, the heat exchange assembly 20 may include at least one group of heat exchange tubes 210, and each group of heat exchange tubes 210 is coiled and arranged in the overflow tank 120. By arranging the heat exchange tubes 210, the heat exchange surface area of ​​the heat exchange assembly 20 can be increased to a certain extent, thereby improving the heat exchange efficiency between the heat exchange assembly 20 and the cleaning liquid in the overflow tank 120.

[0066] In addition, the heat exchange tube 210 can be coiled to increase the heat exchange surface area, thereby improving the heat exchange efficiency. For example, the heat exchange tube 210 can be spirally coiled, bent coiled, reciprocating coiled, etc., which can be selected according to actual working conditions.

[0067] To reduce the overall volume of the heat exchange assembly 20, the heat exchange tubes 210 can be a group; of course, to improve the heat exchange efficiency, the heat exchange tubes 210 can be multiple groups, such as two or more groups. In the embodiment of the present application, the specific number of groups of the heat exchange tubes 210 can be selected according to the actual working conditions.

[0068] Each group of heat exchange tubes may include multiple heat exchange tubes 210, and the multiple heat exchange tubes 210 are arranged along the direction from the bottom to the slot of the overflow slot 120. This arrangement can increase the heat exchange surface area of ​​each group of heat exchange tubes 210 in the direction from the bottom to the slot, which is conducive to improving the heat exchange efficiency.

[0069] It should be clarified here that in some cases, the overflow groove 120 is located on the side of the main groove 110, and the width (such as the first direction or the second direction) of the overflow groove 120 is relatively small, while the height is larger, that is, the overflow groove 120 is relatively large in the direction from the bottom of the groove to the groove mouth, and at this time, multiple heat exchange tubes 210 can be arranged in this direction.

[0070] In addition, when the width of the overflow tank 120 is relatively large, multiple groups of heat exchange tubes 210 can be arranged in the width direction to increase the heat exchange area in the width direction, thereby improving the heat exchange efficiency.

[0071] In order to achieve the limiting and fixing effect on the heat exchange tube 210, a plurality of support members 121 may be provided in the overflow tank 120. The plurality of support members 121 are arranged at intervals in the direction in which each heat exchange tube 210 is coiled and extended. Each heat exchange tube 210 can be limited and fixed in the overflow tank 120 by the plurality of support members 121, thereby ensuring the stability and firmness of each heat exchange tube 210. Optionally, the support member 121 may be a support plate, a support block or other structure, which is not specifically limited here. Thus, by providing a plurality of support members 121 arranged at intervals in the overflow tank 120, the heat exchange tube 210 can be supported and fixed, thereby improving the heat exchange efficiency.

[0072] Furthermore, each support member 121 is provided with a plurality of through holes 1211, and a plurality of heat exchange tubes 210 pass through the plurality of through holes 1211 of each support member 121, and each heat exchange tube 210 passes through the corresponding through holes 1211 on the plurality of support members 121 in sequence. Therefore, the hole wall of the through hole 1211 on each support member 121 can limit and fix the heat exchange tube 210, and prevent assembly interference with the heat exchange tube 210, thereby ensuring the stability and firmness of the heat exchange tube 210.

[0073] In order to further improve the heat exchange effect, the support member 121 can be a heat conductive member, such as a metal member. In addition to the heat exchange through the contact between the tube wall of the heat exchange tube 210 and the cleaning liquid in the overflow tank 120, the heat exchange can also be achieved through the contact between the support member 121 and the cleaning liquid in the overflow tank 120, thereby increasing the heat exchange surface area between the heat exchange component 20 and the cleaning liquid, thereby improving the heat exchange efficiency.

[0074] In the embodiment of the present application, the heat exchange tube 210 can be a transparent tube, that is, the heat exchange tube 210 has a transparent and visible characteristic, so that the cleanliness of the inner wall of the heat exchange tube 210 can be clearly observed, so as to judge whether the heat exchange tube 210 needs to be cleaned, so as to avoid excessive cleaning causing waste of resources or untimely cleaning affecting the heat exchange efficiency.

[0075] Optionally, the heat exchange tube 210 is a plastic transparent tube, such as a PFA (tetrafluoroethylene-perfluoroalkoxy vinyl ether copolymer) tube. In this embodiment, by using a PFA tube as the heat exchange tube 210, the transparency and visibility of the heat exchange tube 210 can be improved, and the service life is long and the cost is low.

[0076] The PFA tube is coiled and disposed in the overflow tank 120 , and cooling water is introduced into the interior of the PFA tube to reduce the temperature of the liquid in the overflow tank 120 .

[0077] In some embodiments, the heat exchange assembly 20 may further include an input flange 220 and an output flange 230, wherein the input flange 220 and the output flange 230 are respectively arranged outside the overflow tank 120, wherein the input flange 220 is provided with an input port 221, and the output flange 230 is provided with an output port 231, and one end of each of the plurality of heat exchange tubes 210 is connected to the input flange 220 and communicates with the input port 221, and the other end of each of the plurality of heat exchange tubes 210 is connected to the output flange 230 and communicates with the output port 231. The plurality of heat exchange tubes 210 in the embodiment of the present application may share an input flange 220, so that heat exchange medium is respectively input into the plurality of heat exchange tubes 210 through the shared input port 221; and the plurality of heat exchange tubes 210 may also share an output flange 230, so that the heat exchange medium in the plurality of heat exchange tubes 210 is discharged through the shared output port 231. Therefore, the above-mentioned shared structure can reduce the use of components, which is conducive to reducing structural complexity and cost.

[0078] Furthermore, the input flange 220 may be provided with an input flow channel and a plurality of input flow diversion ports, the input port 221 is in communication with the input flow channel, the input flow channel is in communication with the plurality of input flow diversion ports respectively, and the plurality of input flow diversion ports are in communication with the plurality of heat exchange tubes 210 in a one-to-one correspondence. Therefore, the heat exchange medium entering the input flange 220 through the input port 221 may be distributed to the plurality of input flow diversion ports through the input flow channel, and finally enter the plurality of heat exchange tubes 210 respectively.

[0079] Similarly, the output flange 230 may be provided with an output flow channel and a plurality of output flow diversion ports, the output port 231 is in communication with the output flow channel, the output flow channel is in communication with the plurality of output flow diversion ports respectively, and the plurality of output flow diversion ports are in communication with the plurality of heat exchange tubes 210 in a one-to-one correspondence. Therefore, the heat exchange medium in the plurality of heat exchange tubes 210 may be respectively collected into the output flow channel through the plurality of output flow diversion ports, and flow into the output port 231 through the output flow channel, and finally discharge the heat exchange medium.

[0080] The input flange 220 can be used as a cooling water inlet flange. The interior of the flange is a cavity structure. An input port 221 can be set on the front surface of the input flange 220, and multiple holes can be set on the rear surface of the input flange 220 for connecting multiple groups of heat exchange tubes 210, such as multiple groups of PFA tubes. Similarly, the general structure of the output flange 230 can be consistent with the structure of the input flange 220, so that the circulation of cooling water can be realized by one inlet and one outlet.

[0081] Optionally, the input flange 220 can be used to connect with the input pipeline 81, such as connecting the input port 221 of the input flange 220 to one end of the input pipeline 81, and connecting the other end of the input pipeline 81 to a cooling water source; cooling water is provided by the cooling water source, and input to the input flange 220 through the input pipeline 81, and then input to the multiple groups of heat exchange tubes 210. The output flange 230 can be used to connect with the output pipeline 82, such as connecting the output port 231 of the output flange 230 to one end of the output pipeline 82, and the other end of the output pipeline 82 can be connected to a cooling water source or other cooling water device.

[0082] In some embodiments, the cleaning device may further include a first sealing plate 51 and a second sealing plate 52, wherein the first sealing plate 51 and the second sealing plate 52 are respectively connected to the outer wall of the overflow groove 120, and the gap between the input end of the heat exchange tube 210 and the outer wall of the overflow groove 120 can be sealed by the first sealing plate 51, and the gap between the output end of the heat exchange tube 210 and the outer wall of the overflow groove 120 can be sealed by the second sealing plate 52. In addition, the first sealing plate 51 and the second sealing plate 52 can also support and limit the heat exchange tube 210 to ensure the stability of the heat exchange tube 210, and effectively prevent the cleaning liquid in the overflow groove 120 from leaking from the gap between the heat exchange tube 210 and the outer wall of the overflow groove 120, so that the sealing effect can be improved by the arrangement of the first sealing plate 51 and the second sealing plate 52.

[0083] Further, the first sealing plate 51 is provided with a plurality of first mounting holes, each of which is connected to a first ferrule 61, and one end of each heat exchange tube 210 is correspondingly inserted into the first ferrule 61; the second sealing plate 52 is provided with a plurality of second mounting holes, each of which is connected to a second ferrule 62, and the other end of each heat exchange tube 210 is correspondingly inserted into the second ferrule 62. Therefore, by providing the first mounting holes and the second mounting holes, an escape space can be provided for the heat exchange tube 210 to prevent the heat exchange tube 210 from being obstructed. The heat exchange tube 210 can be clamped by the first ferrule 61 and the second ferrule 62 to ensure the stability and firmness of the heat exchange tube 210, and it is beneficial to improve the sealing between the heat exchange tube 210 and the outer wall of the overflow tank 120 to prevent the cleaning liquid in the overflow tank 120 from leaking.

[0084] In this embodiment, the first ferrule 61 and the second ferrule 62 can be provided to seal and fix the heat exchange tube 210 such as a PFA tube.

[0085] Optionally, the first mounting hole and the second mounting hole can both be threaded holes, and the outer circumferences of the first ferrule 61 and the second ferrule 62 are respectively provided with external threads, thereby, the first ferrule 61 can be threadedly matched with the first mounting hole, and the second ferrule 62 can be threadedly matched with the second mounting hole, so that disassembly and assembly are convenient.

[0086] In the present application, the overflow groove 120 can be arranged at multiple positions of the main groove 110, so as to receive the cleaning liquid overflowing from the main groove 110 from multiple positions. In the first direction, the overflow groove 120 is distributed on both sides of the main groove 110, and in the second direction, the overflow groove 120 is distributed on one side of the main groove 110, and the first direction, the second direction and the direction from the bottom of the overflow groove 120 to the groove opening are perpendicular to each other.

[0087] Optionally, the main groove 110 may be a groove with a rectangular cross section, the first direction is the width direction of the main groove 110, the second direction is the length direction of the main groove 110, and the direction from the groove bottom to the groove opening is the height direction of the main groove 110. Figure 2 shown.

[0088] Furthermore, each group of heat exchange tubes 210 is distributed in two side areas of the main tank 110 in the first direction and one side area in the second direction. This method can help increase the layout area of ​​the heat exchange tubes 210, thereby improving the heat exchange efficiency.

[0089] In other embodiments, each group of heat exchange tubes 210 may also surround the outer circumference of the main tank 110, which can also improve the heat exchange efficiency.

[0090] like Figure 5As shown, specifically, the heat exchange tube 210 can penetrate from the outer wall of the overflow groove 120 on one side in the second direction into the overflow groove 120 located on one side of the main groove 110 in the first direction, and extend along the second direction to a side away from the penetration position; then return and extend toward the penetration side in the second direction; then bend, penetrate into the overflow groove 120 located on one side of the main groove 110 in the second direction, extend to the other side along the first direction, penetrate into the overflow groove 120 located on the other side of the main groove 110 in the first direction, and extend along the second direction to a side away from the penetration position; then return and extend toward the penetration side in the second direction; finally, pass out from the outer wall of the overflow groove 120 located on the other side of the main groove 110 in the first direction in the second direction. Therefore, the heat exchange tube 210 can extend in all the overflow grooves 120 to increase the heat exchange area, thereby improving the heat exchange efficiency.

[0091] like Figure 6 As shown, in some embodiments, in order to further improve the heat exchange efficiency, the heat exchange component 20 may include multiple groups of heat exchange tubes 210, and in the first direction, the multiple groups of heat exchange tubes 210 are staggered, and in the second direction, the multiple groups of heat exchange tubes 210 are staggered. Thus, the heat exchange area of ​​the heat exchange component 20 can be increased to improve the heat exchange efficiency, and mutual interference between the multiple heat exchange tubes 210 can be avoided. Of course, it can also help to reduce the volume of the entire heat exchange component 20.

[0092] Optionally, in this embodiment, two groups of heat exchange tubes 210 are used, and the two groups of heat exchange tubes 210 are staggered, so that more heat exchange tubes 210 can be arranged in a limited space, thereby achieving a better heat exchange effect.

[0093] In some embodiments, a filter element 70 may be provided at the bottom of the overflow trough 120, and the filter element 70 is arranged corresponding to the inlet end of the circulation loop 30, so that the cleaning liquid entering the circulation loop 30 can be filtered by the filter element 70 to prevent impurities such as silicon wafer fragments from entering the circulation loop 30 and causing the circulation loop 30 to be blocked.

[0094] Optionally, the filter element 70 may be a plate-shaped filter element 70 such as a filter plate. The filter plate can prevent impurities such as silicon chip fragments from entering the circulation loop 30 and causing blockage of the pump port.

[0095] Optionally, an overflow hole 130 may be further provided on the upper side of the cleaning tank 10, such as an overflow hole 130 provided on the main tank 110 or above between the main tank 110 and the overflow tank 120. By providing the overflow hole 130, the liquid medicine continuously introduced into the main tank 110 can then overflow from the overflow hole 130 into the overflow tank 120.

[0096] Optionally, a thermal resistance probe for monitoring the temperature of the liquid medicine is provided in the cleaning tank 10 .

[0097] Therefore, based on the above settings, the heat exchange tube 210 in the overflow tank 120 (also called the sub-tank) of this embodiment, such as the cooling water in the PFA coil, directly exchanges heat with the medicine liquid in the overflow tank 120, and the heat exchange rate is high. The thermistor probe in the tank monitors the temperature of the medicine liquid in real time and feeds back to the electrical program to regulate the temperature and flow of the tank body chiller. The temperature of the medicine liquid is accurately and efficiently regulated, so that the stability of the ozone concentration is better maintained within the parameter range required by the process.

[0098] The cooling system of this embodiment is arranged inside the tank body, does not occupy the pipe space outside the tank body, has few pipe joints, allows smooth circulation of the medicine liquid, and has a standardized and beautiful pipe layout.

[0099] The heat exchange tube 210 in the overflow tank 120 of this embodiment, such as the PFA coil, can be manually maintained and replaced by removing a few cover plates when there is no liquid medicine in the tank. The PFA tube has the characteristics of transparency and visibility, and the cleanliness of the inner wall of the tube can be clearly observed, which can be used to judge whether the pipeline needs to be cleaned, so as to avoid excessive cleaning causing waste of resources and untimely cleaning affecting the heat exchange efficiency. When regularly inspecting the pipeline, the strength test of the PFA heat exchange tube 210 can be carried out in the state of no liquid medicine in the tank body, and only the pipeline suspected of leakage risk needs to be replaced individually for easy maintenance.

[0100] The heat exchange tube 210 of this embodiment, such as a PFA tube, is easy to coil into a desired shape, and has low processing difficulty. For example, the tube only needs to be heated by a handheld hot air blower and then placed in a mold that has been processed in advance as required to achieve the shape required by the technology.

[0101] The heat exchange component 20 of the cleaning device of this embodiment does not need to be external, which can save pipeline space; it is easy to maintain and replace; the heat exchange rate is improved, and the temperature of the heat exchange liquid is more accurately controlled; and the processing difficulty is low.

[0102] In some embodiments, a cleaning and texturing device is also provided, which includes the aforementioned cleaning device.

[0103] The cleaning and texturing equipment provided in the embodiment of the present application adopts the cleaning device of any of the above-mentioned schemes, and therefore has at least the characteristics and advantages of the cleaning device described in any of the above-mentioned schemes, which will not be repeated here.

[0104] It should be pointed out that the core of the cleaning and texturing equipment is the cleaning device provided in this embodiment. The remaining structures such as the texturing tank in the cleaning and texturing equipment can refer to the existing technology and are not limited to this and will not be repeated here.

[0105] Parts not described in detail in the utility model specification are well known to those skilled in the art.

[0106] For ease of explanation, spatial relative terms such as "upper", "lower", "left", "right", "top", "bottom", etc. are used in the embodiments to illustrate the relationship of one element or feature shown in the figure relative to another element or feature. It should be understood that, in addition to the orientation shown in the figure, the spatial terms are intended to include different orientations of the device in use or operation. For example, if the device in the figure is inverted, the elements described as being "under" other elements or features will be positioned "above" other elements or features. Therefore, the exemplary term "under" can include both upper and lower orientations. The device can be positioned in other ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used here can be interpreted accordingly.

[0107] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present application, ordinary technicians in this field can also make many forms without departing from the purpose of the present application and the scope of protection of the claims, all of which are within the protection of the present application.

Claims

1. A cleaning device, characterized in that: include: Cleaning tanks, heat exchange components and circulation loops; The cleaning tank comprises a main tank and an overflow tank, wherein the overflow tank is connected to the main tank; The two ends of the circulation loop are respectively connected to the main tank and the overflow tank; The heat exchange component is arranged in the overflow tank.

2. The cleaning device according to claim 1, characterized in that: The heat exchange assembly includes at least one group of heat exchange tubes, and each group of heat exchange tubes is coiled and arranged in the overflow tank.

3. The cleaning device according to claim 2, characterized in that: Each group of the heat exchange tubes includes a plurality of the heat exchange tubes, and the plurality of the heat exchange tubes are arranged along the direction from the bottom of the overflow tank to the slot opening.

4. The cleaning device according to claim 3, characterized in that: A plurality of support members are arranged in the overflow tank, and the plurality of support members are arranged at intervals in the direction in which each of the heat exchange tubes is coiled and extended; Each of the support members is provided with a plurality of through holes, and the plurality of heat exchange tubes pass through the plurality of through holes of each of the support members correspondingly, and each of the heat exchange tubes passes through the corresponding through holes on the plurality of support members in sequence.

5. The cleaning device according to claim 3, characterized in that: The heat exchange assembly further includes an input flange and an output flange respectively arranged outside the overflow tank, the input flange is provided with an input port, and the output flange is provided with an output port; One end of each of the plurality of heat exchange tubes is connected to the input flange and communicated with the input port, and the other end of each of the plurality of heat exchange tubes is connected to the output flange and communicated with the output port.

6. The cleaning device according to claim 3, characterized in that: The cleaning device further comprises a first sealing plate and a second sealing plate, wherein the first sealing plate and the second sealing plate are respectively connected to the outer wall of the overflow tank; The first sealing plate is provided with a plurality of first mounting holes, each of the first mounting holes is connected with a first ferrule, and one end of each of the heat exchange tubes is correspondingly inserted into the first ferrule; The second sealing plate is provided with a plurality of second mounting holes, each of the second mounting holes is connected with a second ferrule, and the other end of each of the heat exchange tubes is correspondingly inserted into the second ferrule.

7. The cleaning device according to any one of claims 2 to 6, characterized in that: In the first direction, the overflow grooves are distributed on both sides of the main groove, and in the second direction, the overflow grooves are distributed on one side of the main groove, wherein the first direction, the second direction and the direction from the bottom of the overflow groove to the groove opening are perpendicular to each other; Each group of the heat exchange tubes is distributed in two side regions of the main tank in the first direction and in one side region in the second direction.

8. The cleaning device according to claim 7, characterized in that: The heat exchange assembly comprises a plurality of groups of heat exchange tubes; In the first direction, the plurality of groups of heat exchange tubes are staggered; and / or, In the second direction, the plurality of groups of heat exchange tubes are staggered.

9. The cleaning device according to any one of claims 2 to 6, characterized in that: The heat exchange tube is a transparent tube.

10. The cleaning device according to any one of claims 1 to 6, characterized in that: The cleaning device also includes an ozone generator; The ozone generator is connected in the circulation loop.

11. The cleaning device according to any one of claims 1 to 6, characterized in that: A filter is provided at the bottom of the overflow tank, and the filter is provided corresponding to the inlet end of the circulation loop.

12. A cleaning and texturing device, characterized in that: A cleaning device comprising the cleaning device according to any one of claims 1 to 10.

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