Automatic filtering device for ultra-clean high-purity reagent

Abstract

The utility model discloses an automatic filtering device for an ultra-clean high-purity reagent, which comprises a raw material tank and a finished product tank, N levels of filters are connected between the raw material tank and the finished product tank through pipelines, the levels of the N levels of filters are sequentially increased, and a shunting pipeline is connected between the N-1 levels of filters and the N levels of filters. A first electromagnetic valve is mounted on the shunting pipeline, and the shunting pipeline is connected with the raw material tank to form a first circulation loop; the N-stage filter is connected with the raw material tank through a pipeline with a second electromagnetic valve to form a second circulation loop; and a third electromagnetic valve is mounted on the pipeline between the N-stage filter and the finished product tank. According to the utility model, continuous filtration integrating shunting, backflow, timed liquid discharge and constant-pressure filtration is realized, the filtration process is simplified, the filtration effect and the filtration rate are effectively improved, the cost is low, and the practicability is high.

Description

Technical Field

[0001] The utility model relates to the field of chemical reagent purification equipment, in particular to an automatic filtering device for ultra-clean high-purity reagents. Background Art

[0002] With the rapid development of semiconductor technology, the requirements for ultra-clean and high-purity reagents are getting higher and higher. In the processing of integrated circuits, ultra-clean and high-purity reagents are mainly used for cleaning and etching the surface of chips and silicon wafers. Their purity and cleanliness have a very significant impact on the yield, electrical performance and reliability of integrated circuits.

[0003] At present, the main method for processing ultra-clean high-purity reagents is distillation. However, distillation is not effective in removing impurities such as metals and particle size in the solvent. The indicators of the treated reagents cannot meet the requirements of ultra-clean high-purity reagents, and further processing must be combined with precision filtration devices. Therefore, there are disadvantages such as complex processing process, long process flow, large equipment investment, and high cost. Utility Model Content

[0004] The utility model provides an automatic filtering device for ultra-clean high-purity reagents, which effectively removes impurities in the ultra-clean high-purity reagents through a set of devices, has good filtering effect and high automation.

[0005] In order to solve the above technical problems, the utility model provides an automatic filtering device for ultra-clean high-purity reagents, comprising: a raw material tank and a finished product tank, wherein N levels of filters with increasing levels are connected between the raw material tank and the finished product tank through a pipeline, and a shunt pipeline is connected between the N-1 level filter and the N level filter, and a first solenoid valve is installed on the shunt pipeline, and the shunt pipeline is connected to the raw material tank to form a first circulation loop; the N level filter and the raw material tank are connected through a pipeline with a second solenoid valve to form a second circulation loop; a third solenoid valve is installed on the pipeline between the N level filter and the finished product tank.

[0006] In a preferred embodiment of the present invention, the continuous filtering device further comprises a program controller, and the program controller is respectively connected to the first solenoid valve, the second solenoid valve and the third solenoid valve by signals.

[0007] In a preferred embodiment of the present invention, a pressure sensor is also installed on the N-stage filter, and the pressure sensor is connected to the program controller signal.

[0008] In a preferred embodiment of the present invention, the number of filters is three or more.

[0009] In a preferred embodiment of the utility model, a circulation pump is installed on the pipeline between the raw material tank and the primary filter.

[0010] In a preferred embodiment of the present invention, the circulation pump is connected to the program controller signal.

[0011] In a preferred embodiment of the utility model, the continuous filtration device also includes a concentration tank, and the first-level filter to the N-1-level filter are respectively connected to the concentration tank through a pipeline with a fourth solenoid valve; the N-level filter is connected to the concentration tank through a pipeline with a fifth solenoid valve.

[0012] In a preferred embodiment of the present invention, the fourth solenoid valve and the fifth solenoid valve are respectively connected to the program controller signal.

[0013] In a preferred embodiment of the present invention, the continuous filtering device further comprises a waste liquid tank, and the waste liquid tank is connected to the N-stage filter via a pipeline with a sixth solenoid valve.

[0014] In a preferred embodiment of the present invention, the sixth solenoid valve is connected to the program controller signal.

[0015] The beneficial effects of the utility model are as follows: the utility model is an automatic filtering device for ultra-clean high-purity reagents, which realizes continuous filtration integrating diversion, reflux, timed drainage and constant pressure filtration through the design of raw material tanks, finished product tanks, N levels of filters and diversion pipelines, simplifies the filtration process, effectively improves the filtration effect and filtration rate, has low cost and strong practicality. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a structural schematic diagram of a preferred embodiment of an automatic filtering device for ultra-clean and high-purity reagents of the utility model;

[0017] The markings of the components in the accompanying drawings are as follows:

[0018] 10. Raw material tank, 20. Finished product tank, 30. Primary filter, 40. Secondary filter, 50. Tertiary filter, 60. Circulation pump, 70. Diversion pipeline, 80. Concentration tank, 90. Waste liquid tank, 100. Program controller; 51. Pressure sensor, 101. First solenoid valve, 102. Second solenoid valve, 103. Third solenoid valve, 104. Fourth solenoid valve, 105. Fifth solenoid valve, 106. Sixth solenoid valve. DETAILED DESCRIPTION

[0019] The preferred embodiments of the present invention are described in detail below in conjunction with the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0020] See also Figure 1 , the utility model embodiment includes:

[0021] Example 1

[0022] The utility model designs an automatic filtering device for ultra-clean high-purity reagents, comprising: a raw material tank 10 and a finished product tank 20, wherein the raw material tank 10 is used to hold the reagent to be filtered, and the finished product tank 20 is used to hold the ultra-clean high-purity reagent after filtration.

[0023] The raw material tank 10 and the finished product tank 20 are connected by pipelines with N levels of filters of increasing levels. In the present embodiment, the number of filters is 3, namely a primary filter 30, a secondary filter 40 and a tertiary filter 50. In some embodiments, the number of filters can also be selected to be 4, 5, 6 or other levels.

[0024] A circulation pump 60 is installed on the pipeline between the raw material tank 10 and the primary filter 30 .

[0025] A shunt pipe 70 is connected between the secondary filter 40 and the tertiary filter 50, and a first solenoid valve 101 is installed on the shunt pipe 70 for adjusting the pressure of the tertiary filter 50. The shunt pipe 70 is connected to the raw material tank 10 to form a first circulation loop, that is, a shunt loop for adjusting the pressure in the tertiary filter 50.

[0026] The three-stage filter 50 is connected to the raw material tank 10 through a pipeline with a second electromagnetic valve 102 to form a second circulation loop. The three-stage filter 50 is equipped with a pressure sensor 51 for measuring the pressure value in the three-stage filter 50 in real time, and adjusting the opening of the first electromagnetic valve 71 according to the measured pressure value to ensure that the pressure value in the three-stage filter 50 is constant, realize constant pressure filtration, and ensure the quality of ultra-clean high-purity reagents.

[0027] A third solenoid valve 103 is installed on the pipeline between the tertiary filter 50 and the finished product tank 20 .

[0028] The continuous filtering device further comprises a program controller 100 , which is respectively connected to the first solenoid valve 101 , the second solenoid valve 102 , the third solenoid valve 103 , the circulation pump 60 and the pressure sensor 51 for signal control to achieve automatic control.

[0029] Furthermore, the continuous filtering device further includes a concentration tank 80, and the primary filter 30 and the secondary filter 40 are respectively connected to the concentration tank 80 through a pipeline with a fourth solenoid valve 104, so as to discharge the impurities filtered in the primary filter 30 and the secondary filter 40 into the concentration tank 80. The tertiary filter 50 is connected to the concentration tank 80 through a pipeline with a fifth solenoid valve 105, so as to discharge the impurities filtered in the tertiary filter 50 into the concentration tank 80. Through the design of the concentration tank 80 and the fourth solenoid valve 104 and the fifth solenoid valve 105, the impurities in the primary filter 30, the secondary filter 40 and the tertiary filter 50 can be discharged in time, and the macromolecular impurities are prevented from being squeezed out of the filter membrane, thereby effectively improving the filtering effect and the service life of the filter.

[0030] Furthermore, the continuous filtering device further comprises a waste liquid tank 90, which is connected to the three-stage filter 50 via a pipeline with a sixth solenoid valve 106. The waste liquid for flushing the three-stage filter 50 enters the waste liquid tank 90 via a pipeline with a sixth solenoid valve 106. By flushing the third filter 50, its membrane flux can be increased, which is beneficial to improving the filtering effect and filtering speed.

[0031] The fourth solenoid valve 104, the fifth solenoid valve 105 and the sixth solenoid valve 106 are all connected to the program control system 100 for signal control, which is beneficial to improving automation.

[0032] The working principle or filtering process of the utility model is:

[0033] The first step is a pre-filtration: the circulation pump 60 and the first solenoid valve 101 are turned on, and the other solenoid valves are closed. The reagent to be filtered in the raw material pump 10 flows in the first circulation loop for pre-filtration. After the circulation pump 60 runs for a period of time, such as 30 minutes, the circulation pump 60 is turned off, and the fourth solenoid valve 104 is opened at the same time, so that the impurities intercepted in the primary filter 30 and the secondary filter 40 are discharged into the concentration tank 80, and then the fourth solenoid valve 104 is closed, and the circulation pump 60 is turned on. Repeat the above operation three times.

[0034] The second step is secondary pre-filtration: the circulation pump 60 and the second solenoid valve 102 are opened, and the other solenoid valves are closed. The reagent to be filtered in the raw material pump 10 flows in the second circulation loop for pre-filtration. After the circulation pump 60 runs for a period of time, such as 30 minutes, the circulation pump 60 is turned off, and the fourth solenoid valve 104 and the fifth solenoid valve 105 are opened at the same time, so that the impurities intercepted in the primary filter 30, the secondary filter 40 and the tertiary filter 50 are discharged into the concentration tank 80, and then the fourth solenoid valve 104 and the fifth solenoid valve 105 are closed, and the circulation pump 60 is turned on. Repeat the above operation three times.

[0035] The third step is constant pressure continuous filtration: close the fourth solenoid valve 104 and the fifth solenoid valve 105, open the third solenoid valve 103, start the circulation pump 60, and adjust the opening of the first solenoid valve 101 according to the filtration pressure of the three-stage filter 50 set in the program controller 100 to make the pressure in the three-stage filter 50 constant. The reagent in the raw material tank 10 flows through the first circulation loop and the second circulation loop at the same time to achieve continuous constant pressure filtration. During the process again, the filtered reagent flows through the third switch valve 103 into the finished product tank 20 to obtain ultra-clean high-purity reagent.

[0036] The opening and closing of the above-mentioned solenoid valves and circulating pumps can be controlled by a program controller to improve the degree of automation.

[0037] The utility model discloses an automatic filtering device for ultra-clean high-purity reagents, which integrates flow diversion, reflux, timed liquid discharge and constant pressure filtration, has a high degree of automation, can filter continuously, has good filtering effect, is low in cost and is highly practical.

[0038] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. An automatic filtering device for ultra-clean high-purity reagents, characterized in that: include: A raw material tank and a finished product tank, wherein filters of N levels with increasing levels are connected between the raw material tank and the finished product tank through a pipeline, and a shunt pipeline is connected between the N-1 level filter and the N level filter, and a first solenoid valve is installed on the shunt pipeline, and the shunt pipeline is connected to the raw material tank to form a first circulation loop; the N level filter is connected to the raw material tank through a pipeline with a second solenoid valve to form a second circulation loop; a third solenoid valve is installed on the pipeline between the N level filter and the finished product tank.

2. The automatic filtering device for ultra-clean high-purity reagents according to claim 1, characterized in that: It also includes a program controller, which is respectively connected to the first solenoid valve, the second solenoid valve and the third solenoid valve by signals.

3. The automatic filtering device for ultra-clean high-purity reagents according to claim 2, characterized in that: A pressure sensor is also installed on the N-stage filter, and the pressure sensor is connected to the program controller by signal.

4. The automatic filtering device for ultra-clean high-purity reagents according to claim 3, characterized in that: The number of the filters is three or more.

5. The automatic filtering device for ultra-clean high-purity reagents according to claim 2, characterized in that: A circulation pump is installed on the pipeline between the raw material tank and the primary filter.

6. The automatic filtering device for ultra-clean high-purity reagents according to claim 5, characterized in that: The circulation pump is connected to the program controller by signal.

7. The automatic filtering device for ultra-clean high-purity reagents according to claim 2, characterized in that: It also includes a concentration tank, and the first-level filter to the N-1-level filter are respectively connected to the concentration tank through a pipeline with a fourth solenoid valve; the N-level filter is connected to the concentration tank through a pipeline with a fifth solenoid valve.

8. The automatic filtering device for ultra-clean high-purity reagents according to claim 7, characterized in that: The fourth solenoid valve and the fifth solenoid valve are respectively connected to the program controller by signal.

9. The automatic filtering device for ultra-clean high-purity reagents according to claim 2, characterized in that: It also includes a waste liquid tank, which is connected to the N-level filter through a pipeline with a sixth solenoid valve.

10. The automatic filtering device for ultra-clean high-purity reagents according to claim 9, characterized in that: The sixth solenoid valve is connected to the program controller by signal.

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