Gluing machine swing arm with telescopic structure

Abstract

The utility model belongs to the technical field of glue coating machines, and particularly relates to a glue coating machine swing arm with a telescopic structure, which comprises a swing arm base plate, a front-back driving piece, a transfer frame, a glue spraying head mounting plate and a glue spraying head group. The swing arm base plate is connected with a transverse moving mechanism of the gluing machine, the front-back driving piece is installed on the swing arm base plate, the transfer frame is connected with the driving end of the front-back driving piece, the glue spraying head installation plate is connected to the transfer frame, glue spraying head sets are arranged on the glue spraying head installation plate, and each glue spraying head set comprises a plurality of glue spraying heads evenly arranged in the left-right direction. According to the utility model, the glue spraying heads can be arranged in multiple rows, and the glue spraying head mounting plate can be driven by the front-back driving piece to move back and forth, so that each path of glue can be sprayed at the center of a wafer, and the problem that an adaptive transverse moving mechanism and a swing arm occupy too much space in the transverse direction due to the fact that more glue spraying heads are arranged in a single row is avoided; and the compatible photoresist types are increased, so that the method is more suitable for a process which needs more photoresist path requirements.

Description

Technical Field

[0001] The utility model belongs to the technical field of glue coating machines, in particular to a swing arm of a glue coating machine with a telescopic structure. Background Art

[0002] Currently, the semiconductor industry has a demand for multiple adhesives, such as Figure 2 and Figure 3 As shown, a single row of glue spray heads is generally provided at the end of the swing arm close to the wafer, and the lateral movement mechanism of the glue coating machine connects the end of the swing arm away from the wafer and drives the swing arm to move horizontally to switch the glue path. However, with the development of the semiconductor industry, the glue coating machine has also had a demand for more glue paths. However, the number of glue spray heads that can be added by simply setting more glue spray heads in the same row on the swing arm is relatively limited, and the adapted lateral movement mechanism and the swing arm itself also need to occupy more space horizontally, thus affecting the overall structure of the glue coating machine. Utility Model Content

[0003] In view of the above problems, the purpose of the utility model is to provide a gluing machine swing arm with a telescopic structure.

[0004] The purpose of this utility model is achieved through the following technical solutions:

[0005] A gluing machine swing arm with a telescopic structure, comprising a swing arm base plate, front and rear drive members, an adapter frame, a glue spray head mounting plate and a glue spray head group;

[0006] The swing arm base plate is connected to the transverse movement mechanism of the glue coating machine, the front and rear driving members are installed on the swing arm base plate, the adapter frame is connected to the driving ends of the front and rear driving members, the glue spray head mounting plate is connected to the adapter frame, and at least two glue spray head groups are arranged on the glue spray head mounting plate, and each of the glue spray head groups includes a plurality of glue spray heads evenly arranged along the left and right directions.

[0007] The glue spray head groups are arranged parallel to each other.

[0008] Each of the glue spraying head groups comprises the same number of glue spraying heads.

[0009] The adapter frame is divided into a horizontal part and a vertical part connected together. The horizontal part of the adapter frame is connected to the driving end of the front and rear driving members, and the vertical part of the adapter frame is located at the front side of the horizontal part of the adapter frame and is connected to the glue spray head mounting plate.

[0010] A plurality of long holes are provided on the vertical part of the adapter frame in the vertical direction, and each of the long holes is respectively penetrated by a fixing screw for fixing the glue spray head mounting plate, and each of the fixing screws is respectively connected to the fixed glue spray head mounting plate through a thread; when the fixing screws are tightened, the head of each fixing screw and the fixed glue spray head mounting plate are clamped on the vertical part of the adapter frame at the same time.

[0011] The vertical portion of the adapter frame is also located in front of the front and rear drive members.

[0012] A protective cover is installed on the horizontal part of the adapter frame.

[0013] The advantages and positive effects of the utility model are:

[0014] The utility model can arrange glue heads in multiple rows through the coordinated arrangement of the swing arm base plate, the front and rear driving parts, the adapter frame, the glue head mounting plate and the glue head group, and the front and rear driving parts can drive the glue head mounting plate to move forward and backward through the adapter frame, and in turn make the centers of the glue heads of each glue head group that needs to spray liquid be aligned with the center of the wafer, so that each path of glue can be sprayed on the center of the wafer, avoiding the problem of arranging more glue heads in only a single row so that the adapted transverse movement mechanism and the swing arm itself occupy too much space in the horizontal direction, and the types of compatible photoresists are increased, which is more suitable for processes that require more glue paths. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the split structure of the utility model;

[0016] Figure 2 It is a schematic diagram of the overall structure of the swing arm of the glue coating machine in the prior art;

[0017] Figure 3 It is a schematic diagram of the structure of the setting of the swing arm of the glue coating machine in the prior art;

[0018] Figure 4 This is a schematic diagram of the overall structure of the swing arm of the glue coating machine of the utility model;

[0019] Figure 5 This is a schematic diagram of the structure of the gluing machine swing arm of the utility model in the gluing machine;

[0020] Figure 6 The utility model is a schematic diagram of the working principle of the gluing machine swing arm.

[0021] In the figure: 1 is a swing arm base plate, 2 is a front and rear driving member, 3 is an adapter frame, 301 is a long hole, 4 is a glue spray head mounting plate, 5 is a glue spray head, 6 is a protective cover; 100 is a wafer. DETAILED DESCRIPTION

[0022] The following is combined with Figure 1-6 The utility model is further described in detail.

[0023] A gluing machine swing arm with a telescopic structure, such as Figure 1 and Figure 4-6 As shown, this embodiment includes a swing arm base plate 1, front and rear drive components 2, an adapter frame 3, a glue spray head mounting plate 4 and a glue spray head group.

[0024] The rear end of the swing arm base plate 1 is connected to the lateral movement mechanism of the glue coating machine, and the connection structure adopts the existing technology, for example, connected by screws. The front and rear drive members 2 are installed on the front end of the swing arm base plate 1, the adapter frame 3 is connected to the driving end of the front and rear drive members 2, and the glue head mounting plate 4 is connected to the adapter frame 3. Two glue head groups are arranged on the glue head mounting plate 4, and each glue head group includes a number of glue heads 5 evenly arranged along the left and right directions. In this embodiment, the front and rear drive members 2 adopt commercially available pneumatic slide products, and the front and rear drive members 2 and the lateral movement mechanism of the glue coating machine are controlled by the control system of the glue coating machine. The installation and setting structure of the front and rear drive members 2 and each glue head 5 is the existing technology. In this embodiment, each glue head group is arranged in parallel with each other, and the number of glue heads 5 included in each glue head group is the same, which is convenient for installation and setting, and it is convenient to adjust the position of the glue head 5 by program control; the number of glue head groups and the number of glue heads 5 in each glue head group can be adjusted according to process requirements.

[0025] Specifically, in this embodiment, the adapter frame 3 is divided into a horizontal part and a vertical part connected together. The horizontal part of the adapter frame 3 is connected to the driving end of the front and rear driving members 2 by screws, and the vertical part of the adapter frame 3 is located at the front side of the horizontal part of the adapter frame 3 and is connected to the glue spray head mounting plate 4. Two long holes 301 are provided in the vertical direction on the vertical part of the adapter frame 3, and each long hole 301 is respectively penetrated by a fixing screw for fixing the glue spray head mounting plate 4, and each fixing screw is connected to the fixed glue spray head mounting plate 4 by a thread. Through the provision of the long holes 301, it is convenient to adjust the installation height position of the glue spray head mounting plate 4 according to the use requirements. When tightening the fixing screws, the heads of each fixing screw and the fixed glue spray head mounting plate 4 are clamped on the vertical part of the adapter frame 3 at the same time, and the installation height position of the glue spray head mounting plate 4 is maintained by the friction force generated by the clamping.

[0026] Specifically, in this embodiment, the vertical portion of the adapter frame 3 is also located in front of the front and rear drive members 2, and a protective cover 6 is installed on the horizontal portion of the adapter frame 3 by screws, which can respectively protect the front and rear drive members 2 to prevent the liquid from splashing onto the front and rear drive members 2 during operation and causing corrosion to the front and rear drive members 2.

[0027] Working principle:

[0028] During the gluing process, according to the process requirements, the control system of the gluing machine controls the front and rear driving parts 2 and the lateral movement mechanism of the gluing machine according to the preset program. The lateral movement mechanism of the gluing machine drives the lateral movement of the swing arm of the gluing machine as a whole. The front and rear driving parts 2 drive the glue spray head mounting plate 4 to move forward and backward through the adapter frame 3. Figure 6 As shown, the center of each glue spray head 5 that needs to spray liquid is aligned with the center of the wafer in turn, so that each layer of glue can be sprayed on the center of the wafer.

Claims

1. A swing arm of a glue coating machine with a telescopic structure, characterized in that: It comprises a swing arm base plate (1), front and rear drive components (2), an adapter frame (3), a glue spray head mounting plate (4) and a glue spray head assembly; The swing arm base plate (1) is connected to the transverse movement mechanism of the glue coating machine, the front and rear driving members (2) are installed on the swing arm base plate (1), the adapter frame (3) is connected to the driving end of the front and rear driving members (2), the glue spray head mounting plate (4) is connected to the adapter frame (3), and at least two glue spray head groups are arranged on the glue spray head mounting plate (4), and each of the glue spray head groups includes a plurality of glue spray heads (5) evenly arranged in the left and right directions.

2. The swing arm of a glue coating machine with a telescopic structure according to claim 1, characterized in that: The glue spray head groups are arranged parallel to each other.

3. The swing arm of a glue coating machine with a telescopic structure according to claim 2, characterized in that: The number of glue spraying heads (5) included in each glue spraying head group is the same.

4. The swing arm of a glue coating machine with a telescopic structure according to claim 1, characterized in that: The adapter frame (3) is divided into a horizontal part and a vertical part which are connected together. The horizontal part of the adapter frame (3) is connected to the driving end of the front and rear driving members (2), and the vertical part of the adapter frame (3) is located at the front side of the horizontal part of the adapter frame (3) and is connected to the glue spray head mounting plate (4).

5. The swing arm of a glue coating machine with a telescopic structure according to claim 4, characterized in that: A plurality of long holes (301) are provided on the vertical portion of the adapter frame (3) in the vertical direction, and each of the long holes (301) is respectively penetrated by a fixing screw for fixing the glue spray head mounting plate (4), and each of the fixing screws is respectively connected to the fixed glue spray head mounting plate (4) through a thread; when the fixing screws are tightened, the heads of the fixing screws and the fixed glue spray head mounting plate (4) are simultaneously clamped on the vertical portion of the adapter frame (3).

6. The swing arm of a glue coating machine with a telescopic structure according to claim 4, characterized in that: The vertical portion of the adapter frame (3) is also located in front of the front and rear drive members (2).

7. The swing arm of a glue coating machine with a telescopic structure according to claim 4, characterized in that: A protective cover (6) is installed on the horizontal part of the adapter frame (3).

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