Cleaning device

Abstract

The utility model provides a cleaning device, which is used for cleaning a conveying pipeline, and comprises a gas-liquid mixing cavity, a gas inlet and a gas outlet, a liquid inlet is formed in the peripheral wall of the gas-liquid mixing cavity; an outlet is formed in the second end face of the gas-liquid mixing cavity and used for being connected with the conveying pipeline. The first end of the gas inlet pipeline is connected with the gas inlet, and the gas inlet pipeline is used for conveying gas into the gas-liquid mixing cavity; the second end of the liquid inlet pipeline is connected with the liquid inlet, and the liquid inlet pipeline is used for conveying cleaning liquid into the gas-liquid mixing cavity. According to the cleaning device, by introducing the gas into the cleaning liquid, the turbulent flow state of the cleaning liquid in the conveying pipeline is intensified, so that the cleaning effect on the conveying pipeline is enhanced, and the cleaning efficiency is improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a cleaning device. Background Art

[0002] As the critical dimensions in the photolithography process continue to shrink, the control of the solid matter content in the photoresist in the photolithography process is becoming more and more stringent. Photoresist is usually a mixture of polymer resins. In the process of using pipelines to supply photoresist, the photoresist may form solid particles due to crystallization or drying. These solid particles will adhere to the pipe wall and are difficult to remove. During the subsequent coating, these solid particles will be mixed into the flowing photoresist and coated on the wafer along with the photoresist, causing defects in the pattern on the wafer surface and affecting the wafer yield.

[0003] Therefore, the pipeline for supplying photoresist needs to be cleaned before supplying photoresist to reduce the amount of solid particles in the pipeline. Utility Model Content

[0004] The purpose of the present application is to provide a cleaning device that can effectively reduce the amount of solid particles in a conveying pipeline.

[0005] The embodiment of the present application provides a cleaning device for cleaning a delivery pipeline, comprising: a gas-liquid mixing chamber, a first end face of the gas-liquid mixing chamber being provided with an air inlet; a peripheral wall of the gas-liquid mixing chamber being provided with a liquid inlet; and a second end face of the gas-liquid mixing chamber being provided with an outlet, the outlet being used to connect the delivery pipeline; an air inlet pipeline, a first end of the air inlet pipeline being connected to the air inlet for delivering gas into the gas-liquid mixing chamber; and a liquid inlet pipeline, a second end of the liquid inlet pipeline being connected to the liquid inlet for delivering cleaning liquid into the gas-liquid mixing chamber; wherein the gas-liquid mixing chamber also includes a gas dispersion chamber located inside the gas-liquid mixing chamber; the first end of the gas dispersion chamber is fixedly connected to the first end face of the gas-liquid mixing chamber and is in communication with the air inlet pipeline; and the peripheral wall of the gas dispersion chamber is provided with a plurality of air outlet holes penetrating the peripheral wall of the gas dispersion chamber.

[0006] In some embodiments, the gas dispersion chamber is in the shape of a straight tube.

[0007] In some embodiments, the gas dispersion chamber is in an S-shaped tube shape.

[0008] In some embodiments, the gas dispersion chamber is tapered, and an area of ​​an end surface of a first end of the gas dispersion chamber is greater than an area of ​​an end surface of a second end of the gas dispersion chamber.

[0009] In some embodiments, the second end of the air intake pipeline is connected to a gas source, and the air intake pipeline is also sequentially connected to a first valve body, a first filter, and a second valve body from the second end of the air intake pipeline to the first end of the air intake pipeline.

[0010] In some embodiments, the air intake pipeline is further connected to a buffer tank between the first filter and the second valve body, for containing the cleaning liquid that flows back from the gas-liquid mixing chamber to the air intake pipeline.

[0011] In some embodiments, the second end of the liquid inlet pipeline is connected to the liquid source, and the liquid inlet pipeline is also connected to a third valve body, a second filter and a fourth valve body in sequence from the second end of the liquid inlet pipeline to the first end of the liquid inlet pipeline.

[0012] In some embodiments, the second end surface of the gas-liquid mixing chamber is arcuate, and the outlet is located at the center of the second end surface.

[0013] In some embodiments, the outlet is connected to the delivery pipeline through a first connecting pipe, and a fifth valve body is disposed on the first connecting pipeline.

[0014] The beneficial effects of the cleaning device provided in the embodiments of the present application include but are not limited to:

[0015] The cleaning device provided in the present application includes a gas-liquid mixing chamber and an air supply pipeline and a liquid supply pipeline connected to the gas-liquid mixing chamber. When the delivery pipeline is cleaned, the gas and the cleaning liquid form a gas-liquid mixture in the gas-liquid mixing chamber, and then the delivery pipeline is cleaned. The compression and expansion of the gas can aggravate the turbulent state of the cleaning liquid, thereby increasing the shear stress of the cleaning liquid along the flow direction and enhancing the impact of the cleaning liquid on the inner wall of the delivery pipeline; in addition, the gas will generate a large number of air pockets in the cleaning liquid, and these air pockets will generate instantaneous lateral force when they disappear, which will have a hammering effect on the inner wall of the delivery pipeline, causing solid particles to detach from the inner wall of the delivery pipeline, further accelerating the cleaning speed and enhancing the cleaning effect.

[0016] A gas dispersion chamber is also provided in the gas-liquid mixing chamber. The gas is mixed with the cleaning liquid in the gas-liquid mixing chamber through a plurality of gas outlet holes on the peripheral wall of the gas dispersion chamber. The gas dispersion chamber can increase the number of air pockets generated by the gas in the cleaning liquid, thereby further enhancing the cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The following figures describe in detail the exemplary embodiments disclosed in this application. The same reference numerals represent similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting, exemplary embodiments, and the drawings are only for the purpose of illustration and description, and are not intended to limit the scope of this application. Other embodiments may also accomplish the inventive intent in this application. It should be understood that the drawings are not drawn to scale.

[0018] in:

[0019] Figure 1 is a schematic diagram of the structure of a cleaning device according to some embodiments of the present application;

[0020] Figure 2 This is a schematic diagram of the structure of a gas-liquid mixing chamber according to some embodiments of the present application;

[0021] Figure 3 is a schematic diagram of the structure of the gas-liquid mixing chamber according to some other embodiments of the present application; and

[0022] Figure 4 It is a schematic diagram of the structure of an enterprise mixing chamber according to other embodiments of the present application. DETAILED DESCRIPTION

[0023] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content in the present application. It will be apparent to those skilled in the art that various local modifications to the disclosed embodiments are apparent, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of the present application. Therefore, the present application is not limited to the embodiments shown, but to the widest scope consistent with the claims.

[0024] When cleaning the pipeline, a large amount of cleaning liquid is usually used to flush the pipeline until the number of solid particles in the pipeline is reduced to a control range. However, the above cleaning method requires a large amount of cleaning liquid, and there are problems such as long cleaning time and incomplete cleaning.

[0025] The present application provides a cleaning device for cleaning a delivery pipeline, comprising a gas-liquid mixing chamber, a first end face of the gas-liquid mixing chamber being provided with an air inlet, a peripheral wall of the gas-liquid mixing chamber being provided with a liquid inlet, and a second end face of the gas-liquid mixing chamber being provided with an outlet, the outlet being used to connect the delivery pipeline; an air inlet pipeline, a first end of the air inlet pipeline being connected to the air inlet for delivering gas into the gas-liquid mixing chamber; and a liquid inlet pipeline, a second end of the liquid inlet pipeline being connected to the liquid inlet for delivering cleaning liquid into the gas-liquid mixing chamber.

[0026] When the existing technology is used to clean the pipeline, the cleaning liquid is in a turbulent state inside the pipeline. The so-called turbulence refers to the layered flow of fluids mixed with each other. The cleaning liquid in the turbulent state will impact the inner wall of the pipeline, thereby removing solid particles attached to the inner wall of the pipeline. The cleaning device of the present application can increase the turbulent state of the cleaning liquid in the pipeline by means of gas compression and expansion by introducing gas into the cleaning liquid, thereby increasing the shear stress of the cleaning liquid along the flow direction and enhancing the impact of the cleaning liquid on the inner wall of the pipeline; in addition, the gas will generate a large number of cavitations in the cleaning liquid. When these cavitations disappear, they will generate instantaneous lateral forces, which will have a hammering effect on the inner wall of the pipeline, causing solid particles to detach from the inner wall of the pipeline, further accelerating the cleaning speed and enhancing the cleaning effect.

[0027] The cleaning device provided in the present application will be described in detail below in conjunction with the embodiments and drawings.

[0028] refer to Figure 1 The embodiment of the present application provides a cleaning device for cleaning a delivery pipeline 11, the cleaning device comprising a gas-liquid mixing chamber 100, an air inlet pipeline 200 and a liquid inlet pipeline 300. The gas and the cleaning liquid enter the gas-liquid mixing chamber 100 through the air inlet pipeline 200 and the liquid inlet pipeline 300 respectively and mix, and then the delivery pipeline 11 connected to the gas-liquid mixing chamber 100 is cleaned. The delivery pipeline 11 can be a pipeline for transporting photoresist, or a pipeline for other liquids or gases.

[0029] refer to Figures 2 to 4 In some embodiments, the gas-liquid mixing chamber 100 may be cylindrical, prismatic or an irregular columnar structure. In some embodiments, the gas-liquid mixing chamber 100 is cylindrical so that the internal force of the gas-liquid mixing chamber 100 is uniform, so as to avoid damage to the gas-liquid mixing chamber 100 due to uneven internal force when the cleaning liquid is mixed with the gas, thereby affecting the service life. The size of the gas-liquid mixing chamber 100 can be adjusted according to the length of the delivery pipeline 11 and the amount of the cleaning liquid required. In some embodiments, the diameter of the gas-liquid mixing chamber 100 is 20 to 200 mm.

[0030] The first end surface of the gas-liquid mixing chamber 100 is provided with an air inlet 101 for connecting with the air inlet pipeline 200. The shape of the air inlet 101 is not limited. In some embodiments, the cross section of the air inlet 101 is circular; and in some embodiments, the diameter of the air inlet 101 is 3-10 mm.

[0031] In some embodiments, the air inlet 101 is connected to the air inlet pipeline 200 through a second connecting pipe 101a. The gas in the air inlet pipeline 200 enters the interior of the gas-liquid mixing chamber 100 via the second connecting pipe 101a and the air inlet 101. In some embodiments, the second connecting pipe 101a is integrally formed with the gas-liquid mixing chamber 100. In some embodiments, the second connecting pipe 101a is connected to the air inlet 101 by threads.

[0032] In some embodiments, a liquid inlet 102 is provided on the peripheral wall of the gas-liquid mixing chamber 100 for connecting with the liquid inlet pipeline 300. The shape of the liquid inlet 102 is not limited.

[0033] In some embodiments, the liquid inlet 102 is connected to the liquid inlet pipeline 300 through a third connecting pipe 102a. The cleaning liquid in the liquid inlet pipeline 300 enters the interior of the mixing chamber via the third connecting pipe 102a and the liquid inlet 102. In some embodiments, the third connecting pipe 102a is integrally formed with the gas-liquid mixing chamber 100. In some embodiments, the third connecting pipe 102a is connected to the liquid inlet 102 by a thread.

[0034] In some embodiments, the second end surface of the gas-liquid mixing chamber 100 is provided with an outlet 103, and the outlet 103 is used to connect the delivery pipeline 11. In some embodiments, the second end surface of the gas-liquid mixing chamber 100 is arched, and the outlet 103 is located at the center of the second end surface. The second end surface is set to be arched so that the cleaning liquid flowing to the second end surface can be directed to the outlet 103. In addition, compared with a plane, the arched design can make the cleaning liquid still have a component velocity along the axial direction of the gas-liquid mixing chamber 100 when it hits the second end surface and changes its flow direction, so that the cleaning liquid still has a higher speed when it enters the cleaning pipeline from the outlet 103.

[0035] In some embodiments, the outlet 103 is connected to the delivery pipeline 11 through a first connecting pipe 103a. In some embodiments, the first connecting pipe 103a is integrally formed with the gas-liquid mixing chamber 100. In some embodiments, the first connecting pipe 103a is connected to the outlet 103 through a threaded connection.

[0036] In some embodiments, a fifth valve body 103b is provided on the first connecting pipe 103a. When the delivery pipeline 11 needs to be cleaned, the fifth valve body 103b is opened, and when the cleaning of the delivery pipeline 11 is finished or the gas-liquid mixing chamber 100 is in an unused state, the fifth valve body 103b is closed. In some embodiments, the fifth valve body 103b is also used to adjust the pressure of the gas mixture generated by the mixing of the cleaning liquid and the gas in the first connecting pipe 103a. In some embodiments, the fifth valve body 103b controls the pressure of the gas-liquid mixture in the first pipeline to be 0.1-0.3MPa.

[0037] In some embodiments, the gas-liquid mixing chamber 100 further includes a gas dispersion chamber 104 located inside the gas-liquid mixing chamber 100. The first end of the gas dispersion chamber 104 is fixedly connected to the first end surface of the gas-liquid mixing chamber 100 and communicated with the air inlet pipeline 200; and the peripheral wall of the gas dispersion chamber 104 is provided with a plurality of gas outlet holes 104a penetrating the peripheral wall of the gas dispersion chamber 104. The gas enters the gas dispersion chamber 104 through the gas inlet 101, and is dispersed to the entire gas-liquid mixing chamber 100 by the plurality of gas outlet holes 104a. The plurality of gas outlet holes 104a help the gas to generate more cavitations inside the cleaning liquid.

[0038] refer to Figure 2 In some embodiments, the gas dispersion chamber 104 is in the shape of a straight tube, and the diameter of the gas dispersion chamber 104 is 10 to 100 mm; and the ratio of the length of the gas dispersion chamber 104 to the length of the gas-liquid mixing chamber 100 is 1:(1.25 to 5).

[0039] refer to Figure 3 In other embodiments, the gas dispersion chamber 104 is in an S-shaped tubular shape, thereby increasing the contact area between the gas dispersion chamber 104 and the cleaning liquid, thereby increasing the number of cavitations generated by the gas in the cleaning liquid. In some embodiments, the diameter of the gas dispersion chamber 104 is 10 to 100 mm; and the ratio of the length of the gas dispersion chamber 104 to the length of the gas-liquid mixing chamber 100 is 1:(1.25 to 5).

[0040] refer to Figure 4In other embodiments, the gas dispersion chamber 104 is tapered, and the area of ​​the end surface of the first end of the gas dispersion chamber 104 is greater than the area of ​​the end surface of the second end of the gas dispersion chamber 104. In some embodiments, the diameter of the end surface of the first end of the gas dispersion chamber 104 is 20 to 200 mm; the diameter of the end surface of the second end of the gas dispersion chamber 104 is 0 to 10 mm; and the ratio of the length of the gas dispersion chamber 104 to the length of the gas-liquid mixing chamber 100 is 1:(1.25 to 5).

[0041] In some embodiments, the diameter of any one of the plurality of air outlet holes 104a is 0.1-5.0 mm. In some embodiments, the diameter of any one of the plurality of air outlet holes 104a is 0.1 mm, 0.5 mm, 1.0 mm, 3.0 mm or 5.0 mm.

[0042] In some embodiments, the second end of the air intake line 200 is connected to a gas source 400, and the gas source is used to supply the gas to the air intake line 200. In some embodiments, the gas includes N2, CO2, compressed air or an inert gas.

[0043] In some embodiments, the air intake line 200 is further connected with a first valve body 201 , a first filter 202 , and a second valve body 203 in sequence from the second end of the air intake line 200 to the first end of the air intake line 200 .

[0044] In some embodiments, the first valve body 201 is used to control the on and off of the gas source. In a normal state, the first valve body 201 is closed. When the gas needs to be introduced into the gas-liquid mixing chamber 100, the first valve body 201 is opened, and the gas enters the gas-liquid mixing chamber 100 from the gas source via the air inlet line 200. The first valve body 201 is a manual valve or an electric valve.

[0045] In some embodiments, the first filter 202 is used to remove solid particles in the gas. In some embodiments, the first filter 202 is a gas filter. In some embodiments, the first filter 202 includes a high efficiency filter.

[0046] In some embodiments, the second valve body 203 is a pressure valve for controlling the pressure of the gas in the gas supply pipeline. In some embodiments, the second valve body 203 controls the pressure of the gas in the gas supply pipeline to be 0.05-0.5 MPa.

[0047] In some embodiments, the air intake pipeline 200 is further connected to a buffer tank 204 between the first filter 202 and the second valve body 203, for receiving the cleaning liquid that flows back from the gas-liquid mixing chamber 100 to the air intake pipeline 200. The cleaning liquid that enters the gas dispersion chamber 104 from the multiple air outlet holes 104a may flow back to the air intake pipeline 200 through the air inlet 101, and therefore, the buffer tank 204 is required to receive the cleaning liquid that flows back to the air intake pipeline 200.

[0048] In some embodiments, the second end of the liquid inlet pipeline 300 is connected to a liquid source 500, and the liquid source is used to provide the cleaning liquid to the liquid supply pipeline. In some embodiments, the cleaning liquid is a mixture of propylene glycol monomethyl ether and propylene glycol monomethyl ether acetate, isopropyl alcohol or acetone.

[0049] In some embodiments, the liquid inlet pipeline 300 is further connected with a third valve body 301 , a second filter 302 and a fourth valve body 303 in sequence from the second end of the liquid inlet pipeline 300 to the first end of the liquid inlet pipeline 300 .

[0050] In some embodiments, the third valve body 301 is used to control the conduction and closing of the gas source. Under normal conditions, the third valve body 301 is closed. When the cleaning liquid needs to be introduced into the gas-liquid mixing chamber 100, the third valve body 301 is opened, and the cleaning liquid enters the gas-liquid mixing chamber 100 from the liquid source via the liquid inlet pipeline 300. The third valve body 301 is a manual valve or an electric valve.

[0051] In some embodiments, the second filter 302 removes solid particles in the cleaning liquid. In some embodiments, the second filter 302 is a liquid filter.

[0052] In some embodiments, the fourth valve body 303 is a pressure valve for controlling the pressure of the cleaning liquid in the liquid supply pipeline. In some embodiments, the fourth valve body 303 controls the pressure of the cleaning liquid in the liquid supply pipeline to be 0.05-0.5 MPa.

[0053] In some embodiments, the cleaning process of the delivery pipeline 11 by the cleaning device is as follows: the first valve body 201, the second valve body 203, the third valve body 301, the fourth valve body 303 and the fifth valve body 103b are opened at the same time, so that the gas and the cleaning liquid are filtered through the first filter 202 and the second filter 302 respectively, and then mixed in the gas-liquid mixing chamber 100 to form the gas-liquid mixture, and the gas-liquid mixture enters the delivery pipeline 11 through the first connecting pipe 103a to flush the delivery pipeline 11. In the cleaning process, the volume ratio of the gas to the cleaning liquid is 1: (1-10), and the cleaning time is 0.5-10h.

[0054] In other embodiments, the cleaning process of the delivery pipeline 11 by the cleaning device is as follows: first open the third valve body 301, the fourth valve body 303 and the fifth valve body 103b, the cleaning liquid enters the delivery pipeline 11 through the gas-liquid mixing chamber 100 after being filtered by the second filter 302, and rinses the delivery pipeline 11 for a preset time, then open the first valve body 201 and the second valve body 203, pass the gas into the gas-liquid mixing chamber 100, and mix in the gas-liquid mixing chamber 100 to form the gas-liquid mixture, and the gas-liquid mixture enters the delivery pipeline 11 through the first connecting pipe 103a to rinse the delivery pipeline 11. In the cleaning process, the volume ratio of the gas to the cleaning liquid is 1: (1-10), and the cleaning time is 0.5-10h.

[0055] The beneficial effects of the cleaning device provided in the embodiments of the present application include but are not limited to:

[0056] The cleaning device provided in the present application includes a gas-liquid mixing chamber and an air supply pipeline and a liquid supply pipeline connected to the gas-liquid mixing chamber. When the delivery pipeline is cleaned, the gas and the cleaning liquid form a gas-liquid mixture in the gas-liquid mixing chamber, and then the delivery pipeline is cleaned. The compression and expansion of the gas can aggravate the turbulent state of the cleaning liquid, thereby increasing the shear stress of the cleaning liquid along the flow direction and enhancing the impact of the cleaning liquid on the inner wall of the delivery pipeline; in addition, the gas will generate a large number of air pockets in the cleaning liquid, and these air pockets will generate instantaneous lateral force when they disappear, which will have a hammering effect on the inner wall of the delivery pipeline, causing solid particles to detach from the inner wall of the delivery pipeline, further accelerating the cleaning speed and enhancing the cleaning effect.

[0057] A gas dispersion chamber is also provided in the gas-liquid mixing chamber. The gas is mixed with the cleaning liquid in the gas-liquid mixing chamber through a plurality of gas outlet holes on the peripheral wall of the gas dispersion chamber. The gas dispersion chamber can increase the number of air pockets generated by the gas in the cleaning liquid, thereby further enhancing the cleaning effect.

[0058] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other possible beneficial effects.

[0059] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only for example and does not constitute a limitation of this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements and corrections to this application. Such modifications, improvements and corrections are suggested in this specification, so such modifications, improvements and corrections still belong to the spirit and scope of the exemplary embodiments of this application.

[0060] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "fix" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a rotating connection or a sliding connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood in combination with specific circumstances.

[0061] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.

[0062] In addition, the present specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or stereograms. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as being limited to the shapes of the regions shown herein, but should include deviations in shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.

[0063] At the same time, the present application uses specific words to describe the embodiments of this specification. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in the present application does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0064] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus help understand one or more embodiments of the invention, in the above description of the embodiments of this application, multiple features are sometimes combined into one embodiment, figure or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims. In fact, the features of the embodiments are less than all the features of the single embodiment disclosed above.

[0065] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of the present application. Other variations may also fall within the scope of the present application. Therefore, as an example and not a limitation, the alternative configurations of the embodiments of the present application may be considered to be consistent with the teachings of the present application. Accordingly, the embodiments of the present application are not limited to the embodiments explicitly introduced and described in the present application.

Claims

1. A cleaning device for cleaning a conveying pipeline, characterized in that: include: A gas-liquid mixing chamber, wherein a gas inlet is provided on a first end surface of the gas-liquid mixing chamber; a liquid inlet is provided on a peripheral wall of the gas-liquid mixing chamber; and an outlet is provided on a second end surface of the gas-liquid mixing chamber, and the outlet is used to connect to the delivery pipeline; an air intake pipeline, a first end of which is connected to the air inlet and is used to transport gas into the gas-liquid mixing chamber; and a liquid inlet pipeline, the second end of which is connected to the liquid inlet and is used to transport cleaning liquid into the gas-liquid mixing chamber; Among them, the gas-liquid mixing chamber also includes a gas dispersion chamber located inside the gas-liquid mixing chamber; the first end of the gas dispersion chamber is fixedly connected to the first end surface of the gas-liquid mixing chamber and is connected to the air inlet pipeline; and the surrounding wall of the gas dispersion chamber is provided with a plurality of air outlet holes penetrating the surrounding wall of the gas dispersion chamber.

2. The cleaning device according to claim 1, characterized in that: The gas dispersion chamber is in the shape of a straight tube.

3. The cleaning device according to claim 1, characterized in that: The gas dispersion chamber is in an S-shaped tube shape.

4. The cleaning device according to claim 1, characterized in that: The gas dispersion chamber is tapered, and an end surface area of ​​a first end of the gas dispersion chamber is larger than an end surface area of ​​a second end of the gas dispersion chamber.

5. The cleaning device according to claim 1, characterized in that: The second end of the air intake pipeline is connected to a gas source, and the air intake pipeline is also connected to a first valve body, a first filter and a second valve body in sequence from the second end of the air intake pipeline to the first end of the air intake pipeline.

6. The cleaning device according to claim 5, characterized in that: The air intake pipeline is further connected with a buffer tank between the first filter and the second valve body, for containing the cleaning liquid that flows back from the gas-liquid mixing chamber to the air intake pipeline.

7. The cleaning device according to claim 1, characterized in that: The second end of the liquid inlet pipeline is connected to the liquid source, and the liquid inlet pipeline is also connected to a third valve body, a second filter and a fourth valve body in sequence from the second end of the liquid inlet pipeline to the first end of the liquid inlet pipeline.

8. The cleaning device according to claim 1, characterized in that: The second end surface of the gas-liquid mixing chamber is arcuate, and the outlet is located at the center of the second end surface.

9. The cleaning device according to claim 1, characterized in that: The outlet is connected to the delivery pipeline through a first connecting pipe, and a fifth valve body is arranged on the first connecting pipeline.

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