Shielding jig for sputtering target material

Abstract

The utility model provides a shielding jig for a sputtering target material. The shielding jig comprises a rubber jig panel and a carrying handle arranged on the upper surface of the rubber jig panel, the lower surface of the rubber jig panel is arranged above the sputtering surface of the target material; the target material comprises a sputtering surface and a welding surface arranged corresponding to the sputtering surface; the welding surface of the target material is connected with the welding surface of the back plate; and the edge contour of the rubber jig panel is the same as that of the sputtering surface of the target material. The shielding jig provided by the utility model can protect the sputtering area of the target material from being influenced by sand blasting treatment, accurately control the sand blasting area, ensure that only the non-sputtering area of the target material assembly, such as partial area of a back plate, is subjected to sand blasting treatment, and the sputtering area is kept intact, so that the sputtering efficiency of the target material and the film quality are finally ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of target material processing, in particular to a shielding fixture for a sputtering target material. Background Art

[0002] Sputtering is one of the main technologies for preparing thin film materials. It uses ions generated by an ion source to accelerate and gather in a vacuum to form a high-speed energy ion beam to bombard the solid surface. The ions and the atoms on the solid surface exchange kinetic energy, causing the atoms on the solid surface to leave the solid and deposit on the substrate surface. The bombarded solid is the raw material for depositing thin films by sputtering, called sputtering target. Sputtering targets are mainly used in the electronics and information industries, such as integrated circuits, information storage, liquid crystal displays, laser storage, electronic control devices, etc.; they can also be used in the field of glass coating; they can also be used in industries such as wear-resistant materials, high-temperature corrosion resistance, and high-end decorative products.

[0003] Sand blasting is a surface treatment process for workpieces. It uses compressed air as the power to form a high-speed jet beam to spray the material (copper ore sand, quartz sand, corundum, iron sand, Hainan sand, etc.) onto the surface of the workpiece to be treated, so that the surface of the workpiece can obtain a certain degree of cleanliness and different degrees of roughness, so that the mechanical properties of the workpiece surface are improved, the fatigue resistance of the workpiece is improved, the adhesion with the coating is increased, the durability of the coating is extended, and it is also beneficial to the leveling and decoration of the coating.

[0004] At present, before the target material is sputtered, it is usually necessary to perform sandblasting on the target material assembly except for the target material itself, such as part of the back plate. The main purposes include the following aspects: (1) increase the surface roughness of the sandblasting area, improve the adhesion between the target material and the melt-sprayed film layer, and prevent the film layer from falling off during long-term sputtering; (2) remove impurities and oxides on the surface, thereby improving the mechanical properties of the target material; (3) remove burrs that may be generated during the target material processing to avoid arcing during the sputtering process. During the sandblasting process, only the sandblasting area needs to be sandblasted, and the sputtering surface of the target material needs to be protected by a shielding fixture to prevent it from being affected by the sandblasting, so that the target material will not be scrapped during the sandblasting process.

[0005] Therefore, developing a shielding fixture for protecting the sputtering surface of the target material during sandblasting is a technical problem that urgently needs to be solved in this field. Utility Model Content

[0006] In view of the shortcomings of the prior art, the purpose of the utility model is to provide a shielding jig for a sputtering target, which can protect the sputtering area of ​​the target from being affected by sandblasting, accurately control the sandblasting area, and ensure that only the non-sputtering area of ​​the target assembly, such as a part of the back plate, is sandblasted, while the sputtering area remains intact, ultimately ensuring the sputtering efficiency of the target and the film quality.

[0007] To achieve this purpose, the utility model adopts the following technical solutions:

[0008] The utility model provides a shielding jig for a sputtering target material, the shielding jig comprising a rubber jig panel and a carrying handle arranged on the upper surface of the rubber jig panel;

[0009] The lower surface of the rubber jig panel is arranged above the sputtering surface of the target material;

[0010] The target material comprises a sputtering surface and a welding surface arranged corresponding to the sputtering surface;

[0011] The welding surface of the target material is connected to the welding surface of the back plate;

[0012] The edge profile of the rubber jig panel is the same as the edge profile of the sputtering surface of the target material.

[0013] In the utility model, by setting the rubber jig panel, the good flexibility of the jig panel can be utilized, and the sputtering surface of the target material can be closely attached, so that the sputtering surface of the target material can be effectively shielded, and at the same time, it has good reusability; by setting the edge profile of the rubber jig panel to be the same as the edge profile of the sputtering surface of the target material, the sputtering surface of the target material can be fully protected, and the damage to the sputtering surface caused by sandblasting can be avoided, thereby avoiding affecting the sputtering rate and film quality of the target material; at the same time, the jig provided by the utility model can accurately control the sandblasting area, ensuring that only the non-sputtering area of ​​the target assembly, such as a part of the back plate, is subjected to sandblasting treatment, while the sputtering area remains intact, further ensuring the sputtering quality of the target material.

[0014] Preferably, the number of carrying handles on the rubber jig panel is at least 2, for example, 2, 4 or 6, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0015] In the utility model, the carrying handle is provided to help the operator to stably place the jig panel at a predetermined position, so that the jig can well cover the sputtering area.

[0016] Preferably, the carrying handles are symmetrically arranged on the upper surface of the rubber jig panel.

[0017] Preferably, the shape of the carrying handle includes any one of square, rectangular or circular.

[0018] Preferably, the shape of the target material includes any one of a bar shape or a square shape.

[0019] Preferably, the edge of the target material is rounded.

[0020] Preferably, the thickness of the rubber jig panel is 0.2-0.5 cm, for example, it can be 0.2 cm, 0.21 cm, 0.22 cm, 0.23 cm, 0.24 cm, 0.25 cm, 0.26 cm, 0.27 cm, 0.28 cm, 0.29 cm, 0.3 cm, 0.32 cm, 0.34 cm, 0.36 cm, 0.38 cm, 0.4 cm, 0.42 cm, 0.44 cm, 0.46 cm, 0.48 cm or 0.5 cm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0021] In the utility model, the rubber jig panel can be designed as a panel of unequal thickness with a thinner edge area and a thicker remaining area except the edge area as needed, so as to facilitate the application of masking tape along the edge area and the application of masking tape to the side of the target material, so that the side of the target material can also be protected against sandblasting.

[0022] Preferably, the shape of the target is a bar; the length of the target is 2500-2700mm, for example, it can be 2500mm, 2510mm, 2520mm, 2530mm, 2540mm, 2550mm, 2560mm, 2570mm, 2580mm, 2590mm, 2600mm, 2610mm, 2620mm, 2630mm, 2640mm, 2650mm, 2660mm, 2670mm, 2680mm, 2690mm or 2700mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0023] Preferably, the width of the target material is 180-220mm, for example, it can be 180mm, 182mm, 184mm, 186mm, 188mm, 190mm, 192mm, 194mm, 196mm, 198mm, 200mm, 202mm, 204mm, 206mm, 208mm, 210mm, 212mm, 214mm, 216mm, 218mm or 220mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0024] Preferably, the thickness of the target material is 20-30 mm, for example, it can be 20 mm, 21 mm, 22 mm, 23 mm, 24 mm, 25 mm, 26 mm, 27 mm, 28 mm, 29 mm or 30 mm, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0025] Compared with the prior art, the beneficial effects of the utility model are:

[0026] (1) The shielding jig provided by the utility model can be closely attached to the sputtering surface of the target material by setting a rubber jig panel and utilizing the good flexibility of the jig panel, so that the sputtering surface of the target material can be effectively shielded, thereby avoiding scratching the target material and damaging the product, and at the same time having good reusability.

[0027] (2) The shielding jig provided by the utility model can comprehensively protect the sputtering surface of the target material by setting the edge profile of the rubber jig panel to be the same as the edge profile of the sputtering surface of the target material, thereby avoiding damage to the sputtering surface caused by sandblasting, thereby avoiding affecting the sputtering rate of the target material and the film quality.

[0028] (3) The shielding fixture provided by the utility model can accurately control the sandblasting area, ensuring that only the non-sputtering area of ​​the target assembly, such as a portion of the back plate, is sandblasted, while the sputtering area remains intact, further ensuring the sputtering quality of the target. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 A schematic diagram of the structure of the shielding fixture and the target assembly before assembly provided in Example 1 of the utility model;

[0030] Figure 2 A schematic diagram of the structure of the shielding fixture and the target assembly after assembly provided in Example 1 of the utility model;

[0031] In the figure: 1- rubber jig panel; 2- carrying handle; 3- target material; 4- back plate. DETAILED DESCRIPTION

[0032] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0033] The utility model is further described in detail below. However, the following examples are only simple examples of the utility model and do not represent or limit the scope of protection of the utility model. The scope of protection of the utility model shall be subject to the claims.

[0034] It should be understood that, in the description of the present utility model, the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, which is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.

[0035] It should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0036] Those skilled in the art should understand that the present invention necessarily includes necessary pipelines, conventional valves and general pump equipment for realizing a complete process, but the above content does not belong to the main invention point of the present invention. Those skilled in the art can add layouts on their own based on the process flow and equipment structure selection, and the present invention does not make special requirements and specific limitations on this.

[0037] Example 1

[0038] This embodiment provides a shielding fixture for a sputtering target, and the structural schematic diagram of the shielding fixture and the target assembly before assembly and the structural schematic diagram after assembly are respectively as shown in Figure 1 and Figure 2 As shown, the shielding jig includes a rubber jig panel 1 and a carrying handle 2 arranged on the upper surface of the rubber jig panel 1, the lower surface of the rubber jig panel 1 is arranged above the sputtering surface of the target material 3, the target material 3 includes a sputtering surface and a welding surface arranged corresponding to the sputtering surface, the welding surface of the target material 3 is connected to the welding surface of the back plate 4, and the edge profile of the rubber jig panel 1 is the same as the edge profile of the sputtering surface of the target material 3;

[0039] Two carrying handles 2 are provided on the rubber jig panel 1, and the carrying handles 2 are symmetrically arranged on the upper surface of the rubber jig panel 1. The carrying handles 2 are in the shape of a square, and the target material 3 is in the shape of a strip. The edge of the target material 3 is rounded, the length of the target material 3 is 2650 mm, the width of the target material 3 is 200 mm, the thickness of the target material 3 is 24 mm, the thickness of the rubber jig panel 1 is 0.2-0.5 cm, the edge area is used for covering the masking tape, the thickness is 0.2 cm, and the thickness of the remaining area except the edge area is 0.5 cm.

[0040] The shielding jig provided in this embodiment is used to shield the sputtering surface of the target material 3. The carrying handle 2 is used to steadily place the rubber jig panel 1 above the sputtering surface of the target material 3, thereby protecting the sputtering surface. Before sandblasting, the edge area of ​​the rubber jig panel 1 is attached with masking tape to the side of the target material 3, so that the side of the target material 3 can also be protected during the sandblasting process, ultimately ensuring the sputtering effect and coating quality of the target material 3.

[0041] In summary, the shielding fixture provided by the utility model can protect the sputtering area of ​​the target material from being affected by sandblasting, accurately control the sandblasting area, ensure that only the non-sputtering area of ​​the target assembly, such as part of the back plate, is sandblasted, while the sputtering area remains intact, and ultimately ensure the sputtering efficiency of the target material and the film quality.

[0042] The applicant declares that the above is only a specific implementation method of the present utility model, but the protection scope of the present utility model is not limited thereto. The technicians in the relevant technical field should understand that any changes or substitutions that can be easily thought of by the technicians in the relevant technical field within the technical scope disclosed in the present utility model fall within the protection scope and disclosure scope of the present utility model.

Claims

1. A shielding fixture for a sputtering target, characterized in that: The shielding jig includes a rubber jig panel and a carrying handle disposed on the upper surface of the rubber jig panel; The lower surface of the rubber jig panel is arranged above the sputtering surface of the target material; The target material comprises a sputtering surface and a welding surface arranged corresponding to the sputtering surface; The welding surface of the target material is connected to the welding surface of the back plate; The edge profile of the rubber jig panel is the same as the edge profile of the sputtering surface of the target material.

2. The shielding fixture for the sputtering target according to claim 1, characterized in that: The number of the carrying handles on the rubber jig panel is at least 2.

3. The shielding fixture for the sputtering target according to claim 2, characterized in that: The carrying handles are symmetrically arranged on the upper surface of the rubber jig panel.

4. The shielding fixture for the sputtering target according to claim 1, characterized in that: The shape of the carrying handle includes any one of square, rectangular or circular.

5. The shielding fixture for the sputtering target according to claim 1, characterized in that: The shape of the target material includes any one of a bar shape and a square shape.

6. The shielding fixture for the sputtering target according to claim 5, characterized in that: The edge of the target material is rounded.

7. The shielding fixture for the sputtering target according to claim 1, characterized in that: The thickness of the rubber jig panel is 0.2-0.5 cm.

8. The shielding fixture for the sputtering target according to claim 5, characterized in that: The target material is in the shape of a bar; The length of the target material is 2500-2700 mm.

9. The shielding fixture for the sputtering target according to claim 8, characterized in that: The width of the target material is 180-220 mm.

10. The shielding fixture for the sputtering target according to claim 1, characterized in that: The thickness of the target material is 20-30 mm.

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