Cooling system for MPCVD diamond synthesis equipment

Abstract

The utility model relates to the technical field of cooling of microwave plasma chemical vapor deposition (MPCVD) equipment, and discloses a cooling system for MPCVD diamond synthesis equipment, which comprises a main machine body, a water storage tank, a water collecting tank and a water pump, and the water storage tank and the water collecting tank are arranged on the outer side of the main machine body. Through cooperation of a water pump, a water storage tank, a third connecting pipe, a first connecting pipe and a liquid inlet pipe, cooling liquid is guided into a water inlet hole and enters a plurality of L-shaped cooling hole channels to evenly cool the substrate table, then the cooling liquid is discharged out of the L-shaped cooling hole channels through a liquid outlet pipe, and the cooling liquid enters a water collecting tank through a circular pipe and a second connecting pipe to be stored; the cooling liquid is in direct contact with the substrate table, so that heat does not need to be conducted through the top wall of the substrate supporting table before cooling, and the cooling effect is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of MPCVD (microwave plasma chemical vapor deposition) equipment cooling, in particular to a cooling system for MPCVD diamond synthesis equipment. Background Art

[0002] MPCVD (microwave plasma chemical vapor deposition) is one of the most promising methods for synthesizing high-quality diamonds. The MPCVD reaction equipment is to transmit the microwaves generated by the microwave generator into the cavity (reaction chamber) of the reaction equipment through the waveguide transmission system, and introduce a mixed gas of methane and hydrogen into the reaction chamber. Under the excitation of the microwave, a glow discharge is generated in the reaction chamber, which ionizes the molecules of the reaction gas and generates plasma, and a diamond film is deposited on the substrate stage. The temperature uniformity of the substrate stage affects the growth of the diamond film. Uniform cooling of the substrate stage is conducive to maintaining the temperature uniformity of the substrate stage, thereby obtaining a high-quality diamond film.

[0003] Some MPCVD equipment substrate stage cooling devices currently on the market: for example, the utility model patent with authorization announcement number CN208949403U discloses a MPCVD equipment substrate stage cooling structure. The utility model allows the coolant to enter the nozzle through a cooling pipe and be stored in the nozzle. The coolant is evenly distributed on the bottom of the substrate stage to achieve full coverage of the bottom of the substrate stage, thereby allowing the substrate stage to be evenly cooled. However, since the coolant is in contact with the inner top wall of the substrate support platform, there is a thickness of the substrate support platform between the coolant and the substrate stage, resulting in heat being conducted through the top wall of the substrate support platform before being cooled, resulting in poor cooling effect, which needs to be improved.

[0004] Therefore, we propose a cooling system for MPCVD diamond synthesis equipment to solve the above problems. Utility Model Content

[0005] The purpose of the utility model is to solve the problem that in some current MPCVD equipment substrate stage cooling devices, since the coolant is in contact with the inner top wall of the substrate support platform, and there is a thickness of the substrate support platform between the coolant and the substrate stage, the heat must first be conducted through the top wall of the substrate support platform before being cooled, resulting in poor cooling effect, which needs to be improved.

[0006] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a cooling system for MPCVD diamond synthesis equipment, comprising a main body, and also comprising a water storage tank and a water collecting tank, and a water pump arranged on the outside of the main body, a substrate support table is arranged in the main body, a cooling mechanism cavity is opened in the substrate support table, and an adapter groove connected to the cooling mechanism cavity is opened on the upper surface of the substrate support table, a substrate table is arranged in the adapter groove, a plurality of first bolts are arranged on the outer surface of the substrate support table near the top, the substrate table and the substrate support table are connected by the first bolts, a water inlet hole is opened at the center of the lower surface of the substrate table, a plurality of evenly distributed L-shaped cooling channels are opened on the inner wall of the water inlet hole, a liquid inlet pipe is arranged at a position corresponding to the water inlet hole on the lower surface of the substrate support table, and the lower surface of the substrate support table is connected to the L-shaped cooling channel. A liquid outlet pipe is arranged at a position corresponding to the channel, and connecting plates are fixed on the surfaces of the liquid inlet pipe and the liquid outlet pipe, and a plurality of second bolts are arranged on the connecting plate, and the connecting plate and the substrate platform are connected by the second bolts, and a circular tube is connected to the bottom ends of the plurality of liquid outlet pipes, and a pipe connector is arranged on the surface of the substrate support platform, and the circular tube and the liquid inlet pipe are both connected to the pipe connector, and the other ends of the two pipe connectors are respectively connected to a first connecting pipe and a second connecting pipe, the first connecting pipe is connected to the output end of the water pump, and the second connecting pipe is connected to the water collecting tank, and the positions where the first connecting pipe and the second connecting pipe contact with the main body are both provided with connecting structures, and a third connecting pipe is arranged between the input end of the water pump and the water storage tank, a liquid guide pipe is arranged on the side of the water storage tank, and a liquid discharge pipe is arranged on the side of the water collecting tank, and valves are installed on the liquid guide pipe and the liquid discharge pipe.

[0007] Furthermore, the L-shaped cooling channels are all configured as inclined structures.

[0008] Furthermore, the liquid inlet pipe, the liquid outlet pipe, the circular pipe, the first connecting pipe, the second connecting pipe, the third connecting pipe, the liquid guiding pipe, and the liquid draining pipe are all stainless steel core pipes.

[0009] Furthermore, the connection structure includes two symmetrically arranged connecting rings, each of which is provided with a plurality of third bolts, the connecting rings are connected to the main body via the third bolts, the first connecting pipe and the second connecting pipe are symmetrically provided with external threads, and the connecting rings are threadedly connected to the external threads.

[0010] Furthermore, a sealing silicone ring is arranged between the substrate stage and the inner side wall of the adaptation groove, a first sealing silicone pad is arranged between the connecting plate and the substrate stage, a second sealing silicone pad is arranged between the connecting ring and the main body, a through hole adapted to the first connecting tube and the second connecting tube is opened on the side of the main body, a sealing silicone sleeve is arranged in the through hole, and the first connecting tube and the second connecting tube are both connected with the sealing silicone sleeve.

[0011] Furthermore, observation windows are provided on the surfaces of the water storage tank and the water collecting tank.

[0012] The beneficial effects of the utility model are as follows: the coolant can be introduced into the water inlet hole and enter into a plurality of L-shaped cooling channels through the cooperation of the water pump, the water storage tank, the third connecting pipe, the first connecting pipe and the liquid inlet pipe, so as to evenly cool the substrate stage; then the coolant is discharged from the L-shaped cooling channel through the liquid outlet pipe, and enters the water collecting tank through the circular pipe and the second connecting pipe for storage; the coolant directly contacts the substrate stage, so that the heat does not need to be first conducted through the top wall of the substrate support table before being cooled, thereby greatly improving the cooling effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a schematic diagram of the structure of the cooling system of the utility model for MPCVD diamond synthesis equipment;

[0014] Figure 2 It is a partial cross-sectional structural schematic diagram of the cooling system of the utility model for MPCVD diamond synthesis equipment;

[0015] Figure 3 This is a schematic diagram of the first part of the cooling system of the utility model for MPCVD diamond synthesis equipment;

[0016] Figure 4 This utility model Figure 3 A schematic diagram of a partial cross-sectional structure;

[0017] Figure 5 This is a schematic diagram of the second part of the cooling system of the utility model for MPCVD diamond synthesis equipment.

[0018] The names corresponding to the marks in the figure are:

[0019] 1. Main body; 2. Water storage tank; 3. Water collecting tank; 4. Water pump; 5. Baseboard support platform; 6. Baseboard platform; 61. Water inlet hole; 62. L-shaped cooling channel; 7. First bolt; 8. Liquid inlet pipe; 9. Liquid outlet pipe; 10. Connecting plate; 11. Second bolt; 12. Round pipe; 13. Pipe connector; 14. First connecting pipe; 15. Second connecting pipe; 16. Connecting structure; 161. Connecting ring; 162. Third bolt; 163. External thread; 17. Third connecting pipe; 18. Liquid guide tube; 19. Liquid discharge pipe; 20. Valve; 21. Sealing silicone ring; 22. First sealing silicone pad; 23. Second sealing silicone pad; 24. Sealing silicone sleeve; 25. Observation window. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the utility model.

[0021] Embodiments of the present utility model:

[0022] Embodiment 1

[0023] like Figure 1-Figure 5As shown, the utility model provides a cooling system for MPCVD diamond synthesis equipment, including a main body 1, and also including a water storage tank 2 and a water collecting tank 3, and a water pump 4 arranged on the outside of the main body 1. A substrate support table 5 is arranged in the main body 1, and a cooling mechanism cavity is opened in the substrate support table 5. An adapter groove connected to the cooling mechanism cavity is opened on the upper surface of the substrate support table 5, and a substrate table 6 is arranged in the adapter groove. A plurality of first bolts 7 are arranged near the top of the outer surface of the substrate support table 5. The substrate table 6 is connected to the substrate support table 5 by the first bolts 7. The center position of the lower surface of the substrate table 6 is A water inlet hole 61 is provided on the substrate support platform 5, and a plurality of evenly distributed L-shaped cooling channels 62 are provided on the inner wall of the water inlet hole 61. A liquid inlet pipe 8 is provided at a position corresponding to the water inlet hole 61 on the lower surface of the substrate support platform 5, and a liquid outlet pipe 9 is provided at a position corresponding to the L-shaped cooling channel 62 on the lower surface of the substrate support platform 5. A connecting plate 10 is fixed on the surface of the liquid inlet pipe 8 and the liquid outlet pipe 9. A plurality of second bolts 11 are provided on the connecting plate 10, and the connecting plate 10 and the substrate platform 6 are connected by the second bolts. The bottom ends of the plurality of liquid outlet pipes 9 are connected to circular pipes 12, and a pipe connector 13 is provided on the surface of the substrate support platform 5. The circular The pipe 12 and the liquid inlet pipe 8 are both connected to the pipe connector 13, and the other ends of the two pipe connectors 13 are respectively connected to the first connecting pipe 14 and the second connecting pipe 15, the first connecting pipe 14 is connected to the output end of the water pump 4, the second connecting pipe 15 is connected to the water collecting tank 3, and the positions where the first connecting pipe 14 and the second connecting pipe 15 contact the main body 1 are both provided with a connecting structure 16, and a third connecting pipe 17 is provided between the input end of the water pump 4 and the water storage tank 2. The connecting structure 16 includes two symmetrically arranged connecting rings 161, and a plurality of third bolts 162 are provided on the connecting rings 161. The connecting rings 161 are connected to the main body 1. The bodies 1 are connected by a third bolt 162, and the first connecting pipe 14 and the second connecting pipe 15 are symmetrically provided with external threads 163. The connecting ring 161 is threadedly connected to the external threads 163, and the water pump 4 can be started. Under the action of the water pump 4, the coolant in the water storage tank 2 is extracted through the third connecting pipe 17, and is introduced into the water inlet hole 61 of the substrate stage 6 through the first connecting pipe 14 and the liquid inlet pipe 8. The coolant enters the L-shaped cooling channel 62 through the water inlet hole 61 to cool the substrate stage 6, and then the coolant is discharged through the liquid outlet pipe 9, and enters the water collecting tank 3 through the circular pipe 12 and the second connecting pipe 15.

[0024] Embodiment 2

[0025] like Figure 1-Figure 5As shown, on the basis of the first embodiment of the utility model: the L-shaped cooling channel 62 is set to an inclined structure. Through such a setting, it is possible to prevent the coolant from remaining in the substrate stage 6 when no cooling is performed, and to prevent the coolant sediment from accumulating and clogging. The liquid inlet pipe 8, the liquid outlet pipe 9, the circular pipe 12, the first connecting pipe 14, the second connecting pipe 15, the third connecting pipe 17, the liquid guide pipe 18, and the liquid discharge pipe 19 are all stainless steel core pipes. A sealing silicone ring 21 is provided between the substrate stage 6 and the inner side wall of the adapter groove, a first sealing silicone pad 22 is provided between the connecting plate 10 and the substrate stage 6, a second sealing silicone pad 23 is provided between the connecting ring 161 and the main body 1, and a sealing silicone pad 23 is provided between the connecting ring 161 and the main body 1. The second connecting tube 15 is matched with a through hole, and a sealing silicone sleeve 24 is arranged in the through hole. The first connecting tube 14 and the second connecting tube 15 are both sleeved with the sealing silicone sleeve 24. Through such an arrangement, the sealing is guaranteed. A liquid guide tube 18 is arranged on the side of the water storage tank 2, and a liquid discharge pipe 19 is arranged on the side of the water collecting tank 3. Valves 20 are installed on the liquid guide tube 18 and the liquid discharge pipe 19. Observation windows 25 are provided on the surfaces of the water storage tank 2 and the water collecting tank 3. Through such an arrangement, the amount of coolant in the water storage tank 2 and the water collecting tank 3 can be checked through the observation window 25, and then the valve 20 can be opened as needed to introduce coolant into the water storage tank 2 through the liquid guide tube 18, or the coolant in the water collecting tank 3 can be discharged through the liquid discharge pipe 19.

Claims

1. A cooling system for MPCVD diamond synthesis equipment, comprising a main body (1), characterized in that: The invention also comprises a water storage tank (2) and a water collecting tank (3) and a water pump (4) arranged on the outside of the main body (1); a substrate support platform (5) is arranged in the main body (1); a cooling mechanism cavity is provided in the substrate support platform (5); an adapting groove connected to the cooling mechanism cavity is provided on the upper surface of the substrate support platform (5); a substrate platform (6) is arranged in the adapting groove; a plurality of first bolts (7) are arranged on the outer surface of the substrate support platform (5) near the top; the substrate platform (6) and the substrate support platform (5) are connected by the first bolts. The substrate support platform (5) is connected by a bolt (7), a water inlet hole (61) is provided at the center of the lower surface of the substrate platform (6), and a plurality of evenly distributed L-shaped cooling channels (62) are provided on the inner wall of the water inlet hole (61). A liquid inlet pipe (8) is provided at a position on the lower surface of the substrate support platform (5) corresponding to the water inlet hole (61), and a liquid outlet pipe (9) is provided at a position on the lower surface of the substrate support platform (5) corresponding to the L-shaped cooling channel (62). The surfaces of the liquid inlet pipe (8) and the liquid outlet pipe (9) are both fixed with a connecting plate (10), and the connecting plate ( A plurality of second bolts (11) are arranged on the connecting plate (10), and the connecting plate (10) and the substrate platform (6) are connected by the second bolts, the bottom ends of the plurality of liquid outlet pipes (9) are connected to a circular pipe (12), a pipe connector (13) is arranged on the surface of the substrate support platform (5), the circular pipe (12) and the liquid inlet pipe (8) are both connected to the pipe connector (13), and the other ends of the two pipe connectors (13) are respectively connected to a first connecting pipe (14) and a second connecting pipe (15), the first connecting pipe (14) and the water The output end of the water pump (4) is connected, the second connecting pipe (15) is connected to the water collecting tank (3), the positions where the first connecting pipe (14) and the second connecting pipe (15) contact the main body (1) are both provided with connecting structures (16), a third connecting pipe (17) is provided between the input end of the water pump (4) and the water storage tank (2), a liquid guide pipe (18) is provided on the side of the water storage tank (2), a liquid discharge pipe (19) is provided on the side of the water collecting tank (3), and valves (20) are installed on both the liquid guide pipe (18) and the liquid discharge pipe (19).

2. A cooling system for MPCVD diamond synthesis equipment according to claim 1, characterized in that: The L-shaped cooling channels (62) are all arranged as inclined structures.

3. A cooling system for MPCVD diamond synthesis equipment according to claim 1, characterized in that: The liquid inlet pipe (8), the liquid outlet pipe (9), the circular pipe (12), the first connecting pipe (14), the second connecting pipe (15), the third connecting pipe (17), the liquid guide pipe (18), and the liquid discharge pipe (19) are all stainless steel core pipes.

4. A cooling system for MPCVD diamond synthesis equipment according to claim 1, characterized in that: The connection structure (16) comprises two symmetrically arranged connection rings (161), each of which is provided with a plurality of third bolts (162), and the connection rings (161) are connected to the main body (1) via the third bolts (162); the first connection pipe (14) and the second connection pipe (15) are symmetrically provided with external threads (163), and the connection rings (161) are threadedly connected to the external threads (163).

5. A cooling system for MPCVD diamond synthesis equipment according to claim 4, characterized in that: A sealing silicone ring (21) is arranged between the substrate platform (6) and the inner side wall of the adapting groove, a first sealing silicone pad (22) is arranged between the connecting plate (10) and the substrate platform (6), a second sealing silicone pad (23) is arranged between the connecting ring (161) and the main body (1), a through hole adapted to the first connecting tube (14) and the second connecting tube (15) is opened on the side of the main body (1), a sealing silicone sleeve (24) is arranged in the through hole, and the first connecting tube (14) and the second connecting tube (15) are both sleeved with the sealing silicone sleeve (24).

6. The cooling system for MPCVD diamond synthesis equipment according to claim 1, characterized in that: Observation windows (25) are provided on the surfaces of the water storage tank (2) and the water collecting tank (3).

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