Early warning device for hydraulic system of semiconductor furnace

Abstract

The utility model belongs to the technical field of hydraulic monitoring, and particularly relates to a semiconductor furnace hydraulic system early warning device which comprises a connecting pipe. The side wall of the connecting pipe is fixedly connected with a first fixing plate; a piston rod is slidably connected to the middle of the first fixing plate. The side wall of the connecting pipe is fixedly connected with a second fixing plate; the middle part of the second fixing plate is fixedly connected with a pressure sensor; the pressure sensor is aligned with the piston rod; the end part of the pressure sensor is connected with a connecting line; the end part of the connecting line is connected with a buzzer; the side wall of the buzzer is fixedly connected with a mounting seat; according to the step, the first fixing plate, the pressure sensor and the buzzer are connected through the connecting pipe, the pressure in the hydraulic pipeline can be monitored and early warned through movement of the first fixing plate, and the situation that liquid is crystallized, precipitated or corroded on the surface of the pressure sensor due to the fact that the pressure sensor is installed in the pipeline can be reduced; and normal operation of the pressure sensor is influenced.

Description

Technical Field

[0001] The utility model belongs to the technical field of hydraulic monitoring, in particular to an early warning device for a hydraulic system of a semiconductor furnace. Background Art

[0002] A semiconductor furnace is a furnace equipment used in the manufacture of semiconductors. Its main function is to heat and oxidize semiconductors. The hydraulic system of a semiconductor furnace is an important component, used to provide stable pressure and flow control. A pressure warning device is usually required in the hydraulic system to monitor the hydraulic pressure.

[0003] The existing semiconductor furnace hydraulic system early warning device is usually composed of components such as a pressure sensor and an alarm. When in use, the pressure sensor is usually installed in the hydraulic pipe to monitor the real-time pressure in the hydraulic pipe. When the pressure exceeds the normal threshold, the alarm works to play the role of early warning and reminder. During long-term use and observation, it is found that when the existing semiconductor furnace hydraulic system early warning device is in use, the pressure sensor is usually installed in the hydraulic pipeline. After being used for a long time, the pressure sensor comes into contact with the liquid in the pipeline, causing the liquid to crystallize and precipitate on the surface of the sensor or corrode, thereby affecting the normal operation of the sensor.

[0004] To this end, the utility model provides an early warning device for a semiconductor furnace hydraulic system. Utility Model Content

[0005] In order to make up for the deficiencies of the prior art and solve at least one problem raised in the background technology, an early warning device for a semiconductor furnace hydraulic system is proposed.

[0006] The technical solution adopted by the utility model to solve its technical problems is: the utility model describes an early warning device for a semiconductor furnace hydraulic system, comprising a connecting pipe; a first fixed plate is fixedly connected to the side wall of the connecting pipe; a piston rod is slidably connected to the middle of the first fixed plate; a second fixed plate is fixedly connected to the side wall of the connecting pipe; a pressure sensor is fixedly connected to the middle of the second fixed plate; the pressure sensor and the piston rod are aligned; a connecting line is connected to the end of the pressure sensor; a buzzer is connected to the end of the connecting line; a mounting seat is fixedly connected to the side wall of the buzzer; this step connects the first fixed plate and the pressure sensor and the buzzer by setting a connecting pipe, and the pressure in the hydraulic pipeline can be monitored and warned through the movement of the first fixed plate, which can reduce the situation where the pressure sensor is installed in the pipeline, causing the liquid to crystallize or corrode on the surface of the pressure sensor, affecting the normal operation of the pressure sensor.

[0007] Preferably, a dustproof box is fixedly connected to the side wall of the mounting base; the dustproof box is arranged to cover the buzzer; a bellows is fixedly connected to the side wall of the dustproof box; a fan is fixedly connected to the inner wall of the bellows; a plurality of ventilation holes are provided on the side wall of the dustproof box away from the bellows; in this step, the buzzer can be protected from dust by providing the dustproof box, and the convection effect can be used to dissipate the heat of the buzzer in conjunction with the fan and the ventilation holes, so as to reduce the situation where the heat of the semiconductor furnace affects the normal operation of the buzzer.

[0008] Preferably, the side wall of the bellows is fixedly connected with a slide rail; a filter is placed on the inner wall of the slide rail; the slide rail and the filter are slidably matched; this step can filter the airflow entering the bellows by setting the slide rail and the filter, so as to reduce the dust and other impurities in the airflow from entering the dustproof box and accumulating on the surface of the buzzer to cause blockage and affect the sound.

[0009] Preferably, a connecting rod is fixedly connected to the side wall of the buzzer; a warning light is fixedly connected to the end of the connecting rod; this step can generate a light warning when the buzzer sounds an alarm by arranging the connecting rod, thereby improving the warning effect through the coordinated effect of hearing and vision.

[0010] Preferably, the side wall of the connecting pipe is connected to a pressure relief pipe; the side wall of the pressure relief pipe is rotatably connected to a pressure relief valve; this step can perform pressure relief operation on the hydraulic pipeline by setting the pressure relief pipe and the pressure relief valve, so as to reduce safety problems caused by high pressure in the hydraulic pipeline and improve the convenience of pressure relief.

[0011] Preferably, the end of the pressure relief pipe is connected to a liquid storage tank; the side wall of the liquid storage tank is connected to a liquid outlet pipe; in this step, by setting a liquid storage tank to connect the pressure relief pipe and the liquid outlet pipe, the liquid after the pressure relief operation can be collected and reused to reduce the waste of hydraulic liquid resources.

[0012] The beneficial effects of the utility model are as follows:

[0013] 1. The semiconductor furnace hydraulic system early warning device described in the utility model connects the first fixed plate and the pressure sensor and the buzzer by setting a connecting pipe. The pressure in the hydraulic pipeline can be monitored and warned by the movement of the first fixed plate, which can reduce the pressure sensor installed in the pipeline, causing the liquid to crystallize or corrode on the surface of the pressure sensor, thereby affecting the normal operation of the pressure sensor.

[0014] 2. The semiconductor furnace hydraulic system early warning device described in the utility model can protect the buzzer from dust by setting a dustproof box, and can use the convection effect of the fan and ventilation holes to dissipate the heat of the buzzer, so as to reduce the influence of the heat of the semiconductor furnace on the normal operation of the buzzer. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The utility model will be further described below in conjunction with the accompanying drawings.

[0016] Figure 1 It is a stereogram in the utility model;

[0017] Figure 2 It is a schematic diagram of the structure of the buzzer in the utility model;

[0018] Figure 3 It is a schematic diagram of the connecting pipe structure in the utility model;

[0019] Figure 4 It is a schematic diagram of the dustproof box structure in the utility model;

[0020] Legend:

[0021] 1. Connecting pipe; 11. First fixing plate; 12. Piston rod; 13. Second fixing plate; 14. Pressure sensor; 15. Connecting wire; 16. Buzzer; 17. Mounting seat; 2. Dustproof box; 21. Bellows; 22. Fan; 23. Ventilation hole; 3. Slide rail; 31. Filter; 4. Connecting rod; 41. Warning light; 5. Pressure relief pipe; 51. Pressure relief valve; 6. Liquid storage tank; 61. Liquid outlet pipe; 7. Rubber sleeve. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] Specific examples are given below.

[0024] like Figures 1 to 3As shown, a semiconductor furnace hydraulic system early warning device described in an embodiment of the utility model comprises a connecting pipe 1; a first fixing plate 11 is fixedly connected to the side wall of the connecting pipe 1; a piston rod 12 is slidably connected to the middle of the first fixing plate 11; a second fixing plate 13 is fixedly connected to the side wall of the connecting pipe 1; a pressure sensor 14 is fixedly connected to the middle of the second fixing plate 13; the pressure sensor 14 and the piston rod 12 are aligned; a connecting line 15 is connected to the end of the pressure sensor 14; a buzzer 16 is connected to the end of the connecting line 15; a mounting seat 17 is fixedly connected to the side wall of the buzzer 16; when working, the connecting pipe 1 is connected to the hydraulic pipeline in the semiconductor furnace , and then fix the mounting base 17 on the semiconductor furnace. When the liquid pressure in the pipeline will lift the first fixed plate 11, when the pressure is about to exceed the threshold, the first fixed plate 11 will contact the pressure sensor 14 and transmit the signal to the buzzer 16. At this time, the buzzer 16 will sound an alarm. In this step, the connecting tube 1 is set to connect the first fixed plate 11 and the pressure sensor 14 and the buzzer 16. The pressure in the hydraulic pipeline can be monitored and warned through the movement of the first fixed plate 11, which can reduce the pressure sensor 14 installed in the pipeline, resulting in the crystallization or corrosion of the liquid on the surface of the pressure sensor 14, affecting the normal operation of the pressure sensor 14.

[0025] like Figure 2 and Figure 4 As shown, the side wall of the mounting seat 17 is fixedly connected to a dust box 2; the dust box 2 is arranged to cover the buzzer 16; the side wall of the dust box 2 is fixedly connected to a bellows 21; the inner wall of the bellows 21 is fixedly connected to a fan 22; a side wall of the dust box 2 away from the bellows 21 is provided with a plurality of ventilation holes 23; when working, the dust box 2 is installed on the mounting seat 17 to cover the buzzer 16, and then the fan 22 can be started to blow air into the dust box 2, and then the airflow flows out from the ventilation holes 23, and when the airflow passes through the buzzer 16, it can be blown to dissipate heat. In this step, the buzzer 16 can be dust-proofed by setting the dust box 2, and the buzzer 16 can be dissipated by convection effect in conjunction with the fan 22 and the ventilation holes 23, so as to reduce the heat of the semiconductor furnace affecting the normal operation of the buzzer 16.

[0026] like Figure 2As shown, the side wall of the bellows 21 is fixedly connected with a slide rail 3; a filter screen 31 is placed on the inner wall of the slide rail 3; the slide rail 3 and the filter screen 31 are in sliding cooperation; during operation, when the airflow enters the bellows 21, it will pass through the filter screen 31. At this time, the filter screen 31 can filter the airflow to filter out impurities such as dust in the airflow. The filter screen 31 can be pulled out from the slide rail 3, and the impurities adhering to the surface of the filter screen 31 can be cleaned before being installed in the slide rail 3. In this step, the slide rail 3 and the filter screen 31 are set to filter the airflow entering the bellows 21, so as to reduce the dust and other impurities in the airflow from entering the dustproof box 2, causing accumulation on the surface of the buzzer 16 and causing blockage to affect the sound.

[0027] like Figure 2 As shown, the side wall of the buzzer 16 is fixedly connected to a connecting rod 4; the end of the connecting rod 4 is fixedly connected to a warning light 41; during operation, when the pressure is high and the buzzer 16 sounds an alarm, the warning light 41 is connected to the buzzer 16 to issue a light warning. In this step, by setting the connecting rod 4, a light warning can be generated when the buzzer 16 sounds an alarm, thereby improving the warning effect through the coordinated action of hearing and vision.

[0028] like Figure 1 As shown, the side wall of the connecting pipe 1 is connected to a pressure relief pipe 5; the side wall of the pressure relief pipe 5 is rotatably connected to a pressure relief valve 51; during operation, when the pressure is high and an alarm occurs, the pressure relief valve 51 can be rotated to perform a pressure relief operation, and a part of the liquid in the pipeline is discharged through the pressure relief pipe 5 to reduce the pressure in the hydraulic pipeline. In this step, by setting the pressure relief pipe 5 and the pressure relief valve 51, the hydraulic pipeline can be pressure-relieved to reduce the safety problems caused by the high pressure in the hydraulic pipeline, so as to improve the convenience of pressure relief.

[0029] like Figure 1 As shown, the end of the pressure relief pipe 5 is connected to a liquid storage tank 6; the side wall of the liquid storage tank 6 is connected to a liquid outlet pipe 61; during operation, when part of the liquid in the hydraulic pipeline flows out of the pressure relief pipe 5, it will enter the liquid storage tank 6 and be collected, and then the liquid can be discharged from the liquid storage tank 6 through the liquid outlet pipe 61 for recycling and reuse. In this step, by setting the liquid storage tank 6 to connect the pressure relief pipe 5 and the liquid outlet pipe 61, the liquid after the pressure relief operation can be collected and reused to reduce the waste of hydraulic liquid resources.

[0030] like Figure 1 As shown, a rubber sleeve 7 is fixedly connected to the side wall of the pressure relief valve 51; during operation, when the pressure relief valve 51 is rotated, the rubber sleeve 7 can increase the friction of the pressure relief valve 51 and reduce slipping. At the same time, the rubber sleeve 7 can reduce the adhesion of dust and impurities on the surface of the pressure relief valve 51. In this step, the rubber sleeve 7 can be provided to increase the friction when the pressure relief valve 51 is used, and at the same time reduce the adhesion of dust.

[0031] Working principle: connect the connecting pipe 1 to the hydraulic pipeline in the semiconductor furnace, and then fix the mounting seat 17 on the semiconductor furnace. When the liquid pressure in the pipeline will lift the first fixing plate 11, when the pressure is about to exceed the threshold, the first fixing plate 11 will contact the pressure sensor 14 and transmit the signal to the buzzer 16. At this time, the buzzer 16 will sound an alarm. Install the dust box 2 on the mounting seat 17 to cover the buzzer 16, and then start the fan 22 to blow air into the dust box 2, and then the airflow flows out from the ventilation hole 23. When the airflow passes through the buzzer 16, it can be blown and cooled. When the airflow enters the bellows 21, it will pass through the filter 31. At this time, the filter 31 can filter the airflow and filter out impurities such as dust in the airflow. The net 31 is pulled out from the slide rail 3, and the impurities adhering to the surface of the filter screen 31 are cleaned and then installed in the slide rail 3. When the pressure is high, the buzzer 16 sounds an alarm. At this time, the warning light 41 connected to the buzzer 16 can emit a light warning. When the pressure is high and an alarm occurs, the pressure relief valve 51 can be rotated to perform a pressure relief operation, and a part of the liquid in the pipeline is discharged through the pressure relief pipe 5 to reduce the pressure in the hydraulic pipeline. When part of the liquid in the hydraulic pipeline flows out of the pressure relief pipe 5, it will enter the liquid storage tank 6 and be collected. Then the liquid can be discharged from the liquid storage tank 6 through the liquid outlet pipe 61 for recycling and reuse. When the pressure relief valve 51 is rotated, the rubber sleeve 7 can increase the friction of the pressure relief valve 51 to reduce slipping. At the same time, the rubber sleeve 7 can reduce the adhesion of dust and impurities to the surface of the pressure relief valve 51.

[0032] The above shows and describes the basic principles, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A semiconductor furnace hydraulic system early warning device, comprising a connecting pipe (1); characterized in that: The side wall of the connecting tube (1) is fixedly connected to a first fixing plate (11); the middle of the first fixing plate (11) is slidably connected to a piston rod (12); the side wall of the connecting tube (1) is fixedly connected to a second fixing plate (13); the middle of the second fixing plate (13) is fixedly connected to a pressure sensor (14); the pressure sensor (14) and the piston rod (12) are arranged in alignment; the end of the pressure sensor (14) is connected to a connecting wire (15); the end of the connecting wire (15) is connected to a buzzer (16); the side wall of the buzzer (16) is fixedly connected to a mounting seat (17).

2. The semiconductor furnace hydraulic system early warning device according to claim 1, characterized in that: A dustproof box (2) is fixedly connected to the side wall of the mounting seat (17); the dustproof box (2) is arranged to cover the buzzer (16); a bellows (21) is fixedly connected to the side wall of the dustproof box (2); a fan (22) is fixedly connected to the inner side wall of the bellows (21); and a plurality of ventilation holes (23) are provided on a side wall of the dustproof box (2) away from the bellows (21).

3. The semiconductor furnace hydraulic system early warning device according to claim 2, characterized in that: The side wall of the bellows (21) is fixedly connected with a slide rail (3); a filter screen (31) is placed on the inner side wall of the slide rail (3); and the slide rail (3) and the filter screen (31) are in sliding cooperation.

4. The semiconductor furnace hydraulic system early warning device according to claim 3, characterized in that: A connecting rod (4) is fixedly connected to the side wall of the buzzer (16); and a warning light (41) is fixedly connected to the end of the connecting rod (4).

5. The semiconductor furnace hydraulic system early warning device according to claim 4, characterized in that: The side wall of the connecting pipe (1) is connected to a pressure relief pipe (5); the side wall of the pressure relief pipe (5) is rotatably connected to a pressure relief valve (51).

6. The semiconductor furnace hydraulic system early warning device according to claim 5, characterized in that: The end of the pressure relief pipe (5) is connected to a liquid storage tank (6); and the side wall of the liquid storage tank (6) is connected to a liquid outlet pipe (61).

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