Filter mechanism of clean room fan

Abstract

The utility model relates to the technical field of clean room filtering, in particular to a clean room fan filtering mechanism which comprises a machine box, the upper surface of the machine box communicates with an air inlet pipe, the top end of the air inlet pipe communicates with an air nozzle, and an air processing assembly is arranged in the machine box and used for controlling various parameters of air entering a clean room. A cleaning assembly is arranged in the machine box and used for cleaning or replacing the processing part. According to the fan filtering mechanism for the clean room, through cooperation of the exhaust fan, external air can be sucked into the machine box, so that the air is treated and then is introduced into the clean room, through cooperation of the first filter screen and the second filter screen, dust with large size and impurities with small size in the air can be filtered separately, and the filtering efficiency is improved. And through cooperation of a drying plate and a heating plate, the humidity and temperature of the air can be controlled, and therefore it is guaranteed that the environment in the clean room is not affected.

Description

Technical Field

[0001] The utility model relates to the technical field of clean room filtering, in particular to a fan filtering mechanism for a clean room. Background Art

[0002] A clean room refers to a well-enclosed space in which parameters such as air cleanliness, temperature, humidity, pressure, and noise are controlled as required. The development of clean rooms is closely linked to modern industry and cutting-edge technology. The environmental requirements of the precision machinery industry (such as gyroscopes, micro-bearings, etc.) and the semiconductor industry (such as large-scale integrated circuit production) have promoted the development of clean room technology.

[0003] For example, a clean room fan filter mechanism is disclosed in China Utility Model Patent Publication No. (CN213823827U), which includes a housing, a fan and a filter assembly. The housing is provided with a first air inlet and an air outlet at the top and bottom, respectively. The fan is arranged at the air outlet. The filter assembly includes a coarse filter composite net and a fine filter composite net. The coarse filter composite net is arranged at the first air inlet, and the fine filter composite net is arranged above the fan. A second air inlet is provided on the side of the housing, and the second air inlet is located between the coarse filter composite net and the fine filter composite net. The second air inlet is provided away from the inside of the housing. The return air duct is connected to the return air outlet of the clean room. This patent solves the problem that the existing clean room is also provided with a return air outlet. The air in the clean room is discharged through the return air outlet and then filtered and re-discharged into the clean room to complete the air circulation. However, two sets of independent filtering mechanisms are required, making the filtering mechanism of the clean room more complicated. However, this patent can only filter the air but cannot control the temperature and humidity of the air, which makes the environment inside the clean room vulnerable to damage. Secondary treatment of the air by external equipment increases the cost of ventilation in the clean room and affects practicality. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a clean room fan filtering mechanism, which has the advantages of filtering the air while controlling other parameters of the air, etc., solving the problem that the patent can only filter the air but cannot control the temperature and humidity of the air, resulting in the environment inside the clean room being easily damaged. Secondary treatment of the air through external equipment increases the cost of ventilation in the clean room, affecting practicality.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a clean room fan filter mechanism, comprising a chassis, the upper surface of the chassis is connected to an air inlet pipe, the top of the air inlet pipe is connected to an air nozzle, an air treatment component is arranged inside the chassis for controlling various parameters of the air entering the clean room, a cleaning component is arranged inside the chassis for cleaning or replacing the treatment component, a guide plate is fixed between the inner bottom wall and the left inner wall of the chassis, and an air outlet pipe is fixed on the lower surface of the chassis;

[0006] The air handling component includes an installation port opened on the lower surface of the chassis, an exhaust fan is fixed between the inner walls on the side opposite to the installation port, a first filter is provided inside the chassis, a second filter is provided inside the chassis, a drying plate is provided inside the chassis, a temperature sensor is fixed to the right inner wall of the chassis, heating plates are fixed to the four inner walls of the chassis, a cooling pipe is fixed inside the chassis, both ends of the cooling pipe respectively penetrate and extend to the left and right sides of the chassis, and a return air component is provided on the left side of the chassis.

[0007] The beneficial effect of adopting the above further solution is: the air drawn into the interior of the chassis is subjected to parameter control processing to maintain the environment inside the clean room.

[0008] Furthermore, the number of the guide plates is four, and they are symmetrically distributed around the central axis of the chassis, and adjacent guide plates are fixedly connected.

[0009] The beneficial effect of adopting the above further solution is that the purified air can be passed into the clean room from the air outlet pipe, thereby avoiding air accumulation in the clean room.

[0010] Furthermore, the first filter screen is located above the second filter screen, the second filter screen is located above the drying plate, and the drying plate is located above the heating plate.

[0011] The beneficial effect of adopting the above further scheme is: performing stratified treatment on the air and improving the effect and efficiency of air purification.

[0012] Furthermore, the return air assembly includes a return air duct fixed on the left side of the chassis, an air inlet fan is fixed to the inner wall of the bottom end of the return air duct, and an air inlet is opened on the left side of the chassis, and the air inlet corresponds to the position of the return air duct.

[0013] The beneficial effect of adopting the above further solution is: the air inside the clean room is returned to the clean room to ensure the environment inside the clean room.

[0014] Furthermore, the number of the return air ducts is four and they are symmetrically distributed around the central axis of the chassis, and the return air ducts are located above the first filter.

[0015] The beneficial effect of adopting the above further scheme is: increasing the air flow rate in the clean room, so that the air discharged from the return air duct is mixed with the new air and then returns to the first-stage processing position, and the air processing work is carried out again to ensure the air quality.

[0016] Further, the cleaning component includes a first slide groove fixed on the left inner wall of the chassis, the first filter screen is located on the inner side of the first slide groove, the left inner wall of the chassis is fixed with a second slide groove, the second filter screen is located on the inner side of the second slide groove, the left inner wall of the chassis is fixed with a third slide groove, the drying plate is located on the inner side of the third slide groove, a cover plate is provided on the front side of the chassis, a handle is fixed on the front side of the cover plate, the front sides of the first filter screen, the second filter screen and the drying plate all penetrate and extend to the front side of the chassis, and are all fixedly connected to the back side of the cover plate, an installation groove is opened on the front side of the chassis, a magnetic suction plate is fixed on the rear inner wall of the installation groove, and an iron sheet is fixed on the back side of the cover plate.

[0017] The beneficial effect of adopting the above further solution is that it is convenient to clean or replace the first filter screen, the second filter screen and the drying plate, thereby ensuring the effect of the air treatment work.

[0018] Furthermore, the number of the first sliding slot, the second sliding slot and the third sliding slot are all two, and they are all symmetrically distributed about the central axis of the chassis.

[0019] The beneficial effect of adopting the above further solution is that the first filter screen, the second filter screen and the drying plate can maintain stability and support during the movement and operation.

[0020] Furthermore, the sum of the thickness of the magnetic plate and the thickness of the iron sheet is equal to the depth of the mounting groove, and the number of the mounting grooves is two, and they are symmetrically distributed about the central axis of the chassis.

[0021] The beneficial effect of adopting the above further solution is that the cover plate can fit with the front side of the chassis during adsorption, thereby preventing air leakage.

[0022] Compared with the prior art, the technical solution of this application has the following beneficial effects:

[0023] 1. The clean room fan filter mechanism can draw the outside air into the chassis through the cooperation of the exhaust fan, so that the air is introduced into the clean room after being processed. Through the cooperation of the first filter and the second filter, the larger dust and smaller impurities in the air can be filtered and processed separately, so as to ensure the cleanliness of the air. Through the cooperation of the drying plate, the heating plate and the cooling pipe, the humidity and temperature of the air can be controlled, so as to ensure that the environment inside the clean room is not affected.

[0024] 2. The clean room fan filter mechanism can support and limit the first filter, the second filter and the drying plate respectively through the cooperation of the first slide groove, the second slide groove and the third slide groove, so as to facilitate the removal of the first filter, the second filter and the drying plate for cleaning. Through the cooperation of the magnetic plate and the iron sheet, the cover plate can be adsorbed to avoid air leakage inside the chassis and affect the air treatment effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of the utility model;

[0026] Figure 2 This is a schematic diagram of the air handling component of the utility model;

[0027] Figure 3 It is a side view of the cleaning component of the utility model.

[0028] In the figure: 1. chassis; 2. air inlet duct; 3. air nozzle; 4. air handling component; 401. mounting port; 402. exhaust fan; 403. first filter; 404. second filter; 405. drying plate; 406. temperature sensor; 407. heating plate; 408. cooling pipe; 409. return air duct; 410. air inlet fan; 411. air inlet; 5. cleaning component; 501. first slide; 502. second slide; 503. third slide; 504. cover; 505. handle; 506. mounting slot; 507. magnetic plate; 508. iron sheet; 6. guide plate; 7. air outlet duct. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] See also Figure 1A clean room fan filter mechanism in this embodiment includes a chassis 1, an upper surface of the chassis 1 is connected to an air inlet pipe 2, and the top of the air inlet pipe 2 is connected to an air nozzle 3. Air enters the air inlet pipe 2 from the air nozzle 3 and enters the interior of the chassis 1 through the air inlet pipe 2 so as to purify and filter the air. An air treatment component 4 is provided inside the chassis 1 for controlling various parameters of the air entering the clean room, improving the efficiency of air purification, and ensuring that the environment inside the clean room is not affected. A cleaning component 5 is provided inside the chassis 1 for cleaning or replacing the processing components to maintain high-efficiency purification of the air. A guide plate 6 is fixed between the inner bottom wall and the left inner wall of the chassis 1, and an air outlet pipe 7 is fixed on the lower surface of the chassis 1. The guide plate 6 guides the air so that the purified air directly enters the clean room from the air outlet pipe 7.

[0031] In this embodiment, there are four guide plates 6 , which are symmetrically distributed about the central axis of the chassis 1 , and adjacent guide plates 6 are fixedly connected to improve the efficiency of air circulation and avoid air accumulation in the chassis 1 .

[0032] See also Figure 2 In order to improve the efficiency of air purification and ensure that the environment in the clean room is not affected, the air treatment component 4 in this embodiment includes an installation port 401 opened on the lower surface of the chassis 1, and an exhaust fan 402 is fixed between the inner walls on the side opposite to the installation port 401. Under the action of the exhaust fan 402, the air flows downward to process the air. A first filter 403 is provided inside the chassis 1. The air first passes through the first filter 403. The first filter 403 filters the dust with a larger volume in the air. A second filter 404 is provided inside the chassis 1. The filtered air passes through the second filter 404. The second filter 404 filters out the impurities with a smaller volume in the air, thereby ensuring the cleanliness of the air. A drying plate 405 is provided inside the chassis 1. The air passes through the second filter 404. The drying plate 405 dries the water vapor carried in the air, so as to control the humidity of the air inside the clean room. A temperature sensor 406 is fixed to the right inner wall of the chassis 1. Heating plates 407 are fixed to the four inner walls of the chassis 1. The temperature sensor 406 senses the temperature of the air. When the temperature of the air is lower than the temperature inside the clean room, the heating plate 407 is turned on to heat the air. A cooling pipe 408 is fixed inside the chassis 1. The two ends of the cooling pipe 408 respectively penetrate and extend to the left and right sides of the chassis 1. When the temperature of the air is higher than the temperature inside the clean room, cooling water is introduced into the cooling pipe 408. The cooling water absorbs heat from the air during the flow process, so that the air maintains the same temperature as the clean room. A return air component is provided on the left side of the chassis 1.

[0033] In this embodiment, the first filter 403 is located above the second filter 404, the second filter 404 is located above the drying plate 405, and the drying plate 405 is located above the heating plate 407, so as to perform stratified processing on the air and improve the effect and efficiency of air purification.

[0034] It should be noted that the return air assembly includes a return air duct 409 fixed on the left side of the chassis 1, and an air inlet fan 410 is fixed to the inner wall at the bottom of the return air duct 409. The air inlet fan 410 draws the air inside the clean room into the return air duct 409. An air inlet 411 is provided on the left side of the chassis 1, and the air inlet 411 corresponds to the position of the return air duct 409. The return air duct 409 passes air into the chassis 1 from the air inlet 411, mixes with the new air entering the chassis 1 and is processed again, thereby completing the ventilation work inside the clean room. There are four return air ducts 409, and they are symmetrically distributed around the central axis of the chassis 1. The return air duct 409 is located above the first filter 403 to increase the speed of air circulation inside the clean room, and the air discharged from the return air duct 409 is mixed with the new air and returned to the first-stage processing position, and the air processing work is carried out again to ensure the quality of the air.

[0035] See also Figure 3 In order to maintain high-efficiency purification of air, the cleaning component 5 in this embodiment includes a first slide groove 501 fixed to the left inner wall of the chassis 1, the first filter 403 is located on the inner side of the first slide groove 501, and the thickness of the first filter 403 is adapted to the distance between the inner walls on the opposite side of the first slide groove 501. A second slide groove 502 is fixed to the left inner wall of the chassis 1, and the second filter 404 is located on the inner side of the second slide groove 502. The thickness of the second filter 404 is adapted to the distance between the inner walls on the opposite side of the second slide groove 502. A third slide groove 503 is fixed to the left inner wall of the chassis 1, and a drying plate 405 is located on the inner side of the third slide groove 503. The thickness of the drying plate 405 is adapted to the distance between the inner walls on the opposite side of the third slide groove 503. The front side of the chassis 1 is provided with a cover plate 50 4. A handle 505 is fixed on the front of the cover 504. The fronts of the first filter 403, the second filter 404 and the drying plate 405 all penetrate and extend to the front side of the chassis 1, and are all fixedly connected to the back of the cover 504. The cover 504 is taken out by the handle 505. The cover 504 moves the first filter 403, the second filter 404 and the drying plate 405 out of the chassis 1 for cleaning or replacement to ensure the effect of air treatment. A mounting groove 506 is opened on the front of the chassis 1, and a magnetic suction plate 507 is fixed to the rear inner wall of the mounting groove 506. An iron sheet 508 is fixed on the back of the cover 504. The iron sheet 508 on the cover 504 is adsorbed on the magnetic suction plate 507, so that the cover 504 can fit with the front of the chassis 1, thereby avoiding air leakage.

[0036] In this embodiment, the number of the first slide groove 501, the second slide groove 502 and the third slide groove 503 are all two, and they are all symmetrically distributed about the central axis of the chassis 1, so that the first filter 403, the second filter 404 and the drying plate 405 can maintain stability when putting in and taking out, the sum of the thickness of the magnetic suction plate 507 and the thickness of the iron sheet 508 is equal to the depth of the installation groove 506, ensuring that the back of the cover plate 504 can fit with the front of the chassis 1 to prevent air leakage, the number of the installation grooves 506 is two, and they are symmetrically distributed about the central axis of the chassis 1, so as to improve the stability of the adsorption.

[0037] The working principle of the above embodiment is:

[0038] (1) First, turn on the exhaust fan 402. The exhaust fan 402 draws the outside air into the air nozzle 3. The air enters the chassis 1 through the air inlet pipe 2. Under the action of the exhaust fan 402, the air flows downward. The air first passes through the first filter 403. The first filter 403 filters the larger dust in the air. The filtered air passes through the second filter 404. The second filter 404 filters out the smaller impurities in the air, thereby ensuring the cleanliness of the air. Then the air passes through the drying plate 405. The drying plate 405 dries the water vapor carried in the air, thereby controlling the humidity of the air inside the clean room.

[0039] (2) When the air passes through the drying plate 405, the temperature sensor 406 senses the temperature of the air. When the temperature of the air is lower than the temperature in the clean room, the heating plate 407 is turned on to heat the air. When the temperature of the air is higher than the temperature in the clean room, cooling water is introduced into the cooling pipe 408. The cooling water absorbs heat from the air during the flow process, so that the air maintains the same temperature as the clean room. After the air treatment is completed, the exhaust fan 402 guides the air into the clean room under the guidance of the guide plate 6, and then the air inlet fan 407 is turned on. 10. The air inlet fan 410 draws the air inside the clean room into the return air duct 409. The return air duct 409 passes the air into the chassis 1 from the air inlet 411, mixes with the air newly entering the chassis 1 and is processed again, thereby completing the ventilation work inside the clean room. After a period of use, the cover plate 504 is taken out through the handle 505, and the cover plate 504 moves the first filter 403, the second filter 404 and the drying plate 405 out of the chassis 1 for cleaning or replacement to ensure the effect of the air treatment work.

Claims

1. A clean room fan filter mechanism, comprising a chassis (1), characterized in that: The upper surface of the chassis (1) is connected to an air inlet pipe (2), the top end of the air inlet pipe (2) is connected to an air nozzle (3), an air processing component (4) is provided inside the chassis (1) for controlling various parameters of the air entering the clean room, a cleaning component (5) is provided inside the chassis (1) for cleaning or replacing the processing components, a guide plate (6) is fixed between the inner bottom wall and the left inner wall of the chassis (1), and an air outlet pipe (7) is fixed on the lower surface of the chassis (1); The air handling component (4) comprises an installation opening (401) opened on the lower surface of the chassis (1), an exhaust fan (402) is fixed between the inner walls on the side opposite to the installation opening (401), a first filter (403) is provided inside the chassis (1), a second filter (404) is provided inside the chassis (1), a drying plate (405) is provided inside the chassis (1), a temperature sensor (406) is fixed on the right inner wall of the chassis (1), heating plates (407) are fixed on the four inner walls of the chassis (1), a cooling pipe (408) is fixed inside the chassis (1), two ends of the cooling pipe (408) respectively penetrate and extend to the left and right sides of the chassis (1), and a return air component is provided on the left side of the chassis (1).

2. A clean room fan filter mechanism according to claim 1, characterized in that: The number of the guide plates (6) is four, and they are symmetrically distributed about the central axis of the chassis (1), and adjacent guide plates (6) are fixedly connected.

3. A clean room fan filter mechanism according to claim 1, characterized in that: The first filter screen (403) is located above the second filter screen (404), the second filter screen (404) is located above the drying plate (405), and the drying plate (405) is located above the heating plate (407).

4. A clean room fan filter mechanism according to claim 1, characterized in that: The return air assembly comprises a return air duct (409) fixed to the left side of the chassis (1); an air inlet fan (410) is fixed to the inner wall at the bottom end of the return air duct (409); an air inlet (411) is opened on the left side of the chassis (1); the air inlet (411) corresponds to the position of the return air duct (409).

5. A clean room fan filter mechanism according to claim 4, characterized in that: The number of the return air ducts (409) is four and they are symmetrically distributed around the central axis of the chassis (1); the return air ducts (409) are located above the first filter screen (403).

6. A clean room fan filter mechanism according to claim 1, characterized in that: The cleaning component (5) comprises a first slide groove (501) fixed to the left inner wall of the chassis (1), the first filter screen (403) being located on the inner side of the first slide groove (501), a second slide groove (502) being fixed to the left inner wall of the chassis (1), the second filter screen (404) being located on the inner side of the second slide groove (502), a third slide groove (503) being fixed to the left inner wall of the chassis (1), the drying plate (405) being located on the inner side of the third slide groove (503), and a filter screen (405) being provided on the front side of the chassis (1). A cover plate (504) is provided, a handle (505) is fixed on the front of the cover plate (504), the fronts of the first filter screen (403), the second filter screen (404) and the drying plate (405) all penetrate and extend to the front side of the chassis (1), and are all fixedly connected to the back of the cover plate (504), a mounting groove (506) is provided on the front of the chassis (1), a magnetic attraction plate (507) is fixed to the rear inner wall of the mounting groove (506), and an iron sheet (508) is fixed to the back of the cover plate (504).

7. A clean room fan filter mechanism according to claim 6, characterized in that: The number of the first sliding groove (501), the second sliding groove (502) and the third sliding groove (503) are all two, and they are all symmetrically distributed about the central axis of the chassis (1).

8. A clean room fan filter mechanism according to claim 6, characterized in that: The sum of the thickness of the magnetic attraction plate (507) and the thickness of the iron sheet (508) is equal to the depth of the mounting groove (506), and the number of the mounting grooves (506) is two and they are symmetrically distributed about the central axis of the chassis (1).

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