Heating furnace

Abstract

The utility model provides a heating furnace. The heating furnace comprises a shell; the vacuum cavity is arranged in the shell, and the vacuum cavity is made of a metal material and is used for accommodating a flaky material; the electromagnetic induction assembly is distributed around the vacuum cavity, the electromagnetic induction assembly and the vacuum cavity are arranged in an insulated mode, and the electromagnetic induction assembly is used for heating the vacuum cavity through electromagnetic induction; and the supporting assembly is fixed in the shell and is fixedly connected with the electromagnetic induction assembly. During normal work, the electromagnetic induction assembly is electrified to generate a changing magnetic field, so that the vacuum cavity made of the metal material generates current under the action of the changing magnetic field, and Joule heat is generated to heat materials in the vacuum cavity. The electromagnetic induction assembly heats the vacuum cavity through electromagnetic induction, the heating efficiency is high, the speed of transferring heat of the vacuum cavity to the materials is higher, the materials can be rapidly heated to the specified process temperature, and the machining efficiency is improved.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic material processing, and in particular to a heating furnace. Background Art

[0002] At present, in the production process of photovoltaic materials or semiconductors, the materials are usually processed, such as chemical vapor deposition (CVD) process, diffusion process, etc. The above processing technology usually requires the materials to be sent into a heating furnace and react under certain temperature and pressure conditions to achieve.

[0003] In the related art, the heating furnace includes a shell, a heating wire and a quartz vacuum chamber arranged in sequence from the outside to the inside. In actual use, the material to be processed (such as a sheet material) is placed in the quartz vacuum chamber, and the heating wire is heated after being energized, and the heat is transferred to the material through the quartz vacuum chamber. However, the heating furnace in the related art has the problem of slow heating efficiency. Utility Model Content

[0004] In view of the above, it is necessary to provide a heating furnace that can improve heating efficiency.

[0005] The present application provides a heating furnace, including: an outer shell; a vacuum cavity, which is arranged in the outer shell, the vacuum cavity is made of metal and is used to accommodate sheet materials; an electromagnetic induction component, which is distributed around the vacuum cavity and is insulated from the vacuum cavity, and the electromagnetic induction component is used to heat the vacuum cavity through electromagnetic induction; a support component, which is fixed in the outer shell and fixedly connected to the electromagnetic induction component.

[0006] In some embodiments, the heating furnace further includes a heat-insulating layer, which is disposed between the electromagnetic induction component and the inner side of the shell.

[0007] In some embodiments, the electromagnetic induction component includes multiple electromagnetic induction coils, which are spaced apart along the length direction of the vacuum cavity; the vacuum cavity is penetrated by the multiple electromagnetic induction coils, and there is a gap between the inner side of the electromagnetic induction coil and the outer wall of the vacuum cavity.

[0008] In some embodiments, the electromagnetic induction component is made of nickel-chromium alloy, iron-chromium-aluminum alloy, tungsten or molybdenum.

[0009] In some embodiments, the support assembly includes a support rod, a locking piece and multiple insulating blocks. The support rod is fixed in the outer shell, and the multiple insulating blocks are spaced apart along the length direction of the support rod, and two adjacent insulating blocks cooperate to clamp and position the electromagnetic induction coil; the locking piece is connected to the support rod and is used to fix the multiple insulating blocks.

[0010] In some embodiments, a positioning groove is provided on the side of the insulating block facing the electromagnetic induction coil, and the positioning groove is used to accommodate the electromagnetic induction coil.

[0011] In some embodiments, a limiting protrusion is provided on the side of the insulating block facing the vacuum cavity, and the distance from the limiting protrusion to the vacuum cavity is smaller than the distance from the electromagnetic induction coil to the vacuum cavity, so as to limit the distance between the inner side of the electromagnetic induction coil and the outer wall of the vacuum cavity.

[0012] In some embodiments, there are multiple locking members, each of which is provided with a threaded hole, and a threaded surface matching the threaded hole is provided on the circumferential side of the support rod; the support rod is passed through the insulating block, and multiple locking members are threadedly connected to the support rod and cooperate to clamp the insulating block.

[0013] In some embodiments, the vacuum chamber is provided with a plurality of heating zones along the length direction; a plurality of electromagnetic induction coils are distributed corresponding to the plurality of heating zones to form a plurality of electromagnetic induction coil groups, and the electromagnetic induction coil groups are used to heat the corresponding heating zones through electromagnetic induction.

[0014] In some embodiments, the housing is made of insulating material.

[0015] The heating furnace provided by the implementation of the present application, when in normal operation, the electromagnetic induction component is energized to generate a changing magnetic field, so that the vacuum cavity made of metal material generates current under the action of the changing magnetic field, and generates Joule heat to heat the material in the vacuum cavity. The electromagnetic induction component relies on electromagnetic induction to heat the vacuum cavity, and the heating efficiency is fast. The heat of the vacuum cavity is transferred to the material at a faster rate, so that the material can be quickly heated to the specified process temperature, thereby improving the processing efficiency. The thickness of the coating on the inner wall of the vacuum cavity has little effect on heat conduction, avoiding the problem of reduced heating efficiency caused by the use of resistive heating wires to heat the quartz vacuum cavity in related technologies. In addition, the vacuum cavity made of metal material is not prone to tube explosion and shattering in a high temperature environment, which reduces the later maintenance cost of the equipment and improves production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the internal structure of the heating furnace according to an embodiment of the present application.

[0017] Figure 2 This is a cross-sectional view of a heating furnace according to an embodiment of the present application.

[0018] Figure 3 for Figure 2 A partial enlarged view of point III in the middle.

[0019] Figure 4 This is a schematic diagram of the distribution of the vacuum chamber, electromagnetic induction coil and heating zone of the heating furnace of an embodiment of the present application.

[0020] Figure 5This is a schematic structural diagram of the support assembly, electromagnetic induction coil and vacuum chamber of the heating furnace of an embodiment of the present application.

[0021] Figure 6 This is a schematic structural diagram of the electromagnetic induction coil, insulating block, support rod and locking member of the heating furnace of an embodiment of the present application.

[0022] Description of main component symbols:

[0023] 10. Shell; 20. Vacuum chamber; 21. Heating zone; 30. Electromagnetic induction component; 31. Power control box; 32. Electromagnetic induction coil; 40. Insulation layer; 50. Support component; 51. Support rod; 511. Threaded surface; 52. Locking piece; 521. Threaded hole; 53. Insulating block; 531. Positioning groove; 532. Limiting protrusion; 100. Material. DETAILED DESCRIPTION

[0024] In the description of the embodiments of the present application, when an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be a centrally disposed element at the same time. When an element is considered to be "disposed on" another element, it may be directly disposed on the other element or there may be a centrally disposed element at the same time. In the present application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected, or it may be indirectly connected through an intermediate medium, or it may be internal communication between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0025] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0026] In the related art, the heating furnace includes a shell, a heating wire and a quartz vacuum chamber which are arranged in sequence from the outside to the inside. During normal operation, the material is contained in the quartz vacuum chamber, the interior of the quartz vacuum chamber is evacuated, the heating wire is energized to generate heat, and the heat is transferred to the material through the quartz vacuum chamber for heating. After long-term use, the inner wall of the quartz vacuum chamber will be coated, the light transmittance will deteriorate, the thermal radiation efficiency will be affected, and the heating efficiency will be slowed down. At the same time, the quartz vacuum chamber may explode and break in a high temperature environment, and the residue left on the heating wire is difficult to clean and needs to be replaced, which increases the production cost.

[0027] To this end, the embodiment of the present application provides a heating furnace, which can achieve the technical effect of improving heating efficiency and production efficiency. The heating furnace is used to provide a high-temperature vacuum environment for the chemical treatment of materials. The materials can be boats loaded with sheet materials, and the sheet materials include but are not limited to silicon slices, silicon carbide slices or wafers, etc. The chemical treatment includes but is not limited to chemical vapor deposition, atomic layer deposition or diffusion process (such as phosphorus diffusion, boron diffusion), etc.

[0028] Figure 1 This is a schematic diagram of the internal structure of the heating furnace according to an embodiment of the present application. Figure 2 This is a cross-sectional view of a heating furnace according to an embodiment of the present application. Figure 3 for Figure 2 A partial enlarged view of point III in the middle.

[0029] like Figure 1 , Figure 2 and Figure 3 As shown, the heating furnace includes a shell 10, a vacuum cavity 20, an electromagnetic induction component 30, an insulation layer 40 and a support component 50, wherein the vacuum cavity 20, the electromagnetic induction component 30 and the insulation layer 40 are fixed in the heating furnace from the inside to the outside. A reaction space is formed inside the vacuum cavity 20, and the reaction space can accommodate the material 100. The vacuum cavity 20 is made of metal material, including but not limited to carbon steel, stainless steel, etc. The electromagnetic induction component 30 is distributed around the outer wall of the vacuum cavity 20, and a gap is left between the outer wall of the vacuum cavity 20, so that the vacuum cavity 20 is penetrated by the electromagnetic induction component 30. The electromagnetic induction component 30 is insulated from the vacuum cavity 20, and the electromagnetic induction component 30 is used to heat the vacuum cavity 20 by electromagnetic induction. The support component 50 is fixedly arranged in the shell 10, and is fixedly connected to the electromagnetic induction component 30 to support and fix the electromagnetic induction component 30.

[0030] During normal operation, the electromagnetic induction component 30 is energized to generate a changing magnetic field, so that the vacuum chamber 20 made of metal generates current under the action of the changing magnetic field and generates Joule heat to heat the material 100 in the vacuum chamber 20 .

[0031] It can be understood that the electromagnetic induction component 30 relies on electromagnetic induction to heat the vacuum chamber 20, with high heating efficiency, and the heat of the vacuum chamber 20 is transferred to the material 100 at a faster rate, so that the material 100 can be quickly heated to the specified process temperature, thereby improving processing efficiency.

[0032] On the other hand, after long-term operation, the inner wall of the vacuum cavity 20 may be coated with a film. However, the electromagnetic induction heating method has a skin effect, and the induced current is concentrated on the outer surface of the vacuum cavity 20. The heat of the inner surface is carried out by the heat conduction of the inner surface. The thickness of the coating on the inner wall of the vacuum cavity 20 has little effect on the heat conduction, avoiding the use of resistive heating wires to heat the quartz vacuum cavity in related technologies, and eliminating the problem of the inner wall of the quartz vacuum cavity being coated with a film, which affects the thermal radiation efficiency, deteriorates the light transmittance, and reduces the heating efficiency. In addition, the metal vacuum cavity 20 is not prone to tube explosion and shattering in a high temperature environment, reducing the later maintenance cost of the equipment and improving production efficiency.

[0033] There is a gap between the electromagnetic induction component 30 and the inner wall of the shell 10, and the thermal insulation layer 40 is disposed between the electromagnetic induction component 30 and the inner side of the shell 10. In normal operation, the thermal insulation layer 40 can prevent the heat of the vacuum cavity 20 from diffusing to the shell 10, which on the one hand increases the heat accumulation rate of the vacuum cavity 20, and on the other hand prevents the shell 10 from being overheated. In addition, the thermal insulation layer 40 has a certain shielding effect on the magnetic field of the electromagnetic induction component 30, reducing the mutual interference between the magnetic fields of the electromagnetic induction components 30 of different heating furnaces.

[0034] For the convenience of description, the direction of the heating furnace in normal use is used as a direction reference, that is, the housing 10 and the vacuum chamber 20 are placed in a horizontal direction as an example, and the length direction of the vacuum chamber 20 is the horizontal direction.

[0035] In this embodiment, the housing 10 is in the shape of a circular tube as a whole and is made of insulating material to prevent the housing 10 from being heated by electromagnetic induction under the action of the magnetic field generated by the electromagnetic induction component 30 .

[0036] In this embodiment, there is a gap between the electromagnetic induction component 30 and the inner side of the housing 10, and the insulation layer 40 is disposed between the electromagnetic induction component 30 and the inner side of the housing 10 to wrap the outer side of the electromagnetic induction component 30. For example, the insulation layer 40 can be made of aluminum silicate ceramic fiber.

[0037] During normal operation, the thermal insulation layer 40 can prevent the heat of the vacuum chamber 20 from diffusing to the housing 10, thereby increasing the heat accumulation rate of the vacuum chamber 20 and preventing the housing 10 from overheating. In addition, the thermal insulation layer 40 has a certain shielding effect on electromagnetic waves, thereby reducing the mutual interference between the magnetic fields of the electromagnetic induction components 30 of different heating furnaces.

[0038] In this embodiment, the vacuum chamber 20 is in a circular tube shape, and the cross-sectional shape of the vacuum chamber 20 in the vertical direction is a circular ring. In other embodiments, the vacuum chamber 20 can also be adjusted to other shapes according to the shape of the material 100, such as a square tube, etc., and this application is not limited to this.

[0039] In the present embodiment, the vacuum chamber 20 is detachably fixed to the housing 10 to facilitate the disassembly and assembly of the vacuum chamber 20. When the vacuum chamber 20 needs to be disassembled, the detachable fixing structure between the vacuum chamber 20 and the housing 10 can be removed, and the vacuum chamber 20 can be pulled out of the electromagnetic induction component 30. When the vacuum chamber 20 needs to be installed, the vacuum chamber 20 can be inserted into the interior of the electromagnetic induction component 30, and the vacuum chamber 20 can be fixed by the detachable fixing structure. Exemplarily, a fixing ring is provided at the outer periphery of the end of the vacuum chamber 20, and a plurality of threaded mounting holes are provided on the outer side of the fixing ring, and a plurality of fixing bolts are provided at the end of the housing 10, and the fixing bolts are passed through the housing 10 and threadedly connected to the threaded mounting holes, so that the vacuum chamber 20 is fixed in the housing 10.

[0040] In this embodiment, an insulating coating is provided on the outer wall of the vacuum chamber 20 to prevent the vacuum chamber 20 from contacting and conducting with the electromagnetic induction component 30, thereby improving the working stability and safety of the equipment.

[0041] In this embodiment, the electromagnetic induction assembly 30 includes a power control box 31 and a plurality of electromagnetic induction coils 32. The shape of the electromagnetic induction coils 32 matches the shape of the vacuum chamber 20. The plurality of electromagnetic induction coils 32 are spaced apart along the length direction of the vacuum chamber 20. The vacuum chamber 20 is penetrated by the plurality of electromagnetic induction coils 32, and there is a gap between the inner side of the electromagnetic induction coils 32 and the outer wall of the vacuum chamber 20. The power control box 31 is electrically connected to the electromagnetic induction coils 32. The power control box 31 is used to provide current to the electromagnetic induction coils 32 so that the electromagnetic induction coils 32 generate a changing magnetic field.

[0042] It can be understood that the multiple electromagnetic induction coils 32 are distributed along the vacuum chamber 20, which can improve the heating uniformity of the vacuum chamber 20. There is a distance between the electromagnetic induction coil 32 and the vacuum chamber 20, which can play an insulating role on the one hand, and can reduce the position interference between the electromagnetic induction coil 32 and the vacuum chamber 20 when the vacuum chamber 20 is disassembled and assembled on the other hand.

[0043] Exemplarily, the cross-sectional shape of the electromagnetic induction coil 32 in the vertical direction is a circular ring, and the inner ring radius of the electromagnetic induction coil 32 is greater than the outer ring radius of the vacuum chamber 20. The power control box 31 can use a high-frequency power supply, which has the characteristic of less noise compared to a medium-frequency power supply, wherein high frequency refers to a frequency above 10,000 Hz.

[0044] In this embodiment, the electromagnetic induction component 30 is made of a high temperature resistant material, including but not limited to nickel-chromium alloy, iron-chromium-aluminum alloy, tungsten or molybdenum, etc., that is, the electromagnetic induction coil 32 can be made of a nickel-chromium alloy coil, an iron-chromium-aluminum alloy coil, a tungsten coil or a molybdenum coil, etc. Among them, the high temperature resistant material specifies that the material can still work stably when the temperature reaches above 500°C.

[0045] It can be understood that the electromagnetic induction coil 32 can work stably in a high temperature environment, for example, at 1300°C, which improves the applicability of the electromagnetic induction coil 32 to a high temperature environment, and does not require an additional cooling device such as a water cooler to cool the electromagnetic induction coil 32, thereby reducing production costs.

[0046] On the other hand, in an application scenario using the same shell 10 structure and the same insulation layer 40 material, the shorter the distance between the inner side of the electromagnetic induction coil 32 and the outer wall of the vacuum chamber 20, the larger the distance between the inner side of the electromagnetic induction coil 32 and the inner side of the shell 10, and more space can be reserved for the installation of the insulation layer 40 to accommodate a thicker insulation layer 40.

[0047] Therefore, by utilizing the high temperature resistance of the electromagnetic induction coil 32, the distance between the inner side of the electromagnetic induction coil 32 and the inner side of the housing 10 can be increased, leaving more space for the thermal insulation layer 40 to be installed, so as to install a thicker thermal insulation layer 40, thereby improving the ability of the thermal insulation layer 40 to prevent magnetic interference, further reducing the mutual interference between the magnetic fields inside the electromagnetic induction coils 32 of different heating furnaces, and improving the working stability of the heating furnace. The reasons are as follows.

[0048] It is worth noting that in other embodiments, if the electromagnetic induction component 30 is not required to have high temperature resistance, for example, the material needs to be able to work stably when the temperature is below 500°C, then the electromagnetic induction component 30 may also be made of copper, copper alloy, etc. If the electromagnetic induction component 30 is required to have high temperature resistance, on the basis of the electromagnetic induction component 30 being made of copper, copper alloy, etc., a tubular electromagnetic induction component 30 may also be used, and water may be passed through the inside of the electromagnetic induction component 30 by a water cooler to cool it down, and this application does not limit this.

[0049] In this embodiment, an insulating coating is provided on the surface of the electromagnetic induction coil 32 to prevent the vacuum chamber 20 from contacting and conducting with the electromagnetic induction component 30, thereby improving the working stability and safety of the equipment.

[0050] Figure 4 This is a schematic diagram of the distribution of the vacuum chamber, electromagnetic induction coil and heating zone of the heating furnace of an embodiment of the present application.

[0051] like Figure 1 and Figure 4 As shown, in this embodiment, the vacuum chamber 20 is provided with a plurality of heating zones 21 along the length direction. A plurality of electromagnetic induction coils 32 form a plurality of electromagnetic induction coil groups corresponding to the distribution of the plurality of heating zones 21, and the electromagnetic induction coil groups are used to heat the corresponding heating zones 21 through electromagnetic induction.

[0052] It can be understood that the power control box 31 can output currents of different sizes to the electromagnetic induction coils 32 of different electromagnetic induction coil groups to control the magnetic field generated by the electromagnetic induction coil groups, thereby controlling the heating zone 21 to heat to a specified temperature, so as to manage the heating temperature at different positions on the vacuum chamber 20 and realize temperature zoning control.

[0053] In this embodiment, the heating furnace further includes a plurality of temperature sensors, which may be thermocouples. The plurality of temperature sensors are respectively arranged in the plurality of heating zones 21. The power control box 31 is respectively electrically connected to the temperature sensors arranged in the corresponding heating zones 21. The power control box 31 may adjust the current frequency output to the corresponding electromagnetic induction coil group according to the temperature data fed back by the temperature sensor and the set target temperature value, so that the actual temperature of the heating zone 21 is maintained at the target temperature value.

[0054] Figure 5 This is a schematic structural diagram of the support assembly, electromagnetic induction coil and vacuum chamber of the heating furnace of an embodiment of the present application.

[0055] like Figure 3 and Figure 5 As shown, in this embodiment, the support assembly 50 includes a support rod 51, a locking member 52 and a plurality of insulating blocks 53, wherein the support rod 51 is fixedly disposed in the housing 10. The insulating blocks 53 are made of a high temperature resistant insulating material, such as a ceramic material. The plurality of insulating blocks 53 are spaced apart along the length direction of the support rod 51, and the plurality of insulating blocks 53 and the plurality of electromagnetic induction coils 32 are staggered, and two adjacent insulating blocks 53 can cooperate to clamp and position the electromagnetic induction coil 32 in the middle. The locking member 52 is connected to the support rod 51 and is used to fix the plurality of insulating blocks 53.

[0056] In this way, the locking piece 52 fixes the multiple insulating blocks 53 on the support rod 51, and the multiple insulating blocks 53 cooperate with each other to position the electromagnetic induction coils 32, so as to fix the multiple electromagnetic induction coils 32 relatively to the vacuum chamber 20 at the same time. At the same time, the multiple insulating blocks 53 maintain a specified distance between the multiple electromagnetic induction coils 32.

[0057] In this embodiment, multiple groups of support components 50 are provided, and the multiple groups of support components 50 are distributed at intervals around the electromagnetic induction coil 32. Exemplarily, there are 12 groups of support components 50, and each group of support components 50 is distributed at intervals along the circumference of the vacuum chamber 20, and multiple points of the electromagnetic induction coil 32 are fixed at the same time, thereby improving the installation stability of the electromagnetic induction coil 32.

[0058] In this embodiment, fixed blocks are respectively fixedly provided at both ends of the housing 10, and the fixed blocks are distributed in a ring shape along the inner side of the housing 10. The fixed blocks are provided with plug holes on the side facing the support rod 51, and the two ends of the support rod 51 are respectively plugged into the corresponding plug holes. Exemplarily, the fixed blocks are fixed in the housing 10 by a detachable manner such as bolting, clamping or embedding, and the two ends of the support rod 51 are respectively plugged into the corresponding plug holes of the two fixed blocks to fix and limit the support rod 51.

[0059] In this embodiment, a limiting protrusion 532 is provided on the side of the insulating block 53 facing the vacuum chamber 20, and the distance between the limiting protrusion 532 and the vacuum chamber 20 is smaller than the distance between the electromagnetic induction coil 32 and the vacuum chamber 20, so as to limit the distance between the inner side of the electromagnetic induction coil 32 and the outer wall of the vacuum chamber 20, thereby preventing the electromagnetic induction coil 32 from contacting and conducting with the vacuum chamber 20, thereby achieving an insulating effect.

[0060] Figure 6 This is a schematic structural diagram of the electromagnetic induction coil, insulating block, support rod and locking member of the heating furnace of an embodiment of the present application.

[0061] like Figure 5 and Figure 6 As shown, in this embodiment, a positioning groove 531 is provided on the side of the insulating block 53 facing the electromagnetic induction coil 32, and the positioning groove 531 is used to accommodate and position the electromagnetic induction coil 32. When the two insulating blocks 53 cooperate to clamp the electromagnetic induction coil 32, the electromagnetic induction coil 32 is positioned in the positioning grooves 531 of the two adjacent insulating blocks 53 on both sides thereof, so as to improve the installation stability of the electromagnetic induction coil 32.

[0062] In this embodiment, the insulating block 53 is provided with a through hole, which passes through two opposite sides of the insulating block 53, and the support rod 51 is passed through the insulating block 53. The support rod 51 can form a sliding fit with the insulating block 53 through the through hole, and the position of the insulating block 53 on the support rod 51 can be adjusted by sliding the insulating block 53 relative to the support rod 51, so as to clamp or release the corresponding electromagnetic induction coil 32, so as to facilitate the installation or removal of the electromagnetic induction coil 32.

[0063] In this embodiment, there are multiple locking members 52, each of which is provided with a threaded hole 521, and a threaded surface 511 matching the threaded hole 521 is provided on the peripheral side of the support rod 51. The support rod 51 is penetrated through the insulating block 53, and multiple locking members 52 are threadedly connected to the support rod 51 and cooperate to clamp the insulating block 53.

[0064] In this way, the locking member 52 and the support rod 51 are fixed by threaded connection, and the multiple locking members 52 can cooperate to clamp the insulating block 53, so that the insulating block 53 is fixed on the support rod 51. By screwing the locking member 52, the locking member 52 and the support rod 51 are rotated relative to each other, and the position of the locking member 52 on the support rod 51 can be adjusted, so that the corresponding insulating block 53 can be clamped or released, so that the insulating block 53 can slide relative to the support rod 51, which is convenient for installing or removing the corresponding electromagnetic induction coil 32.

[0065] Exemplarily, both ends of the support rod 51 are provided with a threaded surface 511, and each support rod 51 is configured with two locking members 52, and the two locking members 52 are respectively threadedly connected to the two ends of the support rod 51, and the multiple insulating blocks 53 passed through by the support rod 51 are clamped between the two locking members 52, thereby realizing relative fixation among the support rod 51, the locking members 52 and the insulating blocks 53.

[0066] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present application and are not intended to limit it. Although the present application has been described in detail with reference to the preferred embodiments, a person of ordinary skill in the art should understand that the technical solution of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present application.

Claims

1. A heating furnace, characterized in that: include: shell; A vacuum cavity is disposed in the shell, the vacuum cavity is made of metal and is used to accommodate sheet materials; An electromagnetic induction component is distributed around the vacuum cavity and is insulated from the vacuum cavity, and is used to heat the vacuum cavity through electromagnetic induction; The supporting component is fixed in the shell and fixedly connected to the electromagnetic induction component.

2. The heating furnace according to claim 1, characterized in that: The heating furnace further comprises a heat-insulating layer, and the heat-insulating layer is arranged between the electromagnetic induction component and the inner side of the shell.

3. The heating furnace according to claim 1, characterized in that: The electromagnetic induction component includes a plurality of electromagnetic induction coils, which are spaced apart along the length direction of the vacuum cavity; the vacuum cavity is penetrated by the plurality of electromagnetic induction coils, and there is a gap between the inner side of the electromagnetic induction coils and the outer wall of the vacuum cavity.

4. The heating furnace according to claim 3, characterized in that: The electromagnetic induction component is made of nickel-chromium alloy, iron-chromium-aluminum alloy, tungsten or molybdenum.

5. The heating furnace according to claim 3, characterized in that: The support assembly includes a support rod, a locking piece and a plurality of insulating blocks. The support rod is fixed in the outer shell. The plurality of insulating blocks are spaced apart along the length direction of the support rod, and two adjacent insulating blocks cooperate to clamp and position the electromagnetic induction coil. The locking piece is connected to the support rod and is used to fix the plurality of insulating blocks.

6. The heating furnace according to claim 5, characterized in that: A positioning groove is provided on the side of the insulating block facing the electromagnetic induction coil, and the positioning groove is used to accommodate the electromagnetic induction coil.

7. The heating furnace according to claim 5, characterized in that: The insulating block is provided with a limiting protrusion on the side facing the vacuum cavity, and the distance from the limiting protrusion to the vacuum cavity is smaller than the distance from the electromagnetic induction coil to the vacuum cavity, so as to limit the distance between the inner side of the electromagnetic induction coil and the outer wall of the vacuum cavity.

8. The heating furnace according to claim 5, characterized in that: There are multiple locking pieces, each of which is provided with a threaded hole, and a threaded surface matching the threaded hole is provided on the circumferential side of the support rod; the support rod is passed through the insulating block, and multiple locking pieces are threadedly connected to the support rod and cooperate to clamp the insulating block.

9. The heating furnace according to claim 3, characterized in that: The vacuum cavity is provided with a plurality of heating zones along the length direction; the plurality of electromagnetic induction coils are distributed corresponding to the plurality of heating zones to form a plurality of electromagnetic induction coil groups, and the electromagnetic induction coil groups are used to make the corresponding heating zones heat up through electromagnetic induction.

10. The heating furnace according to claim 1, characterized in that: The shell is made of insulating material.

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