Heating furnace with automatic heating and sealing structure

Abstract

The utility model discloses a heating furnace with an automatic heating and sealing structure. The heating furnace comprises a furnace tube and a sealing structure, the furnace cover is used for opening or closing the heating cavity; the sealing ring seals the heating cavity when the furnace cover is closed, and comprises a sealing surface and a mounting surface which are oppositely arranged; the heating piece is embedded in the mounting surface of the sealing ring, the heating piece comprises at least one heating wire and metal sleeve shells arranged on the outer sides of the heating wires in a one-to-one sleeving mode, and the at least one heating wire is of a wavy structure; the boat structure is used for bearing a silicon wafer; the supporting paddle is arranged in the heating cavity in a sliding mode and used for bearing the boat structure, and the supporting paddle is configured to be driven by the driving structure to drive the boat structure to enter or leave the heating cavity from the opening; the detection piece is used for detecting the relative position of the supporting slurry and the opening; the controller is in signal connection with the detection part and the heating part, and the controller controls the heating part to be started or stopped according to the detection result of the detection part. The sealing ring can be automatically heated, and the sealing effect failure caused by cooling hardening of the sealing ring is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell manufacturing, in particular to a heating furnace with an automatic heating sealing structure. Background Art

[0002] In semiconductor manufacturing, silicon wafers undergo various process steps, such as deposition, etching, diffusion, and cleaning, in a high-temperature, dust-free environment. These steps are typically performed in a heating furnace. Currently, the soft landing machines used in TOPCON battery production lines face a common problem: after the process is completed, the support slurry drives the boat structure out of the heating furnace and is exposed to air for a long time. This causes the furnace door to remain open, causing the door seal to cool and harden. This affects the tight fit between the furnace door and the furnace tube during the next process, potentially leading to air leakage at the furnace mouth. At the same time, to maintain the overall furnace tube pressure within the process settings, the furnace's vacuum pump is forced to accelerate, causing the source-carrying airflow to be rapidly drawn to the furnace tail. This reduces the reaction between the silicon wafer and the source at the furnace mouth, and the square resistance of the furnace mouth is greater than that of other temperature zones, exceeding the normal flow range, resulting in a significant increase in rework and production costs. Summary of the Invention

[0003] The utility model provides a heating furnace with an automatic heating and sealing structure, which solves the problem in the prior art that the sealing ring of the heating furnace is easily cooled and hardened when exposed to the air for a long time, resulting in failure of the sealing effect.

[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0005] A heating furnace with an automatic heating sealing structure, comprising:

[0006] a furnace tube having a heating chamber and an opening communicating with the heating chamber;

[0007] a furnace cover, which is opened or closed to open or close the heating chamber;

[0008] a sealing ring, used to seal the heating chamber when the furnace cover is closed, the sealing ring comprising a sealing surface and a mounting surface arranged opposite to each other, the mounting surface being mounted on the opening with the sealing surface facing the furnace cover, or the mounting surface being mounted on the furnace cover with the sealing surface facing the opening;

[0009] A heating element is embedded in the mounting surface of the sealing ring, the heating element includes at least one heating wire and a metal shell arranged on the outside of the heating wire in a pair, at least one of the heating wires has a wavy structure;

[0010] A boat structure for carrying silicon wafers;

[0011] a supporting paddle, slidably disposed in the heating chamber, for supporting the boat structure, wherein the supporting paddle is configured to drive the boat structure to enter or leave the heating chamber from the opening under the drive structure;

[0012] A detection member, used for detecting the relative position of the supporting slurry and the opening;

[0013] The controller is respectively connected to the detection element and the heating element by signal, and the controller controls the heating element to start or stop according to the detection result of the detection element.

[0014] Furthermore, the shape of the sealing ring is adapted to the shape of the opening.

[0015] Furthermore, the metal casing is made of platinum.

[0016] Furthermore, the wavy structure includes a plurality of first protrusions extending from the inside to the outside along the radial direction of the sealing ring and a plurality of second protrusions extending from the outside to the inside along the radial direction of the sealing ring. The plurality of first protrusions and the plurality of second protrusions are arranged alternately, and the first protrusions and the second protrusions have the same shape.

[0017] Furthermore, the wavy structure includes a plurality of first protrusions extending from the inside to the outside along the radial direction of the sealing ring.

[0018] Furthermore, the wavy structure includes a plurality of first protrusions extending from outside to inside along the radial direction of the sealing ring.

[0019] Furthermore, the first protrusion is an axisymmetric structure.

[0020] Furthermore, the first protrusion includes two symmetrically arranged straight line segments;

[0021] or;

[0022] The first protrusion includes two symmetrically arranged arc segments.

[0023] Furthermore, the furnace cover is sleeved on the supporting slurry and is opened or closed under the drive of the supporting slurry.

[0024] Furthermore, the furnace cover is hinged to the furnace tube via an electric hinge mechanism, and the electric hinge mechanism is connected to the controller signal.

[0025] Due to the application of the above technical solution, the beneficial effects of this application compared with the prior art are:

[0026] The present application provides a heating furnace with an automatic heating and sealing structure. By setting a heating element, a detection element and a controller, the heating sealing ring can be automatically started after the process is completed, ensuring that the sealing ring can achieve an ideal sealing effect when closed, reducing the air leakage problem caused by cold hardening of the sealing ring.

[0027] At least one heating wire features a wavy structure, increasing the contact area with the sealing ring and improving heating efficiency. Furthermore, a controller is separately connected to the detection element and the heating element, controlling the start or stop of the heating element based on the detection element's results. This allows the furnace to automatically monitor and adjust the heating process, ensuring the stability of the sealing ring temperature. This improves process stability and product quality, reduces rework, and lowers production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the specific implementation methods or the description of the prior art. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0029] Figure 1 This is a schematic cross-sectional view of a sealing ring according to an embodiment of the present invention;

[0030] Figure 2 for Figure 1 Enlarged structural diagram at point A in the middle. DETAILED DESCRIPTION

[0031] In order to enable those skilled in the art to better understand the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of this application.

[0032] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequential order. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the present application described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0033] In this application, terms such as "upper," "lower," "left," "right," "front," "back," "top," "bottom," "inner," "outer," "center," "vertical," "horizontal," "transverse," and "longitudinal" indicate positions or locations based on the positions or locations shown in the accompanying drawings. These terms are primarily intended to better describe the present invention and its embodiments and are not intended to limit the devices, elements, or components indicated to having a specific orientation, or to being constructed or operated in a specific orientation.

[0034] Furthermore, some of the above terms may be used to express other meanings besides indicating a position or location. For example, the term "on" may also be used to indicate a dependency or connection in certain circumstances. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0035] Furthermore, the terms "installed," "disposed," "provided with," "connected," "connected," and "socketed" should be interpreted broadly. For example, they can refer to fixed connections, removable connections, or integral structures; mechanical connections or electrical connections; direct connections, indirect connections through an intermediary, or internal communication between two devices, elements, or components. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0036] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments in this application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0037] An embodiment of the utility model provides a heating furnace with an automatic heating sealing structure, which includes a furnace tube, a furnace cover, a sealing ring, a heating element, a boat structure, a supporting slurry, a detection element and a controller. The furnace tube has a heating chamber and an opening connected to the heating chamber. The furnace cover is opened or closed to open or close the heating chamber. The sealing ring is used to seal the heating chamber when the furnace cover is closed. The boat structure is used to carry silicon wafers. The supporting slurry is slidably arranged in the heating chamber to carry the boat structure, and the supporting slurry is configured to drive the boat structure from the opening to enter or leave the heating chamber under the drive of the driving structure. The detection element is used to detect the relative position of the supporting slurry and the opening. The controller is connected to the detection element and the heating element signal respectively, and the controller controls the start or stop of the heating element according to the detection result of the detection element.

[0038] It should be noted that the detection part can be any one of a position sensor, a photoelectric sensor, and a Hall sensor. The controller uses a single-chip microcomputer or a logic circuit to realize signal reception and processing functions. The driving structure is a driving motor. All of these are existing technologies and will not be described in detail here.

[0039] In this embodiment, the furnace cover is mounted on the support slurry and is opened and closed by the support slurry. Of course, in other embodiments, the furnace cover is hinged to the furnace tube via an electric hinge mechanism, which is connected to the controller signal. The electric hinge mechanism is a conventional structure and will not be elaborated on in detail here.

[0040] For details, see Figure 1 and Figure 2 The sealing ring 1 includes a sealing surface and a mounting surface that are oppositely arranged. The mounting surface is mounted on the opening with the sealing surface facing the furnace cover, or the mounting surface is mounted on the furnace cover with the sealing surface facing the opening. This application does not make specific restrictions on this and can be adjusted according to design requirements.

[0041] The heating element 2 is embedded within the mounting surface of the sealing ring 1. It comprises at least one heating wire 21 and a metal sheath 22, which is positioned one-to-one with the other around the heating wire 21. At least one heating wire 21 has a wavy structure. This increases the contact area between the heating element 2 and the sealing ring 1, improving heating efficiency. Specifically, the sealing ring 1 is recessed inward from the mounting surface to form a receiving groove 4, which houses the heating element 2. In this embodiment, the metal sheath 22 is made of platinum, which has excellent heat resistance and thermal conductivity.

[0042] To ensure the sealing effect, in this embodiment, the shape of the sealing ring 1 is adapted to the shape of the opening. Of course, in other embodiments, the width of the sealing ring 1 can be smaller or larger than the width of the end face of the opening, as long as it can seal the heating chamber when the furnace cover is closed.

[0043] In this embodiment, the wavy structure includes a plurality of first protrusions extending from the inside to the outside along the radial direction of the sealing ring 1 and a plurality of second protrusions extending from the outside to the inside along the radial direction of the sealing ring 1. The plurality of first protrusions and the plurality of second protrusions are arranged alternately, and the first protrusions and the second protrusions have the same shape.

[0044] In another optional embodiment, the wavy structure includes a plurality of first protrusions extending from the inside to the outside along the radial direction of the sealing ring 1 .

[0045] In another optional embodiment, the wavy structure includes a plurality of first protrusions extending from the outside to the inside along the radial direction of the sealing ring 1 .

[0046] In order to improve the heating uniformity of the heating element 2, in this embodiment, the first protrusion is an axisymmetric structure. Specifically, the first protrusion includes two symmetrically arranged straight line segments, or the first protrusion includes two symmetrically arranged arc segments.

[0047] In this embodiment, the furnace cover is sleeved on the supporting slurry as an example. After the process is completed, the supporting paddle and the furnace cover are driven by the driving structure to move away from the heating chamber. At this time, the sealing ring 1 is exposed to the air and the temperature begins to drop due to heat exchange with the air. The detection component detects the relative position of the supporting slurry and the opening, and sends a signal to the controller. The controller controls the heating component to start heating to increase the temperature of the sealing ring 1 to ensure that the sealing ring 1 is in a softened state when the supporting paddle and the furnace cover are driven by the driving structure to approach the heating chamber in the next process until the sealing ring 1 seals the heating chamber to ensure the sealing effect of the sealing ring 1. At the same time, the detection component detects the relative position of the supporting slurry and the opening, and sends a signal to the controller. The controller controls the heating component to stop heating.

[0048] Finally, it should be noted that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A heating furnace with an automatic heating sealing structure, characterized in that: include: A furnace tube having a heating chamber and an opening communicating with the heating chamber; A furnace cover that is opened or closed to open or close the heating chamber; A sealing ring, used to seal the heating chamber when the furnace cover is closed, the sealing ring comprising a sealing surface and a mounting surface which are arranged opposite to each other, the mounting surface being mounted on the opening, the sealing surface facing the furnace cover, or the mounting surface being mounted on the furnace cover, the sealing surface facing the opening; A heating element is embedded in the mounting surface of the sealing ring, the heating element comprises at least one heating wire and a metal sheath arranged on the outside of the heating wire in a one-to-one arrangement, at least one of the heating wires is in a wavy structure; A boat structure for carrying silicon wafers; A support paddle is slidably disposed in the heating chamber and is used to support the boat structure. The support paddle is configured to drive the boat structure to enter or leave the heating chamber from the opening under the drive of the driving structure. A detection member, used for detecting the relative position of the supporting slurry and the opening; The controller is respectively connected with the detection element and the heating element by signals, and the controller controls the heating element to start or stop according to the detection result of the detection element.

2. A heating furnace with an automatic heating sealing structure as claimed in claim 1, characterized in that: The shape of the sealing ring is matched with the shape of the opening.

3. A heating furnace with an automatic heating sealing structure as claimed in claim 1, characterized in that: The metal casing is made of platinum.

4. A heating furnace with an automatic heating sealing structure as claimed in claim 1, characterized in that: The wavy structure includes a plurality of first protrusions extending from the inside to the outside in the radial direction of the sealing ring and a plurality of second protrusions extending from the outside to the inside in the radial direction of the sealing ring. The plurality of first protrusions and the plurality of second protrusions are arranged alternately, and the first protrusions and the second protrusions have the same shape.

5. The heating furnace with an automatic heating sealing structure according to claim 1, characterized in that: The wave-shaped structure includes a plurality of first protrusions extending from the inside to the outside along the radial direction of the sealing ring.

6. A heating furnace with an automatic heating sealing structure as claimed in claim 1, characterized in that: The wave-shaped structure includes a plurality of first protrusions extending from outside to inside along the radial direction of the sealing ring.

7. A heating furnace with an automatic heating sealing structure according to any one of claims 4 to 6, characterized in that: The first protrusion is an axisymmetric structure.

8. A heating furnace with an automatic heating sealing structure as claimed in claim 7, characterized in that: The first protrusion includes two symmetrically arranged straight line segments; or; The first protrusion includes two symmetrically arranged arc segments.

9. A heating furnace with an automatic heating sealing structure as claimed in claim 1, characterized in that: The furnace cover is sleeved on the supporting slurry and is opened or closed under the drive of the supporting slurry.

10. The heating furnace with an automatic heating sealing structure according to claim 1, characterized in that: The furnace cover is hinged on the furnace tube through an electric hinge mechanism, and the electric hinge mechanism is connected to the controller signal.

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