Article transfer equipment

Abstract

The utility model discloses an article transfer device which comprises a workbench, a main device and an auxiliary device, and the main device and the auxiliary device are both arranged on the workbench. The working table comprises a first working table and a second working table, the first working table is arranged in the first area, the second working table is arranged in the second area, and the height of the first working table is smaller than that of the second working table; a lifting platform is arranged between the first workbench and the second workbench; a first number of main devices are arranged on the first workbench, a second number of main devices and auxiliary devices are arranged on the second workbench, and the first number is larger than the second number. According to the utility model, the space of the second area is effectively utilized, and the factory capacity is increased.

Description

Technical Field

[0001] The utility model relates to the technical field of transfer equipment, in particular to an article transfer equipment. Background Art

[0002] As the demand for semiconductors increases rapidly, the number of equipment invested in wafer fabs increases. If the equipment is not fully utilized, the cost of semiconductor manufacturing will increase significantly. The equipment commonly used in wafer manufacturing is divided into three categories: process equipment, measurement equipment, and auxiliary equipment. Process equipment is involved in the production and processing of wafers, measurement equipment is used to detect processed wafers, and auxiliary equipment includes cleaning of process and measurement equipment components. The ratio of process equipment to measurement equipment in a wafer fab is many to one, and there are fewer auxiliary equipment than measurement equipment; the more process equipment a wafer fab has, the more it can greatly improve the factory's production capacity and space utilization, and reduce wafer manufacturing costs. In the support area reserved in the early stage of building a wafer fab, it is planned to arrange auxiliary equipment, but the auxiliary equipment cannot cover the support area, resulting in a waste of space. Utility Model Content

[0003] In order to solve the technical problems in the background technology, the utility model provides an article transfer device, the transfer device comprises: a workbench, a main device and an auxiliary device, the main device and the auxiliary device are both arranged on the workbench;

[0004] The workbench includes a first workbench and a second workbench, the first workbench is arranged in the first area, the second workbench is arranged in the second area, the height of the first workbench is smaller than the height of the second workbench; a lifting platform is arranged between the first workbench and the second workbench;

[0005] A first number of the main devices are arranged on the first workbench, and a second number of the main devices and the auxiliary devices are arranged on the second workbench, wherein the first number is greater than the second number.

[0006] Furthermore, the lifting platform includes a first lifting platform and a second lifting platform; a first passage is arranged in the first area, the first lifting platform is arranged on one side of the first passage, and the second lifting platform and a ladder are arranged on the other side of the first passage.

[0007] Furthermore, a first outlet is provided on one side of the first lifting platform close to the first channel, and a second outlet is provided on the other side; a second channel is provided at the second outlet, and the first channel and the second channel are connected through the first lifting platform.

[0008] Furthermore, the second channel is arranged in the second area, the height of the first outlet is smaller than the height of the second outlet, and the height difference between the second outlet and the first outlet is equal to the height difference between the first workbench and the second workbench.

[0009] Furthermore, the number of auxiliary devices corresponding to the second main device is less than the number of auxiliary devices corresponding to the first main device, the first main device is the main device located on the first workbench, and the second main device is the main device located on the second workbench.

[0010] Furthermore, a main pipeline is provided in the area between the second workbench and the ground, and the main pipeline is connected to the second main equipment.

[0011] Furthermore, the height of the first workbench is less than a first threshold, and the height of the second workbench is greater than a second threshold; and the first threshold is less than the second threshold.

[0012] Furthermore, the height difference between the second workbench and the first workbench is 600 mm.

[0013] Furthermore, the height of the first workbench is 600 mm, and the height of the second workbench is 1200 mm.

[0014] Furthermore, the height of the lifting platform is determined based on the height difference between the second workbench and the first workbench.

[0015] Furthermore, the item transfer equipment is used to transfer wafers, the first area is a processing area, the second area is a support area, and the main equipment includes process equipment and measurement equipment.

[0016] The beneficial effects of the utility model are:

[0017] The utility model forms a lower first workbench in the first area and a higher second workbench in the second area. Main equipment is arranged not only on the first workbench but also on the second workbench, thereby making full use of the space in the working area and increasing the number of main equipment in the working area. A lifting platform is arranged between the two platforms for connection, ensuring that employee operations, article transportation and equipment handling do not conflict with each other, effectively utilizing the space in the second area and increasing the factory's production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solution of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 is a top view of a wafer transfer device in the prior art;

[0020] Figure 2 is a side view of a wafer transfer device in the prior art;

[0021] Figure 3 It is a top view of an article transfer device provided by the utility model;

[0022] Figure 4 It is a side view of an article transfer device provided by the utility model;

[0023] Figure 5 It is a structural schematic diagram of a second workbench provided by the utility model;

[0024] Among them, the reference numerals in the figure correspond to: 1-first workbench, 2-second workbench, 3-main equipment, 31-process equipment, 32-measuring equipment, 4-auxiliary equipment, 5-first lifting platform, 6-second lifting platform, 7-stairs, 8-first exit, 9-second exit, 10-first passage, 11-second passage, 12-isolation wall, 13-isolation door, 14-idle area, 15-ground, 16-pipeline layout area, 17-waffle hole. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0026] In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Since the embodiments disclosed in the present utility model can be set in different directions, these terms indicating directions are only for illustration and should not be regarded as limitations. For example, "up" and "down" are not necessarily limited to directions opposite to or consistent with the direction of gravity. In addition, the features defined as "first" and "second" may explicitly or implicitly include one or more of such features.

[0027] Please refer to Figure 1-2 , Figure 1 It is a top view of a wafer transfer device in the prior art. Figure 2 FIG. 2 is a side view of a wafer transfer device in the prior art; Figure 1-2 As shown, in a semiconductor factory, the equipment is planned and arranged on the same platform of a traditional clean room. Manual transfer of goods, wafer handling, and the moving in and out of equipment are all performed on the same platform. Various equipment is arranged on the third floor of the clean room, and the main exhaust pipe, main drainage pipe, and auxiliary equipment (electrical box, vacuum pump) related to the main equipment are arranged on the second floor. Waffle holes are designed between the third and second floors to facilitate the connection of machine equipment to the main pipes and auxiliary equipment on the second floor through small pipes and cable ducts through the waffle holes. A raised floor (600mm height) will be laid on the third floor of the clean room to ensure that there is enough space under the floor to install small pipes and cable ducts.

[0028] In the support area reserved for the clean room, there are no waffle holes designed on the ground. The original design planned to arrange auxiliary equipment. If the process equipment 31 and the measuring equipment 32 were arranged, the equipment pipelines would not be able to pass down to the second floor and connect to the main pipeline and auxiliary equipment. In expensive semiconductor factories, auxiliary equipment is arranged in the support area, and the number of equipment is small, which cannot cover the entire support area and cannot maximize the use of the clean room space.

[0029] The production area of ​​the prior art includes a processing area and a support area, and the processing area and the support area are separated by an isolation wall 12, and an isolation door 13 is arranged on the isolation wall 12, wherein a first channel 10 is arranged in the processing area, a first lifting platform 5 is arranged on one side of the first channel 10, and a first exit 8 is arranged on the side of the first lifting platform 5 close to the first channel 10; there is an idle area 14 in the support area where no equipment is arranged, the length of the idle area 14 is a, the width is b, and the idle area is a*b, resulting in a waste of space; a first workbench 1 is arranged in both the processing area and the support area, and the distance between the first workbench 1 and the ground 15 is 600mm, and a pipeline layout area 16 and a waffle hole 17 are arranged below the first workbench 1, and more air pipes, water pipes and bridges can be arranged below the first workbench 1. Since there are few pipelines connected to the auxiliary equipment 4, the space utilization rate below the first workbench 1 is not high.

[0030] In order to solve the technical problems existing in the prior art, this embodiment provides an article transfer device, which includes: a workbench, a main device 3 and an auxiliary device 4, wherein the main device 3 and the auxiliary device 4 are both arranged on the workbench;

[0031] The workbench includes a first workbench 1 and a second workbench 2, the first workbench 1 is arranged in a first area, the second workbench 2 is arranged in a second area, the height of the first workbench 1 is less than the height of the second workbench 2; a lifting platform is arranged between the first workbench 1 and the second workbench 2; the first area can be a main working area, and the second area can be an auxiliary working area.

[0032] The first workbench 1 is provided with a first number of the main devices 3, and the second workbench 2 is provided with a second number of the main devices 3 and the auxiliary devices 4, wherein the first number is greater than the second number. The target number can be set according to actual conditions.

[0033] The article transfer equipment in this embodiment may include but is not limited to handling equipment in the semiconductor processing process, cargo transfer equipment in logistics transportation, and transfer equipment in other fields. The main equipment 3 is the target number, and the sum of the first number and the second number is equal to the target number. When the article transfer equipment is a semiconductor transfer equipment, the first area can be a processing area, and the second area can be a support area, wherein the main equipment 3 and the auxiliary equipment 4 can be used for the production and handling of articles; the processing area is mainly used to arrange the main equipment 3 such as process equipment 31 and measurement equipment 32, and the support area is mainly used to arrange the auxiliary equipment 4. In order to make full use of the space of the support area, this embodiment also arranges some main equipment 3 in the support area. For example, the main equipment 3 originally arranged on other floors can be transferred to the support area, thereby improving the utilization rate of the support area and increasing the number of arranged main equipment 3.

[0034] Exemplarily, the lifting platform includes a first lifting platform 5 and a second lifting platform 6; a first passage 10 is provided in the first area, the first lifting platform 5 is provided on one side of the first passage 10, and the second lifting platform 6 and a ladder are provided on the other side of the first passage 10. The first lifting platform 5 is located in the first area, and the second lifting platform 6 is located in the second area.

[0035] In this embodiment, the steps 7 may be three or more steps 7, and the specific number of steps may be determined according to the height difference between the first workbench 1 and the second workbench 2. Lifting platforms are provided in both the first area and the second area, and steps are provided on one side of the first passage 10, so as to facilitate connection between the first workbench 1 and the second workbench 2, improve the efficiency of transferring equipment between the two platforms, and thus improve the efficiency of equipment transfer.

[0036] Exemplarily, the first lifting platform 5 is provided with a first outlet 8 on one side close to the first channel 10, and a second outlet 9 on the other side; a second channel 11 is provided at the second outlet 9, and the first channel 10 and the second channel 11 are connected through the first lifting platform 5. In this embodiment, by providing two channels, the first lifting platform 5 is provided between the two channels, and the first outlet 8 and the second outlet 9 are provided on both sides of the first lifting platform 5, respectively, the efficiency of transferring items between the two workbenches is improved; thereby improving the docking efficiency between the two work platforms.

[0037] Exemplarily, the second passage 11 is arranged in the second area, the height of the first outlet 8 is less than the height of the second outlet 9, and the height difference between the second outlet 9 and the first outlet 8 is equal to the height difference between the first workbench 1 and the second workbench 2. The height of the first outlet 8 is determined based on the height of the second workbench 2, and the height of the second outlet 9 is determined based on the height of the first workbench 1. In this embodiment, the height of the first outlet 8 in the first lifting platform 5 is determined according to the height of the first workbench 1, and the height of the second outlet 9 in the first lifting platform 5 is determined according to the height of the second workbench 2, so as to ensure that the outlets corresponding to the two work platforms can conveniently connect and transfer the items on the work platforms.

[0038] Exemplarily, the number of subsidiary equipment corresponding to the second main equipment is less than the number of subsidiary equipment corresponding to the first main equipment, the first main equipment is the main equipment 3 located on the first workbench 1, and the second main equipment is the main equipment 3 located on the second workbench 2. Since the area corresponding to the first workbench 1 is the main production and processing area, and the area corresponding to the second workbench 2 is the auxiliary support area, the main equipment 3 with more subsidiary equipment is set on the first workbench 1, and the main equipment 3 with fewer subsidiary equipment is set on the second workbench 2, so as to improve the production efficiency of the factory.

[0039] Exemplarily, a main pipeline is provided in the area between the second workbench 2 and the ground 15, and the main pipeline is connected to the second main device. In this embodiment, the second workbench 2 is higher, so a large space is reserved between the second workbench 2 and the ground 15, and the main pipeline can be provided in the space, thereby improving the utilization rate of the idle space.

[0040] Exemplarily, the height of the first workbench 1 is less than a first threshold, and the height of the second workbench 2 is greater than a second threshold; the first threshold is less than the second threshold.

[0041] Exemplarily, the height difference between the second workbench and the first workbench is 600 mm.

[0042] Exemplarily, the height of the first workbench 1 is 600 mm, and the height of the second workbench 2 is 1200 mm. In this embodiment, by setting the height of the second workbench 2 to be greater than the height of the first workbench 1, the main equipment 3 can be arranged on the second workbench 2 without affecting the arrangement of the auxiliary equipment 4 in the second workbench 2, and the area of ​​the idle area 14 between the second workbench 2 and the ground 15 can be increased, thereby improving the utilization rate of the idle area 14.

[0043] Exemplarily, the height of the lifting platform is determined based on the height difference between the second workbench 2 and the first workbench 1. The heights of the first lifting platform 5 and the second lifting platform 6 are both equal to the height difference between the second workbench 2 and the first workbench 1.

[0044] Exemplarily, the item transfer equipment is used to transfer wafers, the first area is a processing area, the second area is a support area, and the main equipment 3 includes a process equipment 31 and a measurement equipment 32 .

[0045] In an exemplary embodiment, Figure 3-5 As shown, Figure 3 It is a top view of an article transfer device provided by the utility model; Figure 4 It is a side view of an article transfer device provided by the utility model; Figure 5 It is a structural schematic diagram of a second workbench provided by the utility model; the article transfer device of this embodiment is a wafer transfer device, and the transfer device comprises: a workbench, a main device 3 and an auxiliary device 4, and the main device 3 and the auxiliary device 4 are both arranged on the workbench;

[0046] The workbench comprises a first workbench 1 and a second workbench 2, wherein the first workbench 1 is arranged in a first area, and the second workbench 2 is arranged in a second area, and the height of the first workbench 1 is smaller than the height of the second workbench 2; a lifting platform is arranged between the first workbench 1 and the second workbench 2;

[0047] The main devices 3 are the target number, a first number of the main devices 3 are arranged on the first workbench 1, a second number of the main devices 3 and the auxiliary devices 4 are arranged on the second workbench 2, the sum of the first number and the second number is equal to the target number, and the first number is greater than the second number.

[0048] The first area is the processing area, and the second area is the supporting area, wherein the processing area is mainly used for arranging main equipment 3 such as process equipment 31 and measuring equipment 32, and the supporting area is mainly used for arranging auxiliary equipment 4. In order to make full use of the space of the supporting area, this embodiment also arranges some main equipment 3 in the supporting area. For example, the main equipment 3 originally arranged on other floors can be transferred to the supporting area, thereby improving the utilization rate of the supporting area and increasing the number of arranged main equipment 3.

[0049] The lifting platform includes a first lifting platform 5 and a second lifting platform 6; a first passage 10 is provided in the first area, the first lifting platform 5 is provided on one side of the first passage 10, the second lifting platform 6 and a ladder are provided on the other side of the first passage 10, and the second lifting platform 6 is located in the second area. A first exit 8 is provided on one side of the first lifting platform 5 close to the first passage 10, and a second exit 9 is provided on the other side; a second passage 11 is provided at the second exit 9, and the first passage 10 and the second passage 11 are connected through the first lifting platform 5.

[0050] The second passage 11 is arranged in the second area, the height of the first outlet 8 is less than the height of the second outlet 9, and the height difference between the second outlet 9 and the first outlet 8 is equal to the height difference between the first workbench 1 and the second workbench 2. The height of the first outlet 8 is determined based on the height of the second workbench 2, and the height of the second outlet 9 is determined based on the height of the first workbench 1; the number of auxiliary devices corresponding to the second main device is less than the number of auxiliary devices corresponding to the first main device, the first main device is the main device 3 located on the first workbench 1, and the second main device is the main device 3 located on the second workbench 2.

[0051] A main pipeline is provided in the area between the second workbench 2 and the ground 15, and the main pipeline is connected to the second main equipment. The height of the first workbench 1 is 1200 mm, and the height of the second workbench 2 is 600 mm. The height difference between the first workbench 1 and the second workbench 2 is 600 mm. The heights of the first lifting platform 5 and the second lifting platform 6 are both equal to the height difference between the second workbench 2 and the first workbench 1, that is, the heights of the two lifting platforms are both 600 mm.

[0052] The beneficial effects of the utility model are:

[0053] The utility model forms a lower first workbench in the first area and a higher second workbench in the second area. Main equipment is arranged not only on the first workbench but also on the second workbench, thereby making full use of the space in the working area and increasing the number of main equipment in the working area. A lifting platform is arranged between the two platforms for connection, ensuring that employee operations, article transportation and equipment handling do not conflict with each other, effectively utilizing the space in the second area and increasing the factory's production capacity.

[0054] The above is a preferred embodiment of the present invention. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the principle of the present invention. These improvements and modifications are also considered to be within the protection scope of the present invention.

Claims

1. An article transfer device, characterized in that: The transfer device comprises: a workbench, a main device (3) and an auxiliary device (4), wherein the main device (3) and the auxiliary device (4) are both arranged on the workbench; The workbench comprises a first workbench (1) and a second workbench (2), the first workbench (1) being arranged in a first area, the second workbench (2) being arranged in a second area, the height of the first workbench (1) being smaller than the height of the second workbench (2); a lifting platform is arranged between the first workbench (1) and the second workbench (2); A first number of the main devices (3) are arranged on the first workbench (1), and a second number of the main devices (3) and the auxiliary devices (4) are arranged on the second workbench (2), wherein the first number is greater than the second number.

2. The device according to claim 1, characterized in that The lifting platform comprises a first lifting platform (5) and a second lifting platform (6); a first passage (10) is arranged in the first area, the first lifting platform (5) is arranged on one side of the first passage (10), and the second lifting platform (6) and a ladder (7) are arranged on the other side of the first passage (10).

3. The device according to claim 2, characterized in that A first outlet (8) is provided on one side of the first lifting platform (5) close to the first channel (10), and a second outlet (9) is provided on the other side; a second channel (11) is provided at the second outlet (9), and the first channel (10) and the second channel (11) are connected via the first lifting platform (5).

4. The device according to claim 3, characterized in that The second channel (11) is arranged in the second area, the height of the first outlet (8) is less than the height of the second outlet (9), and the height difference between the second outlet (9) and the first outlet (8) is equal to the height difference between the first workbench (1) and the second workbench (2).

5. The device according to claim 1, characterized in that The number of auxiliary devices corresponding to the second main device is less than the number of auxiliary devices corresponding to the first main device, the first main device is the main device (3) located on the first workbench (1), and the second main device is the main device (3) located on the second workbench (2).

6. The device according to claim 5, characterized in that A main pipeline is arranged in the area between the second workbench (2) and the ground (15), and the main pipeline is connected to the second main equipment.

7. The device according to claim 1, characterized in that The height of the first workbench (1) is less than a first threshold, and the height of the second workbench (2) is greater than a second threshold; the first threshold is less than the second threshold.

8. The device according to claim 7, characterized in that The height difference between the second workbench (2) and the first workbench (1) is 600 mm.

9. The device according to claim 8, characterized in that The height of the first workbench (1) is 600 mm, and the height of the second workbench (2) is 1200 mm.

10. The device according to claim 1, characterized in that The height of the lifting platform is determined based on the height difference between the second workbench (2) and the first workbench (1).

11. The device according to claim 1, characterized in that The article transfer equipment is used to transfer wafers, the first area is a processing area, the second area is a support area, and the main equipment (3) includes a process equipment (31) and a measurement equipment (32).

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