Device for replacing wafer boat

Abstract

The utility model provides a device for replacing a wafer boat. The device comprises a base, a vertical rod, a horizontal rod, a rotating table, a first driving unit, a second driving unit and a third driving unit, a sliding rail is arranged on the base, a sliding component is installed at one end of the vertical rod, and the sliding component is installed on the sliding rail; the vertical rod is perpendicular to the base and is connected with the first driving unit; the horizontal rod is vertically connected with the vertical rod and is connected with the second driving unit; the rotating table is installed at one end of the horizontal rod, and the rotating table is perpendicular to the horizontal rod and connected with the third driving unit. The first driving unit drives the vertical rod to move back and forth along the sliding rail, the second driving unit drives the horizontal rod to move up and down, and the third driving unit drives the rotating table to rotate, so that the unexpected effects are that the dismounting efficiency and the mounting efficiency of the wafer boat are obviously improved, and the wafer boat is not easy to collide when being replaced.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer manufacturing, in particular to a device for replacing a wafer boat. Background Art

[0002] The wafer quenching equipment needs to replace the wafer boat during maintenance. The current practice is for operators to manually remove the old wafer boat and place a new one. However, when operators take the wafer boat from the elevator, due to the obstructed vision of the operators and the limited space of the elevator, if they want to exit with the wafer boat, the operators need to turn around or continue to step back. Both of these actions are prone to the risk of collision between the wafer boat and the elevator or other parts of the equipment because they cannot fully judge the route, thereby causing direct economic losses. In addition, when the operators place the wafer boat, the lower end of the wafer boat must be inserted into the protruding positioning screws on the elevator. Due to the obstruction of the wafer boat, the operators cannot judge the status of the lower end of the wafer boat. It usually takes multiple attempts to install the wafer boat in place, which is time-consuming and labor-intensive. Utility Model Content

[0003] The utility model provides a device for replacing a crystal boat, so as to solve the technical problem that the crystal boat is difficult to replace.

[0004] In order to solve the above technical problems, the utility model provides a device for replacing a wafer boat, comprising a base, a vertical rod, a horizontal rod, a rotating table, a first driving unit, a second driving unit and a third driving unit;

[0005] The base is provided with a slide rail, one end of the vertical rod is provided with a slide component, and the slide component is installed on the slide rail; the vertical rod is perpendicular to the base and connected to the first driving unit;

[0006] The horizontal rod is vertically connected to the vertical rod and connected to the second driving unit;

[0007] The rotating platform is installed on one end of the horizontal rod, and the rotating platform is perpendicular to the horizontal rod and connected to the third driving unit.

[0008] Optionally, the device further comprises a limiting component, wherein the limiting component is mounted on one end of the vertical rod and one end of the slide rail.

[0009] Optionally, the limiting component is a limiting bolt, and the limiting bolt is detachably connected to one end of the vertical rod and one end of the slide rail.

[0010] Optionally, three or four rollers are installed on the lower surface of the base.

[0011] Optionally, the first drive unit, the second drive unit and the third drive unit all include motors.

[0012] Optionally, a lead screw is installed inside the vertical rod, one end of the horizontal rod is sleeved on the lead screw through a sleeve, and the motor is meshingly connected to the lead screw through a gear.

[0013] Optionally, the slide rail is a limiting groove, and the sliding component is a bearing.

[0014] Optionally, the base is in the shape of a cuboid, and the limiting groove is arranged on the center line of the base along a direction parallel to the long side of the base.

[0015] Optionally, the vertical rod and the horizontal rod are both in the shape of a cuboid.

[0016] Optionally, the top of the rotating table is disc-shaped.

[0017] The utility model provides a device for replacing a crystal boat. A first driving unit drives a vertical rod to move back and forth along a slide rail, a second driving unit drives a horizontal rod to move up and down, and a third driving unit drives a rotating table to rotate. An unexpected effect is that the disassembly efficiency and installation efficiency of the crystal boat are significantly increased, and the crystal boat is not easily collided when replacing the crystal boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of a crystal boat in the prior art.

[0019] Figure 2 The utility model is a schematic diagram of the structure of a device for replacing a wafer boat provided in one embodiment.

[0020] [Description of reference numerals is as follows]:

[0021] Base-1, vertical rod-2, horizontal rod-3, rotating table-4, slide rail-5, sliding component-6, limiting component-7, roller-8, crystal boat-9. DETAILED DESCRIPTION

[0022] In order to make the purpose, advantages and features of the utility model clearer, the following is a further detailed description of a device for replacing a wafer boat proposed by the utility model in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are all in a very simplified form and are not in precise proportions, and are only used to conveniently and clearly assist in explaining the purpose of the embodiments of the utility model.

[0023] In the description of the present invention, the terms "first", "second", etc. are added for the convenience of description and reference, and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined by the terms "first", "second", etc. may explicitly or implicitly include one or more of the features.

[0024] like Figure 2 As shown, the utility model provides a device for replacing a crystal boat, comprising a base 1, a vertical rod 2, a horizontal rod 3, a rotating table 4, a first drive unit, a second drive unit and a third drive unit; a slide rail 5 is arranged on the base 1, a sliding component 6 is installed at one end of the vertical rod 2, and the sliding component 6 is installed on the slide rail 5; the vertical rod 2 is perpendicular to the base 1 and connected to the first drive unit; the horizontal rod 3 is perpendicularly connected to the vertical rod 2 and connected to the second drive unit; the rotating table 4 is installed on one end of the horizontal rod 3, and the rotating table 4 is perpendicular to the horizontal rod 3 and connected to the third drive unit.

[0025] The first driving unit is used to drive the vertical rod 2 to move back and forth on the slide rail 5 along the extension direction of the slide rail 5; the second driving unit is used to drive the horizontal rod 3 to move up and down; and the third driving unit is used to drive the rotating table 4 to rotate.

[0026] like Figure 1 and Figure 2 As shown, the steps of using the device to disassemble the wafer boat 9 are as follows: move the device to the vicinity of the lifting platform of the wafer quenching equipment, open the rear door of the wafer quenching equipment, and support the rotating table 4 on the lower surface of the top of the wafer boat 9; drive the horizontal rod 3 to rise by the second driving unit, and the wafer boat 9 is lifted; after the wafer boat 9 is lifted, drive the vertical rod 2 to move away from the lifting platform by the first driving unit, and the wafer boat 9 is moved out of the lifting platform.

[0027] The steps of installing the wafer boat 9 using the device are as follows: hang the wafer boat 9 on the rotating table 4 through the lower surface of the top of the wafer boat 9; drive the vertical rod 2 close to the lifting platform through the first driving unit, and the wafer boat 9 enters the lifting platform; drive the rotating table 4 to rotate through the third driving unit, so that the lower end of the wafer boat 9 is stuck in the protruding positioning screws on the lifting platform; drive the horizontal rod 3 to descend through the second driving unit, and place the wafer boat 9 at the center of the lifting platform.

[0028] This embodiment provides a device for replacing a crystal boat 9, which drives the vertical rod 2 to reciprocate along the slide rail 5 through the first drive unit, drives the horizontal rod 3 to move up and down through the second drive unit, and drives the turntable 4 to rotate through the third drive unit. An unexpected effect is that the disassembly efficiency and installation efficiency of the crystal boat 9 are significantly increased, and the crystal boat 9 is not easily collided when replacing the crystal boat 9.

[0029] Optional, such as Figure 2 As shown, the device further comprises a limiting component 7, which is mounted on one end of the vertical rod 2 and one end of the slide rail 5. The limiting component 7 can fix the vertical rod 2 to one end of the slide rail 5 to prevent the vertical rod 2 from moving.

[0030] Optional, such as Figure 2 As shown, the limiting component 7 is a limiting bolt, and the limiting bolt is detachably connected to one end of the vertical rod 2 and one end of the slide rail 5. The limiting bolt is easy to operate and cheap, and can be used as the limiting component 7. In other embodiments, the limiting component 7 can be an openable and closable baffle installed on one end of the slide rail 5, and the vertical rod 2 can be fixed to one end of the slide rail 5 by the baffle to prevent the vertical rod 2 from moving.

[0031] Optional, such as Figure 2 As shown, three or four rollers 8 are installed on the lower surface of the base 1. The rollers 8 facilitate the movement of the device.

[0032] Optional, such as Figure 2 As shown, the first drive unit, the second drive unit and the third drive unit all include motors. The motors can accurately drive the vertical rod 2, the horizontal rod 3 and the rotating table 4 to move. In other embodiments, the first drive unit and the second drive unit can both include cylinders, which can drive the vertical rod 2 and the horizontal rod 3 to move.

[0033] Optional, reference Figure 2 As shown, a lead screw is installed inside the vertical rod 2, one end of the horizontal rod 3 is sleeved on the lead screw through a sleeve, and the motor is meshed with the lead screw through a gear. Through the transmission between the gear and the lead screw, the horizontal rod 3 can be accurately driven to move up and down to prevent the crystal boat 9 from being damaged.

[0034] Optional, such as Figure 2 As shown, the slide rail 5 is a limit groove, and the sliding component 6 is a bearing. The vertical rod 2 can slide in the limit groove through the bearing, and combined with the drive of the first driving unit, the vertical rod 2 can be reciprocated along the extension direction of the limit groove. In other embodiments, the slide rail 5 can be a track, and the sliding component 6 can be a slider that matches the track.

[0035] Optional, such as Figure 2As shown, the base 1 is in the shape of a cuboid, and the limiting groove is arranged on the center line of the base 1 along the direction parallel to the long side of the base 1. The limiting groove is arranged on the center line of the base 1, so that the vertical rod 2 can move along the center line of the base 1, thereby improving the stability of the device and preventing the device from tilting. In other embodiments, the base 1 can be in other shapes, and the limiting groove can be slightly offset from the center line of the base 1.

[0036] Optional, such as Figure 2 As shown, the vertical rod 2 and the horizontal rod 3 are both in the shape of a cuboid. The vertical rod 2 and the horizontal rod 3 are both in the shape of a cuboid, which can facilitate the manufacture of the vertical rod 2 and the horizontal rod 3. In other embodiments, the vertical rod 2 and the horizontal rod 3 can be in the shape of a cylinder or other shapes.

[0037] Optional, such as Figure 2 As shown, the top of the rotating table 4 is in a disc shape. The disc-shaped top of the rotating table 4 can make the top of the rotating table 4 and the lower surface of the top of the wafer boat 9 have a larger contact area, and can prevent the rotating table 4 from scratching the wafer boat 9. In other embodiments, the top of the rotating table 4 can be elliptical or other shapes.

[0038] To sum up, the utility model provides a device for replacing a crystal boat 9, which drives the vertical rod 2 to move back and forth along the slide rail 5 through the first drive unit, drives the horizontal rod 3 to move up and down through the second drive unit, and drives the turntable 4 to rotate through the third drive unit. The unexpected effect is that the disassembly efficiency and installation efficiency of the crystal boat 9 are significantly increased, and the crystal boat 9 is not easily collided when replacing the crystal boat 9.

[0039] The above description is only a description of the preferred embodiment of the utility model, and is not any limitation to the scope of the utility model. Any changes and modifications made by ordinary technicians in this field based on the above disclosure are within the protection scope of the utility model.

Claims

1. A device for replacing a wafer boat, characterized in that: It includes a base, a vertical rod, a horizontal rod, a rotating table, a first driving unit, a second driving unit and a third driving unit; The base is provided with a slide rail, one end of the vertical rod is provided with a slide component, and the slide component is installed on the slide rail; the vertical rod is perpendicular to the base and connected to the first driving unit; The horizontal rod is vertically connected to the vertical rod and connected to the second driving unit; The rotating platform is installed on one end of the horizontal rod, and the rotating platform is perpendicular to the horizontal rod and connected to the third driving unit.

2. A device for replacing a wafer boat as claimed in claim 1, characterized in that: The device further comprises a limiting component, wherein the limiting component is mounted on one end of the vertical rod and one end of the slide rail.

3. A device for replacing a wafer boat as claimed in claim 2, characterized in that: The limiting component is a limiting bolt, and the limiting bolt is detachably connected to one end of the vertical rod and one end of the slide rail.

4. The device for replacing a wafer boat according to claim 1, characterized in that: Three or four rollers are installed on the lower surface of the base.

5. The device for replacing a wafer boat according to claim 1, characterized in that: The first driving unit, the second driving unit and the third driving unit each include a motor.

6. The device for replacing a wafer boat as claimed in claim 5, characterized in that: A lead screw is installed inside the vertical rod, one end of the horizontal rod is sleeved on the lead screw through a sleeve, and the motor is meshed and connected with the lead screw through a gear.

7. The device for replacing a wafer boat according to claim 1, characterized in that: The slide rail is a limiting groove, and the sliding component is a bearing.

8. The device for replacing a wafer boat as claimed in claim 7, characterized in that: The base is in the shape of a cuboid, and the limiting groove is arranged on the center line of the base along a direction parallel to the long side of the base.

9. The device for replacing a wafer boat according to claim 1, characterized in that: The vertical rod and the horizontal rod are both in the shape of a cuboid.

10. The device for replacing a wafer boat according to claim 1, characterized in that: The top of the rotating platform is in a disc shape.

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