Thickness detection mechanism and grinding device

Abstract

The utility model relates to the technical field of grinding, and provides a thickness detection mechanism and a grinding device. The thickness detection mechanism comprises a first driving group, a touch structure and an induction structure, the touch structure is slidably connected to the first driving group, and the touch structure is provided with an abutting part and a testing part which are arranged at an interval in the first direction; the sensing structure is connected to the first driving group, is located on one side, deviating from the abutting part, of the testing part, and is arranged at an interval relative to the testing part in the first direction; wherein the first driving group is used for driving the touch structure and the sensing structure to move along a first direction, and the sensing structure is configured to send out a detection signal in response to the abutting part abutting against the test part when the abutting part abuts against the to-be-tested body for limiting. According to the thickness detection mechanism provided by the invention, the measurement efficiency and precision are improved, so that the feed amount in subsequent grinding is ensured.

Description

Technical Field

[0001] The present application relates to the field of grinding technology, and in particular to a thickness detection mechanism and a grinding device. Background Art

[0002] Removing the dome of silicon carbide crystal rough material is an essential step in the grinding of the crystal. When removing the dome, the grinding depth needs to be determined by measuring the height of the crystal, that is, the total thickness of the crystal, so as to determine the grinding starting point. The grinding starting point determines whether the dome removal meets the requirements. If the dome is not completely removed, the shape of the crystal after grinding will be irregular. If the dome is removed excessively, it will lead to material waste.

[0003] In the related art, during crystal grinding, the crystal is usually fixed on a grinding machine and then measured manually using a caliper. However, due to the irregular shape of the crystal rough material, the measurement efficiency is low and the manual measurement error is large. Utility Model Content

[0004] Based on this, it is necessary to provide a thickness detection mechanism to improve the measurement efficiency and accuracy, so as to ensure the feed amount in subsequent grinding.

[0005] A thickness detection mechanism comprises a first drive group, a touch structure and a sensing structure: the touch structure is slidably connected to the first drive group, and the touch structure has an abutment portion and a test portion arranged at intervals along a first direction; the sensing structure is connected to the first drive group and is located on a side of the test portion away from the abutment portion, and the sensing structure is arranged at intervals relative to the test portion along the first direction; wherein the first drive group is used to drive the touch structure and the sensing structure to move along the first direction, and the sensing structure is configured to send a detection signal in response to the abutment portion abutting against the test portion when the abutment portion abuts against the object to be tested to a limit position.

[0006] It is understandable that when performing thickness detection, the first drive group drives the touch structure and the sensing structure to move simultaneously along the first direction toward the side close to the crystal rough material until the abutment portion of the touch assembly abuts against the end face of the crystal rough material. At this time, the touch structure stops moving under the limiting action of the crystal rough material, and the touch structure is slidably connected to the first drive group. Therefore, when the first drive group continues to drive, the touch structure can produce a relative displacement along the first direction away from the crystal rough material relative to the first drive group; however, the sensing structure can continue to move along the first direction toward the side close to the crystal rough material with the drive of the first drive group until the sensing structure abuts against the test portion of the touch structure. The sensing structure can send out a detection signal when it is subjected to force to meet the thickness detection of the crystal rough material. Compared with manual caliper measurement, such a setting improves the measurement efficiency and measurement accuracy, thereby ensuring the feed amount in subsequent grinding.

[0007] In some embodiments, the contact structure includes a contact plate and a guide rod; the testing portion and the abutting portion are arranged on both sides of the contact plate along the first direction, the guide rod is connected to the testing portion and extends along the first direction toward a side away from the abutting portion, and the guide rod is slidably connected to the first drive group.

[0008] In some embodiments, the first drive group at least includes a connecting seat, the connecting seat is configured with a guide hole axially along the first direction, the guide rod is passed through the guide hole, and can move along the first direction in the guide hole; the contact structure also includes an elastic member, the elastic member is connected between the connecting seat and the contact plate, and is used to apply a force to the contact plate to move toward a side away from the connecting seat.

[0009] In some embodiments, the contact structure also includes an adjustment seat, which is connected to the end of the guide rod away from the contact plate, the adjustment seat can move relative to the guide rod along the first direction, and the adjustment seat can abut against the side of the connecting seat away from the contact plate.

[0010] In some embodiments, the thickness detection mechanism further includes a mounting frame and a limit assembly, the connecting seat is slidably connected to the mounting frame, and the limit assembly is connected between the mounting frame and the connecting seat for limiting the driving stroke of the first driving group.

[0011] In some embodiments, the first drive group is mounted on the mounting frame; the first drive group has a driving state and a restricted state; in the restricted state, the mounting frame can drive the sensing structure, the first drive group and the connecting seat to move along the first direction toward the side away from the first drive group, so that the sensing structure abuts against the testing part.

[0012] In some embodiments, the limit block assembly includes a first limit block and a second limit block, one of the first limit block and the second limit block is installed on the mounting frame, and the other is installed on the connecting seat, and the first limit block and the second limit block can abut to limit the movement of the connecting seat along the first direction.

[0013] In some embodiments, the first drive group also includes a power source and a connecting plate, one end of the connecting plate along the first direction is connected to the power source, and the other end is connected to the connecting seat; the sensing structure is connected to the connecting plate, and is arranged on the opposite side of the connecting plate along the second direction relative to the connecting seat, and the second direction is set at an angle to the first direction.

[0014] In some embodiments, the sensing structure includes a displacement sensor, which is mounted on the first drive group. The displacement sensor has a sensing column, and the sensing column is configured to cause the displacement sensor to emit a detection signal in response to abutment and compression with the test portion.

[0015] The present application also provides a grinding device, comprising a grinding mechanism and the above-mentioned thickness detection mechanism, which are arranged at an interval. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the conventional technology, the drawings required for use in the embodiments or the conventional technology descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0017] Figure 1 A first schematic diagram of a thickness detection mechanism provided in an embodiment of the present application;

[0018] Figure 2 A second schematic diagram of a thickness detection mechanism provided in an embodiment of the present application;

[0019] Figure 3 A first partial schematic diagram of a thickness detection mechanism provided in an embodiment of the present application;

[0020] Figure 4 A second partial schematic diagram of a thickness detection mechanism provided in one embodiment of the present application.

[0021] 1. The first drive group; 11. The connecting seat; 1101. The guide hole; 12. The power source; 13. The connecting plate; 20. The contact structure; 21. The contact plate; 22. The guide rod; 23. The adjustment seat; 24. The elastic member; 25. The linear bearing; 26. The locking cap; 30. The sensing structure; 31. The displacement sensor; 32. The fixing seat; 40. The mounting frame; 41. The assembly block; 42. The support plate; 43. The mounting plate; 44. The reinforcing rib; 45. The guide rail; 50. The limiting assembly; 51. The first limiting block; 52. The second limiting block; 121. The cylinder body; 122. The piston rod; 131. The limiting baffle; 132. The slider; 201. The abutting part; 202. The testing part; 211. The assembly protrusion; 311. The sensing column; 1310. The avoidance groove; 4301. The waist-shaped hole. DETAILED DESCRIPTION

[0022] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0023] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may also be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only implementation method.

[0024] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of this application, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0025] In the present application, unless otherwise clearly specified and limited, a first feature being “above” or “below” a second feature may mean that the first feature is directly in contact with the second feature, or the first feature and the second feature are indirectly in contact through an intermediate medium. Moreover, a first feature being “above”, “above” or “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below”, “below” or “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0026] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in the specification of this application includes any and all combinations of one or more related listed items.

[0027] When grinding silicon carbide crystal wool, it is necessary to remove the dome of the crystal wool first, and then proceed with subsequent grinding. In this process, if the dome is not completely removed, the shape of the crystal after grinding will be irregular. If the dome is removed excessively, it will cause material waste. Therefore, when removing the dome, it is necessary to determine the grinding starting point and grinding depth, both of which are basically determined by the total thickness of the crystal wool. Therefore, the total thickness of the crystal wool needs to be measured before grinding. In the related art, most of the measurements are performed manually with a caliper after the crystal wool is fixed on the grinding machine. However, due to the irregular shape of the crystal wool, the measurement efficiency is low and the measurement error is large.

[0028] In view of this, an embodiment of the present application provides a grinding device that can improve the efficiency and accuracy of thickness measurement before grinding, thereby ensuring the feed amount in the subsequent grinding process and improving the grinding quality and efficiency. The grinding device includes a grinding machine and a fixed clamp, a grinding mechanism and a thickness detection mechanism arranged on the grinding machine. The fixed clamp is used to fix the crystal rough material to ensure that the crystal rough material will not shift during the grinding and thickness detection process, thereby ensuring the measurement and grinding accuracy and stability. The grinding mechanism and the thickness detection mechanism are arranged at intervals. When the thickness detection mechanism is used to perform thickness detection, the grinding mechanism will not interfere with the thickness detection mechanism; and, when the grinding mechanism is grinding, the thickness detection mechanism will not interfere with it. The thickness detection mechanism is described in detail below.

[0029] See also Figure 1 and Figure 2 In an optional embodiment, the thickness detection mechanism includes a first drive group 10, a touch structure 20 slidably connected to the first drive group 10, and a sensing structure 30 connected to the first drive group 10. The touch structure 20 has an abutment portion 201 and a test portion 202 arranged at intervals along a first direction, the sensing structure 30 is located on a side of the test portion 202 away from the abutment portion 201, and the sensing structure 30 is arranged at intervals relative to the test portion 202 along the first direction. The first drive group 10 is used to drive the touch structure 20 and the sensing structure 30 to move along the first direction, and the sensing structure 30 is configured to send a detection signal in response to the abutment portion 201 abutting against the test portion 202 when the abutment portion 201 abuts against the object to be tested to limit the position. Among them, the object to be tested here is a crystal raw material.

[0030] It should be noted in advance that the first direction is the thickness direction of the crystal raw material, and the thickness of the crystal raw material mentioned in this application. In actual use, the crystal rod is cut into cylindrical crystal blocks, and the thickness of the crystal blocks needs to be detected to facilitate the subsequent grinding of the crystal blocks into wafers. Therefore, the thickness direction of the crystal raw material referred to in this application is the axial direction of the cylindrical crystal block. When the crystal is placed horizontally on a support table for supporting the crystal, the first direction is the vertical direction (ie, the Z-axis direction); if the crystal is clamped between the grinder headstock and the grinder tailstock, the first direction is the horizontal X-axis direction. The following takes the first direction as the X-axis direction as an example.

[0031] Specifically, the abutment portion 201 is used to abut against the crystal wool material for positioning. The testing portion 202 is used to cooperate with the sensing structure 30 to realize thickness detection. When performing thickness detection, the first drive group 10 drives the touch structure 20 and the sensing structure 30 to move simultaneously along the first direction toward the side close to the crystal wool material until the abutment portion 201 of the touch assembly abuts against the end face of the crystal wool material. At this time, the touch structure 20 stops moving under the limiting effect of the crystal wool material, and the touch structure 20 is slidably connected with the first drive group 10, so when the first drive group 10 continues to drive, the touch structure 20 can produce a relative displacement along the first direction away from the crystal wool material relative to the first drive group 10. Due to the spacing arrangement of the sensing structure 30 and the touch structure 20, the sensing structure 30 can continue to move along the first direction toward the side close to the crystal wool material with the first drive group 10 until the sensing structure 30 abuts against the testing portion 202 of the touch structure 20. The sensing structure 30 can send a detection signal when it is subjected to force to meet the thickness detection of the crystal wool material. Compared with manual caliper measurement, this setting improves measurement efficiency and accuracy, thereby ensuring the feed amount in subsequent grinding.

[0032] Please continue reading Figure 1 and Figure 2 Exemplarily, the contact structure 20 includes a contact plate 21 and a guide rod 22. The test portion 202 and the abutment portion 201 are respectively arranged on both sides of the contact plate 21 along the first direction. The guide rod 22 is connected to the test portion 202 and extends along the first direction toward the side away from the abutment portion 201. The guide rod 22 is slidably connected to the first drive group 10. It can be understood that the contact plate 21 is used to abut against the crystal raw material and cooperate with the sensing structure 30 to realize thickness detection. The guide rod 22 is used to connect with the first drive group 10 to realize the assembly of the entire contact structure 20 relative to the first drive group 10. In this way, detection interference can be reduced and detection accuracy can be ensured.

[0033] If the crystal wool is placed horizontally, the thickness direction of the crystal wool is the vertical direction. Due to the existence of the dome, the top surface of the crystal wool is an arc-shaped surface, and the bottom surface of the crystal wool is a flat surface. The contact plate 21 is arranged opposite to the arc-shaped surface and is parallel to the bottom surface. The contact plate 21 is located above the crystal wool and moves downward in the vertical direction under the action of the driving member to abut against the arc-shaped surface.

[0034] Please continue reading Figure 1 and Figure 2 Optionally, the first drive group 10 at least includes a connecting seat 11, and the connecting seat 11 is configured with a guide hole 1101 axially along the first direction, and the guide rod 22 is inserted into the guide hole 1101 and can move in the guide hole 1101 along the first direction. Such a configuration not only satisfies the sliding connection of the touch assembly relative to the first drive group 10 through the guide rod 22, but also can utilize the cooperation of the guide hole 1101 and the guide rod 22 to play a moving guide role, thereby avoiding the shaking and displacement of the contact disk 21, thereby improving the detection accuracy. Among them, the contact disk 21 is provided with an assembly protrusion 211 at one end facing the connecting seat 11, and the assembly protrusion 211 is configured with an insertion hole, and one end of the guide rod 22 is inserted into the insertion hole. Among them, two guide rods 22 are provided, and they are arranged at intervals, and each guide rod 22 corresponds to an insertion hole.

[0035] See also Figures 1 to 3 In actual use, the first drive group 10 also includes a power source 12, which is connected to the connecting seat 11 and is used to drive the connecting seat 11 to reciprocate along the first direction. Among them, the power source 12 can be a cylinder, or it can be an electric push rod or other structures that can realize linear drive. The thickness detection mechanism also includes a mounting frame 40, and the power source 12 is installed on the mounting frame 40. The mounting frame 40 is connected to the grinding machine to realize the assembly of the thickness detection mechanism. The connecting seat 11 is slidably connected to the mounting frame 40, which not only improves the support effect of the touch structure 20 and the sensing structure 30, but also guides the movement of the two along the first direction, further improving the detection accuracy. The mounting frame 40 is provided with an assembly block 41, and the power source 12 is penetrated by the assembly block 41 and fixed to the assembly block 41 to realize the installation of the first drive group 10 relative to the mounting frame 40. The power source 12 includes a cylinder body 121 and a piston rod 122 slidably connected to the cylinder body 121, and the end of the piston rod 122 away from the cylinder body 121 is connected to the connecting seat 11 to realize driving.

[0036] Please continue reading Figure 1 and Figure 2Optionally, the contact structure 20 further includes an elastic member 24, which is connected between the connection seat 11 and the contact plate 21, and is used to apply a force to the contact plate 21 to move toward the side away from the connection seat 11. The setting of the elastic member 24 is used to increase the degree of freedom of the contact plate 21 when it abuts against the crystal wool, avoid wear caused by the two being in a completely rigid abutment state, and improve the safety of use. At this time, the setting of the elastic member 24 can also ensure that after the contact plate 21 moves away from the crystal wool, the contact plate 21 is prompted to return to its original state, so that it is easy to use again.

[0037] In actual use, the two ends of the elastic member 24 along its own axis are respectively connected to the connection seat 11 and the contact plate 21. After the contact plate 21 abuts against the crystal wool, as the first drive group 10 continues to drive, the elastic member 24 will be compressed; when the contact plate 21 moves away from the crystal wool, the elastic member 24 is released and drives the contact plate 21 to move toward the side of the crystal wool along the first direction to restore the initial state. Furthermore, the elastic member 24 can be sleeved on the outside of the guide rod 22, so that the guide rod 22 can support the elastic member 24 and prevent the elastic member 24 from shaking too much during the compression process.

[0038] Please continue reading Figure 1 and Figure 2 Furthermore, the contact structure 20 also includes an adjustment seat 23, which is connected to the end of the guide rod 22 away from the contact disc 21, and the adjustment seat 23 can abut against the side of the connection seat 11 away from the contact disc 21. In other words, the setting of the adjustment seat 23 can limit the movement of the contact disc 21 relative to the connection seat 11, thereby preventing the contact disc 21 from being separated. At the same time, due to the setting of the aforementioned elastic member 24, it can cooperate with the adjustment seat 23, thereby limiting the contact disc 21 relative to the connection seat 11 on both sides along the first direction; and, such a setting can ensure that the elastic member 24 is also in a slightly compressed state after assembly, generating a movement trend of moving along the first direction toward the side away from the sensing structure 30, thereby ensuring that the contact disc 21 and the sensing structure 30 are not in contact in the initial state, thereby ensuring the test accuracy. Among them, each guide rod 22 corresponds to an elastic member 24 and an adjustment seat 23 respectively.

[0039] In some specific embodiments, the adjustment seat 23 can move relative to the guide rod 22 along the first direction. In this way, the installation position of the adjustment seat 23 relative to the guide rod 22 can be adjusted, thereby changing the length of the guide rod 22 between the contact plate 21 and the connecting seat 11, thereby adjusting the installation position of the contact plate 21 relative to the connecting seat 11. Specifically, the adjustment seat 23 is configured with a threaded hole, and the side wall of the guide rod 22 is configured with a threaded structure, and the two are threadedly connected.

[0040] In an alternative embodiment, the guide rod 22 can also be slidably connected to the connection seat 11 by means of a slide groove. Alternatively, the contact plate 21 and the connection seat 11 are slidably connected by means of a slider and a slide groove. It is sufficient to ensure that the contact plate 21 generates a stable relative displacement with the first drive group 10 after contacting the crystal blank.

[0041] See also Figure 1 , Figure 2 and Figure 4 In actual use, a linear bearing 25 is further provided between the connecting seat 11 and the guide rod 22 to play a role in movement. At the same time, a locking cap 26 is provided at the end of the adjustment seat 23 away from the contact plate 21. The locking cap 26 is threadedly connected to the guide rod 22. When the adjustment seat 23 is adjusted to a target position relative to the guide rod 22, the locking cap 26 can be tightened to achieve a tightening effect. The locking cap 26 can be a locking nut.

[0042] Alternatively, the adjustment seat 23 and the guide rod 22 may be locked by a pin. At this time, the guide rod 22 is provided with a plurality of locking holes spaced apart along its axial direction, and the pin may be selectively inserted and locked in the plurality of locking holes.

[0043] like Figures 1 to 4 As shown, in an optional embodiment, the thickness detection mechanism also includes a limit assembly 50, which is connected between the mounting frame 40 and the connecting seat 11, and is used to limit the driving stroke of the first drive group 10, that is, to limit the extension length of the cylinder to prevent the cylinder from extending too long. In actual use, the limiter includes a first limit block 51 and a second limit block 52, one of which is installed on the mounting frame 40, and the other is installed on the connecting seat 11. When the connecting seat 11 moves along the first direction toward the direction close to the crystal raw material under the action of the power source 12, the first limit block 51 and the second limit block 52 can abut to limit the driving stroke of the first drive group 10, thereby also limiting the movement of the connecting seat 11 under the action of the first drive group 10.

[0044] For example, the first limit block 51 may be installed on a side of the mounting frame 40 away from the power source 12 along the first direction, and the second limit block 52 may be installed on a side of the connecting seat 11 close to the power source 12 along the first direction. Alternatively, the second limit block 52 may be installed on the mounting frame 40, and the first limit block 51 may be connected to the connecting seat 11.

[0045] In actual use, the first drive group 10 has a driving state and a restricted state. In the driving state, the first drive group 10 drives the connecting seat 11 to move, thereby driving the contact structure 20 and the sensing structure 30 to move. In the restricted state, the driving stroke of the first drive group 10 toward the side of the crystal blank is limited by the limit assembly 50. Therefore, in the restricted state, if the abutting portion 201 on the contact plate 21 is not in an abutting state with the crystal blank, the mounting frame 40 needs to move along the first direction.

[0046] In some embodiments, the thickness detection mechanism further includes a second drive group, and the power output end of the second drive group is connected to the mounting frame 40 to drive the mounting frame 40 to move along the first direction. In actual use, a bottom guide rail can be installed at the bottom of the mounting frame 40, and the mounting frame 40 is slidably connected to the bottom guide rail to achieve a moving guide effect. Therefore, after the first limit block 51 and the second limit block 52 abut, the second drive group can drive the mounting frame 40 to move toward one side of the crystal rough material along the first direction, and the mounting frame 40 drives the contact structure 20, the sensing structure 30 and the first drive group 10 to move synchronously until the contact plate 21 in the contact structure 20 abuts against the crystal rough material. Then, the mounting frame 40 can continue to move toward one side of the crystal rough material along the first direction under the action of the second drive group, so that the sensing structure 30 abuts against the test part 202 and sends out a detection signal.

[0047] The second drive group may be driven by a lead screw, or other linear drive modules for achieving linear movement.

[0048] Alternatively, when the contact plate 21 contacts the crystal blank, the first limit block 51 and the second limit block 52 abut against each other to limit the position. At this time, the second drive group drives the mounting frame 40 to move to perform thickness detection.

[0049] See also Figures 1 to 4 Exemplarily, the first driving group 10 also includes a connecting plate 13, one end of the connecting plate 13 along the first direction is connected to the power source 12, and the other end is connected to the connecting seat 11, and the sensing structure 30 is connected to the connecting plate 13. The setting of the connecting plate 13 is equivalent to increasing the connection length between the connecting seat 11 and the power source 12, so that the power source 12 can be set at a position farther away from the supporting platform of the crystal raw material, reducing interference with other structures. Moreover, by using the setting of the connecting plate 13, it is possible to avoid interference between the contact plate 21 and the guide rod 22 and the power source 12, thereby ensuring the accuracy of thickness detection.

[0050] Furthermore, the sensing structure 30 and the connection seat 11 are arranged on opposite sides of the connection plate 13 along the second direction. The second direction is the thickness direction of the connection plate 13, the first direction is the length direction of the connection plate 13, and the second direction is set at an angle to the first direction. When the first direction is the X-axis direction, the second direction is the Y-axis direction. The arrangement of the sensing structure 30 and the connection seat 11 on opposite sides fully utilizes the assembly space on both sides of the connection plate 13 along its own thickness direction, and reduces the installation interference between the sensing structure 30 and the touch structure.

[0051] like Figures 1 to 4 As shown, further, the connecting plate 13 is slidably connected to the mounting frame 40. Specifically, a slider 132 is provided on the side of the connecting plate 13 away from the connecting seat 11, and the mounting frame 40 is provided with a guide rail 45, and the slider 132 is slidably connected to the guide rail 45.

[0052] See also Figure 1 , Figure 2 and Figure 4 Optionally, the sensing structure 30 includes a displacement sensor 31, and the displacement sensor 31 is installed on the connecting plate 13 of the first driving group 10. The displacement sensor 31 has a sensing column 311, and the sensing column 311 is configured to make the displacement sensor 31 send a detection signal in response to the abutment and compression with the test part 202. That is to say, when the sensing column 311 abuts against the contact plate 21, it will be compressed, and as the sensing structure 30 continues to be driven by the first driving group 10 or the second driving group, the sensing column 311 is compressed to produce displacement, and then the linear motion is converted into an electrical signal, and then a digital signal is output to obtain the thickness of the crystal raw material. Among them, the distance between the detection end of the displacement sensor 31 and the fixed center of the crystal is fixed, so the thickness can be the difference between this distance and the displacement of the displacement sensor 31 driven by the first driving group 10 and / or the second driving group.

[0053] It should be added that the specific structure and working principle of the displacement sensor 31 are existing mature technologies and will not be described in detail here.

[0054] like Figure 4 As shown, the sensing structure 30 further includes a fixing seat 32, so that the displacement sensor 31 can be detachably connected to the side of the connecting plate 13 away from the connecting seat 11 by using the fixing seat 32. When a limit baffle 131 is provided at one end of the connecting plate 13 facing the contact plate 21, the limit baffle 131 is provided with an avoidance groove 1310 for the sensing column 311 to pass through.

[0055] like Figures 1 to 3As shown, in some embodiments, the mounting frame 40 includes a support plate 42 and a mounting plate 43, which are connected and arranged at an angle. The aforementioned first drive group 10, connecting plate 13, etc. are all mounted on the support plate 42. The mounting plate 43 is arranged to cooperate with other structures, for example, the thickness detection mechanism is installed at the corresponding workstation, or the mounting plate 43 is slidably connected to the bottom guide rail on the machine table arranged at the corresponding workstation. Among them, the mounting frame 40 also includes a reinforcing rib 44, which is connected between the support plate 42 and the mounting plate 43 to improve the structural strength of the mounting frame 40. The reinforcing rib 44 can be provided in one, or in two or more. When at least two reinforcing ribs 44 are provided, they can be arranged at intervals along the first direction.

[0056] Among them, the mounting plate 43 is provided with a plurality of waist-shaped holes 4301 arranged at intervals, which improves the assembly flexibility of the mounting plate 43 and facilitates the adjustment of the position and posture.

[0057] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0058] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the scope of patent protection of the present application shall be subject to the attached claims.

Claims

1. A thickness detection mechanism, characterized in that: include: A first drive group (10); A contact structure (20) is slidably connected to the first drive group (10), the contact structure (20) comprising an abutment portion (201) and a testing portion (202) arranged at intervals along a first direction; and a sensing structure (30) connected to the first drive group (10) and located on a side of the testing portion (202) away from the abutting portion (201), and the sensing structure (30) is arranged at intervals relative to the testing portion (202) along the first direction; The first driving group (10) is used to drive the contact structure (20) and the sensing structure (30) to move along a first direction, and the sensing structure (30) is configured to send a detection signal in response to the abutment of the abutment portion (201) against the test object when the abutment portion (201) abuts against the test portion (202) to limit the abutment.

2. The thickness detection mechanism according to claim 1, characterized in that: The contact structure (20) comprises a contact plate (21) and a guide rod (22); The testing portion (202) and the abutting portion (201) are respectively arranged on two sides of the contact plate (21) along the first direction; the guide rod (22) is connected to the testing portion (202) and extends along the first direction toward a side away from the abutting portion (201); the guide rod (22) is slidably connected to the first driving group (10).

3. The thickness detection mechanism according to claim 2, characterized in that: The first drive group (10) at least comprises a connecting seat (11), the connecting seat (11) being configured with a guide hole (1101) axially along the first direction, the guide rod (22) passing through the guide hole (1101) and being able to move in the guide hole (1101) along the first direction; The contact structure (20) further comprises an elastic member (24), wherein the elastic member (24) is connected between the connection seat (11) and the contact plate (21) and is used to apply a force to the contact plate (21) to move toward a side away from the connection seat (11).

4. The thickness detection mechanism according to claim 3, characterized in that: The contact structure (20) further comprises an adjustment seat (23), wherein the adjustment seat (23) is connected to the end of the guide rod (22) away from the contact plate (21), the adjustment seat (23) is movable relative to the guide rod (22) along the first direction, and the adjustment seat (23) is abuttable against a side of the connecting seat (11) away from the contact plate (21).

5. The thickness detection mechanism according to claim 3, characterized in that: The thickness detection mechanism further comprises a mounting frame (40) and a limiting assembly (50); the connecting seat (11) is slidably connected to the mounting frame (40); and the limiting assembly (50) is connected between the mounting frame (40) and the connecting seat (11) and is used to limit the driving stroke of the first driving group (10).

6. The thickness detection mechanism according to claim 5, characterized in that: The first drive group (10) is mounted on the mounting frame (40); the first drive group (10) has a driving state and a restricted state; In the restricted state, the mounting frame (40) is capable of driving the sensing structure (30), the first drive group (10) and the connecting seat (11) to move along the first direction toward a side away from the first drive group (10), so that the sensing structure (30) abuts against the testing portion (202).

7. The thickness detection mechanism according to claim 5, characterized in that: The limiting assembly (50) comprises a first limiting block (51) and a second limiting block (52); one of the first limiting block (51) and the second limiting block (52) is mounted on the mounting frame (40), and the other is mounted on the connecting seat (11); the first limiting block (51) and the second limiting block (52) are capable of abutting against each other to limit the movement of the connecting seat (11) along the first direction.

8. The thickness detection mechanism according to claim 3, characterized in that: The first driving group (10) further comprises a power source (12) and a connecting plate (13), wherein one end of the connecting plate (13) along the first direction is connected to the power source (12), and the other end is connected to the connecting seat (11); The sensing structure (30) is connected to the connecting plate (13), and is arranged on the opposite side of the connecting seat (11) relative to the connecting plate (13) along a second direction, wherein the second direction is arranged at an angle to the first direction.

9. The thickness detection mechanism according to claim 1, characterized in that: The sensing structure (30) comprises a displacement sensor (31), the displacement sensor (31) being mounted on the first drive group (10), the displacement sensor (31) having a sensing column (311), the sensing column (311) being configured to cause the displacement sensor (31) to emit a detection signal in response to abutment compression with the test portion (202).

10. A grinding device, characterized in that: The invention comprises a grinding mechanism and the thickness detection mechanism according to any one of claims 1 to 9, wherein the grinding mechanism and the thickness detection mechanism are arranged at an interval.

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