Heating furnace

Abstract

The utility model provides a heating furnace which comprises an outer cavity provided with a first vacuumizing opening; the inner cavity is arranged in the outer cavity, and a second vacuumizing opening is formed in the inner cavity; the heating assembly is arranged in the outer cavity and is distributed around the outer side of the inner cavity; the heat preservation layer is arranged on the inner side of the outer cavity and distributed around the heating assembly and the inner cavity. The heat preservation layer can slow down the temperature of the inner cavity to be transmitted to the outer cavity, most heat is reserved in the inner cavity, and therefore the heating rate of the outer cavity is reduced, the temperature of the outer cavity is prevented from being too high, meanwhile, the heating rate of the inner cavity is increased, and production efficiency is improved. In addition, vacuumizing of the first vacuumizing opening and the second vacuumizing opening by the vacuumizing equipment can be configured according to preset setting parameters, so that the outer cavity and the inner cavity can be in the same or different vacuum degrees, and the device is suitable for various application scenes.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic material processing, and in particular to a heating furnace. Background Art

[0002] In the processing of photovoltaic materials or semiconductors, processes such as atomic layer deposition technology and chemical vapor deposition technology are usually used to prepare thin films on the materials, and a heating furnace is one of the commonly used equipment.

[0003] In the related art, the heating furnace includes an outer cavity, an inner cavity, a heating component and a water cooling component, wherein the inner cavity and the heating component are both arranged inside the outer cavity, the heating component is located outside the inner cavity, and the water cooling component is arranged outside the outer cavity. During normal operation, the material is contained in the inner cavity, the heating component heats the material in the inner cavity, and the water cooling component cools the outer cavity. However, the heating furnace has the problem of slow heating efficiency of the inner cavity, which affects production efficiency. Utility Model Content

[0004] In view of the above, it is necessary to provide a heating furnace and a heating furnace that can improve work efficiency.

[0005] The present application provides a heating furnace, comprising: an outer cavity, the outer cavity is provided with a first vacuum port; an inner cavity, arranged in the outer cavity, the inner cavity is provided with a second vacuum port; a heating component, arranged in the outer cavity and distributed around the outer side of the inner cavity; a thermal insulation layer, arranged on the inner side of the outer cavity, and distributed around the heating component and the inner cavity.

[0006] In some embodiments, the inner cavity is made of metal; the heating component includes a power module and an electromagnetic induction component, the power module is electrically connected to the electromagnetic induction component, the electromagnetic induction component is distributed around the outside of the inner cavity, and the electromagnetic induction component and the inner cavity are insulated.

[0007] In some embodiments, the heating furnace further includes a heat insulation layer, which is disposed on the outside of the inner cavity.

[0008] In some embodiments, the cross-sectional shape of the outer cavity in a direction perpendicular to its axis is circular, and the cross-sectional shape of the inner cavity in a direction perpendicular to its axis is circular or square.

[0009] In some embodiments, when the cross-section of the inner cavity perpendicular to its axial direction is a square, the electromagnetic induction components are arranged corresponding to the side walls of the inner cavity, and the electromagnetic induction components are spaced and distributed in parallel with the corresponding side walls of the inner cavity.

[0010] In some embodiments, the heating furnace also includes a fixing part, which is arranged on the outside of the inner cavity and is detachably connected to the electromagnetic induction part; one end of the fixing part is fixedly connected to the inner cavity, and the other end of the fixing part is provided with a clamping groove, and the electromagnetic induction part is clamped and fixed in the clamping groove.

[0011] In some embodiments, a plurality of fixing members are provided, and the plurality of fixing members are arranged at intervals along the distribution direction of the electromagnetic induction member.

[0012] In some embodiments, the inner cavity has multiple heating positions distributed around its circumference, and multiple electromagnetic induction components are provided, and the multiple electromagnetic induction components correspond to the multiple heating positions; the electromagnetic induction components are distributed at the corresponding heating positions and are used to heat the corresponding heating positions.

[0013] In some embodiments, the electromagnetic induction member is in a spiral shape.

[0014] In some embodiments, the inner cavity has multiple heating zones distributed along its length direction, multiple electromagnetic induction components are provided, and the multiple electromagnetic induction components correspond to the multiple heating zones; the electromagnetic induction components are distributed in the corresponding heating zones and are used to heat the corresponding heating zones.

[0015] During normal operation, the material is contained in the inner cavity, and the vacuum device vacuums the outer cavity through the first vacuum port, and vacuums the inner cavity through the second vacuum port, so that both the outer cavity and the inner cavity are in a vacuum state, and the heating component heats the material in the inner cavity. At this time, the insulation layer can slow down the transfer of the temperature of the inner cavity to the outer cavity, and retain most of the heat in the inner cavity, thereby reducing the heating rate of the outer cavity, preventing the temperature of the outer cavity from being too high, and at the same time increasing the heating rate of the inner cavity, thereby improving production efficiency. In addition, this embodiment replaces the water cooling component with the insulation layer, eliminating the installation of the cooling water circuit, thereby reducing the pipeline blockage problem caused by impurity structures in the cooling water, and reducing the operation risk.

[0016] On the other hand, the vacuum pumping device can evacuate the outer cavity and the inner cavity through the first vacuum pumping port and the second vacuum pumping port respectively, so that the outer cavity and the inner cavity are in a vacuum state at the same time. In actual applications, the vacuum pumping device can be configured to evacuate the first vacuum pumping port and the second vacuum pumping port according to preset setting parameters, so that the outer cavity and the inner cavity can be in the same or different vacuum degrees, which is suitable for a variety of application scenarios. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the internal structure of the heating furnace of the first embodiment of the present application, wherein the X-axis direction shown in the figure is the horizontal direction, and the Y-axis direction shown in the figure is the vertical direction.

[0018] Figure 2 This is a schematic diagram of the state of the heating component of the first embodiment of the present application when heating a material.

[0019] Figure 3This is a schematic structural diagram of the inner cavity side and the electromagnetic induction component of the first embodiment of the present application, wherein the X-axis direction shown in the figure is the horizontal direction, and the Y-axis direction shown in the figure is the vertical direction.

[0020] Figure 4 It is a cross-sectional schematic diagram of the fixing member, the electromagnetic induction member, the heat insulation layer and the inner cavity of the first embodiment of the present application.

[0021] Figure 5 This is a schematic structural diagram of the electromagnetic induction component and the inner cavity of the second embodiment of the present application, wherein the X-axis direction shown in the figure is the horizontal direction, and the Y-axis direction shown in the figure is the vertical direction.

[0022] Figure 6 This is a schematic diagram of the state of the heating component of the second embodiment of the present application when heating a material.

[0023] Figure 7 It is a cross-sectional schematic diagram of the fixing member, the electromagnetic induction member, the heat insulation layer and the inner cavity of the second embodiment of the present application.

[0024] Description of main component symbols:

[0025] 10. Outer cavity; 20. Inner cavity; 21. Second vacuum port; 22. Heating position; 23. Heating partition; 30. Heating component; 31. Electromagnetic induction component; 3. Screw; 32. Power module; 40. Insulation layer; 50. Fixing part; 51. Clamping groove; 52. First clamping block; 521. First clamping block; 53. Second clamping block; 531. Second clamping block; 54. Locking nut; 55. First through hole; 56. Second through hole; 60. Insulation layer; 100. Material. DETAILED DESCRIPTION

[0026] In the description of the embodiments of the present application, when an element is considered to be "connected" to another element, it may be directly connected to the other element or there may be a centrally disposed element at the same time. When an element is considered to be "disposed on" another element, it may be directly disposed on the other element or there may be a centrally disposed element at the same time. In the present application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected, or it may be indirectly connected through an intermediate medium, or it may be internal communication between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0027] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0028] In the related art, the heating furnace often adopts a bimetallic cavity structure, and the heating furnace includes an outer cavity, an inner cavity, a heating component and a water-cooling component. During normal operation, the material is contained in the inner cavity, and the outer cavity and the inner cavity need to be evacuated respectively. The heating component heats the material in the inner cavity, and the temperature of the outer cavity will also rise due to the increase in the temperature of the inner cavity. At this time, the water-cooling component can cool the outside of the outer cavity to prevent the temperature of the outer cavity from being too high. However, while the outer cavity is cooling down, it will also take away the temperature inside the outer cavity, causing the temperature of the inner cavity to rise slowly, resulting in low heating efficiency and slow production efficiency.

[0029] On the other hand, in the related art, a resistive heating wire is usually used to heat the inner cavity of the quartz material, which has a slow heating speed and a large thermal hysteresis. After long-term use, the inner wall of the inner cavity will be coated, and the light transmittance will be reduced, which reduces the heating efficiency. At the same time, the inner cavity of the quartz material may explode and break in a high temperature environment, and the residue left on the electric heating wire is difficult to clean and needs to be replaced, which increases the production cost.

[0030] To this end, the embodiment of the present application provides a heating furnace, which can achieve the technical effect of improving heating efficiency and production efficiency. The heating furnace can be used to chemically treat materials, the materials can be a boat loaded with sheet materials, the sheet materials include but are not limited to silicon sheets, silicon carbide sheets or wafers, etc., and the chemical treatment includes but is not limited to chemical vapor deposition, atomic layer deposition technology or diffusion process treatment.

[0031] Figure 1 This is a schematic diagram of the internal structure of the heating furnace of the first embodiment of the present application, wherein the X-axis direction shown in the figure is the horizontal direction, and the Y-axis direction shown in the figure is the vertical direction. Figure 2 This is a schematic diagram of the state of the heating component of the first embodiment of the present application when heating a material.

[0032] like Figure 1 and Figure 2As shown, the heating furnace includes an outer cavity 10, an inner cavity 20, a heating component 30 and a heat preservation layer 40, wherein the inner cavity 20 and the heating component 30 are both arranged in the outer cavity 10, and the heating component 30 is distributed around the outer side of the inner cavity 20, the inner cavity 20 is used to accommodate the material 100, and the heating component 30 is used to heat the material 100. The heat preservation layer 40 is arranged on the inner side of the outer cavity 10, and the heat preservation layer 40 is distributed around the inner cavity 20. The outer cavity 10 is provided with a first vacuum port (not shown in the figure), and the inner cavity 20 is provided with a second vacuum port 21. Both the first vacuum port and the second vacuum port 21 can be connected to the vacuum equipment outside the heating furnace.

[0033] During normal operation, the material 100 is contained in the inner cavity 20, and the vacuuming device vacuums the outer cavity 10 through the first vacuuming port, and vacuums the inner cavity 20 through the second vacuuming port 21, so that both the outer cavity 10 and the inner cavity 20 are in a vacuum state, and the heating component 30 heats the material 100 located in the inner cavity 20. At this time, the thermal insulation layer 40 can slow down the temperature transfer of the inner cavity 20 to the outer cavity 10, and retain most of the heat in the inner cavity 20, thereby reducing the heating rate of the outer cavity 10, preventing the temperature of the outer cavity 10 from being too high, and at the same time increasing the heating rate of the inner cavity 20, thereby improving production efficiency. In addition, the present embodiment replaces the water cooling component with the thermal insulation layer 40, eliminating the need to install the cooling water circuit, thereby reducing the pipeline blockage problem caused by impurity structures in the cooling water, and reducing the operation risk.

[0034] On the other hand, the vacuum pumping device can evacuate the outer cavity 10 and the inner cavity 20 through the first vacuum pumping port and the second vacuum pumping port 21, respectively, so that the outer cavity 10 and the inner cavity 20 are in a vacuum state at the same time. In actual applications, the vacuum pumping device can be configured to evacuate the first vacuum pumping port and the second vacuum pumping port 21 according to preset setting parameters, so that the outer cavity 10 and the inner cavity 20 can be in the same vacuum degree, and the outer cavity 10 and the inner cavity 20 can also be in different vacuum degrees, which is suitable for a variety of application scenarios and can be set according to actual needs.

[0035] For the convenience of description, the direction of the heating furnace in normal use is used as a reference, that is, the outer cavity 10 and the inner cavity 20 are both placed in the horizontal direction as an example, and the length direction of the outer cavity 10 and the inner cavity 20 are both in the horizontal direction. Exemplarily, the outer cavity 10 is made of metal such as stainless steel.

[0036] In this embodiment, the insulation layer 40 is fixed to the inner side of the outer cavity 10, and the insulation layer 40 is adaptively installed on the inner side of the outer cavity 10. Support structures such as metal rods are provided at both ends of the outer cavity 10, and the insulation layer 40 is installed on the support structure so that the insulation layer 40 and the outer cavity 10 are relatively fixed.

[0037] In this embodiment, the thermal insulation layer 40 is made of a metal foil vacuum insulation material, specifically a sandwich structure formed by evacuating the space after wrapping a high-temperature nano material with a metal foil. The metal foil vacuum insulation material has better thermal insulation performance compared to ordinary thermal insulation materials such as ceramic fiber thermal insulation materials. Moreover, the high-temperature nano material is sealed within the metal foil, preventing problems such as air leakage, powder shedding, or fiber shedding in the thermal insulation layer 40 and avoiding interference with the normal operation of the equipment.

[0038] In this embodiment, the heating furnace is heated by electromagnetic induction. Specifically, the inner cavity 20 is made of a metal material, including but not limited to carbon steel, stainless steel, etc. The heating component 30 includes a power supply module 32 and an electromagnetic induction element 31. The power supply module 32 is electrically connected to the electromagnetic induction element 31, and the electromagnetic induction element 31 is distributed around the outer side of the inner cavity 20. An insulating setting is provided between the inner cavity 20 and the electromagnetic induction element 31.

[0039] Figure 3 It is a schematic structural diagram of the side surface of the inner cavity and the electromagnetic induction element in the first embodiment of this application. Among them, the X-axis direction shown in the figure is the horizontal direction, and the Y-axis direction shown in the figure is the vertical direction.

[0040] As Figure 2 and Figure 3 shown, in this embodiment, the electromagnetic induction element 31 is made of a high-temperature resistant conductive material and is electrically connected to the power supply module 32 through a lead wire. Exemplarily, the electromagnetic induction element 31 uses a high-temperature resistant cloud bus bar. The electromagnetic induction element 31 is in a vortex shape. The electromagnetic induction element 31 extends along a rectangular vortex line, making the overall shape of the electromagnetic induction element 31 a square shape with a hole in the middle. And the pitch of the electromagnetic induction element 31 decreases from the inside to the outside to improve the heating efficiency of electromagnetic induction. A plurality of electromagnetic induction elements 31 are provided, and the plurality of electromagnetic induction elements 31 are spaced apart and distributed around the outer side of the inner cavity 20, and are also spaced apart along the length direction of the inner cavity 20.

[0041] Exemplarily, the power supply module 32 is a high-frequency power control box, where "high-frequency" refers to a frequency above 10000HZ.

[0042] In practical applications, the power supply module 32 can supply high-frequency current to the electromagnetic induction element 31. Under the action of the high-frequency current, the electromagnetic induction element 31 generates a changing magnetic field. The metal inner cavity 20 generates an induced current under the action of the changing magnetic field and generates Joule heat, thereby providing a sufficient reaction temperature for the material 100.

[0043] It should be noted that there is an error in the description of the shape of the electromagnetic induction element 31 in the original text. It is corrected in the translation. The original text says "使得电磁感应件31整体呈回字形", which is translated as "making the overall shape of the electromagnetic induction element 31 a square shape with a hole in the middle" to correct the inaccurate description. If this is not allowed, please adjust according to the actual requirements.It can be understood that the electromagnetic induction component 31 relies on electromagnetic induction to heat the inner cavity 20 made of metal material, with a fast heating speed and high production efficiency. After long-term operation, the inner wall of the inner cavity 20 will be coated with a film, but induction heating has a skin effect, and the induced current is concentrated on the outer layer of the inner cavity 20. The heat of the inner surface is carried out by the heat conduction of the inner surface. The thickness of the coating on the inner wall of the inner cavity 20 has little effect on the heat conduction, avoiding the problem of using a resistive heating wire to heat the quartz vacuum cavity in the related technology. Since the inner wall of the quartz vacuum cavity will be coated, the light transmittance is poor and the heating efficiency is reduced. In addition, the inner cavity 20 made of metal material is not prone to tube explosion and shattering in a high temperature environment, which reduces the later maintenance cost of the equipment and improves production efficiency.

[0044] like Figure 1 and Figure 2 As shown, in this embodiment, the cross-sectional shape of the outer cavity 10 in the direction perpendicular to its axis is circular, and the cross-sectional shape of the inner cavity 20 in the direction perpendicular to its axis is square. The cross-sectional shape of the material 100 in the direction perpendicular to the axis of the inner cavity 20 is also square, so that the cross-sectional shape of the inner cavity 20 matches the cross-sectional shape of the material 100. When the material 100 is accommodated in the inner cavity 20, the side of the cross-sectional shape of the inner cavity 20 is parallel to the side of the cross-sectional shape of the material 100, so that the distance between the side wall of the inner cavity 20 and the material 100 is shorter, so as to improve the heat conduction efficiency between the inner cavity 20 and the material 100 when Joule heat is generated, thereby improving the heating efficiency of the material 100.

[0045] In this embodiment, the electromagnetic induction components 31 are arranged corresponding to the side walls of the inner cavity 20, and the electromagnetic induction components 31 are spaced and parallel to the side walls corresponding to the inner cavity 20. Exemplarily, the multiple electromagnetic induction components 31 are divided into four groups corresponding to the four side walls of the inner cavity 20, and each group of electromagnetic induction components 31 is distributed in the upper, lower, left, and right directions relative to the inner cavity 20, and the electromagnetic induction components 31 are parallel to the outer sides of the adjacent inner cavity 20 and spaced apart.

[0046] In this embodiment, the inner cavity 20 is provided with a plurality of heating positions 22 along its circumference, and a plurality of electromagnetic induction components 31 are provided, and the plurality of electromagnetic induction components 31 correspond to the plurality of heating positions 22. The electromagnetic induction components 31 are distributed at the corresponding heating positions 22, and are used to heat the corresponding heating positions 22. Each power module 32 can independently output a current of a specified frequency to the electromagnetic induction components 31 of different heating positions 22, so as to control the heating temperature of the inner cavity 20 at different heating positions 22, and realize the temperature zoning control of the inner cavity 20 in the circumferential direction.

[0047] Exemplarily, four side walls of the inner cavity 20 form four heating positions 22 , and the four heating positions 22 are distributed at the top, bottom, left and right relative to the inner cavity 20 , and the plurality of electromagnetic induction elements 31 are distributed corresponding to the four heating positions 22 .

[0048] In this embodiment, the heating furnace further includes a plurality of temperature sensors, which may be thermocouples. The plurality of temperature sensors are respectively disposed at the plurality of heating positions 22. In addition, the plurality of power modules 32 are respectively electrically connected to the temperature sensors disposed at the corresponding heating positions 22. The power module 32 may also adjust the frequency of the current output to the corresponding electromagnetic induction element 31 according to the temperature data fed back by the temperature sensor and the set target temperature value, so that the actual temperature of the heating position 22 is maintained at the target temperature value.

[0049] like Figure 2 and Figure 3 As shown, in this embodiment, the inner cavity 20 is provided with a plurality of heating zones 23 along its length direction. A plurality of electromagnetic induction components 31 correspond to the plurality of heating zones 23, and the electromagnetic induction components 31 are distributed in the corresponding heating zones 23. Each heating zone 23 is provided with a power module 32, and the power module 32 is electrically connected to the electromagnetic induction component 31 corresponding to the heating zone 23.

[0050] Exemplarily, the inner cavity 20 is divided into multiple areas in the horizontal direction, and each area forms a heating zone 23. In this embodiment, the number of heating zones 23 is 4. The four heating zones 23 are distributed in sequence in the horizontal direction relative to the inner cavity 20. Each heating zone 23 is configured with a group of induction components, and a group of induction components includes four electromagnetic induction components 31 distributed around the inner cavity 20.

[0051] In this way, each power module 32 can independently output current of a specified frequency to the electromagnetic induction components 31 of different heating zones 23 to control the heating temperature of the inner cavity 20 in different heating zones 23, thereby realizing temperature zoning control of the inner cavity 20 in its length direction.

[0052] In this embodiment, each heating zone 23 is configured with a temperature sensor, and the power module 32 can also adjust the frequency of the current output to the corresponding electromagnetic induction component 31 according to the temperature data fed back by the temperature sensor and the set target temperature value, so that the actual temperature of the heating zone 23 is maintained at the target temperature value.

[0053] It is worth noting that there are overlapping parts between the multiple heating positions 22 and the multiple heating zones 23 in this embodiment. The heating positions 22 and heating zones 23 in this part can use the same temperature sensor and power module 32 as long as the effect of temperature zone control can be achieved.

[0054] In this embodiment, the heating furnace further includes a fixing member 50, which is fixedly connected to the outside of the inner cavity 20, and the fixing member 50 is detachably connected to the electromagnetic induction member 31. In this way, the user can remove or install the electromagnetic induction member 31 on the fixing member 50 according to needs to repair or replace the electromagnetic induction member 31.

[0055] Figure 4 It is a cross-sectional schematic diagram of the fixing member, the electromagnetic induction member, the heat insulation layer and the inner cavity of the first embodiment of the present application.

[0056] like Figure 3 and Figure 4 As shown, in this embodiment, one end of the fixing member 50 is fixedly connected to the outside of the inner cavity 20, and the other end of the fixing member 50 is provided with a clamping groove 51, and the electromagnetic induction member 31 is clamped and fixed in the clamping groove 51. The fixing member 50 fixes the electromagnetic induction member 31 by clamping, which is convenient for users to disassemble or install the electromagnetic induction member 31, and improves the efficiency of disassembly and assembly of the electromagnetic induction member 31.

[0057] Exemplarily, the fixing member 50 is made of insulating material, and includes a first clamping block 52 and a second clamping block 53 that are arranged opposite to each other, and the first clamping block 52 and the second clamping block 53 are spaced apart so that a clamping groove 51 is formed between the first clamping block 52 and the second clamping block 53. One end of the first clamping block 52 is bonded and fixed to the outside of the inner cavity 20, and the other end of the first clamping block 52 is provided with a first clamping block 521 protruding toward one side of the second clamping block 53. One end of the second clamping block 53 is bonded and fixed to the outside of the inner cavity 20, and the other end of the second clamping block 53 is provided with a second clamping block 531 protruding toward one side of the first clamping block 52.

[0058] When the electromagnetic induction component 31 is in a fixed state, the electromagnetic induction component 31 is located in the clamping groove 51 formed between the first clamping block 52 and the second clamping block 53. The first clamping block 52 and the second clamping block 53 cooperate to clamp the electromagnetic induction component 31, and at the same time, the first clamping block 521 and the second clamping block 531 prevent the electromagnetic induction component 31 from escaping from the clamping groove 51, thereby fixing the electromagnetic induction component 31. In this state, a distance is left between the electromagnetic induction component 31 and the outer wall of the inner cavity 20, so that the electromagnetic induction component 31 and the inner cavity 20 are insulated.

[0059] When the electromagnetic induction member 31 needs to be disassembled, the electromagnetic induction member 31 can be moved away from the inner cavity 20. The first clamping block 52 and the second clamping block 53 are elastically deformed under the action of the electromagnetic induction member 31, and then the electromagnetic induction member 31 can be taken out from the clamping groove 51. When the electromagnetic induction member 31 needs to be installed, the electromagnetic induction member 31 can be abutted between the first clamping block 521 and the second clamping block 531, and the electromagnetic induction member 31 is moved towards the inner cavity 20. The first clamping block 52 and the second clamping block 53 are in interference fit under the action of the electromagnetic induction member 31, and then the electromagnetic induction member 31 can enter and be clamped and fixed in the clamping groove 51.

[0060] In this embodiment, both the first clamping block 52 and the second clamping block 53 extend along the length direction of the electromagnetic induction member 31 to increase the contact area between the first clamping block 52, the second clamping block 53 and the electromagnetic induction member 31, and improve the clamping stability of the electromagnetic induction member 31.

[0061] It should be noted that the fixing member 50 in this embodiment fixes the electromagnetic induction member 31 by means of clamping. In other embodiments, the fixing member 50 can also fix the electromagnetic induction member 31 in a detachable manner such as bolting or clamping.

[0062] In this embodiment, a plurality of fixing members 50 are provided, and the plurality of fixing members 50 are arranged at intervals along the distribution direction of the electromagnetic induction member 31. The plurality of fixing members 50 can fix the electromagnetic induction member 31 at the same time, improving the installation stability of the electromagnetic induction member 31.

[0063] Exemplarily, the electromagnetic induction member 31 is in an overall shape of a square frame with a hole in the middle. The electromagnetic induction member 31 forms a plurality of loops from the inside to the outside, and each loop has a plurality of line segments and a plurality of corner portions, and the corner portions are located between two adjacent line segments. Fixing members 50 are also provided at the middle of the line segments and both ends of the corner portions for fixing, so as to comprehensively fix a plurality of points on the electromagnetic induction member 31 and improve the installation stability.

[0064] As Figure 2 and Figure 4 shown, in this embodiment, the heating furnace further includes a heat insulation layer 60. The heat insulation layer 60 is arranged outside the inner cavity 20 and is distributed around the inner cavity 20. The heat insulation layer 60 is located between the outside of the inner cavity 20 and the electromagnetic induction member 31, reducing the heat transfer between the inner cavity 20 and the electromagnetic induction member 31, avoiding the electromagnetic induction member 31 from being overheated, and playing a protective role for the electromagnetic induction member 31. At the same time, most of the heat is retained in the inner cavity 20, improving the heating rate of the inner cavity 20 and the production efficiency. Exemplarily, the heat insulation layer 60 is a blanket structure made of heat insulation material. The heat insulation layer 60 covers and is fixed to the outside of the inner cavity 20, and a through hole for the fixing member 50 to pass through is left on the surface of the heat insulation layer 60.

[0065] In this embodiment, the heat insulation layer 60 is made of aluminum silicate. The heat insulation layer 60 not only plays a heat insulation role, but also plays an insulating role between the inner cavity 20 and the electromagnetic induction component 31 to prevent electrical conduction between the inner cavity 20 and the electromagnetic induction component 31. In other embodiments, the heat insulation layer 60 can also be made of mica, and a distance is left between the electromagnetic induction component 31 and the heat insulation layer 60, so that the heat insulation layer 60 and the electromagnetic induction component 31 are insulated.

[0066] Figure 5 This is a schematic structural diagram of the electromagnetic induction component and the inner cavity of the second embodiment of the present application, wherein the X-axis direction shown in the figure is the horizontal direction, and the Y-axis direction shown in the figure is the vertical direction. Figure 6 This is a schematic diagram of the state of the heating component of the second embodiment of the present application when heating a material.

[0067] like Figure 5 and Figure 6 As shown, in this embodiment, the cross-section of the outer cavity 10 perpendicular to its axis is circular, and the cross-section of the inner cavity 20 perpendicular to its axis is circular. The inner cavity 20 of this embodiment has higher mechanical hardness and pressure resistance, and stronger working stability.

[0068] In this embodiment, the electromagnetic induction components 31 are spaced apart in the circumferential direction of the inner cavity 20. Exemplarily, the multiple electromagnetic induction components 31 are divided into four groups, and the multiple groups of electromagnetic induction components 31 are spaced apart around the outer side of the inner cavity 20, and each group of electromagnetic induction components 31 is distributed at the upper left, lower left, upper right, and lower right relative to the inner cavity 20, and the electromagnetic induction components 31 are parallel to the outer side of the adjacent inner cavity 20 and there is a gap between them.

[0069] In this embodiment, the outer side of the inner cavity 20 is divided into a plurality of regions around its axis, and each region forms a heating position 22. Exemplarily, the number of the heating positions 22 is 4, and the four heating positions 22 are distributed at the upper left, lower left, upper right, and lower right relative to the inner cavity 20. Each heating position 22 is distributed with an electromagnetic induction member 31.

[0070] Figure 7 It is a cross-sectional schematic diagram of the fixing member, the electromagnetic induction member, the heat insulation layer and the inner cavity of the second embodiment of the present application.

[0071] like Figure 6 and Figure 7As shown, in this embodiment, the side wall of the electromagnetic induction component 31 is welded with a screw rod 3, and the screw rod 3 is provided with a locking nut 54. The fixing member 50 is bolted and fixed to the outside of the inner cavity 20, and the end of the fixing member 50 away from the inner cavity 20 is provided with a first through hole 55 for the electromagnetic induction component 31 to pass through and a second through hole 56 for the screw rod 3 to pass through. The electromagnetic induction component 31 is passed through the first through hole 55, and the screw rod 3 is passed through the second through hole 56 and is threadedly connected with the locking nut 54 to achieve the fixing of the electromagnetic induction component 31.

[0072] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present application and are not intended to limit it. Although the present application has been described in detail with reference to the preferred embodiments, a person of ordinary skill in the art should understand that the technical solution of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present application.

Claims

1. A heating furnace, characterized in that: include: An outer cavity, wherein the outer cavity is provided with a first vacuum port; An inner cavity is disposed in the outer cavity, and the inner cavity is provided with a second vacuum port; A heating component is disposed in the outer cavity and distributed around the outer side of the inner cavity; The heat-insulating layer is arranged on the inner side of the outer cavity and is distributed around the heating component and the inner cavity.

2. The heating furnace according to claim 1, characterized in that: The inner cavity is made of metal; the heating component includes a power module and an electromagnetic induction component, the power module is electrically connected to the electromagnetic induction component, the electromagnetic induction component is distributed around the outside of the inner cavity, and the electromagnetic induction component and the inner cavity are insulated.

3. The heating furnace according to claim 2, characterized in that: The heating furnace further comprises a heat insulating layer, and the heat insulating layer is arranged on the outer side of the inner cavity.

4. The heating furnace according to claim 2, characterized in that: The cross-sectional shape of the outer cavity perpendicular to the axial direction thereof is circular, and the cross-sectional shape of the inner cavity perpendicular to the axial direction thereof is circular or square.

5. The heating furnace according to claim 4, characterized in that: When the cross-section of the inner cavity perpendicular to the axial direction thereof is square, the electromagnetic induction components are arranged corresponding to the side walls of the inner cavity, and the electromagnetic induction components are spaced and distributed in parallel with the corresponding side walls of the inner cavity.

6. The heating furnace according to claim 2, characterized in that: The heating furnace further comprises a fixing member, which is arranged outside the inner cavity and is detachably connected to the electromagnetic induction member; One end of the fixing member is fixedly connected to the inner cavity, and the other end of the fixing member is provided with a clamping groove, and the electromagnetic induction member is clamped and fixed in the clamping groove.

7. The heating furnace according to claim 6, characterized in that: A plurality of the fixing members are provided, and the plurality of the fixing members are arranged at intervals along the distribution direction of the electromagnetic induction members.

8. The heating furnace according to claim 2, characterized in that: The inner cavity is provided with a plurality of heating positions around its circumference, and a plurality of electromagnetic induction components are provided, and the plurality of electromagnetic induction components correspond to the plurality of heating positions; the electromagnetic induction components are distributed at the corresponding heating positions and are used to heat the corresponding heating positions.

9. The heating furnace according to claim 2, characterized in that: The electromagnetic induction component is in a spiral shape.

10. The heating furnace according to claim 2, characterized in that: The inner cavity is provided with a plurality of heating zones along its length direction, and a plurality of electromagnetic induction components are provided, and the plurality of electromagnetic induction components correspond to the plurality of heating zones; the electromagnetic induction components are distributed in the corresponding heating zones and are used to heat the corresponding heating zones.

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