Iron ring white film expanding table

Abstract

The utility model relates to the technical field of wafer cracking, in particular to an iron ring white film expanding table. A pressing frame is detachably connected to a lifting table; a guide groove is formed in the top of the top cover; a lifting table is slidably connected into the guide groove. A lifting assembly used for driving the lifting table to slide in the guide groove in a lifting mode is arranged in the outer box body. The top cover is sleeved with the pressing frame. When the film expanding device is used, the film is tensioned by utilizing the lifting platform to lift after the edge of the expanded film is pressed, so that the tensile force can be synchronously applied to the white film in all directions, the quality of the expanded film is improved, the cleavage effect of a wafer is improved, and the tearing risk of the white film is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer scribing, in particular to an iron ring white film expanding table. Background Art

[0002] Before the wafer is cleaved, a layer of white film needs to be covered on the wafer surface. The tightness of the white film indirectly affects the cleavage effect of the wafer. If the film is not tight enough, it is easy to cause missed cracks or shallow cracks during the cleavage process, which affects the cleavage effect. During the film expansion process, the white film needs to be tightened manually, and then fixed on the iron ring, and the excess film material on the wafer is cut out according to the trajectory of the iron ring.

[0003] However, in this artificial film stretching structure, each time the tension applied by the human hand to the film material, it acts in two opposite directions, making it difficult to tighten the film material in multiple directions at the same time. Therefore, after tightening in a single direction, it is necessary to change the direction and then tighten in other directions, and the two tensioning films are not performed at the same time. This makes the film tension inconsistent in all directions. Not only does it affect the tension of the film material and the cleavage effect of the wafer, but it is also difficult to control the tension on the film during the artificial film stretching process, which can easily tear the film material. Utility Model Content

[0004] The utility model aims to provide an iron ring white film expanding platform in view of the defects and shortcomings of the prior art.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] The utility model discloses an iron ring white film expansion platform, which comprises a top cover, an outer box body, and a pressing frame; the pressing frame is detachably connected to the lifting platform;

[0007] A guide groove is arranged on the top of the top cover; a lifting platform is slidably connected inside the guide groove; a lifting assembly for driving the lifting platform to lift and slide in the guide groove is arranged inside the outer box body; and the pressure frame is sleeved on the outside of the top cover.

[0008] Furthermore, a positioning frame is arranged on the bottom surface of the pressing frame; an inner hole of the positioning frame matches with the top cover; and the positioning frame is embedded into the outside of the top cover.

[0009] Furthermore, a pressing frame handle is provided on the pressing frame.

[0010] Furthermore, the lifting assembly includes a screw nut fixed to the bottom of the lifting platform; the inner part of the outer box is rotatably connected with a screw; the screw is threadedly connected to the screw nut;

[0011] The screw rod is threadedly connected with the screw rod nut; and a rotating module for driving the screw rod to rotate is arranged on the lifting platform.

[0012] Furthermore, the rotating module includes a connecting sleeve rotatably connected to the inside of the outer box and a worm rotatably connected to the inside of the outer box; a turbine meshing with the worm is fixed on the connecting sleeve; and the screw is fixed inside the connecting sleeve.

[0013] Furthermore, a hand wheel is fixed to one end of the worm extending out of the outer box body.

[0014] After adopting the above structure, the beneficial effects of the utility model are as follows: the first step is to remove the pressing frame from the top cover before the white film covers the lifting platform; the second step is that the lifting assembly moves the top surface of the lifting platform to the same horizontal plane as the top surface of the top cover; the third step is to cover the white film on the plane formed by the lifting platform and the top cover; the fourth step is to reconnect the pressing frame to the top cover, and press and fix the edge of the white film by the frame of the pressing frame and the surface of the top cover; the fifth step is that the lifting assembly is actuated to drive the top cover to rise, and the surface of the lifting platform is used to push the white film upward and tighten it to expand the film, and then an iron ring is placed on the tightened film (the iron ring is used in pair with the round wafer). The edge of the film is cut out along the outer edge of the iron ring by cutting to complete the expansion of the white film, and finally the wafer and Bar strips are placed on the white film of the iron ring; in this structure, the film is tightened by pressing the edge of the expanded film and then lifting the lifting platform, which can simultaneously apply tension to all directions of the white film, thereby improving the quality of the expanded film, improving the cleavage effect of the wafer, and reducing the risk of tearing of the white film. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of the utility model;

[0016] Figure 2 This is a structural diagram of the utility model after the outer box body is disassembled;

[0017] Figure 3 This is the structural diagram of the screw rod and the lifting platform;

[0018] Figure 4 It is the structural diagram of the outer box;

[0019] Figure 5 It is the structural diagram of the top cover;

[0020] Description of reference numerals:

[0021] 1. Lifting platform; 2. Pressing frame; 201. Pressing frame handle; 202. Positioning frame; 3. Top cover;

[0022] 301, screw rod hole; 302, guide groove; 4, outer box body; 401, first cavity;

[0023] 402, second cavity; 5, hand wheel; 6, worm; 7, connecting sleeve; 8, turbine; 9, screw;

[0024] 10. Screw nut. DETAILED DESCRIPTION

[0025] The utility model is further described below in conjunction with the accompanying drawings.

[0026] like Figures 1 to 5 As shown, the utility model discloses an iron ring white film expansion platform, which comprises a top cover 3, an outer box body 4, and a pressing frame 2; the pressing frame 2 is detachably connected to the lifting platform 1;

[0027] The top of the top cover 3 is provided with a guide groove 302; the inside of the guide groove 302 is slidably connected with the lifting platform 1; the inside of the outer box body 4 is provided with a lifting assembly for driving the lifting platform 1 to lift and slide in the guide groove 302; the pressing frame 2 is sleeved on the outside of the top cover 3;

[0028] The lifting platform 1 can move up and down under the guidance of the top cover 3;

[0029] The first step is to remove the pressing frame 2 from the top cover 3 before the white film covers the lifting platform 1; the second step is for the lifting assembly to move the top surface of the lifting platform 1 to the same horizontal plane as the top surface of the top cover 3; the third step is to cover the white film on the plane formed by the lifting platform 1 and the top cover 3; the fourth step is to reconnect the pressing frame 2 to the top cover 3, and press and fix the edge of the white film by the frame of the pressing frame 2 and the surface of the top cover 3; the fifth step is for the lifting assembly to move, drive the top cover 3 to rise, and use the surface of the lifting platform 1 to push the white film upward and tighten it to expand the film, and then put an iron ring (the iron ring is used in combination with the round wafer) on the tightened film. The edge of the film is cut out along the outer edge of the iron ring by cutting to complete the expansion of the white film, and finally the wafer and the Bar strip are placed on the white film of the iron ring; in this structure, the film is tightened by pressing the edge of the expanded film and then lifting the lifting platform 1, so that tension can be applied to all directions of the white film simultaneously, thereby improving the quality of the expanded film, improving the cleavage effect of the wafer, and reducing the risk of tearing of the white film.

[0030] As a preferred embodiment of the present invention, a positioning frame 202 is provided on the bottom surface of the pressing frame 2; the inner hole of the positioning frame 202 matches the top cover 3; the positioning frame 202 is embedded in the outside of the top cover 3;

[0031] A lock buckle may be provided between the top cover 3 and the pressing frame 2. After the top cover 3 and the pressing frame 2 are connected, the top cover 3 and the pressing frame 2 are connected and fixed by the lock buckle. When the pressing frame 2 needs to be removed, the lock buckle is opened.

[0032] The positioning frame 202 is inserted into the top cover 3 to position the pressing frame 2 on the top cover 3, thereby preventing the pressing frame 2 from deviating on the top cover 3 and better pressing the edge of the white film.

[0033] As a preferred embodiment of the present invention, a pressing frame handle 201 is provided on the pressing frame 2 ; during the film expansion process, the pressing frame 2 is operated by manually holding the pressing frame handle 201 .

[0034] As a preferred embodiment of the present invention, the lifting assembly includes a screw nut 10 fixed to the bottom of the lifting platform 1; a screw 9 is rotatably connected to the inside of the outer box 4; the screw 9 is threadedly connected to the screw nut 10;

[0035] The screw rod 9 is threadedly connected with the screw nut 10; a rotating module for driving the screw rod 9 to rotate is provided on the lifting platform 1; a screw rod hole 301 for the screw rod 9 to pass through is provided on the top cover 3;

[0036] After the rotating module drives the screw 9 to rotate, it pushes the screw nut 10 and the lifting platform 1 to perform lifting motion.

[0037] As a preferred embodiment of the present invention, the rotating module comprises a connecting sleeve 7 rotatably connected to the inside of the outer box body 4 and a worm 6 rotatably connected to the inside of the outer box body 4; a turbine 8 meshing with the worm 6 is fixed on the connecting sleeve 7; and the screw 9 is fixed inside the connecting sleeve 7;

[0038] The connecting sleeve 7 is connected to the outer box body 4 through a bearing;

[0039] The outer box 4 is provided with a first cavity 401 and a second cavity 402; the second cavity 402 is used to install the worm 9; the first cavity 401 is used to install the turbine 8;

[0040] By rotating the worm 6, the turbine 8 and the connecting sleeve 7 can be driven to rotate, so that the screw 9 rotates. Due to the driving mode of the worm 6 and the turbine 8, the turbine 8 cannot drive the worm 6 to rotate in reverse, and the adjusted self-locking can be achieved, which is convenient for the self-locking positioning of the lifting platform 1 and the film cutting is convenient.

[0041] As a preferred embodiment of the present invention, a hand wheel 5 is fixed to one end of the worm 6 extending out of the outer box 4 .

[0042] The above description is only a preferred embodiment of the present utility model, so all equivalent changes or modifications made according to the structure, features and principles described in the scope of the present utility model patent application are included in the scope of the present utility model patent application.

Claims

1. An iron ring white film expansion station, characterized in that: It comprises a top cover (3), an outer box body (4), and a pressing frame (2); the pressing frame (2) is detachably connected to the lifting platform (1); The top of the top cover (3) is provided with a guide groove (302); the inside of the guide groove (302) is slidably connected to a lifting platform (1); the inside of the outer box body (4) is provided with a lifting component for driving the lifting platform (1) to lift and slide in the guide groove (302); and the pressing frame (2) is sleeved on the outside of the top cover (3).

2. The iron ring white film expansion platform according to claim 1, characterized in that: A positioning frame (202) is provided on the bottom surface of the pressing frame (2); an inner hole of the positioning frame (202) matches the top cover (3); and the positioning frame (202) is embedded in the outside of the top cover (3).

3. The iron ring white film expansion platform according to claim 1, characterized in that: The pressing frame (2) is provided with a pressing frame handle (201).

4. The iron ring white film expansion platform according to claim 1, characterized in that: The lifting assembly comprises a screw nut (10) fixed to the bottom of the lifting platform (1); a screw (9) is rotatably connected to the interior of the outer box (4); the screw (9) is threadedly connected to the screw nut (10); The screw rod (9) is threadably connected to the screw rod nut (10); and a rotating module for driving the screw rod (9) to rotate is provided on the lifting platform (1).

5. The iron ring white film expansion platform according to claim 4, characterized in that: The rotary module comprises a connecting sleeve (7) rotatably connected to the interior of the outer box (4) and a worm (6) rotatably connected to the interior of the outer box (4); a turbine (8) meshing with the worm (6) is fixed to the connecting sleeve (7); and the screw (9) is fixed to the interior of the connecting sleeve (7).

6. The iron ring white film expansion platform according to claim 5, characterized in that: A hand wheel (5) is fixed to one end of the worm (6) extending out of the outer box body (4).

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