Novel nitriding furnace waste gas treatment device

Abstract

The novel nitriding furnace waste gas treatment device comprises a nitriding furnace body, a mounting assembly and a cleaning assembly, the top of the nitriding furnace body communicates with a gas inlet pipe, the top of the gas inlet pipe communicates with a shell, and supporting frames are fixedly mounted at the tops and the bottoms of the two sides of an inner cavity of the shell correspondingly; a filter plate is movably mounted between the opposite sides of the two supporting frames, a limiting plate is fixedly mounted on the rear side of the filter plate, a mounting assembly is fixedly mounted on the rear side of the shell, two cleaning assemblies are fixedly mounted on the right side of the shell, and the top of the shell communicates with an air outlet pipe. The filter plate can be conveniently and rapidly mounted and dismounted through the mounting assembly, the maintenance work can be more convenient through rapid mounting and dismounting of the filter plate, when the filter plate needs to be replaced or maintained, an operator can rapidly operate, the downtime is shortened, the usability and the production efficiency of equipment are improved, and the filter plate is more convenient to use.

Description

Technical Field

[0001] The utility model relates to the technical field of nitriding furnaces, and in particular to a novel waste gas treatment device for nitriding furnaces. Background Art

[0002] A nitriding furnace is a device used for nitriding treatment, commonly used in semiconductor manufacturing and material processing industries. The nitriding furnace is mainly used to nitridate the surface of the material to improve its hardness, wear resistance and corrosion resistance. The nitriding furnace usually uses an ammonia or nitrogen atmosphere at a high temperature to cause a nitriding reaction on the surface of the material through heat treatment, thereby forming a nitride layer on the surface of the material. An exhaust gas treatment device is required during the use of the nitriding furnace.

[0003] The existing nitriding furnace exhaust gas treatment device also has the following problems: it is not convenient to quickly install and disassemble the filter plate, and the filter plate is easily damaged after long-term use. If the filter plate cannot be quickly installed and disassembled, it will become very difficult to maintain and replace it, which may increase the maintenance time and cost, and may cause the equipment to be down for too long, affecting production efficiency.

[0004] Therefore, we made improvements to this and proposed a new type of nitriding furnace exhaust gas treatment device. Utility Model Content

[0005] The purpose of this utility model is to: solve the problem that it is inconvenient to quickly install and disassemble the filter plate, and the filter plate is easily damaged after long-term use. If the filter plate cannot be quickly installed and disassembled, it will become very difficult to maintain and replace it, which may increase the time and cost of maintenance, and may cause the equipment to be down for too long, affecting production efficiency.

[0006] In order to achieve the above-mentioned purpose of the invention, the present invention provides the following technical solutions:

[0007] A new type of nitriding furnace exhaust gas treatment device is used to improve the above problems.

[0008] The specific application is as follows:

[0009] It includes a nitriding furnace body, a mounting assembly and a cleaning assembly. The top of the nitriding furnace body is connected to an air inlet pipe, the top of the air inlet pipe is connected to an outer shell, the top and bottom of both sides of the inner cavity of the outer shell are fixedly installed with support frames, a filter plate is movably installed between the opposite sides of the two support frames, the rear side of the filter plate is fixedly installed with a limit plate, the rear side of the outer shell is fixedly installed with a mounting assembly, the right side of the outer shell is fixedly installed with two cleaning assemblies, and the top of the outer shell is connected to an air outlet pipe.

[0010] The installation components facilitate quick installation and removal of the filter plate. Quick installation and removal of the filter plate can make maintenance more convenient. When the filter plate needs to be replaced or repaired, the operator can operate quickly, reducing downtime, improving equipment availability and production efficiency, and making it more convenient to use.

[0011] As a preferred embodiment of the new nitriding furnace exhaust gas treatment device provided by the utility model, the mounting assembly includes a protective shell, which is fixedly mounted on the rear side of the outer shell, and a first motor is fixedly mounted on the rear side of the protective shell, and a cam is fixedly mounted on the output end of the first motor, and inclined blocks are movably mounted on the top and bottom of the cam, and baffles are fixedly mounted on opposite sides of the two inclined blocks, and two plug rods are fixedly mounted on opposite sides of the two baffles, and springs are fixedly mounted on both sides of the opposite sides of the two baffles.

[0012] As a preferred embodiment of the novel nitriding furnace exhaust gas treatment device provided by the present invention, a stabilizing plate is provided on the surface of the first motor, and the stabilizing plate is fixedly connected to the protective shell on the side close to the protective shell.

[0013] As a preferred embodiment of the new nitriding furnace exhaust gas treatment device provided by the utility model, sliding blocks are fixedly installed on both sides of the baffle, a sliding rod is slidably installed in the inner cavity of the sliding block, and the top and bottom of the sliding rod are fixedly installed in the inner cavity of the protective shell.

[0014] As a preferred embodiment of the new nitriding furnace exhaust gas treatment device provided by the utility model, the cleaning component includes a second motor, which is fixedly mounted on the right side of the outer shell, and a bidirectional screw is fixedly mounted on the output end of the second motor, and both sides of the surface of the bidirectional screw are threadedly connected with a fixing block, and a connecting block is fixedly mounted on the top of the fixing block, and a cleaning plate is fixedly mounted on the top of the connecting block.

[0015] As a preferred embodiment of the novel nitriding furnace exhaust gas treatment device provided by the present invention, a positioning plate is sleeved on the surface of the second motor, and the positioning plate is fixedly connected to the outer shell on a side close to the outer shell.

[0016] As a preferred embodiment of the new nitriding furnace waste gas treatment device provided by the utility model, positioning blocks are fixedly installed on the front and rear sides of the fixed block, a positioning rod is slidably installed in the inner cavity of the positioning block, and both sides of the positioning rod are fixedly installed in the inner cavity of the shell.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows: the filter plate can be quickly installed and disassembled by installing the assembly, and the quick installation and disassembly of the filter plate can make maintenance work more convenient. When the filter plate needs to be replaced or repaired, the operator can operate quickly, reducing downtime, improving equipment availability and production efficiency, and being more convenient in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram of the structure of the novel nitriding furnace exhaust gas treatment device provided in this application;

[0019] Figure 2 This is a schematic diagram of the main cross-section of the structure of the novel nitriding furnace exhaust gas treatment device provided in this application;

[0020] Figure 3 This is a schematic rear cross-sectional view of the structure of the novel nitriding furnace exhaust gas treatment device provided in this application;

[0021] Figure 4 A schematic rear cross-sectional view of the installation assembly of the novel nitriding furnace exhaust gas treatment device provided in this application;

[0022] Figure 5 This is a schematic diagram of the main view of the cleaning components of the new nitriding furnace exhaust gas treatment device provided in this application.

[0023] Indicated in the figure:

[0024] 1. Nitriding furnace body; 2. Air inlet pipe; 3. Outer shell; 4. Support frame; 5. Filter plate; 6. Limit plate; 7. Mounting assembly; 701. Protective shell; 702. First motor; 703. Cam; 704. Bevel block; 705. Baffle; 706. Insert rod; 707. Spring; 708. Stabilizing plate; 709. Sliding block; 710. Sliding rod; 8. Cleaning assembly; 801. Second motor; 802. Bidirectional screw; 803. Fixed block; 804. Connecting block; 805. Cleaning plate; 806. Positioning plate; 807. Positioning block; 808. Positioning rod; 9. Air outlet pipe. DETAILED DESCRIPTION

[0025] To make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be described clearly and completely in conjunction with the accompanying drawings. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them.

[0026] Therefore, the following detailed description of the embodiments of the present invention is not intended to limit the scope of the claimed invention, but merely represents some embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0027] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features and technical solutions therein can be combined with each other.

[0028] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0029] In the description of this utility model, it should be noted that the terms "upper" and "lower" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or the orientations or positional relationships in which the inventive product is typically placed when in use, or the orientations or positional relationships commonly understood by those skilled in the art. Such terms are intended solely to facilitate the description of this utility model and simplify the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" and the like are used solely for distinction and description and should not be construed as indicating or implying relative importance.

[0030] As described in the background technology, it is not convenient to quickly install and disassemble the filter plate, and the filter plate is easily damaged after long-term use. If the filter plate cannot be quickly installed and disassembled, it will become very difficult to maintain and replace it, which may increase the maintenance time and cost, and may cause the equipment to be down for too long, affecting production efficiency.

[0031] In order to solve this technical problem, the utility model provides a novel nitriding furnace exhaust gas treatment device.

[0032] Specifically, please refer to Figure 1-5 The new nitriding furnace exhaust gas treatment device specifically includes: a nitriding furnace body 1, a mounting assembly 7 and a cleaning assembly 8. The top of the nitriding furnace body 1 is connected to an air inlet pipe 2, and the top of the air inlet pipe 2 is connected to an outer shell 3. Support frames 4 are fixedly installed on the top and bottom of both sides of the inner cavity of the outer shell 3. A filter plate 5 is movably installed between the opposite sides of the two support frames 4. A limiting plate 6 is fixedly installed on the rear side of the filter plate 5. A mounting assembly 7 is fixedly installed on the rear side of the outer shell 3. Two cleaning assemblies 8 are fixedly installed on the right side of the outer shell 3. The top of the outer shell 3 is connected to an air outlet pipe 9.

[0033] The installation assembly facilitates quick installation and removal of the filter plate. Quick installation and removal of the filter plate can make maintenance more convenient. When the filter plate needs to be replaced or repaired, the operator can operate quickly, reducing downtime and improving equipment availability and production efficiency.

[0034] In order to enable those skilled in the art to better understand the solution of the present invention, the technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings.

[0035] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features and technical solutions therein can be combined with each other.

[0036] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0037] Example 1

[0038] Please refer to Figure 1-5 A new type of nitriding furnace exhaust gas treatment device includes a nitriding furnace body 1, a mounting assembly 7 and a cleaning assembly 8. The top of the nitriding furnace body 1 is connected to an air inlet pipe 2, and the top of the air inlet pipe 2 is connected to an outer shell 3. Support frames 4 are fixedly installed on the top and bottom of both sides of the inner cavity of the outer shell 3. A filter plate 5 is movably installed between the opposite sides of the two support frames 4. A limit plate 6 is fixedly installed on the rear side of the filter plate 5. A mounting assembly 7 is fixedly installed on the rear side of the outer shell 3. Two cleaning assemblies 8 are fixedly installed on the right side of the outer shell 3. The top of the outer shell 3 is connected to an air outlet pipe 9. The mounting assembly 7 includes a protective shell 701, which is fixedly mounted on the rear side of the outer shell 3. A first motor 702 is fixedly mounted on the rear side of the protective shell 701. A cam 703 is fixedly mounted on the output end of the first motor 702. Inclined blocks 704 are movably mounted on the top and bottom of the cam 703. Baffles 705 are fixedly mounted on opposite sides of the two inclined blocks 704. Two plug rods 706 are fixedly mounted on opposite sides of the two baffles 705. Springs 707 are fixedly mounted on both sides of the opposite sides of the two baffles 705. A stabilizing plate 708 is sleeved on the surface of the first motor 702. The side of the stabilizing plate 708 close to the protective shell 701 is fixedly connected to the protective shell 701. Sliding blocks 709 are fixedly mounted on both sides of the baffle 705. A sliding rod 710 is slidably mounted on the inner cavity of the sliding block 709. The top and bottom of the sliding rod 710 are fixedly mounted on the inner cavity of the protective shell 701.

[0039] During the implementation process, by starting the first motor 702, the first motor 702 will drive the cam 703 to rotate when in use. When the cam 703 rotates, it will push the two baffles 705 to move through the two inclined blocks 704, and can also compress the spring 707. The plug rod 706 is installed on the baffle 705 and will move with the movement of the baffle 705, moving the plug rod 706 into the groove on the limit plate 6, thereby quickly installing the limit plate 6. When the limit plate 6 needs to be removed, the first motor 702 is started to disengage the plug rod 706 from the inside of the groove, thereby removing the limit plate 6. The filter plate 5 is installed on the limit plate 6 and will be installed and removed along with the limit plate 6. Quick installation and removal of the filter plate 5 can make maintenance work more convenient. When the filter plate 5 needs to be replaced or repaired, the operator can operate quickly, reduce downtime, and improve equipment availability and production efficiency.

[0040] Example 2

[0041] The cleaning assembly 8 includes a second motor 801, which is fixedly mounted on the right side of the housing 3. A bidirectional screw 802 is fixedly mounted on the output end of the second motor 801. A fixing block 803 is threadedly connected to both sides of the surface of the bidirectional screw 802. A connecting block 804 is fixedly mounted on the top of the fixing block 803, and a cleaning plate 805 is fixedly mounted on the top of the connecting block 804. A positioning plate 806 is sleeved on the surface of the second motor 801, and the side of the positioning plate 806 closest to the housing 3 is fixedly connected to the housing 3. Positioning blocks 807 are fixedly mounted on the front and rear sides of the fixing block 803. A positioning rod 808 is slidably mounted in the inner cavity of the positioning block 807. Both sides of the positioning rod 808 are fixedly mounted in the inner cavity of the housing 3.

[0042] During the implementation process, by starting the second motor 801, the second motor 801 will drive the bidirectional screw 802 to rotate when in use. When the bidirectional screw 802 rotates, it will drive the two fixed blocks 803 to move closer to or away from each other. When the fixed block 803 moves, it will drive the connecting block 804 to move. When the connecting block 804 moves, it will drive the cleaning plate 805 to move. The two cleaning plates 805 move back and forth on the surface of the filter plate 5, thereby cleaning the surface of the filter plate 5. Cleaning the filter plate 5 can remove particulate matter and dirt accumulated on the plate, thereby restoring the original performance of the filter plate 5, which helps to maintain the high-efficiency filtering capacity of the exhaust gas treatment device and ensure that harmful substances in the exhaust gas are effectively captured and removed.

[0043] During installation, the exhaust gas discharged from the nitriding furnace body 1 enters the interior of the shell 3 through the air inlet pipe 2, and the exhaust gas is filtered by the filter plate 5. The exhaust gas after filtering is discharged through the exhaust pipe 9, thereby processing the exhaust gas discharged from the nitriding furnace body 1. By starting the first motor 702, the first motor 702 will drive the cam 703 to rotate when in use. When the cam 703 rotates, it will push the two baffles 705 to move through the two inclined blocks 704, and can also compress the spring 707. The plug rod 706 is installed on the baffle 705 and will move with the movement of the baffle 705. Move the plug rod 706 to the groove on the limit plate 6, so that the limit plate 6 can be quickly installed. When the limit plate 6 needs to be disassembled, start the first motor 702, and disengage the plug rod 706 from the inside of the groove, so that the limit plate 6 can be disassembled. The filter plate 5 is installed on the limit plate 6 and will be installed and Disassembly, quick installation and disassembly of the filter plate 5 can make maintenance work more convenient. When the filter plate 5 needs to be replaced or repaired, the operator can operate quickly, reduce downtime, and improve equipment availability and production efficiency. By starting the second motor 801, the second motor 801 will drive the bidirectional screw 802 to rotate when in use. When the bidirectional screw 802 rotates, it will drive the two fixed blocks 803 to move closer to or away from each other. When the fixed block 803 moves, it will drive the connecting block 804 to move. When the connecting block 804 moves, it will drive the cleaning plate 805 to move. The two cleaning plates 805 move back and forth on the surface of the filter plate 5, thereby cleaning the surface of the filter plate 5. Cleaning the filter plate 5 can remove particulate matter and dirt accumulated on the plate, thereby restoring the original performance of the filter plate 5, which helps to maintain the high-efficiency filtering capacity of the exhaust gas treatment device and ensure that harmful substances in the exhaust gas are effectively captured and removed.

[0044] The above embodiments are only used to illustrate the present invention and are not intended to limit the technical solutions described in the present invention. Although this specification has described the present invention in detail with reference to the above embodiments, the present invention is not limited to the above specific implementation methods. Therefore, any modification or equivalent replacement of the present invention; and all technical solutions and improvements thereof that do not depart from the spirit and scope of the invention are included in the scope of the claims of the present invention.

Claims

1. A novel nitriding furnace waste gas treatment device, comprising a nitriding furnace body (1), a mounting assembly (7) and a cleaning assembly (8), characterized in that: The top of the nitriding furnace body (1) is connected to an air inlet pipe (2), the top of the air inlet pipe (2) is connected to an outer shell (3), support frames (4) are fixedly installed on the top and bottom of both sides of the inner cavity of the outer shell (3), a filter plate (5) is movably installed between the two opposite sides of the support frames (4), a limit plate (6) is fixedly installed on the rear side of the filter plate (5), a mounting assembly (7) is fixedly installed on the rear side of the outer shell (3), two cleaning assemblies (8) are fixedly installed on the right side of the outer shell (3), and the top of the outer shell (3) is connected to an air outlet pipe (9).

2. A novel nitriding furnace exhaust gas treatment device according to claim 1, characterized in that: The mounting assembly (7) comprises a protective shell (701), wherein the protective shell (701) is fixedly mounted on the rear side of the outer shell (3), a first motor (702) is fixedly mounted on the rear side of the protective shell (701), a cam (703) is fixedly mounted on the output end of the first motor (702), inclined blocks (704) are movably mounted on the top and bottom of the cam (703), baffles (705) are fixedly mounted on opposite sides of the two inclined blocks (704), two plug rods (706) are fixedly mounted on opposite sides of the two baffles (705), and springs (707) are fixedly mounted on both sides of the opposite sides of the two baffles (705).

3. A novel nitriding furnace exhaust gas treatment device according to claim 2, characterized in that: A stabilizing plate (708) is sleeved on the surface of the first motor (702), and a side of the stabilizing plate (708) close to the protective shell (701) is fixedly connected to the protective shell (701).

4. A novel nitriding furnace exhaust gas treatment device according to claim 2, characterized in that: Sliding blocks (709) are fixedly mounted on both sides of the baffle (705), a sliding rod (710) is slidably mounted in the inner cavity of the sliding block (709), and the top and bottom of the sliding rod (710) are fixedly mounted in the inner cavity of the protective shell (701).

5. A novel nitriding furnace exhaust gas treatment device according to claim 1, characterized in that: The cleaning assembly (8) comprises a second motor (801), the second motor (801) being fixedly mounted on the right side of the housing (3), a bidirectional screw rod (802) being fixedly mounted on the output end of the second motor (801), both sides of the surface of the bidirectional screw rod (802) being threadedly connected with a fixing block (803), a connecting block (804) being fixedly mounted on the top of the fixing block (803), and a cleaning plate (805) being fixedly mounted on the top of the connecting block (804).

6. A novel nitriding furnace exhaust gas treatment device according to claim 5, characterized in that: A positioning plate (806) is sleeved on the surface of the second motor (801), and the positioning plate (806) is fixedly connected to the outer shell (3) on a side close to the outer shell (3).

7. A novel nitriding furnace waste gas treatment device according to claim 5, characterized in that: A positioning block (807) is fixedly mounted on the front and rear sides of the fixed block (803), a positioning rod (808) is slidably mounted in the inner cavity of the positioning block (807), and both sides of the positioning rod (808) are fixedly mounted in the inner cavity of the shell (3).

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