Wafer box transmission system

Abstract

The utility model provides a wafer box transmission system. The wafer box transmission system comprises a manipulator, a control unit and a board card, a motor is arranged in the manipulator, and the manipulator is used for loading a wafer box; when the motor enters a working state, the motor is used for driving the manipulator and the wafer box to move together; the board card is fixed on the manipulator and comprises a power supply interface, a power interface, a control output interface and a control input interface which are jointly arranged on a substrate; the power supply interface is connected with a power supply; the power interface is electrically connected with a motor in the manipulator; the control input interface is electrically connected with the control unit; the control output interface is electrically connected with the motor; and the control unit is electrically connected with the upper computer and is used for receiving a control instruction and sending a motion instruction to the control input interface. The system is used for improving stability and avoiding movement limitation of the manipulator.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor manufacturing, in particular to a wafer box transmission system. Background Art

[0002] Wafer box transfer system is an automatic transfer system for wafer boxes in the semiconductor manufacturing process. Usually, a host computer is used to control the robot to move the wafer box to reduce the risk of contamination and improve production efficiency.

[0003] At present, in order to achieve accurate handling of wafer boxes by robots, the existing technology uses a large number of jumpers to provide power transmission and control signal transmission. After the robot has been running for a long time, the jumpers will become loose, causing the transmission system to fail. In addition, the arrangement of jumpers around the robot will affect the movable space of the robot, which is not conducive to the miniaturization of the wafer box transmission system. Therefore, a new type of wafer box transmission system is urgently needed to improve the above problems. Utility Model Content

[0004] The utility model aims to provide a wafer box transmission system, which is used to improve stability and avoid movement restriction of a robot.

[0005] The utility model provides a wafer box transmission system, including: a manipulator, a control unit and a board; a motor is arranged in the manipulator, and the manipulator is used for loading a wafer box; when the motor enters a working state, it is used to drive the manipulator and the wafer box to move together; the board is fixed on the manipulator, and the board includes a power supply interface, a power interface, a control output interface and a control input interface which are arranged together on a substrate; the power supply interface is connected to a power source; the power interface is electrically connected to the motor in the manipulator; the control input interface is electrically connected to the control unit; the control output interface is electrically connected to the motor; the control unit is electrically connected to a host computer, and is used to receive control instructions, and send motion instructions to the control input interface.

[0006] The beneficial effects of the utility model are as follows: the application realizes the transmission of power supply, power output and control signals on the same board through the power supply interface, power interface, control output interface and control input interface jointly arranged on the substrate; the power supply interface is connected to the power supply; the power interface is electrically connected to the motor in the manipulator; the control input interface is electrically connected to the control unit; the control output interface is electrically connected to the motor; and it is beneficial to improve the stability of the wafer box transmission system, facilitate the arrangement of electrical circuits, ensure that the movable space of the manipulator is not affected, and is beneficial to the miniaturization of the wafer box transmission system.

[0007] Optionally, it also includes a cavity, the manipulator is arranged in the cavity, and the cavity is provided with an opening and a door panel; one end of the door panel is connected to a solenoid valve; the solenoid valve is used to drive the door panel to rise and fall to expose or close the opening.

[0008] Optionally, it also includes a sealing ring; the sealing ring is fixed to the peripheral side of the opening, and the sealing ring abuts against the door panel; when the door panel closes the opening, the sealing ring and the door panel form an annular sealing surface.

[0009] Optionally, it also includes an angle valve and a vacuum pump; one end of the angle valve is connected to the cavity; the other end of the angle valve is connected to the vacuum pump; the vacuum pump is used to extract the gas in the cavity.

[0010] Optionally, a pressure gauge is further included; at least a portion of the pressure gauge is disposed in the cavity or connected to the cavity, and the pressure gauge is used to detect the air pressure in the cavity.

[0011] Optionally, the board also includes a detection input interface; the detection input interface is electrically connected to the pressure gauge.

[0012] Optionally, the board also includes a three-phase inverter, the input end of the three-phase inverter is electrically connected to a DC power supply via the power supply interface, and the output end of the three-phase inverter is electrically connected to the power interface.

[0013] Optionally, the control unit is configured as at least one of a speed controller, a current controller and a position controller.

[0014] Optionally, the robot is also connected to a wafer sensor for scanning a wafer box to detect the position of each wafer in the wafer box.

[0015] Optionally, the robot is also connected to an in-place sensor for detecting whether the robot is loaded with a wafer box. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram of the connection circuit structure between a board and a motor provided by the utility model;

[0017] Figure 2 This is a schematic diagram of the structure of a manipulator provided by the utility model and arranged in a cavity.

[0018] Numbers in the figure:

[0019] 100, board; 110, baseboard; 120, power supply interface; 130, power interface; 140, control output interface; 150, control input interface; 151, first network port; 152, second network port; 160, three-phase inverter; 170, detection input interface;

[0020] 200, connecting line group; 210, power connecting line; 220, data connecting line;

[0021] 300, motor; 310, coil; 320, encoder;

[0022] 400, manipulator;

[0023] 500, wafer sensor;

[0024] 610, angle valve; 620, pressure gauge; 630, vacuum pump;

[0025] 710, solenoid valve; 720, door panel; 730, sealing ring; 740, opening;

[0026] 810, wafer box; 820, cavity;

[0027] 910, control unit; 920, host computer. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0029] In view of the problems existing in the existing technology, such as Figure 1 and Figure 2As shown, the first embodiment provides a wafer box 810 transmission system, including: a robot 400, a control unit 910 and a board 100; a motor 300 is arranged in the robot 400, and the robot 400 is used to load the wafer box 810; when the motor 300 enters the working state, it is used to drive the robot 400 and the wafer box 810 to move together; the board 100 is fixed on the robot 400, and the board 100 includes a power supply interface 120, a power interface 130, a control output interface 140 and a control input interface 150 which are jointly arranged on a substrate 110; the power supply interface 120 is connected to a power source; the power interface 130 is electrically connected to the motor 300 in the robot 400; the control input interface 150 is electrically connected to the control unit 910; the control output interface 140 is electrically connected to the motor 300; the control unit 910 is electrically connected to the host computer 920, and is used to receive control instructions and send motion instructions to the control input interface 150.

[0030] In this embodiment, a power supply interface 120, a power interface 130, a control output interface 140 and a control input interface 150 are jointly arranged on a substrate 110; the power supply interface 120 is connected to a power source; the power interface 130 is electrically connected to a motor 300 in the robot 400; the control input interface 150 is electrically connected to the control unit 910; the control output interface 140 is electrically connected to the motor 300; and the power supply, power output and control signals are transmitted on the same board 100, which is beneficial to improving the stability of the wafer box 810 transmission system, facilitating the arrangement of electrical circuits, ensuring that the movable space of the robot 400 is not affected, and is beneficial to the miniaturization of the wafer box 810 transmission system.

[0031] Specifically, the board 100 can be configured as an integrated circuit board. The substrate 110 can be made of insulating materials, such as fiberglass or plastic, to provide good electrical isolation and mechanical support. The power supply interface 120 can be a standard power supply interface, such as a socket or a terminal block, so as to be connected to a power line. The power interface 130 can be designed as an interface connected to the motor 300 in the manipulator 400, for providing power to the motor 300. It can be the output port of the motor 300 driver or power amplifier to convert the control signal into a drive signal suitable for the motor 300. The control output interface 140 can be a digital signal interface, such as a parallel or serial communication interface, so as to transmit data with the control unit 910. The control input interface 150 can be a digital or analog signal input interface so as to communicate with the control unit 910 and receive instructions.

[0032] like Figure 1As shown, exemplarily, the power supply interface 120 is configured as a three-core connector, including a DC positive terminal DC+, a DC negative terminal DC-, and a DC ground terminal PE2.

[0033] In some other examples, the power interface 130 is configured as a four-core connector, including a first phase terminal U, a second phase terminal V, a third phase terminal W, and a power grounding terminal PE1.

[0034] In some other examples, the control output interface 140 includes a high-level signal terminal, a low-level signal terminal, a first data terminal D+, a second data terminal D-, a first clock terminal C+, a second clock terminal C-, and a signal ground terminal PE3. The high-level signal terminal can be connected to a 5V voltage, and the low-level signal terminal can be connected to a weak ground GND.

[0035] More specifically, the high level signal terminal and the low level signal terminal are connected to the first twisted pair, the first data terminal D+ and the second data terminal D- are connected to the second twisted pair, and the first clock terminal C+ and the second clock terminal C- are connected to the third twisted pair.

[0036] In some other examples, the board 100 is connected to the motor 300 via a connection line group 200. The connection line group 200 includes a power connection line 210 and a data connection line 220. The power interface 130 is electrically connected to the coil 310 in the motor 300 via the power connection line 210. The control output interface 140 is electrically connected to the line encoder 320 in the motor 300 via the data connection line 220.

[0037] In some other examples, the control input interface 150 includes a first network port 151 and a second network port 152. The first network port 151 is used to receive a signal output by the control unit 910, and the second network port 152 is used to send a signal to the control unit 910.

[0038] like Figure 2 As shown, in some embodiments, a cavity 820 is further included, the manipulator 400 is disposed in the cavity 820, and the cavity 820 is provided with an opening 740 and a door panel 720; one end of the door panel 720 is connected to a solenoid valve 710; the solenoid valve 710 is used to drive the door panel 720 to rise and fall to expose or close the opening 740.

[0039] Specifically, the fixed end of the solenoid valve 710 is fixedly connected to the cavity 820. The movable end of the solenoid valve 710 drives the door plate 720 to rise along the Z-axis direction to close the opening 740. In other specific embodiments, the movable end of the solenoid valve 710 drives the door plate 720 to descend in the opposite direction of the Z-axis to expose the opening 740. In some other specific embodiments, the robot 400 loads the wafer box 810 and moves the wafer box 810 out of the cavity 820 from the opening 740 along the R-axis direction. In some other specific embodiments, the robot 400 moves the wafer box 810 from the opening 740 into the cavity 820 along the opposite direction of the R-axis. In some other specific embodiments, the robot 400 drives the wafer box 810 to rise along the Z-axis direction, or the robot 400 descends in the opposite direction of the Z-axis, and the wafer box 810 descends together with the robot 400.

[0040] In some embodiments, a sealing ring 730 is further included; the sealing ring 730 is fixed to the peripheral side of the opening 740, and the sealing ring 730 abuts against the door plate 720; when the door plate 720 closes the opening 740, the sealing ring 730 and the door plate 720 form an annular sealing surface. Specifically, the sealing ring 730 is made of rubber, silicone, or any flexible material with elasticity.

[0041] In some embodiments, an angle valve 610 and a vacuum pump 630 are also included; one end of the angle valve 610 is connected to the cavity 820; the other end of the angle valve 610 is connected to the vacuum pump 630; the vacuum pump 630 is used to extract the gas in the cavity 820.

[0042] In some embodiments, a pressure gauge 620 is further included; at least a portion of the pressure gauge 620 is disposed in the cavity 820 or is connected to the cavity 820 , and the pressure gauge 620 is used to detect the air pressure in the cavity 820 .

[0043] In some embodiments, the board 100 further includes a detection input interface 170; the detection input interface 170 is electrically connected to the pressure gauge 620. Specifically, the detection input interface 170 is configured as a serial interface.

[0044] In some embodiments, the board 100 further includes a three-phase inverter 160 , an input end of the three-phase inverter 160 is electrically connected to a DC power source via the power supply interface 120 , and an output end of the three-phase inverter 160 is electrically connected to the power interface 130 .

[0045] Specifically, the input end of the three-phase inverter 160 is connected to the power supply interface 120, and the output end of the three-phase inverter 160 is connected to the power interface 130. The motor 300 is configured as a three-phase asynchronous servo motor 300, and the three-phase inverter 160 is used to convert direct current into three-phase alternating current for use by the coil 310 of the three-phase asynchronous servo motor 300.

[0046] In some embodiments, the control unit 910 is configured as at least one of a speed controller, a current controller, and a position controller.

[0047] In some embodiments, the robot 400 is further connected to a wafer sensor 500 for scanning the wafer box 810 to detect the position of each wafer in the wafer box 810 .

[0048] In some embodiments, the robot 400 is also connected to a position sensor for detecting whether the robot 400 is loaded with a wafer box 810 .

[0049] The second embodiment provides a wafer box transmission method, which is used in the system described in any one of the above embodiments, including: S0, initializing the power supply parameters of the board, inputting DC power to the power supply interface of the board, and the power interface of the board outputting three-phase power to the motor; S1, the control unit obtains the control instruction of the host computer and generates a motion instruction; S2, the control input interface of the board obtains the motion instruction and generates a driving result; S3, the motor obtains the driving result through the control output interface of the board, and drives the robot and the wafer box to move together.

[0050] In some embodiments, before executing S1, it also includes: S01, confirming whether the current robot has loaded a wafer box according to a detection signal of a wafer sensor, and generating a confirmation result; S02, obtaining the confirmation result, and when it is confirmed that the current robot has not loaded a wafer box, controlling the solenoid valve to drive the door panel to rise, and controlling the motor to drive the robot to extend out of the cavity; S03, when it is confirmed that the current robot has loaded a wafer box, controlling the motor to drive the robot and the wafer box to reset into the cavity together, and controlling the solenoid valve to drive the door panel to descend to seal the cavity; S04, controlling the angle valve to open, obtaining the pressure value of the pressure gauge, and when the pressure value reaches the threshold, confirming that the vacuum cavity is a vacuum environment.

[0051] In other embodiments, S1 also includes: generating at least one of a speed loop instruction, a current loop instruction and a position loop instruction according to the control instruction; the speed loop instruction is used to control the speed of the motor; the current loop instruction is used to control the current of the motor; and the position loop instruction is used to control the position of the motor.

[0052] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A wafer box transmission system, characterized in that: include: Manipulator, control unit and boards; A motor is provided in the manipulator, and the manipulator is used to load a wafer box; When the motor enters the working state, it is used to drive the robot and the wafer box to move together; The board is fixed on the manipulator, and the board includes a power supply interface, a power interface, a control output interface and a control input interface which are commonly arranged on a substrate; The power supply interface is connected to the power supply; the power interface is electrically connected to the motor in the manipulator; the control input interface is electrically connected to the control unit; and the control output interface is electrically connected to the motor; The control unit is electrically connected to the host computer and is used to receive control instructions and send motion instructions to the control input interface.

2. The system according to claim 1, characterized in that It also includes a cavity, the manipulator is arranged in the cavity, and the cavity is provided with an opening and a door panel; One end of the door panel is connected to a solenoid valve; The solenoid valve is used to drive the door panel to rise and fall so as to expose or close the opening.

3. The system according to claim 2, characterized in that Also includes a sealing ring; The sealing ring is fixed to the peripheral side of the opening, and the sealing ring abuts against the door panel; When the door panel closes the opening, the sealing ring and the door panel form an annular sealing surface.

4. The system according to claim 2 or 3, characterized in that: It also includes an angle valve and a vacuum pump; One end of the angle valve is connected to the cavity; the other end of the angle valve is connected to the vacuum pump; the vacuum pump is used to extract the gas in the cavity.

5. The system according to claim 2 or 3, characterized in that: It also includes a pressure gauge; at least a part of the pressure gauge is arranged in the cavity or connected to the cavity, and the pressure gauge is used to detect the air pressure in the cavity.

6. The system according to claim 5, characterized in that The board also includes a detection input interface; the detection input interface is electrically connected to the pressure gauge.

7. The system according to claim 1 or 2, characterized in that: The board also includes a three-phase inverter, the input end of the three-phase inverter is electrically connected to a DC power supply via the power supply interface, and the output end of the three-phase inverter is electrically connected to the power interface.

8. The system according to claim 1 or 2, characterized in that: The control unit is configured as at least one of a speed controller, a current controller and a position controller.

9. The system according to claim 1 or 2, characterized in that: The robot is also connected with a wafer sensor for scanning the wafer box to detect the position of each wafer in the wafer box.

10. The system according to claim 1 or 2, characterized in that: The robot is also connected with an in-position sensor for detecting whether the robot is loaded with a wafer box.

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