Hydraulic integrated circuit detection probe

Abstract

The utility model discloses a hydraulic integrated circuit detection probe, which comprises a needle cylinder, a linkage rod and a probe head, the linkage rod is arranged in the needle cylinder, the lower end of the linkage rod is connected with the probe head, a first magnetic assembly is arranged between the upper end of the needle cylinder and the linkage rod, and a second magnetic assembly is arranged between the lower end of the needle cylinder and the linkage rod; the same polarities of the magnets of the two magnetic assemblies are arranged oppositely; a hydraulic damper is arranged between the two magnetic assemblies; when the linkage rod is stressed to move downwards, the first magnetic assembly and the second magnetic assembly block the stroke of the linkage rod due to the principle that like poles of magnets repel each other, and force the linkage rod to reset and keep after the linkage rod loses external force, namely, the probe head returns to the original position. The two magnetic assemblies play a role similar to a metal mechanical spring in the telescopic process of the detection probe; the hydraulic damper is used for providing damping in the reverse direction in the movement process of the linkage rod, vibration of the probe head in the stretching and retracting process is reduced as much as possible, the stretching and retracting stroke of the probe head is made to be smooth and linear, the paragraph feeling is reduced, and the stability of the probe head is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of circuit detection, in particular to a hydraulic integrated circuit detection probe. Background Art

[0002] The main application areas of semiconductor / IC test probes include chip design verification, wafer testing, and semiconductor finished product testing. It plays a core role in connecting chips / wafers with test equipment and transmitting signals, which is of great significance for the quality control of semiconductor products.

[0003] The probe is generally formed by riveting and pre-pressing with precision instruments, and consists of four basic components: a needle head, a needle tail, a spring, and an outer tube.

[0004] During the wafer or chip testing process, probes are usually used to accurately connect the pins or solder balls of the wafer or chip to the tester in order to detect performance indicators such as conductivity, current, functionality and aging of the product.

[0005] Currently, most mainstream probes use springs as the key component for the extension and retraction of the needle tip. Due to high-frequency and long-term use in detection work, the springs are prone to aging and deformation. Utility Model Content

[0006] In view of the above-mentioned deficiencies of the current integrated circuit test probe, the utility model provides a hydraulic integrated circuit detection probe, which can achieve the effect of extending the service life.

[0007] In order to achieve the above object, the embodiment of the utility model adopts the following technical solution:

[0008] A hydraulic integrated circuit detection probe comprises a syringe, a linkage rod and a probe head, wherein the linkage rod is arranged in the syringe, and its lower end is connected to the probe head, a first magnetic component is arranged between the upper end of the syringe and the linkage rod, and a second magnetic component is arranged between the lower end of the syringe and the linkage rod; the first magnetic component comprises a first magnet and a second magnet from top to bottom; the second magnetic component comprises a third magnet and a fourth magnet from top to bottom; the first magnet and the third magnet are fixedly connected to the linkage rod; the second magnet and the fourth magnet are fixedly connected to the inner wall of the syringe; the first magnet and the second magnet are arranged opposite to each other with the same polarity, and the third magnet and the fourth magnet are arranged opposite to each other with the same polarity; a hydraulic damper is arranged between the first magnet and the third magnet.

[0009] According to one aspect of the utility model, the hydraulic damper includes a sleeve and a hydraulic pipe group; the sleeve is sleeved on the outer wall of the hydraulic pipe group; the sleeve is connected to the second magnet, and the hydraulic pipe group is connected to the third magnet.

[0010] According to one aspect of the utility model, the hydraulic pipe group includes an outer hydraulic pipe and an inner hydraulic pipe; the sleeve is sleeved on the outer wall of the outer hydraulic pipe; the inner hydraulic pipe is sleeved in the outer hydraulic pipe; an inner piston is arranged in the inner hydraulic pipe; the inner piston is fixedly connected to the sleeve through a connecting rod; an outer piston is arranged at the lower end of the inner hydraulic pipe.

[0011] According to one aspect of the utility model, hydraulic oil is arranged in the outer hydraulic pipe and the inner hydraulic pipe.

[0012] According to one aspect of the utility model, the inner hydraulic pipe is provided with a channel for hydraulic oil to pass through.

[0013] According to one aspect of the utility model, a connecting head is provided at the upper end of the linkage rod.

[0014] According to one aspect of the utility model, a pointed sleeve is provided at the lower end of the syringe.

[0015] Advantages of the utility model:

[0016] Two groups of mutually repelling magnets are used instead of springs, and the principle of like-charged magnets repel each other is used to provide power for resetting the probe. Compared with traditional metal springs, the structure is simpler, metal fatigue is avoided, the service life is longer, and the frequency of repair and replacement of probes is reduced. A hydraulic damper is arranged between the two groups of magnetic components to reduce the vibration of the probe head, make its telescopic stroke smooth and linear, reduce the sense of segmentation, and increase the stability of the probe head. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 This is a schematic diagram of the structure of a hydraulic integrated circuit detection probe described in the utility model;

[0019] Figure 2 It is a cross-sectional schematic diagram of a hydraulic integrated circuit detection probe according to the utility model;

[0020] Figure 3 It is a structural schematic diagram of the hydraulic damper of the utility model.

[0021] Legend: 1. Syringe; 11. Tip sleeve; 2. Linking rod; 21. Connecting head; 3. Probe head; 4. First magnetic assembly; 41. First magnet; 42. Second magnet; 5. Second magnetic assembly; 51. Third magnet; 52. Fourth magnet; 6. Hydraulic damper; 61. Sleeve; 611. Inner piston; 612. Connecting rod; 62. Outer hydraulic pipe; 63. Inner hydraulic pipe; 631. Outer piston. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] like Figure 1 , Figure 2 and Figure 3 As shown, a hydraulic integrated circuit detection probe comprises a syringe 1, a linkage rod 2 and a probe head 3, wherein the linkage rod 2 is arranged in the syringe 1, and its lower end is connected to the probe head 3, a first magnetic component 4 is arranged between the upper end of the syringe 1 and the linkage rod 2, and a second magnetic component 5 is arranged between the lower end of the syringe 1 and the linkage rod 2; the first magnetic component 4 comprises a first magnet 41 and a second magnet 42 from top to bottom; the second magnetic component 5 comprises a third magnet 51 and a fourth magnet 52 from top to bottom; the first magnet 41 and the third magnet 51 are fixedly connected to the linkage rod 2; the second magnet 42 and the fourth magnet 52 are fixedly connected to the inner wall of the syringe 1; the first magnet 41 and the second magnet 42 are arranged opposite to each other with the same polarity, and the third magnet 51 and the fourth magnet 52 are arranged opposite to each other with the same polarity; a hydraulic damper 6 is arranged between the first magnet 41 and the third magnet 51;

[0024] When the linkage rod 2 is forced to move downward, the first magnetic component 4 and the second magnetic component 5 will hinder the travel of the linkage rod 2 due to the principle of like-charged magnets repelling each other, and will force the linkage rod 2 to reset and maintain after the linkage rod 2 loses external force, that is, to return the probe head 3 to its original position. The two magnetic components play a role similar to that of a metal mechanical spring in the extension and retraction process of the detection probe; and the role of the hydraulic damper 6 is to provide damping in the opposite direction during the movement of the linkage rod 2, to minimize the vibration of the probe head 3 during the extension and retraction process, to make the extension and retraction stroke smooth and linear, to reduce the sense of segmentation, and to increase the stability of the probe head 3.

[0025] The hydraulic damper 6 is composed of a sleeve 61 and a hydraulic pipe group; the sleeve 61 is sleeved on the outer wall of the hydraulic pipe group; the sleeve 61 is connected to the second magnet 42, and the hydraulic pipe group is connected to the third magnet 51;

[0026] The following is a structure of a hydraulic pipe group: the hydraulic pipe group includes an outer hydraulic pipe 62 and an inner hydraulic pipe 63; the sleeve 61 is sleeved on the outer wall of the outer hydraulic pipe 62; the inner hydraulic pipe 63 is sleeved in the outer hydraulic pipe 62; an inner piston 611 is provided in the inner hydraulic pipe 63; the inner piston 611 is fixedly connected to the sleeve 61 through a connecting rod 612; an outer piston 631 is provided at the lower end of the inner hydraulic pipe 63.

[0027] Hydraulic oil is arranged in the outer hydraulic pipe 62 and the inner hydraulic pipe 63; a channel for the hydraulic oil to pass through is arranged on the inner hydraulic pipe 63; when the hydraulic damper 6 is squeezed by external force, the inner piston 611 connected to the sleeve 61 will squeeze the inner hydraulic pipe 63, so that the hydraulic oil in the inner hydraulic pipe 63 is pumped into the outer hydraulic pipe 62, and the increase of hydraulic oil in the outer hydraulic pipe 62 will in turn squeeze the outer piston 631 behind the inner hydraulic pipe 63, thereby hindering the compression of the hydraulic damper 6. Conversely, when the damper is stretched by external force, it can also hinder the stretching of the damper. Since the flow of hydraulic oil between the inner and outer layers of hydraulic pipes can play an effective buffering role, it can also play an effect of reducing the vibration of the probe head 3.

[0028] A connector 21 is disposed at the upper end of the linkage rod 2, on which grooves and protrusions are disposed for facilitating the combination of the probe and the driving unit.

[0029] A tip cover 11 is provided at the lower end of the syringe 1 for protecting the probe head 3 in an unactivated state. The tip cover 11 is fixedly connected to the syringe 1 by a thread for easy replacement and maintenance.

[0030] Advantages of the utility model:

[0031] Two groups of mutually repelling magnets are used instead of springs, and the principle of like-charged magnets repel each other is used to provide power for resetting the probe. Compared with traditional metal springs, the structure is simpler, metal fatigue is avoided, the service life is longer, and the frequency of repair and replacement of probes is reduced. A hydraulic damper is arranged between the two groups of magnetic components to reduce the vibration of the probe head, make its telescopic stroke smooth and linear, reduce the sense of segmentation, and increase the stability of the probe head.

[0032] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any changes or substitutions that can be easily thought of by any technician familiar with the technical field within the technical scope disclosed in the utility model should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model shall be based on the protection scope of the claims.

Claims

1. A hydraulic integrated circuit detection probe, comprising a syringe (1), a linkage rod (2) and a probe head (3), wherein the linkage rod (2) is arranged in the syringe (1) and its lower end is connected to the probe head (3), characterized in that: A first magnetic assembly (4) is arranged between the upper end of the syringe (1) and the linkage rod (2), and a second magnetic assembly (5) is arranged between the lower end of the syringe (1) and the linkage rod (2); the first magnetic assembly (4) comprises a first magnet (41) and a second magnet (42) from top to bottom; the second magnetic assembly (5) comprises a third magnet (51) and a fourth magnet (52) from top to bottom; the first magnet (41) and the third magnet (51) are fixedly connected to the linkage rod (2); the second magnet (42) and the fourth magnet (52) are fixedly connected to the inner wall of the syringe (1); the first magnet (41) and the second magnet (42) are arranged opposite to each other with the same polarity, and the third magnet (51) and the fourth magnet (52) are arranged opposite to each other with the same polarity; and a hydraulic damper (6) is arranged between the first magnet (41) and the third magnet (51).

2. The hydraulic integrated circuit detection probe according to claim 1, characterized in that: The hydraulic damper (6) comprises a sleeve (61) and a hydraulic pipe group; the sleeve (61) is sleeved on the outer wall of the hydraulic pipe group; the sleeve (61) is connected to the second magnet (42), and the hydraulic pipe group is connected to the third magnet (51).

3. The hydraulic integrated circuit detection probe according to claim 2, characterized in that: The hydraulic pipe group comprises an outer hydraulic pipe (62) and an inner hydraulic pipe (63); the sleeve (61) is sleeved on the outer wall of the outer hydraulic pipe (62); the inner hydraulic pipe (63) is sleeved in the outer hydraulic pipe (62); an inner piston (611) is arranged in the inner hydraulic pipe (63); the inner piston (611) is fixedly connected to the sleeve (61) via a connecting rod (612); and an outer piston (631) is arranged at the lower end of the inner hydraulic pipe (63).

4. The hydraulic integrated circuit detection probe according to claim 3, characterized in that: Hydraulic oil is provided in the outer hydraulic pipe (62) and the inner hydraulic pipe (63).

5. The hydraulic integrated circuit detection probe according to claim 4, characterized in that: The inner hydraulic pipe (63) is provided with a channel for hydraulic oil to pass through.

6. The hydraulic integrated circuit detection probe according to claim 1, characterized in that: The upper end of the linkage rod (2) is provided with a connecting head (21).

7. The hydraulic integrated circuit detection probe according to claim 1, characterized in that: The lower end of the syringe (1) is provided with a pointed sleeve (11).

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