Precise perfluoroether product for semiconductor equipment and cutting processing device

Abstract

The utility model belongs to the technical field of processing of perfluoroether products, and particularly relates to a precise perfluoroether product for semiconductor equipment and a cutting processing device, the perfluoroether product comprises the following components: a product shell and a positioning hole, and the upper end of the product shell is provided with an arc angle; a guide structure is arranged at the bottom end of the product shell, and the guide structure is in an inverted cone shape; through cooperation of a first rotating rod, a second rotating rod and a third rotating rod, a first motor is started, the first motor drives the first rotating rod to rotate, the first rotating rod drives a first limiting block to rotate, the first limiting block drives a rotating frame to rotate, the rotating frame drives a second limiting block to rotate, and the second limiting block drives a second rotating rod to swing in a reciprocating mode; a second rotating rod drives a third limiting block to swing in a reciprocating manner, and a sliding block is limited by a sliding opening, so that the sliding block moves in a reciprocating manner, the sliding block slides to drive a material receiving rod to move, the material receiving rod moves in a reciprocating manner, and the material receiving rod is inserted into a positioning hole to drive a cutting equipment main body to cut a perfluoroether body.

Description

Technical Field

[0001] The utility model belongs to the technical field of perfluoroether product processing, in particular to a precision perfluoroether product for semiconductor equipment and a cutting processing device. Background Art

[0002] Perfluoroether rubber refers to a ternary copolymer of perfluoroether, tetrafluoroethylene and perfluoroolefin ether, also known as perfluororubber. It has the elasticity and thermal and chemical stability of polytetrafluoroethylene, and still has a certain plasticity below the brittle temperature. It is hard but not brittle and can be bent. The installation of perfluoroether products on semiconductor equipment is time-consuming and labor-intensive, extremely inconvenient, and easily causes product breakage. Because its rubber type is perfluoroether, it is expensive and the waste cost is very high. Therefore, it is imperative to design a new structural product that is easy to install and not easy to break. The processing of perfluoroether products adopts cutting processing equipment.

[0003] At present, the cutting processing device of perfluoroether products in the prior art has structures such as a workbench, a cutting equipment body, a clamping component, a driving structure, a blanking trough, and a mounting plate. The perfluoroether product material is fixed on the mounting plate by the clamping component. A driving structure is provided on one side of the mounting plate. The cutting equipment body is installed on the top of the workbench. A blanking trough is provided on the top of the workbench. The mounting plate is fixedly connected to the top of the workbench. When working, the driving mechanism is driven to drive the clamping component to rotate. The cutting equipment body is controlled by computer program settings. The cutting equipment body can move according to the set numerical values ​​to perform cutting processing. The perfluoroether product after cutting falls into the blanking trough.

[0004] At present, the cutting device will generate waste during the cutting process. Smaller debris is easy to fly with the rotation of the clamping component, and larger waste will be entangled on the main body of the cutting equipment. The debris and the perfluoroether product fall into the blanking chute at the same time, resulting in debris adhering to the surface of the perfluoroether product, requiring additional labor to clean the perfluoroether product, increasing the work intensity, and the debris is easy to scratch the surface of the perfluoroether product. Therefore, it is not convenient to collect the debris and the perfluoroether product separately. Therefore, a valve seal processing cutting device is proposed to solve the above problems.

[0005] To this end, the utility model provides a precision perfluoroether product and a cutting device for semiconductor equipment. Utility Model Content

[0006] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0007] The technical solution adopted by the utility model to solve the technical problem is: the utility model discloses a precision perfluoroether product for semiconductor equipment, and the perfluoroether product includes the following components:

[0008] The product shell and the positioning hole, the upper end of the product shell is set as an arc angle; the bottom end of the product shell is set as a guide structure, the guide structure is set as an inverted cone, the guide structure is convenient for installation on the semiconductor device through the positioning hole, the positioning hole is used for positioning the perfluoroether product, and the product shell is made of perfluoroether material.

[0009] Preferably, the surface of the product shell is coated with a film, the film is used to reduce the friction coefficient of the product shell, and the film is made of PTFE.

[0010] A precision perfluoroether product cutting and processing device for semiconductor equipment, preferably comprising:

[0011] Workbench;

[0012] A mounting frame fixed to the top of the workbench;

[0013] A cutting device body mounted on a mounting frame via an electric guide rail;

[0014] A perfluoroether body disposed below the cutting device body;

[0015] A material receiving unit is arranged on one side of the perfluoroether body, and the material receiving unit is used to collect the perfluoroether product after cutting;

[0016] The material receiving unit includes a limit frame fixedly connected to one end of the workbench away from the mounting frame, and a slider is slidably connected to the limit frame; a sliding opening is opened on the limit frame, and the slider slides in the sliding opening; a side wall of the slider close to the perfluoroether body is fixedly connected to a material receiving rod, and the material receiving rod is inclined. When receiving materials, the material receiving rod is inserted into the positioning hole of the perfluoroether body; a reciprocating swinging mechanism is provided under the slider.

[0017] Preferably, the reciprocating swing mechanism includes a fixed frame fixedly connected to the inner wall of the limit frame, the inner wall of the fixed frame is rotatably connected to the rotating frame via a bearing; the rotating frame is provided with a first limit opening, a first limit block is slidably connected in the first limit opening, and one end of the first limit block is fixedly connected to the first rotating rod; a connecting plate is fixedly connected to the inner side wall of the limit frame, and the top end of the connecting plate is fixedly connected to the first motor; the output shaft of the first motor is rotatably connected to the connecting plate via a bearing, and the output shaft of the first motor is fixedly connected to one end of the first rotating rod away from the first limit block; the rotating frame is fixedly connected to a second limit block, the second limit block is used for the linkage between the rotating frame and the slider, and the second limit block is provided with a linkage component.

[0018] Preferably, the linkage assembly includes a fixed plate fixedly connected to the inner wall of the limit frame, and the fixed plate is rotatably connected to a second rotating rod via a pin shaft; a second limit opening is provided on the second rotating rod; the second limit block slides in the second limit opening; a third limit block is fixedly connected to one end of the second rotating rod; a third limit opening is provided on the sliding block; and the third limit block slides in the third limit opening.

[0019] Preferably, a mounting plate is fixedly connected to the top of the workbench, a driving motor is provided on a side wall of the mounting plate, an output shaft of the driving motor is fixedly connected to a clamping disk, and the perfluoroether body is provided on the clamping disk.

[0020] Preferably, two side panels are fixedly connected to the top of the workbench; a second motor is fixedly connected to one of the side panels, and the output shaft of the second motor is rotatably connected to the side panel via a bearing; a screw rod is fixedly connected to the output shaft of the second motor; both ends of the screw rod are rotatably connected to the side panels via bearings, a moving block is threadedly connected to the screw rod, and a scraper is fixedly connected to the bottom of the moving block; slide rails are provided at the bottom of the side panels, and the slide rails are arranged on the workbench.

[0021] Preferably, a filter plate is hollowed out and fixed on the workbench; the scraper is in contact with the surface of the filter plate; a material collection box is fixedly connected to the bottom of the workbench, and the material collection box is adapted to the filter plate.

[0022] Preferably, a waste trough is provided on the top of the moving block; a through hole is opened on the waste trough; a rotating block is rotatably connected to the top of the moving block via a rotating shaft, and the rotating block is adapted to the through hole; the rotating block is used to fix the waste trough.

[0023] Preferably, two guide rods are slidably connected to the moving block, and both ends of the guide rods are fixed to the side plates.

[0024] The beneficial effects of the utility model are as follows:

[0025] 1. The utility model discloses a precision perfluoroether product and a cutting processing device for semiconductor equipment. Through the cooperation of the first rotating rod, the second rotating rod and the third rotating rod, the first motor is turned on. The first motor drives the first rotating rod to rotate through the output shaft. The first rotating rod drives the first limit block to rotate. When the first limit block rotates, the first limit block presses the first limit opening. When the first limit opening rotates, the rotating frame rotates. When the rotating frame rotates, the second limit block is driven to rotate. During the rotation of the second limit block, the second limit block slides in the second limit opening. The second limit block drives the second rotating rod to rotate through the second limit opening. Since one end of the second rotating rod is affected by the pin shaft, the second rotating rod swings back and forth around the pin shaft. During the swinging process of the second rotating rod, the The second rotating rod drives the third limit block to swing back and forth, and the third limit block slides in the third limit opening. The third limit block presses the third limit opening, and the third limit opening presses the slider, and the slider is limited by the sliding opening. Therefore, the third limit block drives the slider to move back and forth during the reciprocating swing, and the sliding of the slider drives the material receiving rod to move. The material receiving rod reciprocates, and the material receiving rod is inserted into the positioning hole to drive the cutting equipment body. The cutting equipment body cuts the perfluoroether body. After cutting is completed, the cut part falls on the material receiving rod. Since the material receiving rod is inclined, the cut perfluoroether body falls on the bottom end of the material receiving rod. After collection is completed, driven by the slider, the slider drives the material receiving rod away from the clamping disk, so as to facilitate the removal of the cut perfluoroether body.

[0026] 2. The utility model describes a precision perfluoroether product and cutting processing device for semiconductor equipment. By setting a collection box and a waste trough, the second motor is turned on. The second motor drives the screw to rotate through the output shaft. A nut seat is provided at the connection between the screw and the moving block. The moving block is limited in the horizontal direction through the nut seat, so the screw drives the moving block to reciprocate, and the moving block drives the scraper to reciprocate. The scraper pushes the debris and drops it into the collection box through the filter plate to collect the debris. During the cutting process, larger debris falls, and the waste trough is used to collect the larger debris.

[0027] 2. The utility model describes a precision perfluoroether product and cutting processing device for semiconductor equipment. By setting a guide structure, the upper end of the product shell is set as an arc angle, and the bottom end of the product shell is set as a guide structure, wherein the angle and height of the guide structure are particularly critical during processing; through the design of the guide structure, the product can be automatically installed. During installation, the product shell can be easily fixed on the installation platform by pressing on the top, so as to achieve the purpose of convenient installation and product protection; the surface of the product shell is coated with a film, and the film is used to reduce the friction coefficient of the product shell; the product shell is made of perfluoroether material, and the perfluoroether material makes the product resistant to high temperature and corrosion, and the product has a longer service life. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] The utility model will be further described below in conjunction with the accompanying drawings.

[0029] Figure 1 It is a three-dimensional diagram of the utility model;

[0030] Figure 2 It is a structural schematic diagram of the front view of the limiting frame in the utility model;

[0031] Figure 3 It is a structural schematic diagram of the rear view of the limiting frame in the utility model;

[0032] Figure 4 It is a structural schematic diagram of the slider in the utility model;

[0033] Figure 5 It is a structural schematic diagram of the perfluoroether body and the cutting device body in the utility model;

[0034] Figure 6 It is a structural schematic diagram of the screw rod and the guide rod in the utility model;

[0035] Figure 7 It is a structural schematic diagram of the waste tank in the utility model;

[0036] Figure 8 It is a schematic diagram of the structure of the perfluoroether product in the utility model;

[0037] In the figure: 1. workbench; 2. mounting frame; 3. cutting equipment body; 4. mounting plate; 5. clamping plate; 6. perfluoroether body; 7. limiting frame; 8. collecting rod; 9. fixed frame; 10. rotating frame; 11. first limiting opening; 12. first rotating rod; 13. first limiting block; 14. fixed plate; 15. second rotating rod; 16. second limiting opening; 17. second limiting block; 18. sliding block; 19. third limiting opening; 20. sliding opening; 21. third limiting block; 22. first motor; 23. connecting plate; 24. filter plate; 25. collecting box; 26. side plate; 27. second motor; 28. waste trough; 29. ​​guide rod; 30. screw rod; 31. scraper; 32. moving block; 33. through hole; 34. rotating block. DETAILED DESCRIPTION

[0038] In order to make the technical means, creative features, objectives and effects achieved by the present invention easy to understand, the present invention is further described below in conjunction with specific implementation methods.

[0039] Embodiment 1:

[0040] like Figure 8 As shown, a precision perfluoroether product for semiconductor equipment according to an embodiment of the utility model comprises the following components:

[0041] The product shell and the positioning hole, the upper end of the product shell is set as an arc angle; the bottom end of the product shell is set as a guide structure, the guide structure is set as an inverted cone, the guide structure is convenient for installation on the semiconductor device through the positioning hole, the positioning hole is used for positioning the perfluoroether product, and the product shell is made of perfluoroether material.

[0042] The surface of the product shell is coated with a film, and the film is used to reduce the friction coefficient of the product shell. The film is made of PTFE.

[0043] When the guide structure provided by the utility model is in use, the upper end of the product shell is set to a circular arc angle, and the bottom end of the product shell is set to a guide structure, wherein the angle and height of the guide structure are particularly critical during processing; through the design of the guide structure, the product can be automatically installed, and during installation, the product shell can be easily fixed on the installation platform by pressing the top, so as to achieve the purpose of convenient installation and product non-breakage; the surface of the product shell is coated with a film, and the film is used to reduce the friction coefficient of the product shell; the product shell is made of perfluoroether material, and the perfluoroether material makes the product resistant to high temperature and corrosion, and the product has a longer service life.

[0044] A precision perfluoroether product cutting and processing device for semiconductor equipment, such as Figures 1 to 8 As shown, including:

[0045] Workbench 1;

[0046] A mounting frame 2 fixedly connected to the top of the workbench 1;

[0047] A cutting device body 3 mounted on a mounting frame 2 via an electric guide rail;

[0048] A perfluoroether body 6 disposed below the cutting device body 3;

[0049] A material receiving unit provided on one side of the perfluoroether body 6, the material receiving unit is used to collect the perfluoroether product after cutting;

[0050] The material receiving unit includes a limit frame 7 fixedly connected to one end of the workbench 1 away from the mounting frame 2, and a slider 18 is slidably connected to the limit frame 7; a sliding opening 20 is opened on the limit frame 7, and the slider 18 slides in the sliding opening 20; a side wall of the slider 18 close to the perfluoroether body 6 is fixedly connected to a material receiving rod 8, and the material receiving rod 8 is arranged at an angle, and the material receiving rod 8 is inserted into the positioning hole of the perfluoroether body 6 when receiving materials; a reciprocating swinging mechanism is provided below the slider 18.

[0051] When the material receiving unit provided by the utility model is in use, the material receiving rod 8 is first aligned with the positioning hole of the perfluoroether body 6, and the reciprocating swing mechanism is driven, and the reciprocating swing mechanism drives the slider 18 to slide in the sliding mouth 20, and the sliding of the slider 18 drives the material receiving rod 8 to move, and the material receiving rod 8 performs reciprocating motion, and the material receiving rod 8 is inserted into the positioning hole, and the cutting device body 3 is driven, and the cutting device body 3 cuts the perfluoroether body 6. After the cutting is completed, the cut part falls on the material receiving rod 8. Since the material receiving rod 8 is inclined, the cut perfluoroether body 6 falls on the bottom end of the material receiving rod 8. After the collection is completed, under the drive of the slider 18, the slider 18 drives the material receiving rod 8 away from the clamping plate 5, so that the cut perfluoroether body 6 is easy to remove;

[0052] During cutting, the debris is separated from the perfluoroether product to prevent the debris from adhering to the surface of the perfluoroether product and scratching the surface of the perfluoroether product; the main body of the cutting equipment is controlled by a computer program, and the setting of the computer program makes it easy to cut the guide structure according to the set angle and height to ensure the precision of the guide structure.

[0053] like Figures 2 to 3 As shown, the reciprocating swing mechanism includes a fixed frame 9 fixedly connected to the inner wall of the limit frame 7, and the inner wall of the fixed frame 9 is rotatably connected to a rotating frame 10 through a bearing; a first limit opening 11 is opened on the rotating frame 10, and a first limit block 13 is slidably connected in the first limit opening 11, and one end of the first limit block 13 is fixedly connected to a first rotating rod 12; a connecting plate 23 is fixedly connected to the inner side wall of the limit frame 7, and a first motor 22 is fixedly connected to the top of the connecting plate 23; the output shaft of the first motor 22 is rotatably connected to the connecting plate 23 through a bearing, and the output shaft of the first motor 22 is fixedly connected to the end of the first rotating rod 12 away from the first limit block 13; a second limit block 17 is fixedly connected to the rotating frame 10, and the second limit block 17 is used for the linkage between the rotating frame 10 and the slider 18, and a linkage component is provided on the second limit block 17.

[0054] When the reciprocating swing mechanism provided by the utility model is used, the first motor 22 is first turned on, and the first motor 22 drives the first rotating rod 12 to rotate through the output shaft, and the first rotating rod 12 drives the first limit block 13 to rotate. When the first limit block 13 rotates, the first limit block 13 presses the first limit opening 11. When the first limit opening 11 rotates, the rotating frame 10 rotates, and when the rotating frame 10 rotates, it drives the second limit block 17 to rotate, and the second limit block 17 drives the slider 18 to reciprocate through the linkage assembly;

[0055] The second limit block 17 is used for linkage between the rotating frame 10 and the slider 18. When the second limit block 17 rotates, it drives the slider 18 to swing back and forth by driving the linkage assembly.

[0056] like Figures 2 to 4 As shown, the linkage assembly includes a fixed plate 14 fixedly connected to the inner wall of the limit frame 7, and the fixed plate 14 is rotatably connected to a second rotating rod 15 through a pin shaft; a second limit opening 16 is formed on the second rotating rod 15; the second limit block 17 slides in the second limit opening 16; a third limit block 21 is fixedly connected to one end of the second rotating rod 15; a third limit opening 19 is formed on the slider 18; and the third limit block 21 slides in the third limit opening 19.

[0057] When the linkage assembly provided by the utility model is in use, the second limit block 17 is in the process of rotating, and the second limit block 17 slides in the second limit opening 16, and the second limit block 17 drives the second rotating rod 15 to rotate through the second limit opening 16. Since one end of the second rotating rod 15 is affected by the pin shaft, the second rotating rod 15 swings back and forth around the pin shaft, and the second rotating rod 15 drives the third limit block 21 to swing back and forth during the swinging process, and the third limit block 21 slides in the third limit opening 19, and the third limit block 21 presses the third limit opening 19, and the third limit opening 19 presses the slider 18, and the slider 18 is limited by the sliding opening 20, so the third limit block 21 drives the slider 18 to reciprocate during the reciprocating swinging process, wherein the linkage assembly plays a transition role in this movement process, realizes the movement of the reciprocating swinging mechanism, and thus promotes the material collection of the material collecting unit.

[0058] like Figure 5 As shown, a mounting plate 4 is fixedly connected to the top of the workbench 1 , a driving motor is provided on one side wall of the mounting plate 4 , a clamping plate 5 is fixedly connected to the output shaft of the driving motor, and the perfluoroether body 6 is provided on the clamping plate 5 .

[0059] When the clamping plate 5 provided by the utility model is used, the perfluoroether body 6 is first placed on one side of the clamping plate 5, and the clamping claws on the clamping plate 5 are driven to clamp the perfluoroether body 6, and then the driving motor is turned on. When the driving motor rotates, it drives the clamping plate 5 to rotate, and the clamping plate 5 drives the perfluoroether body 6 to rotate, thereby achieving uniform cutting of the perfluoroether body 6.

[0060] like Figure 6 As shown, two side panels 26 are fixedly connected to the top of the workbench 1; a second motor 27 is fixedly connected to one of the side panels 26, and the output shaft of the second motor 27 is rotatably connected to the side panel 26 through a bearing; a screw rod 30 is fixedly connected to the output shaft of the second motor 27; both ends of the screw rod 30 are rotatably connected to the side panels 26 through bearings, a moving block 32 is threadedly connected to the screw rod 30, and a scraper 31 is fixedly connected to the bottom of the moving block 32; slide rails are provided at the bottom of the side panels 26, and the slide rails are provided on the workbench 1.

[0061] When the fixed screw rod 30 provided by the utility model is in use, the second motor 27 is turned on, and the second motor 27 drives the screw rod 30 to rotate through the output shaft. A nut seat is provided at the connection between the screw rod 30 and the moving block 32, and the moving block 32 is limited in the horizontal direction through the nut seat, so the screw rod 30 drives the moving block 32 to reciprocate, and the moving block 32 drives the scraper 31 to reciprocate, and the scraper 31 cleans the debris; wherein the slide rail facilitates the adjustment of the position of the side plate 26.

[0062] like Figure 1 As shown, the workbench 1 is hollowed out and fixed with a filter plate 24 ; the scraper 31 is in contact with the surface of the filter plate 24 ; a material collecting box 25 is fixedly connected to the bottom of the workbench 1 , and the material collecting box 25 is adapted to the filter plate 24 .

[0063] When the filter plate 24 provided by the utility model is in use, when cutting the perfluoroether body 6, debris is generated, and the scraper 31 swings back and forth, and the scraper 31 pushes the debris and passes through the filter plate 24 and falls into the collection box 25, and the debris is collected.

[0064] like Figure 6 to Figure 7 As shown, a waste trough 28 is provided at the top of the moving block 32; a through hole 33 is opened on the waste trough 28; a rotating block 34 is rotatably connected to the top of the moving block 32 via a rotating shaft, and the rotating block 34 is adapted to the through hole 33; the rotating block 34 is used to fix the waste trough 28.

[0065] When the waste chute 28 provided by the utility model is in use, during the cutting process, larger debris falls down, and the waste chute 28 is used to collect the larger debris.

[0066] like Figure 6 As shown, two guide rods 29 are slidably connected to the moving block 32 , and both ends of the guide rods 29 are fixed to the side plate 26 .

[0067] When the guide rod 29 provided by the utility model is in use, the moving block 32 slides on the guide rod 29 during the movement, and the moving block 32 is limited in the horizontal direction by the guide rod 29 .

[0068] Working principle: firstly, align the receiving rod 8 with the positioning hole of the perfluoroether body 6, turn on the first motor 22, the first motor 22 drives the first rotating rod 12 to rotate through the output shaft, the first rotating rod 12 drives the first limit block 13 to rotate, when the first limit block 13 rotates, the first limit block 13 presses the first limit opening 11, when the first limit opening 11 rotates, the rotating frame 10 rotates, and when the rotating frame 10 rotates, it drives the second limit block 17 to rotate; when the second limit block 17 rotates, the second limit block 17 slides in the second limit opening 16 The second limit block 17 drives the second rotating rod 15 to rotate through the second limit opening 16. Since one end of the second rotating rod 15 is affected by the pin shaft, the second rotating rod 15 swings back and forth around the pin shaft. During the swinging process of the second rotating rod 15, the second rotating rod 15 drives the third limit block 21 to swing back and forth. The third limit block 21 slides in the third limit opening 19. The third limit block 21 presses the third limit opening 19. The third limit opening 19 presses the slider 18. The slider 18 is limited by the sliding opening 20, so the third limit block 21 swings back and forth. During the process, the slider 18 is driven to reciprocate, and the sliding of the slider 18 drives the material receiving rod 8 to move. The material receiving rod 8 reciprocates, and the material receiving rod 8 is inserted into the positioning hole to drive the cutting device body 3. The cutting device body 3 cuts the perfluoroether body 6. After the cutting is completed, the cut part falls on the material receiving rod 8. Since the material receiving rod 8 is set at an angle, the cut perfluoroether body 6 falls on the bottom end of the material receiving rod 8. After the collection is completed, under the drive of the slider 18, the slider 18 drives the material receiving rod 8 away from the clamping plate 5, which is convenient for removal. The perfluoroether body 6 is cut; the second motor 27 is turned on, and the second motor 27 drives the screw rod 30 to rotate through the output shaft. A nut seat is provided at the connection between the screw rod 30 and the moving block 32, and the moving block 32 is limited in the horizontal direction through the nut seat, so the screw rod 30 drives the moving block 32 to reciprocate, and the moving block 32 drives the scraper 31 to reciprocate, and the scraper 31 pushes the debris and drops it into the collecting box 25 through the filter plate 24 to collect the debris; in the cutting process, larger debris falls, and the waste trough 28 is used to collect the larger debris.

[0069] The above shows and describes the basic principles, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments. The above embodiments and descriptions are only for explaining the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, which fall within the scope of the utility model to be protected. The scope of protection claimed by the utility model is defined by the attached claims and their equivalents.

Claims

1. A precision perfluoroether product for semiconductor equipment, characterized in that: Its perfluoroether products include the following components: The product shell and the positioning hole, the upper end of the product shell is set as an arc angle; the bottom end of the product shell is set as a guide structure, the guide structure is set as an inverted cone, the guide structure is convenient for installation on the semiconductor device through the positioning hole, the positioning hole is used for positioning the perfluoroether product, and the product shell is made of perfluoroether material.

2. The precision perfluoroether product for semiconductor equipment according to claim 1, characterized in that: The surface of the product shell is coated with a film, and the film is used to reduce the friction coefficient of the product shell. The film is made of PTFE.

3. A cutting and processing device for a precision perfluoroether product for semiconductor equipment, applicable to a precision perfluoroether product for semiconductor equipment as claimed in any one of claims 1 to 2, comprising: Workbench (1); A mounting frame (2) fixedly connected to the top of the workbench (1); A cutting device body (3) mounted on a mounting frame (2) via an electric guide rail; A perfluoroether body (6) disposed below the cutting device body (3); A material receiving unit is arranged on one side of the perfluoroether body (6), and is used to collect the perfluoroether product after cutting; The invention is characterized in that: the material receiving unit comprises a limit frame (7) fixedly connected to one end of the workbench (1) away from the mounting frame (2), and a slider (18) is slidably connected to the limit frame (7); a sliding opening (20) is provided on the limit frame (7), and the slider (18) slides in the sliding opening (20); a material receiving rod (8) is fixedly connected to a side wall of the slider (18) close to the perfluoroether body (6), and the material receiving rod (8) is inclinedly arranged, and the material receiving rod (8) is inserted into the positioning hole of the perfluoroether body (6) when receiving the material; and a reciprocating swinging mechanism is provided below the slider (18).

4. A precision perfluoroether product cutting and processing device for semiconductor equipment according to claim 3, characterized in that: The reciprocating swing mechanism comprises a fixed frame (9) fixedly connected to the inner wall of the limit frame (7), the inner wall of the fixed frame (9) being rotatably connected to a rotating frame (10) via a bearing; a first limit opening (11) is provided on the rotating frame (10), a first limit block (13) is slidably connected in the first limit opening (11), one end of the first limit block (13) being fixedly connected to a first rotating rod (12); a connecting plate (23) is fixedly connected to the inner side wall of the limit frame (7), the connecting plate (23) being rotatably connected to the inner wall of the limit frame (7), 3) is fixedly connected to the top of a first motor (22); an output shaft of the first motor (22) is rotatably connected to a connecting plate (23) via a bearing, and the output shaft of the first motor (22) is fixedly connected to an end of the first rotating rod (12) away from the first limiting block (13); a second limiting block (17) is fixedly connected to the rotating frame (10), and the second limiting block (17) is used for linkage between the rotating frame (10) and the sliding block (18), and a linkage component is provided on the second limiting block (17).

5. A precision perfluoroether product cutting and processing device for semiconductor equipment according to claim 4, characterized in that: The linkage assembly comprises a fixed plate (14) fixedly connected to the inner wall of the limiting frame (7); the fixed plate (14) is rotatably connected to a second rotating rod (15) via a pin shaft; the second rotating rod (15) is provided with a second limiting opening (16); the second limiting block (17) slides in the second limiting opening (16); one end of the second rotating rod (15) is fixedly connected to a third limiting block (21); the sliding block (18) is provided with a third limiting opening (19); the third limiting block (21) slides in the third limiting opening (19).

6. A precision perfluoroether product cutting and processing device for semiconductor equipment according to claim 5, characterized in that: A mounting plate (4) is fixedly connected to the top of the workbench (1), a side wall of the mounting plate (4) is provided with a driving motor, an output shaft of the driving motor is fixedly connected to a clamping plate (5), and the perfluoroether body (6) is arranged on the clamping plate (5).

7. A precision perfluoroether product cutting and processing device for semiconductor equipment according to claim 6, characterized in that: The top of the workbench (1) is fixedly connected to two side panels (26); a second motor (27) is fixedly connected to one of the side panels (26), and the output shaft of the second motor (27) is rotatably connected to the side panel (26) via a bearing; the output shaft of the second motor (27) is fixedly connected to a screw rod (30); both ends of the screw rod (30) are rotatably connected to the side panel (26) via bearings, a moving block (32) is threadedly connected to the screw rod (30), and a scraper (31) is fixedly connected to the bottom of the moving block (32); a slide rail is provided at the bottom of each side panel (26), and the slide rail is arranged on the workbench (1).

8. A precision perfluoroether product cutting and processing device for semiconductor equipment according to claim 7, characterized in that: The workbench (1) is hollowed out and fixed with a filter plate (24); the scraper (31) is in contact with the surface of the filter plate (24); the bottom of the workbench (1) is fixedly connected with a material collection box (25), and the material collection box (25) is compatible with the filter plate (24).

9. A precision perfluoroether product cutting and processing device for semiconductor equipment according to claim 8, characterized in that: A waste trough (28) is provided on the top of the moving block (32); a through hole (33) is provided on the waste trough (28); a rotating block (34) is rotatably connected to the top of the moving block (32) via a rotating shaft, and the rotating block (34) is adapted to the through hole (33); the rotating block (34) is used to fix the waste trough (28).

10. A precision perfluoroether product cutting and processing device for semiconductor equipment according to claim 9, characterized in that: The moving block (32) is slidably connected to two guide rods (29), and both ends of the guide rods (29) are fixed to the side plate (26).

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