Constant-temperature corrosion device for reticle processing

Abstract

The utility model discloses a constant-temperature corrosion device for reticle processing. A constant-temperature bath is arranged in a machine body, a corrosion tank is arranged in the constant-temperature bath, clamping grooves are formed in the inner walls of the two sides of the constant-temperature bath, clamping blocks are installed on the outer surfaces of the two sides of the corrosion tank, and the clamping blocks are matched with the clamping grooves; a heating plate is arranged at the bottom in the thermostatic bath, a tank cover is arranged on the upper side of the corrosion tank, a connecting rod is connected to the lower surface of the tank cover, and a plurality of clamping mechanisms are uniformly arranged on the outer surface of the end part of the connecting rod; a cleaning tank is formed in the surface of the machine body, a waste water tank is formed in the machine body, and a filter hole support is arranged at the joint of the waste water tank and the cleaning tank. Through the arrangement of the clamping mechanism, the reticle can be clamped from the side face, so that the upper side face and the lower side face of the reticle are both in full contact with corrosive liquid, the corrosion effect of the reticle is improved, the product percent of pass is increased, the situation that hands are injured during manual cleaning can be avoided, safety is higher, and the cleaning effect is better.

Description

Technical Field

[0001] The utility model relates to the technical field of grating plate processing equipment, in particular to a constant temperature etching device used for grating plate processing. Background Art

[0002] In a telescope, the graticule is a transparent glass or glass sheet located on the focal plane, which is engraved with scale lines or marks used to measure the position of celestial bodies or observe celestial bodies. When observing celestial bodies, the graticule can help astronomical observers make more accurate measurements and judgments. The graticule is usually processed by wet etching.

[0003] At present, when wet etching is performed on the reticle, the reticle is usually placed directly in the etching liquid for etching, and the lower surface of the reticle is in direct contact with the bottom of the etching tank, which makes it difficult for the upper and lower sides of the reticle to be uniformly etched, which easily leads to the reticle being of unqualified quality.

[0004] In addition, after a period of use, the corrosion tank will have sediment and residue inside, so the corrosion tank needs to be cleaned to avoid affecting the corrosion effect on the reticle. However, due to the certain corrosiveness inside the corrosion tank, it is easy to cause skin damage during the manual cleaning process. Utility Model Content

[0005] In order to solve the above technical problems, the utility model provides a constant temperature etching device for graticule processing.

[0006] The utility model provides the following technical solutions: a constant temperature etching device for processing a grating plate, comprising a machine body, a constant temperature bath arranged inside the machine body, a corrosion tank arranged inside the constant temperature bath, slots are provided on both inner walls of the constant temperature bath, blocks are installed on both outer surfaces of the corrosion tank, and the blocks are adapted to the slots; a heating plate is arranged at the bottom of the constant temperature bath, a tank cover is arranged on the upper side of the corrosion tank, a connecting rod is connected to the lower surface of the tank cover, and a plurality of clamping mechanisms are evenly arranged on the outer surface of the end of the connecting rod; a cleaning tank is arranged on the surface of the machine body, a waste water tank is arranged inside the machine body, a filter hole bracket is arranged at the connection between the waste water tank and the cleaning tank, a cleaning shaft is penetrated and rotatably installed on the filter hole bracket, and a driving mechanism capable of driving the cleaning shaft to rotate is arranged inside the waste water tank; bristles are arranged on the outer surface of the cleaning shaft, water outlet holes are evenly provided on the outer surface of the cleaning shaft, a water pump is arranged inside the constant temperature bath, an output end of the water pump is connected to a water outlet pipe, and the end of the water outlet pipe is connected to the bottom of the cleaning shaft through a rotating joint.

[0007] Preferably, the clamping mechanism includes an L-shaped mounting block installed on the outer surface of the connecting rod, an upper clamping block is provided at the bottom of the L-shaped mounting block, a lower clamping block is provided on the lower side of the upper clamping block, and two L-shaped guide rods are connected to the outer surface of the lower clamping block. The ends of the L-shaped guide rods pass through the upper side of the L-shaped mounting block, and a top plate is installed at the end of the L-shaped guide rod. A spring is sleeved on the outer surface of the L-shaped guide rod, and both ends of the spring are respectively abutted against the top plate and the L-shaped mounting block.

[0008] Preferably, the driving mechanism includes a motor installed at the bottom of the machine body, the end of the motor output shaft is connected to a connecting shaft, and the end of the connecting shaft passes through the interior of the wastewater tank, a driving gear is installed at the end of the connecting shaft, and a driven gear is sleeved on the outer surface of the cleaning shaft, and the driven gear is meshed and connected with the driving gear.

[0009] Preferably, a damping shaft is installed on the upper surface of the body, a mounting plate is installed at the end of the damping shaft, a screw rod passes through the end of the mounting plate and is threadedly connected, a pressure block is installed at the bottom of the screw rod, and a twist rod is installed at the top of the screw rod.

[0010] Preferably, the outer surface of the body is connected with a drain pipe A and a drain pipe B respectively, and the drain pipe A and the drain pipe B are connected with the constant temperature tank and the waste water tank respectively, and the drain pipe A and the drain pipe B are provided with valves inside.

[0011] Preferably, a control panel is provided on the outer surface of the machine body, and the control panel is electrically connected to the heating plate, the water pump and the motor.

[0012] Compared with the prior art, the utility model has the following beneficial effects:

[0013] (1) The utility model is provided with a constant temperature tank inside the machine body, and a corrosion tank is provided inside the constant temperature tank. The inner walls on both sides of the constant temperature tank are provided with card slots, and the outer surfaces on both sides of the corrosion tank are installed with card blocks, and the card blocks are adapted to the card slots; a heating plate is provided at the bottom of the constant temperature tank, and a tank cover is provided on the upper side of the corrosion tank, and a connecting rod is connected to the lower surface of the tank cover, and a plurality of clamping mechanisms are evenly provided on the outer surface of the end of the connecting rod; a cleaning tank is provided on the surface of the machine body, and a waste water tank is provided inside the machine body, and a filter hole bracket is provided at the connection between the waste water tank and the cleaning tank, and a cleaning shaft is penetrated and rotatably installed on the filter hole bracket, and a driving mechanism capable of driving the cleaning shaft to rotate is provided inside the waste water tank; bristles are provided on the outer surface of the cleaning shaft, and water outlet holes are evenly provided on the outer surface of the cleaning shaft, and a water pump is provided inside the constant temperature tank, and the output end of the water pump is connected to a water outlet pipe, and the end of the water outlet pipe is connected to the bottom of the cleaning shaft through a rotating joint. By setting the clamping mechanism, the graticule can be clamped from the side, so that the upper and lower sides of the graticule are fully in contact with the etching liquid, thereby improving the etching effect of the graticule and improving the product qualification rate. When cleaning the corrosion tank, it can be inverted in the cleaning tank, and the cleaning shaft is driven to rotate by the driving mechanism to make the bristles clean the inner wall of the corrosion tank. At the same time, the water pump draws the water inside the constant temperature tank into the cleaning shaft and sprays it outward on the inner wall of the corrosion tank through the water outlet, thereby improving the cleaning effect of the corrosion tank, avoiding hand injuries caused by manual cleaning, and having higher safety and better cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional schematic diagram of the overall structure of the utility model;

[0015] Figure 2 It is a partial structural schematic diagram of the utility model;

[0016] Figure 3 It is a schematic diagram of the cross-sectional structure of the utility model;

[0017] Figure 4 It is a structural schematic diagram of the clamping mechanism in the utility model. DETAILED DESCRIPTION

[0018] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.

[0019] like Figures 1 to 4As shown, a constant temperature etching device for graticule processing includes a body 1, a constant temperature tank 2, a corrosion tank 3, a card slot 4, a card block 5, a heating plate 6, a tank cover 7, a connecting rod 8, a cleaning tank 9, a filter hole bracket 10, a cleaning shaft 11, bristles 12, a water outlet 13, a water pump 14, a water outlet pipe 15, a rotary joint 16, a waste water tank 17, a clamping mechanism 18, an L-shaped mounting block 19, an upper clamping block 20, a lower clamping block 21, an L-shaped guide rod 22, a top plate 23, a spring 24, a driving mechanism 25, a motor 26, a connecting shaft 27, a driving gear 28, a driven gear 29, a damping shaft 30, a mounting plate 31, a screw 32, a pressing block 33, a twisting rod 34, a drain pipe A 35, a drain pipe B 36 and a control panel 37.

[0020] In the description of the present invention, unless otherwise specified, "multiple" means two or more; the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0021] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0022] like Figures 1 to 4As shown, a thermostatic bath 2 is provided inside the machine body 1, and a corrosion tank 3 is provided inside the thermostatic bath 2. The inner walls on both sides of the thermostatic bath 2 are provided with card slots 4, and the outer surfaces on both sides of the corrosion tank 3 are provided with card blocks 5, and the card blocks 5 are adapted to the card slots 4. The corrosion liquid in the corrosion tank 3 is heated by heating the water inside the thermostatic bath 2, so that the corrosion liquid can be heated evenly and kept at a constant temperature. The arrangement of the card slots 4 and the card blocks 5 makes it convenient to take the corrosion tank 3, and the bottom of the corrosion tank 3 can be aligned with the heating plate. 6 does not contact, so as to avoid the heating effect of the heating plate 6 affecting the constant temperature effect of the etching liquid in the etching tank 3; a heating plate 6 is arranged at the bottom of the constant temperature tank 2, and a tank cover 7 is arranged on the upper side of the etching tank 3. The lower surface of the tank cover 7 is connected with a connecting rod 8, and the outer surface of the end of the connecting rod 8 is evenly provided with a plurality of clamping mechanisms 18. Through the setting of the clamping mechanisms 18, the graticule can be clamped from the side, so that the upper and lower sides of the graticule are fully in contact with the etching liquid, thereby improving the etching effect of the graticule and improving the product qualification rate.

[0023] A cleaning tank 9 is provided on the surface of the machine body 1, a waste water tank 17 is provided inside the machine body 1, a filter hole bracket 10 is provided at the connection between the waste water tank 17 and the cleaning tank 9, a cleaning shaft 11 is penetrated and rotatably installed on the filter hole bracket 10, and a driving mechanism 25 capable of driving the cleaning shaft 11 to rotate is provided inside the waste water tank 17, the cleaning shaft 11 can be driven to rotate by the driving mechanism 25, and then the cleaning shaft 11 can drive the bristles 12 to clean the inner wall of the corrosion tank 3; the outer surface of the cleaning shaft 11 is provided with a brush 12 2, the outer surface of the cleaning shaft 11 is evenly provided with water outlet holes 13, the interior of the thermostatic tank 2 is provided with a water pump 14, the output end of the water pump 14 is connected with a water outlet pipe 15, the end of the water outlet pipe 15 is connected to the bottom of the cleaning shaft 11 through a rotary joint 16, the water pump 14 can draw the water inside the thermostatic tank 2 into the cleaning shaft 11, and spray it outward from the water outlet holes 13 onto the inner wall of the corrosion tank 3, thereby achieving the effect of cleaning the interior of the corrosion tank 3, and the waste water generated by the cleaning falls into the waste water tank 17 through the filter hole bracket 10.

[0024] The outer surface of the body 1 is connected to a drain pipe A35 and a drain pipe B36, respectively, and the drain pipe A35 and the drain pipe B36 are connected to the constant temperature tank 2 and the waste water tank 17 respectively, and valves are arranged inside the drain pipe A35 and the drain pipe B36. Through the arrangement of the drain pipe A35 and the drain pipe B36, the water inside the constant temperature tank 2 and the waste water generated by cleaning inside the waste water tank 17 can be discharged.

[0025] The outer surface of the machine body 1 is provided with a control panel 37, and the control panel 37 is electrically connected to the heating plate 6, the water pump 14 and the motor 26. The setting of the control panel 37 facilitates unified control of the heating plate 6, the water pump 14 and the motor 26. It should be explained that the control panel 37 used in the utility model is a common model that can be purchased on the market, and the control connection method between it and the heating plate 6, the water pump 14 and the motor 26 can be easily realized by the staff in this field in the prior art, which is not the innovation of the utility model, so the specific control connection method is not marked in the figure and is not described in detail.

[0026] The clamping mechanism 18 includes an L-shaped mounting block 19 mounted on the outer surface of the connecting rod 8, an upper clamping block 20 is provided at the bottom of the L-shaped mounting block 19, a lower clamping block 21 is provided on the lower side of the upper clamping block 20, and two L-shaped guide rods 22 are connected to the outer surface of the lower clamping block 21, the ends of the L-shaped guide rods 22 penetrate to the upper side of the L-shaped mounting block 19, and a top plate 23 is installed at the end of the L-shaped guide rod 22. A spring 24 is sleeved on the outer surface of the L-shaped guide rod 22, and the two ends of the spring 24 are respectively abutted against the top plate 23 and the L-shaped mounting block 19, and the spring 24 is provided at the bisecting portion. When clamping the grating plate, first pull down the lower clamp block 21, the lower clamp block 21 drives the L-shaped guide rod 22 to move downward, and makes the top plate 23 compress the spring 24, then place the grating plate vertically between the lower clamp block 21 and the upper clamp block 20, then release the L-shaped guide rod 22, the compressed spring 24 releases the elastic force, which can drive the lower clamp block 21 to move downward, and clamp the grating plate between the upper clamp block 20 and the lower clamp block 21, so that the upper and lower sides of the grating plate are not blocked and can fully contact with the etching liquid, thereby improving the corrosion effect.

[0027] The driving mechanism 25 includes a motor 26 installed at the bottom of the body 1, and the end of the output shaft of the motor 26 is connected to a connecting shaft 27, and the end of the connecting shaft 27 passes through the interior of the wastewater tank 17, and a driving gear 28 is installed at the end of the connecting shaft 27. The outer surface of the cleaning shaft 11 is sleeved with a driven gear 29, and the driven gear 29 is meshed and connected with the driving gear 28. After the corrosion tank 3 is placed upside down in the cleaning tank 9, the cleaning shaft 11 is inside the corrosion tank 3, and then the motor 26 is started. The motor 26 drives the connecting shaft 27 to rotate, and drives the driving gear 28 to rotate. Through the meshing relationship between the driving gear 28 and the driven gear 29, the cleaning shaft 11 can be driven to rotate, so that the bristles 12 clean the inner wall of the corrosion tank 3.

[0028] A damping shaft 30 is installed on the upper surface of the body 1, and a mounting plate 31 is installed at the end of the damping shaft 30. A screw 32 passes through the end of the mounting plate 31 and is threadedly connected. A pressure block 33 is installed at the bottom of the screw 32, and a twisting rod 34 is installed at the top of the screw 32. After the corrosion tank 3 is placed upside down in the cleaning tank 9, the mounting plate 31 can be rotated to drive the pressure block 33 to rotate to the top of the corrosion tank 3, and then the twisting rod 34 is twisted to drive the pressure block 33 to descend and press it on the corrosion tank 3, so that the corrosion tank 3 can be fixed to ensure the stability of the cleaning of the corrosion tank 3.

[0029] The working principle of the utility model is as follows:

[0030] When in use, first place the corrosion tank 3 in the constant temperature bath 2, and make the card slot 4 stuck in the card block 5, so that the bottom of the corrosion tank 3 does not directly contact the heating plate 6, then pour pure water into the constant temperature bath 2, pour the corrosion liquid into the corrosion tank 3, heat the pure water in the constant temperature bath 2 by the heating plate 6, and then use the hot water to heat the corrosion liquid in the corrosion tank 3, so that the corrosion liquid is kept at a constant temperature state, and then fix the dividing plate, first pull down the lower clamping block 21, the lower clamping block 21 drives the L-shaped guide rod 22 to move downward, and make the top plate 23 compress the spring 24, then place the dividing plate vertically between the lower clamping block 21 and the upper clamping block 20, then loosen the L-shaped guide rod 22, the compressed spring 24 releases the elastic force, which can drive the lower clamping block 21 to move downward, and clamp the dividing plate between the upper clamping block 20 and the lower clamping block 21;

[0031] Then, the tank cover 7 is placed on the corrosion tank 3 and the graticule is immersed in the corrosion liquid to ensure that both sides of the graticule are evenly corroded. When cleaning the corrosion tank 3, the corrosion liquid in the corrosion tank 3 is poured out first, and then the corrosion tank 3 is placed upside down in the cleaning tank 9, and the mounting plate 31 is rotated to drive the pressing block 33 to rotate to the top of the corrosion tank 3, and then the screw rod 34 is screwed to drive the pressing block 33 to descend and press it on the corrosion tank 3 to fix the corrosion tank 3.

[0032] Then start the water pump 14 and the motor 26. The water pump 14 pumps the water in the thermostatic bath 2 into the cleaning shaft 11 and sprays it out from the water outlet 13. The motor 26 drives the connecting shaft 27 to rotate, and the connecting shaft 27 drives the driving gear 28 to rotate. Due to the meshing relationship between the driving gear 28 and the driven gear 29, the cleaning shaft 11 can be driven to rotate, so that the bristles 12 clean the inner wall of the corrosion tank 3, thereby completing the purpose of automatically cleaning the corrosion tank 3.

[0033] The above-mentioned embodiments are only preferred embodiments of the present invention and cannot be used to limit the scope of rights of the present invention. Therefore, modifications, equivalent changes, improvements, etc. made according to the scope of the patent application of the present invention are still within the scope covered by the present invention.

Claims

1. A constant temperature etching device for reticle processing, comprising a body (1), characterized in that: The body (1) is provided with a thermostatic bath (2) inside, a corrosion tank (3) inside, both inner walls of the thermostatic bath (2) are provided with card slots (4), both outer surfaces of the corrosion tank (3) are provided with card blocks (5), and the card blocks (5) are matched with the card slots (4); a heating plate (6) is provided at the bottom of the thermostatic bath (2), a tank cover (7) is provided on the upper side of the corrosion tank (3), a connecting rod (8) is connected to the lower surface of the tank cover (7), and a plurality of clamping mechanisms (18) are evenly provided on the outer surface of the end of the connecting rod (8); a cleaning tank (9) is provided on the surface of the body (1), and a wastewater tank is provided inside the body (1) (17), a filter hole bracket (10) is provided at the connection between the waste water tank (17) and the cleaning tank (9), a cleaning shaft (11) is penetrated and rotatably installed on the filter hole bracket (10), and a driving mechanism (25) capable of driving the cleaning shaft (11) to rotate is provided inside the waste water tank (17); bristles (12) are provided on the outer surface of the cleaning shaft (11), and water outlet holes (13) are evenly opened on the outer surface of the cleaning shaft (11); a water pump (14) is provided inside the constant temperature tank (2), and the output end of the water pump (14) is connected to a water outlet pipe (15), and the end of the water outlet pipe (15) is connected to the bottom of the cleaning shaft (11) through a rotating joint (16).

2. A constant temperature etching device for reticle processing according to claim 1, characterized in that: The clamping mechanism (18) comprises an L-shaped mounting block (19) mounted on the outer surface of the connecting rod (8); an upper clamping block (20) is arranged at the bottom of the L-shaped mounting block (19); a lower clamping block (21) is arranged on the lower side of the upper clamping block (20); two L-shaped guide rods (22) are connected to the outer surface of the lower clamping block (21); the ends of the L-shaped guide rods (22) pass through the upper side of the L-shaped mounting block (19); a top plate (23) is mounted on the ends of the L-shaped guide rods (22); a spring (24) is sleeved on the outer surface of the L-shaped guide rod (22); the two ends of the spring (24) are respectively in contact with the top plate (23) and the L-shaped mounting block (19).

3. A constant temperature etching device for reticle processing according to claim 2, characterized in that: The driving mechanism (25) comprises a motor (26) mounted at the bottom of the machine body (1); the end of the output shaft of the motor (26) is connected to a connecting shaft (27), and the end of the connecting shaft (27) penetrates into the interior of the wastewater tank (17); a driving gear (28) is mounted on the end of the connecting shaft (27); a driven gear (29) is sleeved on the outer surface of the cleaning shaft (11), and the driven gear (29) is meshedly connected to the driving gear (28).

4. A constant temperature etching device for reticle processing according to claim 3, characterized in that: A damping shaft (30) is installed on the upper surface of the machine body (1), a mounting plate (31) is installed at the end of the damping shaft (30), a screw rod (32) passes through the end of the mounting plate (31) and is threadedly connected, a pressing block (33) is installed at the bottom of the screw rod (32), and a twisting rod (34) is installed at the top of the screw rod (32).

5. A constant temperature etching device for reticle processing according to claim 4, characterized in that: The outer surface of the machine body (1) is connected to a drain pipe A (35) and a drain pipe B (36), respectively, and the drain pipe A (35) and the drain pipe B (36) are connected to the constant temperature tank (2) and the waste water tank (17), respectively, and valves are provided inside the drain pipe A (35) and the drain pipe B (36).

6. A constant temperature etching device for reticle processing according to claim 3, characterized in that: A control panel (37) is provided on the outer surface of the machine body (1), and the control panel (37) is electrically connected to the heating plate (6), the water pump (14) and the motor (26).

Images