Temperature detection device of crystal growth furnace

Abstract

The embodiment of the utility model provides a temperature detection device of a crystal growth furnace. The temperature detection device comprises a moving trolley, a rack, a bracket and a matching piece, the moving trolley is used for being arranged on the outer side of the crystal growth furnace and can move in the circumferential direction of the crystal growth furnace, the rack is arranged on the moving trolley and extends in the vertical direction, the support is connected with the rack, the support can move in the vertical direction relative to the rack, the support extends in the first direction and is used for being arranged above the crystal growth furnace, and the matching part is arranged on the support. The matching part is installed on the temperature detection part, the matching part can drive the temperature detection part to move in the preset direction, the first direction and the preset direction are perpendicular to the vertical direction, and the preset direction is perpendicular to or parallel to the first direction. Therefore, the situation that the crystal growth quality is influenced by shaking of the crystal growth furnace is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and in particular to a temperature detection device for a crystal growth furnace. Background Art

[0002] Silicon carbide (SiC), as an emerging third-generation semiconductor core material, has excellent properties such as wide bandgap, high critical breakdown electric field strength, high electron mobility, good radiation resistance and chemical stability, which makes it an important substrate wafer material with wide applications. It has shown good application prospects in the fields of aviation devices, new energy vehicles, rail transportation and household appliances. The crystal growth furnace is an important device for growing silicon carbide crystals.

[0003] The inventors have found that in some existing crystal growth furnaces, the temperature is generally measured manually by standing on the machine using a thermometer. When an operator walks onto the machine, there is a risk of the machine shaking, thereby affecting the quality of crystal growth in the crystal growth furnace. Utility Model Content

[0004] The utility model aims to provide a temperature detection device for a crystal growth furnace, which can avoid manual operation on a machine platform to measure the temperature of the crystal growth furnace, thereby reducing the situation where the crystal growth quality is affected by the shaking of the crystal growth furnace.

[0005] The embodiment of the utility model is achieved as follows:

[0006] In a first aspect, the utility model provides a temperature detection device for a crystal growth furnace, comprising:

[0007] A movable carriage, which is configured to be disposed on one side of the crystal growth furnace and can move around the circumference of the crystal growth furnace;

[0008] A frame, the frame is arranged on the mobile vehicle, and the frame extends in a vertical direction;

[0009] A bracket, the bracket is connected to the frame, the bracket can move relative to the frame along the vertical direction, and the bracket extends along a first direction;

[0010] A matching piece, wherein the matching piece is arranged on the bracket and can move on the bracket along the first direction, the matching piece is installed with a temperature detection piece and the temperature detection piece is used to be configured above the crystal growth furnace, and the matching piece is used to drive the temperature detection piece to move along the first direction and / or the preset direction, the first direction and the preset direction are perpendicular to the vertical direction, and the preset direction is perpendicular or parallel to the first direction.

[0011] In an optional embodiment, the mating piece includes a conveying device disposed on a bracket, the mating piece is connected to the conveying device, and the conveying device is used to drive the mating piece to move in the first direction.

[0012] In an optional embodiment, the conveying device includes a bracket guide rail and a first driving member arranged on the bracket, the bracket guide rail extends along the first direction, the mating member is connected to the bracket guide rail, the mating member slides or rolls with the bracket guide rail, and the first driving member is used to drive the mating member to move on the bracket guide rail.

[0013] In an optional embodiment, the mating member includes a second driving member and a connecting member, the driving end of the second driving member is connected to the connecting member, the connecting member is used to install the temperature detecting member, and the second driving member is used to drive the connecting member to move along the preset direction.

[0014] In an optional embodiment, the mating member also includes a third driving member, which is arranged on the bracket, and the driving end of the third driving member is connected to the second driving member, and the driving end of the second driving member is connected to the connecting member, and the third driving member is used to drive the second driving member to move along the first direction, and the second driving member is used to drive the connecting member to move along the preset direction, and the third driving member and the second driving member are driving cylinders or driving electric cylinders, and the preset direction, the first direction and the vertical direction are perpendicular to each other.

[0015] In an optional embodiment, the mobile trolley is detachably connected to the frame.

[0016] In an optional embodiment, the frame is provided with a plurality of connection parts spaced apart in a vertical direction, and the bracket is provided with a matching part connected to the connection parts.

[0017] In an optional embodiment, the temperature detection device of the crystal growth furnace further includes a preset guide rail, which is used to be configured on one side of the crystal growth furnace, and the movable trolley is disposed on the preset guide rail, and the movable trolley can move on the preset guide rail.

[0018] In an optional embodiment, the temperature detection device of the crystal growth furnace also includes an industrial computer, which is communicatively connected to the temperature detection component and the matching component. The temperature detection component is equipped with a monitoring camera, and the industrial computer is used to obtain temperature data and monitoring data detected by the temperature detection component.

[0019] In an optional implementation, the preset direction, the first direction and the vertical direction are perpendicular to each other.

[0020] The beneficial effect of the embodiment of the utility model is as follows: the temperature detection device of a crystal growth furnace provided by the embodiment of the utility model includes a mobile trolley, a frame, a bracket and a matching piece. The mobile trolley is used to be arranged on the outside of the crystal growth furnace and can move around the circumference of the crystal growth furnace, the frame is arranged on the mobile trolley, the frame extends in the vertical direction, the bracket is connected to the frame, the bracket can move relative to the frame in the vertical direction, the bracket extends in the first direction and is used to be arranged above the crystal growth furnace, the matching piece is arranged on the bracket, the matching piece is installed on the temperature detection piece, the matching piece can drive the temperature detection piece to move in a preset direction, the first direction and the preset direction are perpendicular to the vertical direction, the preset direction is perpendicular or parallel to the first direction, and through the arrangement of the bracket and the matching piece, it is possible to avoid manually walking on the machine to measure the temperature of the crystal growth furnace, thereby reducing the occurrence of the crystal growth furnace affecting the crystal growth quality due to the shaking. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 A schematic structural diagram of a temperature detection device for a crystal growth furnace provided in an embodiment of the utility model.

[0023] Icons: 1-temperature detection device of crystal growth furnace; 100-frame; 200-support; 300-matching part; 400-second driving part; 500-third driving part; 600-industrial computer. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0027] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0028] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0029] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] The specific structure of a temperature detection device for a crystal growth furnace provided by an embodiment of the utility model and the corresponding technical effects it brings are described in detail below in conjunction with the patent drawings.

[0031] Please refer to Figure 1 The embodiment of the utility model provides a temperature detection device 1 for a crystal growth furnace, which includes a moving trolley, a frame 100 , a bracket 200 and a matching piece 300 .

[0032] The mobile trolley is used to be configured on the outside of the crystal growth furnace and can move around the circumference of the crystal growth furnace. The frame 100 is set on the mobile trolley. The frame 100 extends in the vertical direction. The bracket 200 is connected to the frame 100. The bracket 200 can move in the vertical direction relative to the frame 100. The bracket 200 extends in the first direction and is used to be configured above the crystal growth furnace. The matching component 300 is set on the bracket 200. The matching component 300 is installed with a temperature detection component (not shown in the figure). The temperature detection component can perform high temperature detection. The matching component 300 is used to drive the temperature detection component to move along the first direction and / or the preset direction. The first direction and the preset direction are perpendicular to the vertical direction, and the preset direction is perpendicular or parallel to the first direction.

[0033] It can be understood that since the frame 100 is arranged on the moving trolley, the moving trolley can drive the frame 100 to move around the crystal growth furnace, and the bracket 200 can move in the vertical direction relative to the frame 100 to adapt to crystal growth furnaces of various heights and sizes.

[0034] Optionally, the mobile cart is detachably connected to the frame 100, that is, the frame 100 is detachably installed on the mobile cart, which is convenient for operators to replace the frame 100 in time, and also convenient for operators to replace the frame 100 of different lengths to adapt to crystal growth furnaces of different heights. For example, the mobile cart is detachably connected to the frame 100 by threaded fasteners.

[0035] Of course, in some other embodiments, the moving trolley may also be fixedly connected to the frame 100, for example, the frame 100 is welded to the moving trolley.

[0036] The matching component 300 is arranged on the bracket 200 and can move along the first direction on the bracket 200. The matching component 300 is installed with a temperature detection component and the temperature detection component is used to be configured above the crystal growth furnace. That is to say, during use, the bracket 200 is at least partially above the crystal growth furnace, and the temperature detection component is above the crystal growth furnace to detect the temperature of the crystal growth furnace, wherein the matching component 300 can also drive the temperature detection component to move along a preset direction.

[0037] Optionally, the frame 100 is provided with a plurality of connecting parts (not shown in the figure) at intervals along the vertical direction, and the bracket 200 is provided with a matching part (not shown in the figure) connected to the connecting part. It can be understood that the bracket 200 can be connected to different connecting parts through the matching part to change the height position of the bracket 200 in the vertical direction, wherein the connecting part is clamped with the matching part or connected by threaded fasteners.

[0038] Of course, in some other embodiments, the bracket 200 can also move in the extension direction of the rack 100 through other matching methods. For example, the rack 100 is provided with a slide rail along its length direction, and a slider is provided in the slide rail. The rack 100 is also provided with a driving component connected to the slider, and the slider is connected to the bracket 200. The driving component can drive the slider to move along the extension direction of the rack 100, thereby driving the bracket 200 to move in the extension direction of the rack 100.

[0039] Optionally, in this embodiment, the preset direction is perpendicular to the first direction, that is, the preset direction, the first direction and the vertical direction are perpendicular to each other. It can be understood that since the bracket extends along the first direction and the matching member 300 can move along the first direction on the bracket 200, the temperature detection member can measure the temperature at multiple positions above the crystal growth furnace, which can avoid manually walking on the machine to measure the temperature of the crystal growth furnace, thereby reducing the occurrence of the crystal growth furnace affecting the crystal growth quality due to the shaking of the crystal growth furnace.

[0040] Optionally, in some embodiments, the preset direction is parallel to the first direction, that is, the matching component 300 can drive the temperature detection component to continue to move along the first direction to increase the detection range of the temperature detection component in the first direction. It can be understood that when performing temperature detection on a certain crystal growth furnace, when the moving vehicle moves along the second direction perpendicular to the first direction, it should be noted that the second direction is also perpendicular to the vertical direction.

[0041] Optionally, the matching piece 300 includes a conveying device disposed on the bracket 200, the conveying device (not shown in the figure) is connected to the matching piece 300, and the conveying device is used to drive the matching piece 300 to move in the first direction. The conveying device includes a bracket 200 guide rail and a first driving member disposed on the bracket 200, the bracket 200 guide rail extends along the first direction, the matching piece 300 is connected to the bracket 200 guide rail, and the matching piece 300 and the bracket 200 guide rail slide or roll with each other. It can be understood that the interaction or rolling cooperation between the matching piece 300 and the bracket 200 guide rail is used to reduce the friction between the bracket 200 guide rail and the matching piece 300, and the first driving member is used to drive the matching piece 300 to move on the bracket 200 guide rail.

[0042] It can be understood that the bracket 200 having the bracket 200 guide rail and the matching member 300 set on the bracket 200 guide rail driven by the first driving member to move on the bracket 200 guide rail are conventional settings in the mechanical field, and their specific structures are not described in detail here.

[0043] Optionally, in some other embodiments, the conveying device may be a conveyor belt structure, and the matching component 300 is disposed on the conveying device and can move along the first direction driven by the conveyor belt.

[0044] Optionally, the mating member 300 includes a second driving member 400 and a connecting member, the driving end of the second driving member 400 is connected to the connecting member, the connecting member is used to install the temperature detection member, and the second driving member 400 is used to drive the connecting member to move along a preset direction. It can be understood that the second driving member 400 can be a screw motor, that is, when the screw motor is driven, the driving end moves along the preset direction, and under the drive of the screw motor, it moves along the preset direction.

[0045] It should be noted that the connecting member and the temperature detecting member are detachably connected. In some embodiments, the connecting member and the temperature detecting member are connected by threaded fasteners, or in some embodiments, the temperature detecting member is clamped on the connecting member, and the detection end of the temperature detecting member faces the crystal growth furnace to detect the temperature of the crystal growth furnace.

[0046] Optionally, in some embodiments, the mating member 300 also includes a third driving member 500, which is disposed on the bracket, and the driving end of the third driving member 500 is connected to the second driving member 400, and the driving end of the second driving member 400 is connected to the connecting member. The third driving member 500 is used to drive the second driving member 400 to move in a first direction, and the second driving member 400 is used to drive the connecting member to move in a preset direction. The third driving member 500 and the second driving member 400 are one of a driving cylinder, a driving electric cylinder or a screw motor, and the preset direction, the first direction and the vertical direction are perpendicular to each other.

[0047] Optionally, in order to ensure that the moving trolley can move stably, the temperature detection device 1 of the crystal growth furnace also includes a preset guide rail, which is used to be configured on one side of the crystal growth furnace, and the moving trolley is set on the preset guide rail, and the moving trolley can move on the preset guide rail.

[0048] It can be understood that when the preset guide rail (not shown in the figure) is laid, it will be laid to the outer periphery of the crystal growth furnace. When there are multiple crystal growth furnaces, the preset guide rail will pass through multiple crystal growth furnaces to ensure that the temperature detection device 1 of the crystal growth furnace can move on the preset guide rail and perform temperature detection on multiple crystal growth furnaces.

[0049] Optionally, the temperature detection device 1 of the crystal growth furnace further includes an industrial computer 600, which is in communication with the temperature detection component and the matching component 300. The temperature detection component is equipped with a monitoring camera. It can be understood that the industrial computer 600 is used to obtain temperature data and monitoring data detected by the temperature detection component. The industrial computer 600 can be set on the rack 100.

[0050] The industrial computer 600 can control the matching part 300 to drive the temperature detection part to move in the first direction and the preset direction according to the monitoring data, until the temperature probe of the temperature detection part is aligned with the temperature detection point of the crystal growth furnace. In detail, the industrial computer 600 can control the second driving part 400 and the third driving part 500 to drive the temperature detection part to move in the first direction and the preset direction according to the monitoring data, so that the temperature detection probe of the temperature detection part is aligned with the temperature detection point of the crystal growth furnace to obtain the temperature data of the temperature monitoring point of the crystal growth furnace. Alternatively, the industrial computer 600 can control the first driving part and the second driving part 400 to drive the temperature detection part to move in the first direction and the preset direction according to the monitoring data, so that the temperature detection probe of the temperature detection part is aligned with the temperature detection point of the crystal growth furnace to obtain the temperature data of the temperature monitoring point of the crystal growth furnace.

[0051] It can be understood that the temperature detection point of the crystal growth furnace is a temperature measurement position with a preset mark on the crystal growth furnace, and the monitoring camera of the temperature detection component can be used to coordinate the temperature detection probe of the temperature detection component to be aligned with the temperature detection point.

[0052] The temperature detection device 1 of the crystal growth furnace also includes a power module (not shown in the figure), which supplies power to the driving component, the temperature detection component and the industrial computer 600. It should be noted that the driving component refers to at least one of the above-mentioned first driving component, the second driving component 400 and the third driving component 500.

[0053] In summary, a temperature detection device 1 for a crystal growth furnace provided by an embodiment of the utility model includes a moving trolley, a frame 100, a bracket 200 and a matching piece 300. The moving trolley is used to be arranged outside the crystal growth furnace and can move around the circumference of the crystal growth furnace, the frame 100 is arranged on the moving trolley, the frame 100 extends in the vertical direction, the bracket 200 is connected to the frame 100, the bracket 200 can move in the vertical direction relative to the frame 100, the bracket 200 extends in the first direction and is used to be arranged above the crystal growth furnace, the matching piece 300 is arranged on the bracket 200, the matching piece 300 is installed on the temperature detection piece, the matching piece 300 can drive the temperature detection piece to move in a preset direction, the first direction and the preset direction are perpendicular to the vertical direction, and the preset direction is perpendicular or parallel to the first direction. Through the arrangement of the bracket 200 and the matching piece 300, it is possible to avoid manually walking on the machine to measure the temperature of the crystal growth furnace, thereby reducing the occurrence of the situation where the crystal growth furnace affects the crystal growth quality due to the shaking.

[0054] The above description is only the preferred embodiment of the utility model, and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

Claims

1. A temperature detection device for a crystal growth furnace, characterized in that: include: A movable carriage, which is configured to be disposed on one side of the crystal growth furnace and can move around the circumference of the crystal growth furnace; A frame (100), the frame (100) being arranged on the mobile vehicle, and the frame (100) extending in a vertical direction; A bracket (200), the bracket (200) being connected to the frame (100), the bracket (200) being able to move relative to the frame (100) along the vertical direction, and the bracket (200) extending along a first direction; A matching piece (300), wherein the matching piece (300) is arranged on the bracket (200) and can move on the bracket (200) along the first direction, the matching piece (300) is installed with a temperature detection piece and the temperature detection piece is used to be arranged above the crystal growth furnace, and the matching piece (300) is used to drive the temperature detection piece to move along the first direction and / or a preset direction, the first direction and the preset direction are perpendicular to the vertical direction, and the preset direction is perpendicular or parallel to the first direction.

2. The temperature detection device for a crystal growth furnace according to claim 1, characterized in that: The matching piece (300) comprises a conveying device arranged on the bracket (200), the matching piece (300) is connected to the conveying device, and the conveying device is used to drive the matching piece (300) to move in the first direction.

3. The temperature detection device of the crystal growth furnace according to claim 2, characterized in that: The conveying device comprises a support (200) guide rail and a first driving member arranged on the support (200); the support (200) guide rail extends along the first direction; the matching member (300) is connected to the support (200) guide rail; the matching member (300) and the support (200) guide rail are slidably or rollingly matched; and the first driving member is used to drive the matching member (300) to move on the support (200) guide rail.

4. The temperature detection device for a crystal growth furnace according to claim 1, characterized in that: The matching member (300) comprises a second driving member (400) and a connecting member, wherein the driving end of the second driving member (400) is connected to the connecting member, the connecting member is used to install the temperature detection member, and the second driving member (400) is used to drive the connecting member to move along the preset direction.

5. The temperature detection device for a crystal growth furnace according to claim 4, characterized in that: The mating member (300) further comprises a third driving member (500), wherein the third driving member (500) is arranged on the bracket (200), wherein a driving end of the third driving member (500) is connected to the second driving member (400), and the third driving member (500) is used to drive the second driving member (400) to move along the first direction, wherein the third driving member (500) and the second driving member (400) are driving cylinders or driving electric cylinders, and the preset direction, the first direction and the vertical direction are perpendicular to each other.

6. The temperature detection device for a crystal growth furnace according to claim 1, characterized in that: The movable trolley is detachably connected to the frame (100).

7. The temperature detection device for a crystal growth furnace according to claim 1, characterized in that: The frame (100) is provided with a plurality of connection parts at intervals along the vertical direction, and the bracket (200) is provided with a matching part connected to the connection parts.

8. The temperature detection device for a crystal growth furnace according to claim 1, characterized in that: The temperature detection device of the crystal growth furnace also includes a preset guide rail, which is used to be configured on one side of the crystal growth furnace. The moving trolley is arranged on the preset guide rail, and the moving trolley can move on the preset guide rail.

9. The temperature detection device for a crystal growth furnace according to claim 1, characterized in that: The temperature detection device of the crystal growth furnace also includes an industrial computer (600), the industrial computer (600) is communicatively connected with the temperature detection component and the matching component (300), the temperature detection component is equipped with a monitoring camera, and the industrial computer (600) is used to obtain temperature data and monitoring data detected by the temperature detection component.

10. The temperature detection device for a crystal growth furnace according to claim 1, characterized in that: The preset direction, the first direction and the vertical direction are perpendicular to each other.

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