Mobile platform of wafer box opener

Abstract

The utility model discloses a mobile platform of a wafer box opener, the mobile platform is arranged above a platform support frame of the wafer box opener in a sliding manner, the mobile platform is provided with a 7-shaped hollow notch, the 7-shaped hollow notch is arranged at the outer side of the mobile platform, and the mobile platform is provided with a plurality of hollow holes. The moving platform is in driving connection with a platform driving mechanism arranged below the platform supporting frame, and the platform driving mechanism is located on the side away from the 7-shaped hollowed-out notch. The moving platform is provided with the 7-shaped hollow notch, so that a motion space can be provided for the mechanical arm, and the moving platform can be suitable for a wafer cleaning machine and other scenes which are compact in overall space and need to complete loading of the wafer conveying box through the mechanical arm.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductors, and in particular relates to a mobile platform of a wafer box opener. Background Art

[0002] A wafer box is a container used in the semiconductor manufacturing process to protect, transport and store wafers. Currently, 12-inch and 8-inch wafer boxes are commonly used.

[0003] Most of the wafer box openers in the prior art cannot meet the requirements of scenarios such as wafer cleaning machines where the overall space is compact and a robotic arm is required to complete the loading of wafer transfer boxes. For example, Chinese invention patent CN202211223632.5 discloses a loadport that is compatible with 8-inch and 12-inch wafer boxes. Its mobile platform is a complete plane, and the space under the mobile platform needs to be used to accommodate various drive devices such as the platform drive mechanism and the locking drive mechanism. There is no more space to place automated loading equipment such as robotic arms.

[0004] Therefore, there is a need for a mobile platform for a wafer box opener that can be suitable for compact space scenarios. Utility Model Content

[0005] To achieve the above-mentioned purpose, the utility model provides a mobile platform of a wafer box opener, wherein the mobile platform is slidably arranged above a platform support frame of the wafer box opener, and the mobile platform is provided with a "7"-shaped hollow notch, and the "7"-shaped hollow notch is located on the outside of the mobile platform. The mobile platform is driven and connected to a platform driving mechanism arranged under the platform support frame, and the platform driving mechanism is located on the side away from the "7"-shaped hollow notch.

[0006] Preferably, a slide groove and slide rail structure is provided between the mobile platform and the platform support frame, and the slide groove and slide rail structure is provided on both sides of the platform support frame.

[0007] Preferably, the platform driving mechanism includes a platform driving motor, a platform screw and a platform nut. The platform driving motor is arranged on the inner side of the platform support frame. The platform nut is connected to the mobile platform. The platform driving motor drives the platform screw to rotate, and the displacement of the mobile platform is realized through the displacement of the platform nut.

[0008] Preferably, a connecting block is provided between the platform nut and the mobile platform, the lower end of the connecting block is fixedly connected to the platform nut, and the upper end of the connecting block is fixedly connected to the bottom of the mobile platform.

[0009] Preferably, a positioning structure is provided on the surface of the mobile platform, and the positioning structure includes at least 3 positioning columns.

[0010] Preferably, three positioning columns are provided.

[0011] Preferably, the three positioning posts are respectively arranged at the three ends of the “7”-shaped hollow notch.

[0012] Preferably, the positioning structure also includes at least two downward pressure detection devices.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] (1) The mobile platform of the utility model is provided with a "7"-shaped hollow notch, which can provide movement space for the robot arm. The utility model can be applied to scenes where the overall space is compact, such as wafer cleaning machines, and the loading of wafer transfer boxes needs to be completed by the robot arm.

[0015] (2) The platform driving mechanism of the utility model is arranged on the inner side of the bottom of the platform support frame and is located on the side away from the "7"-shaped hollow notch. The transmission connection in a limited space is cleverly realized through the connecting block, further providing movement space for the robot arm.

[0016] (3) The positioning structure of the utility model utilizes the three ends of the "7"-shaped hollow notch to achieve three-point positioning. The structure is ingenious and the space utilization rate is high. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the structure of the mobile platform of the wafer box opener disclosed in the embodiment of the utility model;

[0019] Figure 2 It is a structural schematic diagram of a platform driving mechanism of a mobile platform of a wafer box opener disclosed in an embodiment of the utility model;

[0020] Figure 3 It is a structural schematic diagram of the positioning structure of the mobile platform of the wafer box opener disclosed in the embodiment of the utility model.

[0021] In the figure: a mobile platform 100, a "7"-shaped hollow notch 110, a slide groove and slide rail structure 120, a positioning column 130, a downward pressure detection device 140, a platform support frame 200, a platform driving mechanism 300, a platform driving motor 310, a platform screw rod 320, a platform nut 330, and a connecting block 340. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] Figure 1 A moving platform 100 of a wafer box opener disclosed in an embodiment of the utility model is shown. The moving platform 100 is slidably arranged above a platform support frame 200 of the wafer box opener. The moving platform 100 is provided with a "7"-shaped hollow notch 110 for providing movement space for a robot arm such as a wafer cleaning machine. The "7"-shaped hollow notch 110 is located on the outside of the moving platform 200. The moving platform 200 is driven and connected to a platform driving mechanism 300 arranged below the platform support frame 200. The platform driving mechanism 300 is located on a side away from the "7"-shaped hollow notch 110.

[0024] like Figure 2 and Figure 3 As shown, a slideway rail structure 120 is provided between the mobile platform 100 and the platform support frame 200, and the slideway rail structure 120 is provided on both sides of the platform support frame 200. The platform driving mechanism 300 includes a platform driving motor 310, a platform screw rod 320 and a platform nut 330. The platform driving motor 310 is provided at the inner side of the bottom of the platform support frame 110. The platform driving motor 310 drives the platform screw rod 320 to rotate, and the displacement of the mobile platform 200 is realized by the displacement of the platform nut 330. In a preferred embodiment, the platform nut 330 is connected to the mobile platform 200 through a connecting block 340, the lower end of the connecting block 340 is fixedly connected to the platform nut 330, and the upper end of the connecting block 340 is fixedly connected to the lower end of the mobile platform 200. The entire platform driving mechanism 300 is provided at the inner side of the platform support frame 200, and the transmission connection in a limited space is cleverly realized through the connecting block 340.

[0025] like Figure 3 As shown, a positioning structure is provided on the surface of the mobile platform 200, and the positioning structure includes at least three positioning posts 130. The mobile platform 200 can detachably install the wafer box through the positioning structure. In a preferred embodiment, the positioning structure is provided with three positioning posts 130, and the three positioning posts 130 are respectively provided at the three ends of the "7"-shaped hollow notch 110, which just realizes three-point positioning. The structural setting is ingenious, the space utilization rate is high, and the three-point positioning can meet the positioning needs.

[0026] In a preferred embodiment, the positioning structure also includes at least two downward pressure detection devices 140, which are used to detect the loading status of the wafer box loaded by the robot arm. In this embodiment, three positioning posts 130 and two downward pressure detection devices 140 are set as an example. When the wafer box is loaded successfully, the standard structure at the bottom of the wafer box can press the two downward pressure detection devices 140 at the same time, indicating that the loading is normal; if both downward pressure detection devices 140 pop up, it means that the wafer box is not loaded; if only one downward pressure detection device 140 is pressed down, it means that the loading is crooked. Preferably, the downward pressure detection device 140 is set adjacent to the positioning post 130.

[0027] The mobile platform 100 of the wafer box opener disclosed in the embodiment of the utility model can provide movement space for the robot arm, and can be suitable for scenes such as wafer cleaning machines where the overall space is compact and the wafer transfer box loading needs to be completed by the robot arm.

[0028] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0029] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A mobile platform of a wafer box opener, characterized in that: The mobile platform is slidably arranged above the platform support frame of the wafer box opener, and the mobile platform is provided with a "7"-shaped hollow notch, and the "7"-shaped hollow notch is located on the outside of the mobile platform. The mobile platform is driven and connected to a platform driving mechanism arranged below the platform support frame, and the platform driving mechanism is located on a side away from the "7"-shaped hollow notch.

2. The mobile platform of the wafer box opener according to claim 1, characterized in that: A slide groove and slide rail structure is arranged between the mobile platform and the platform support frame, and the slide groove and slide rail structure is arranged on both sides of the platform support frame.

3. The mobile platform of the wafer box opener according to claim 1, characterized in that: The platform driving mechanism includes a platform driving motor, a platform lead screw and a platform nut. The platform driving motor is arranged on the inner side of the platform support frame. The platform nut is connected to the mobile platform. The platform driving motor drives the platform lead screw to rotate, and the displacement of the mobile platform is realized through the displacement of the platform nut.

4. The mobile platform of the wafer box opener according to claim 3, characterized in that: A connecting block is arranged between the platform nut and the mobile platform, the lower end of the connecting block is fixedly connected to the platform nut, and the upper end of the connecting block is fixedly connected to the bottom of the mobile platform.

5. The mobile platform of the wafer box opener according to any one of claims 1 to 4, characterized in that: A positioning structure is arranged on the surface of the mobile platform, and the positioning structure includes at least three positioning columns.

6. The mobile platform of the wafer box opener according to claim 5, characterized in that: The number of the positioning posts is 3.

7. The mobile platform of the wafer box opener according to claim 6, characterized in that: The three positioning posts are respectively arranged at the three ends of the "7"-shaped hollow notch.

8. The mobile platform of the wafer box opener according to claim 5, characterized in that: The positioning structure also includes at least two downward pressure detection devices.

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