Adjustable clamping die for plane copper target stamping and stamping correction system of adjustable clamping die
By designing an adjustable clamping mold, the mold adjustment is achieved using the chute and bolt structure, the problem of deformation and adaptation to different types of targets during calibration of planar copper targets is solved, and the yield rate and adaptability are improved.
Patent Information
- Application Number
- CN202423228015.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-26
- Publication Date
- 2025-03-04
- Estimated Expiration
- 2034-12-26
AI Technical Summary
The prior art can easily cause deformation during calibration of planar copper targets, affect yield, and cannot uniformly adapt to different types of targets for calibration.
An adjustable clamping mold is designed, including a stress-bearing plate, an adjustment assembly and a contact plate. The movement of the adjustment assembly and contact plate is achieved through a combined structure of slide grooves and bolts, and is adapted to different types of planar copper targets for calibration.
It effectively avoids direct contact between the stamping parts and the plane and the target material, reduces damage to the contact surface, ensures that the original contour of the target material remains unchanged, improves the yield rate, and is adapted to different types of target materials for calibration.
Smart Images
Figure CN222551905U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of plane copper target material preparation, in particular to an adjustable clamping die for punching the plane copper target material and a punching correction system thereof. Background Art
[0002] Planar targets mainly refer to circular and rectangular targets with a certain thickness; sputtering targets can be divided into planar targets, multi-arc targets, and rotating targets according to their shapes. Planar targets are connected to sputtering equipment through screws and other methods, and the film layer is attached to the substrate by sputtering under vacuum conditions, and then the film is processed by various means (etching) to meet different needs.
[0003] Conventional planar targets are mainly rectangular targets such as Figure 1 As shown, or secondary processing is performed on the rectangular target to form a certain arc structure such as Figure 2 As shown, no matter it is a rectangular target or a multi-arc target after secondary processing, according to customer needs, there are various specifications of length, width and thickness. The length range is usually between 2000mm and 4000mm, the width range is usually between 190mm and 210mm, and the thickness range is usually between 16mm and 22mm.
[0004] However, due to its long length, the flat target usually has warped edges during processing, so it needs to be leveled and corrected. Conventional calibration usually involves pressing directly on both ends of the flat target to make both ends flat. Conventional calibration has the following problems: 1. Since the texture of the pure copper flat target is relatively soft, pressing directly on the ends may cause deformation at the ends, affecting the overall flatness. 2. For the curved target after secondary processing, since the target will form a stepped structure, the curved surface at the upper end that contacts the pressing mechanism may deform, causing the curvature to change, affecting the overall yield. 3. Different types of flat targets are calibrated in different ways, resulting in low processing efficiency. Utility Model Content
[0005] The purpose of the utility model is to provide an adjustable clamping die and a stamping correction system for planar copper target stamping to address the above-mentioned shortcomings, thereby solving the problem in the prior art that planar targets are easily deformed during calibration operations, resulting in a low yield rate; and at the same time, solving the problem in the prior art that planar targets of different models cannot be calibrated by a set of devices.
[0006] The utility model is realized by the following scheme:
[0007] An adjustable clamping die for stamping a planar copper target comprises a force-bearing plate, an adjusting assembly and a contact plate; the adjusting assembly is connected to the force-bearing plate via a first bolt, a first slide groove cooperating with the first bolt is provided on the force-bearing plate, the adjusting assembly can move along the length direction of the first slide groove, the contact plate is connected to the bottom of the adjusting assembly via a second bolt, a second slide groove cooperating with the second bolt is provided at the bottom of the adjusting assembly, and the contact plate can move along the length direction of the second slide groove.
[0008] Based on the above-mentioned structure of an adjustable clamping mold for stamping a flat copper target, the first slide groove is symmetrically arranged in multiple groups along the length direction of the force-bearing plate, the end of the first slide groove is flush with the end of the force-bearing plate, and the end of the first slide groove is opened.
[0009] Based on the above-mentioned structure of an adjustable clamping mold for stamping a flat copper target, the first slide groove includes a first through groove and a first limiting groove; the first through groove is connected to the first limiting groove, and the force-bearing plate is provided with a first receiving strip for receiving the first bolt, and the size of the hexagonal bolt head of the first bolt is adapted to the size of the first limiting groove.
[0010] Based on the above-mentioned structure of an adjustable clamping mold for stamping a flat copper target, the adjustment component includes an upper connecting plate, a lower connecting plate and a center connecting plate; the center connecting plate is arranged as multiple plates between the upper connecting plate and the lower connecting plate; through holes cooperating with the first bolt are arranged at corresponding positions in the upper connecting plate, the lower connecting plate and the center connecting plate, and the upper connecting plate, the lower connecting plate and the center connecting plate are connected as a whole by the first bolt.
[0011] Based on the structure of the adjustable clamping mold for stamping a planar copper target, the end surface of the upper connecting piece in contact with the planar target is a first arcuate surface, and the end surface of the lower connecting piece in contact with the planar target is a second arcuate surface; the first arcuate surface and the second arcuate surface are arranged in a centrally symmetrical manner.
[0012] Based on the above-mentioned structure of an adjustable clamping mold for stamping a flat copper target, the second slide groove is arranged at the bottom position of the lower connecting plate, the second slide groove is arranged in multiple strips along the length direction of the lower connecting plate, the end of the second slide groove is flush with the end of the lower connecting plate, and the end of the second slide groove is arranged to be open.
[0013] Based on the above-mentioned structure of an adjustable clamping mold for stamping a planar copper target, the second slide groove includes a second through groove, a second limiting groove and a connecting hole; the second through groove is connected to the second limiting groove, and a second receiving strip for receiving a second bolt is provided on the lower connecting plate, and the size of the hexagonal bolt head of the second bolt is adapted to the size of the second limiting groove; the connecting hole is arranged through the lower connecting plate.
[0014] Based on the structure of the adjustable clamping die for stamping a planar copper target, the contact plate is provided with a plurality of through holes for the second bolts to pass through, and the through holes at the bottom of the contact plate are sink holes.
[0015] The present invention provides a stamping correction system, including a support seat, a stamping assembly, an elastic support member and an adjustable clamping die; the elastic support member is arranged in plurality along the length direction of the support seat, the length of the adjustable clamping die is adapted to the length of the elastic support member, and the stamping assembly is arranged on the support seat.
[0016] Based on the structure of the above-mentioned stamping correction system, the elastic support member includes a support plate and a support spring; a plurality of elastic cavities cooperating with the elastic support member are arranged on the support seat, and the support plate is arranged in the elastic cavity through the support spring; the support plate and the contact plate are made of magnetic material.
[0017] In summary, due to the adoption of the above technical solution, the beneficial effects of the utility model are:
[0018] 1. This solution is provided with an adjustable clamping structure, which can adapt to different types of flat copper targets, such as rectangular targets, or arc-shaped targets on which secondary processing is performed. It can even limit special-shaped targets according to needs. On the one hand, during stamping calibration, it avoids direct contact between the stamped parts and the flat targets, reducing damage on the contact surface; on the other hand, the clamping mold can be adjusted according to the contour of the target, so that the original contour of the target is restricted and will not be deformed due to stamping, affecting the overall yield.
[0019] 2. This solution moves the position of the adjustment component according to the planar target structure to be corrected. When it is a rectangular target structure, the contact plate and the adjustment component are moved to the same position to limit the contour of the rectangular target, and the end face and side wall of the rectangular target are protected during stamping calibration to prevent deformation. When the target is a stepped structure, the adjustment component and the contact plate are slid separately to make the structure formed by the two match the target contour, limit the side wall of the target, and protect the end face and side wall of the stepped target during stamping calibration to prevent deformation. Since this solution is adjustable in the width direction, it can be adapted to different types of targets, which increases the adaptability of this solution and reduces the overall cost of use. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 It is a schematic diagram of the structure of a planar copper target material in the prior art;
[0021] Figure 2 It is a schematic diagram of the structure of the prior art step copper target;
[0022] Figure 3 The structure and partial enlarged schematic diagram of the adjustable clamping mold in Example 1 of the utility model;
[0023] Figure 4 This is a schematic diagram of the structure of clamping a rectangular target in Example 1 of the utility model;
[0024] Figure 5 This is a schematic diagram of the top view of the load-bearing plate in Example 1 of the utility model;
[0025] Figure 6 This is a schematic diagram of the structure of the first chute in Embodiment 1 of the present utility model;
[0026] Figure 7 This is a schematic diagram of the structure of the second chute in Embodiment 1 of the present utility model;
[0027] Figure 8 It is a structural schematic diagram of the punching correction system in Example 2 of the utility model;
[0028] Description of the drawings: 1. Force plate; 2. Adjustment assembly; 3. Contact plate; 4. First bolt; 5. First slide groove; 6. Second bolt; 7. Second slide groove; 8. Adjustable clamping die; 9. Support seat; 10. Stamping assembly; 11. Elastic support member; 12. Rectangular target; 13. Step target; 21. Upper connecting piece; 22. Lower connecting piece; 23. Center connecting piece; 24. First arc surface; 25. Second arc surface; 31. Sinking hole; 51. First through groove; 52. First limiting groove; 53. First connecting strip; 71. Second through groove; 72. Second limiting groove; 73. Connecting hole; 111. Support plate; 112. Support spring. DETAILED DESCRIPTION
[0029] All features disclosed in this specification, or steps in all methods or processes disclosed, except mutually exclusive features and / or steps, can be combined in any manner.
[0030] Any feature disclosed in this specification (including any additional claims and abstract), unless otherwise stated, may be replaced by other alternative features that are equivalent or have similar purposes. That is, unless otherwise stated, each feature is only an example of a series of equivalent or similar features.
[0031] The terms "first", "second", etc. are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first", "second", etc. may explicitly or implicitly include one or more of the features.
[0032] Example 1
[0033] like Figure 3~Figure 7 As shown, the utility model provides a technical solution:
[0034] An adjustable clamping die for stamping a planar copper target, which at least includes but is not limited to a force-bearing plate 1, an adjustment component 2 and a contact plate 3; the adjustment component 2 is connected to the force-bearing plate 1 through a first bolt 4, a first slide groove 5 cooperating with the first bolt 4 is provided on the force-bearing plate 1, the adjustment component 2 can move along the length direction of the first slide groove 5, the contact plate 3 is connected to the bottom of the adjustment component 2 through a second bolt 6, a second slide groove 7 cooperating with the second bolt 6 is provided at the bottom of the adjustment component 2, and the contact plate 3 can move along the length direction of the second slide groove 7.
[0035] Based on the above structure, since the types of planar copper targets are various, the present solution is provided with an adjustable clamping structure, which can adapt to different types of planar copper targets, such as the rectangular target 12, or the arc-shaped target on which secondary processing is performed, and can even restrict the special-shaped targets according to needs. On the one hand, during the stamping calibration, it avoids direct contact between the stamping parts and the planar target, thereby reducing damage on the contact surface; on the other hand, the clamping mold can be adjusted according to the contour of the target, so that the original contour of the target is restricted, and deformation will not occur due to stamping, thereby affecting the overall yield rate.
[0036] As an example, the first chute 5 is symmetrically arranged in multiple groups along the length direction of the force-bearing plate 1, and the end of the first chute 5 is flush with the end of the force-bearing plate 1, and the end of the first chute 5 is opened;
[0037] Based on the above structure, the first slide groove 5 is set into multiple groups, so that the adjustment component 2 can be locked by multiple first bolts 4, thereby increasing the stability of the overall connection. At the same time, the end of the first slide groove 5 is set as an open structure to facilitate the first bolt 4 to slide in and out, which is convenient for subsequent maintenance.
[0038] As an example, the first slide groove 5 may include a first through groove 51 and a first limiting groove 52; the first through groove 51 is connected to the first limiting groove 52, and a first receiving strip 53 for receiving the first bolt 4 is provided on the force-bearing plate 1, and the size of the hexagonal bolt head of the first bolt 4 is adapted to the size of the first limiting groove 52;
[0039] Based on the above structure, the hexagonal bolt barrel of the first bolt 4 slides into the end of the first slide groove 5, so that it can slide arbitrarily along the length direction of the first slide groove 5. The first supporting strip 53 supports the bottom of the first bolt 4. When the adjustment assembly 2 moves to the predetermined position, the first bolt 4 is locked by the nut.
[0040] As an example, the adjustment component 2 may include an upper connecting plate 21, a lower connecting plate 22 and a center connecting plate 23; the center connecting plate 23 is arranged as multiple plates between the upper connecting plate 21 and the lower connecting plate 22; through holes cooperating with the first bolt 4 are arranged at corresponding positions in the upper connecting plate 21, the lower connecting plate 22 and the center connecting plate 23, and the upper connecting plate 21, the lower connecting plate 22 and the center connecting plate 23 are connected as a whole by the first bolt 4.
[0041] Based on the above structure, according to the planar target structure to be corrected, the position of the adjustment component 2 is moved. When it is a rectangular target 12 structure, the contact plate 3 and the adjustment component 2 are moved to the same position to limit the contour of the rectangular target 12, and the end face and side wall of the rectangular target 12 are protected during stamping calibration to prevent it from deformation. When the target is a stepped structure, the adjustment component 2 and the contact plate 3 are slid separately so that the structure formed by the two is adapted to the target contour, the side wall of the target is restricted, and the end face and side wall of the stepped target are protected during stamping calibration to prevent it from deformation. Since the present scheme is adjustable in the width direction, it can be adapted to different types of targets, which increases the adaptability of the present scheme and reduces the overall use cost.
[0042] As an example, the end surface of the upper connecting piece 21 in contact with the planar target is a first arcuate surface 24, and the end surface of the lower connecting piece 22 in contact with the planar target is a second arcuate surface 25; the first arcuate surface 24 and the second arcuate surface 25 are centrally symmetrically arranged.
[0043] Based on the above structure, since the end of the step target is usually chamfered when restricting the end of the step target, the first curved surface 24 and the second curved surface 25 are set on the upper connecting piece 21 and the lower connecting piece 22 to better fit the end face of the step target.
[0044] As an example, the second slide groove 7 is arranged at the bottom of the lower connecting piece 22, and a plurality of second slide grooves 7 are arranged along the length direction of the lower connecting piece 22, and the end of the second slide groove 7 is flush with the end of the lower connecting piece 22, and the end of the second slide groove 7 is opened;
[0045] Based on the above structure, the second slide groove 7 is set into multiple groups, so that the contact plate 3 can be locked by multiple second bolts 6, thereby increasing the stability of the overall connection. At the same time, the end of the second slide groove 7 is set as an open structure to facilitate the second bolts 6 to slide in and out, which is convenient for later maintenance.
[0046] As an example, the second slide groove 7 may include a second through groove 71, a second limiting groove 72 and a connecting hole 73; the second through groove 71 is connected to the second limiting groove 72, and a second receiving strip for receiving the second bolt 6 is provided on the lower end connecting plate, and the size of the hexagonal bolt head of the second bolt 6 is adapted to the size of the second limiting groove 72; the connecting hole 73 is arranged through the lower end connecting plate.
[0047] Based on the above structure, the hexagonal bolt barrel of the second bolt 6 slides into the end of the second slide groove 7, so that it can slide arbitrarily along the length direction of the second slide groove 7. The second supporting bar supports the bottom of the second bolt 6. When the contact plate 3 moves to the predetermined position, the second bolt 6 is locked by the nut.
[0048] When the present solution is used and the number of the intermediate connecting plates is reduced, the first bolt 4 needs to be replaced so that the length of the first bolt 4 matches the length of the entire adjustment assembly 2 ; to avoid the first bolt 4 being too long and interfering with the first limiting groove 52 or the second limiting groove 72 .
[0049] As an example, the contact plate 3 is provided with a plurality of through holes for the second bolts 6 to pass through, and the through holes at the bottom of the contact plate 3 are sink holes 31;
[0050] Based on the above structure, by setting the bottom of the contact plate 3 as the sink hole 31, the end of the second bolt 6 can be prevented from being exposed, so that when receiving the compressive force, the force is output outward from the bottom surface of the entire contact plate 3.
[0051] Example 2
[0052] Based on the above embodiment 1, Figure 8 As shown, the utility model provides a technical solution:
[0053] A stamping correction system, which at least includes but is not limited to an adjustable clamping die 8, a support seat 9, a stamping assembly 10 and an elastic support member 11; the elastic support member 11 is arranged in plurality along the length direction of the support seat 9, the length of the adjustable clamping die 8 is adapted to the length of the elastic support member 11, and the stamping assembly 10 is arranged on the support seat.
[0054] Based on the above structure, when in use, a predetermined number of adjustable clamping molds 8 are used to hold the planar target material to be corrected according to its length, so that most of the area of the planar target material is covered by the adjustable clamping mold 8, and then the positions of the adjustment component 2 and the contact plate 3 are adjusted according to the contour of the planar target material, so that the cavity formed by the adjustable clamping mold 8 is adapted to the outer contour of the planar target material; the contact plate 3 contacts the elastic support member 11, and the stamping component 10 is started; it is slowly pressed downward to calibrate the horizontality of the planar target material.
[0055] In this solution, the stamping assembly 10 can be set to multiple groups as needed. The stamping assembly 10 can be a hydraulic cylinder stamping assembly 10, which is a prior art and will not be described in detail here.
[0056] As an example, the elastic support member 11 may include a support plate 111 and a support spring 112 ; a plurality of elastic cavities cooperating with the elastic support member 11 are provided on the support seat 9 , and the support plate 111 is arranged in the elastic cavity through the support spring 112 .
[0057] The support plate 111 and the contact plate 3 can be made of magnetic materials;
[0058] Based on the above structure, when performing stamping correction, the main body of the planar target is still subjected to the pressure transmitted through the force plate 1, and then the pressure is transmitted to the support seat 9 to achieve forced correction. The side walls formed by the adjustment component 2 and the contact plate 3 are only for limiting the end face deformation of the target and will not be subjected to excessive pressure. The elastic support 11 can reduce the overall noise and avoid the rigid structure of the end of the adjustable clamping mold 8 and the support seat 9, which can effectively prevent the damage of the adjustable clamping mold 8. The support plate 111 and the contact plate 3 are made of magnetic material, which can preliminarily limit the stamping position and improve the overall assembly efficiency.
[0059] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.
Claims
1. An adjustable clamping die for stamping a flat copper target, characterized in that: It includes a force-bearing plate, an adjustment component and a contact plate; the adjustment component is connected to the force-bearing plate through a first bolt, a first slide groove cooperating with the first bolt is provided on the force-bearing plate, the adjustment component can move along the length direction of the first slide groove, the contact plate is connected to the bottom of the adjustment component through a second bolt, a second slide groove cooperating with the second bolt is provided at the bottom of the adjustment component, and the contact plate can move along the length direction of the second slide groove.
2. The adjustable clamping die for punching a planar copper target according to claim 1, characterized in that: The first slide grooves are symmetrically arranged in multiple groups along the length direction of the force-bearing plate, the ends of the first slide grooves are flush with the ends of the force-bearing plate, and the ends of the first slide grooves are opened.
3. The adjustable clamping die for punching a planar copper target as claimed in claim 2, characterized in that: The first slide groove includes a first through groove and a first limiting groove; the first through groove is connected to the first limiting groove, and the force-bearing plate is provided with a first receiving strip for receiving the first bolt, and the size of the hexagonal bolt head of the first bolt is adapted to the size of the first limiting groove.
4. The adjustable clamping die for punching a planar copper target as claimed in claim 3, characterized in that: The adjustment assembly includes an upper connecting plate, a lower connecting plate and a center connecting plate; the center connecting plate is arranged as multiple plates between the upper connecting plate and the lower connecting plate; through holes cooperating with the first bolt are arranged at corresponding positions in the upper connecting plate, the lower connecting plate and the center connecting plate, and the upper connecting plate, the lower connecting plate and the center connecting plate are connected as a whole by the first bolt.
5. The adjustable clamping die for punching a planar copper target as claimed in claim 4, characterized in that: The end surface of the upper connecting piece in contact with the planar target is a first arcuate surface, and the end surface of the lower connecting piece in contact with the planar target is a second arcuate surface; the first arcuate surface and the second arcuate surface are centrally symmetrically arranged.
6. The adjustable clamping die for punching a planar copper target as claimed in claim 5, characterized in that: The second slide groove is arranged at the bottom position of the lower connecting piece, and the second slide groove is arranged in a plurality along the length direction of the lower connecting piece. The end of the second slide groove is flush with the end of the lower connecting piece, and the end of the second slide groove is arranged to be open.
7. The adjustable clamping die for punching a planar copper target as claimed in claim 6, characterized in that: The second slide groove includes a second through groove, a second limiting groove and a connecting hole; the second through groove is connected to the second limiting groove, and a second receiving strip for receiving a second bolt is arranged on the lower end connecting plate, and the size of the hexagonal bolt head of the second bolt is adapted to the size of the second limiting groove; the connecting hole is arranged through the lower end connecting plate.
8. The adjustable clamping die for punching a planar copper target as claimed in claim 7, characterized in that: The contact plate is provided with a plurality of through holes for the second bolts to pass through, and the through holes at the bottom of the contact plate are sink holes.
9. A punching correction system, characterized in that: It includes a support seat, a stamping assembly, an elastic support member and an adjustable clamping die as described in any one of claims 1 to 8; the elastic support member is arranged in plurality along the length direction of the support seat, the length of the adjustable clamping die is adapted to the length of the elastic support member, and the stamping assembly is arranged on the support seat.
10. A punching correction system as claimed in claim 9, characterized in that: The elastic support member includes a support plate and a support spring; a plurality of elastic cavities cooperating with the elastic support member are arranged on the support seat, and the support plate is arranged in the elastic cavity through the support spring; the support plate and the contact plate are made of magnetic material.