Guiding device and sputtering machine

Abstract

The utility model discloses a guide device and a sputtering machine, and relates to the technical field of semiconductor equipment. The guiding device comprises a bottom plate and a guiding mechanism which is connected to the bottom plate in a sliding mode in the first direction. The guide mechanism comprises a guide block, a guide part is arranged on the guide block, and a transmission strip of the sputtering machine is arranged in the guide part; the guide block is driven to slide on the bottom plate and can drive the transmission strip to move in the first direction, and the first direction is the width direction of the transmission strip. The guide device can solve the problem that the transmission strip is easy to deviate in the prior art, so that the sputtering uniformity of the sputtering machine can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a guiding device and a sputtering machine. Background Art

[0002] Sputtering is one of the main technologies for preparing thin film materials. Sputtering machine, as a device for sputtering process, is a machine that uses energetic ions generated by gas discharge to bombard cathode target material at high speed under the action of electric field under high vacuum conditions, so that atoms and molecules of target material escape and deposit on substrate to form thin film. With the rapid development of semiconductor industry, sputtering machine has been widely used.

[0003] Among them, the sputtering machine usually uses a transmission motor to drive the belt or chain to rotate, thereby driving the transmission guide wheel to move so that the carrier plate moves forward, so that the substrate placed on the carrier plate can be vacuum coated. However, in the existing sputtering machine, since the axis of the driving motor or the tail redirecting roller is not perpendicular to the central axis of the conveyor, the conveying belt or chain is prone to deviation at the head roller or the tail redirecting roller, which causes the substrate on the carrier plate to be sputtered unevenly during coating. Utility Model Content

[0004] The utility model aims to provide a guide device and a sputtering machine, which can improve the problem of easy deviation of the transmission bar in the prior art, thereby improving the sputtering uniformity of the sputtering machine.

[0005] The embodiment of the utility model is achieved as follows:

[0006] In one aspect of the utility model, a guide device is provided, which includes a bottom plate and a guide mechanism connected to the bottom plate in a sliding manner along a first direction; the guide mechanism includes a guide block, a guide portion is provided on the guide block, and a transmission bar of a sputtering machine is arranged in the guide portion; the guide block is driven to slide on the bottom plate, and can drive the transmission bar to move in the first direction, and the first direction is the width direction of the transmission bar. The guide device can improve the problem of the transmission bar being prone to deviation in the prior art, thereby improving the sputtering uniformity of the sputtering machine.

[0007] Optionally, two protrusions arranged at intervals are provided on a side of the guide block facing away from the bottom plate, and the two protrusions cooperate with each other to form a guide portion.

[0008] Optionally, the distance between the two protrusions is equal to or greater than the dimension of the transmission bar along its width direction; and / or, the dimension of the two protrusions along the second direction is greater than the dimension of the transmission bar along the second direction, and the second direction is the thickness direction of the transmission bar.

[0009] Optionally, a sliding groove extending along the first direction is provided on the bottom plate, the guide mechanism is clamped in the sliding groove, and at least a portion of the guide block of the guide mechanism extends out of the sliding groove.

[0010] Optionally, a drainage groove is also provided on the bottom plate, and the drainage groove is communicated with the sliding groove.

[0011] Optionally, the guide mechanism further includes a mounting plate and a connecting block, wherein the mounting plate and the guide block are distributed on opposite sides of the connecting block, and the mounting plate and the guide block are connected via the connecting block.

[0012] Optionally, a threaded hole is provided on the connecting block, the guide block includes a first body and a first protruding shaft protruding from the first body on a side close to the connecting block, and the guide portion is provided on a side of the first body away from the first protruding shaft; the mounting plate includes a second body and a second protruding shaft protruding from the second body on a side close to the connecting block, the first protruding shaft and the second protruding shaft are both provided with external threads matching the threaded hole, the guide block is screwed to one side of the connecting block through the first protruding shaft, and the mounting plate is screwed to the other side of the connecting block through the second protruding shaft.

[0013] Optionally, the connecting block is located in the sliding groove, the first body is located outside the sliding groove and overlaps with one side of the bottom plate, and the second body is located outside the sliding groove and overlaps with the other side of the bottom plate.

[0014] Optionally, a plurality of positioning holes are provided on the mounting plate; and / or fixing holes are provided on opposite sides of the bottom plate along the first direction, respectively, and the fixing holes are used to be fixed to the machine platform of the sputtering machine through connecting members.

[0015] Another aspect of the present invention provides a sputtering machine, which includes the above-mentioned guiding device.

[0016] The beneficial effects of the utility model include:

[0017] The guide device provided by the present application includes a base plate and a guide mechanism connected to the base plate in a sliding manner along a first direction; the guide mechanism includes a guide block, a guide portion is provided on the guide block, and a transmission bar of the sputtering machine is arranged in the guide portion; the guide block is driven to slide on the base plate, and can drive the transmission bar to move in the first direction, and the first direction is the width direction of the transmission bar. When the guide device provided by the present application is used, the base plate is fixed to the machine table or guide rail of the sputtering machine, and the transmission bar of the sputtering machine is arranged in the guide portion of the guide block, so that when the sputtering machine is working, the guide portion can guide the movement direction of the transmission bar, and can prevent the transmission bar from running off during the operation of the sputtering machine; in addition, the present application connects the guide mechanism to the base plate in a sliding manner, so that even if the transmission bar runs off, the present application can drive the guide block to move on the base plate along the width direction of the transmission bar to correct the deviation of the transmission bar, so that the present application can ensure the working reliability and accuracy of the transmission bar, thereby improving the sputtering uniformity of the sputtering machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the utility model and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 One of the structural schematic diagrams of the guide device provided in the embodiment of the utility model;

[0020] Figure 2 The second structural schematic diagram of the guide device provided in the embodiment of the utility model;

[0021] Figure 3 A schematic diagram of the structure of the guide block provided in the embodiment of the utility model;

[0022] Figure 4 A schematic structural diagram of a mounting plate provided in an embodiment of the utility model.

[0023] Icons: 10-bottom plate; 11-sliding groove; 12-drain groove; 13-fixing hole; 20-guide mechanism; 21-guide block; 211-protrusion; 2111-guide part; 212-first body; 213-first cam shaft; a-first direction; b-second direction; 22-mounting plate; 221-second body; 222-second cam shaft; 223-positioning hole; 23-connecting block; 231-threaded hole. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Generally, the components of the embodiments of the utility model described and shown in the drawings here can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the present invention to be protected, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0027] In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the accompanying drawings, or the orientation or position relationship in which the utility model product is usually placed when in use, which is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0028] In addition, the terms "horizontal", "vertical" and the like do not mean that the components are required to be absolutely horizontal or suspended, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0029] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "install", "connect", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] Please refer to Figure 1 and Figure 2 The present embodiment provides a guide device, which includes a bottom plate 10 and a guide mechanism 20 slidably connected to the bottom plate 10 along a first direction a; the guide mechanism 20 includes a guide block 21, a guide portion 2111 is provided on the guide block 21, and a transmission bar of the sputtering machine is arranged in the guide portion 2111; the guide block 21 is driven to slide on the bottom plate 10, and can drive the transmission bar to move along the first direction a, and the first direction a is the width direction of the transmission bar. The guide device can improve the problem of the transmission bar easily running off in the prior art, thereby improving the sputtering uniformity of the sputtering machine.

[0031] It should be noted that the guide device provided in the present application includes a base plate 10 and a guide mechanism 20, wherein the base plate 10 is used to be fixed on the machine platform or guide rail of the sputtering machine. The shape of the base plate 10 is not specifically limited in the present application, and can be set accordingly according to the shape of the machine platform or guide rail.

[0032] The guide mechanism 20 is slidably connected to the bottom plate 10 , wherein the guide mechanism 20 can slide along a first direction a on the bottom plate 10 .

[0033] In addition, the guide mechanism 20 includes a guide block 21, and a guide portion 2111 is provided on the guide block 21. The guide portion 2111 is used to guide the movement of the transmission bar of the sputtering machine. It should be noted that, first, the transmission bar of the sputtering machine can be a chain or a belt, and the present application does not limit the specific type of the transmission bar configured in the guide portion 2111.

[0034] Second, the guide portion 2111 is disposed on the guide block 21, wherein the guide portion 2111 can be formed by concavely providing a groove on the guide block 21, or can be formed by adding two protrusions 211 on the guide block 21. The present application does not impose any restriction on the formation method of the guide portion 2111, as long as the guide portion 2111 on the guide block 21 can guide the movement direction of the transmission bar of the sputtering machine.

[0035] The specific size and shape of the guide portion 2111 are not limited in this application, but it should be noted that the setting of the guide portion 2111 should avoid affecting the normal transmission of the transmission bar.

[0036] In this embodiment, the guide mechanism 20 can slide on the base plate 10 along the first direction a, and the first direction a is the width direction of the transmission bar. In this way, when the guide mechanism 20 is driven to slide on the base plate 10, the guide block 21 can be driven to slide along the width direction of the transmission bar, so that the transmission bar also follows the movement, and then the transmission bar can be corrected when the transmission bar deviates.

[0037] When in use, the bottom plate 10 of the guide device is fixed to the machine table or guide rail of the sputtering machine, and the guide mechanism 20 and the bottom plate 10 are assembled (it should be noted that in some feasible implementations, the bottom plate 10 can be first installed on the machine table or guide rail of the sputtering machine, and then the guide mechanism 20 can be installed on the bottom plate 10; in other feasible implementations, the bottom plate 10 and the guide mechanism 20 can be assembled first, and then the assembled guide device can be installed on the machine table or guide rail of the sputtering machine, and the present application does not limit the order of sequence); then the transmission of the sputtering machine is installed. The bar is arranged in the guide portion 2111 of the guide block 21. In this way, during the movement of the transmission bar, the guide portion 2111 of the guide block 21 can guide the movement of the transmission bar to prevent the transmission bar from deviating during the transmission process. In addition, the present application sets the guide mechanism 20 on the base plate 10 for sliding, and allows the guide mechanism 20 to slide on the base plate 10 along the width direction of the transmission bar. In this way, when the transmission bar deviates, the guide block 21 can be driven to slide along the width direction of the transmission bar to adjust the position of the transmission bar, thereby realizing the deviation correction of the transmission bar.

[0038] To summarize, the guiding device provided in the present application includes a base plate 10 and a guiding mechanism 20 slidably connected to the base plate 10 along a first direction a; the guiding mechanism 20 includes a guiding block 21, a guiding portion 2111 is provided on the guide block 21, and a transmission bar of the sputtering machine is arranged in the guiding portion 2111; the guiding block 21 is driven to slide on the base plate 10, and can drive the transmission bar to move along the first direction a, and the first direction a is the width direction of the transmission bar. When the guiding device provided by the present application is in use, the base plate 10 is fixed to the machine table or guide rail of the sputtering machine, and the transmission bar of the sputtering machine is arranged in the guide part 2111 of the guide block 21, so that when the sputtering machine is working, the guide part 2111 can guide the movement direction of the transmission bar, and can prevent the transmission bar from running off course during the operation of the sputtering machine; in addition, the present application connects the guide mechanism 20 to the base plate 10 by sliding, so that even if the transmission bar runs off course, the present application can also drive the guide block 21 to move along the width direction of the transmission bar on the base plate 10 to correct the deviation of the transmission bar. In this way, the present application can ensure the working reliability and accuracy of the transmission bar, thereby improving the sputtering uniformity of the sputtering machine.

[0039] Optionally, please refer to Figure 2 and Figure 3, the side of the guide block 21 facing away from the bottom plate 10 is provided with two protrusions 211 arranged at intervals, and the two protrusions 211 cooperate with each other to form a guide portion 2111. In other words, the guide portion 2111 can be formed by providing two protrusions 211 on the guide block 21. In this way, the transmission bar is located in the gap between the two protrusions 211 (i.e., the guide portion 2111). It should be noted that the two protrusions 211 are arranged along the first direction a.

[0040] It should be noted that the protrusion 211 may be made of metal material. Of course, in other embodiments, non-metallic materials may also be used.

[0041] In order to avoid the normal transmission of the transmission bar being affected by the distance between the two protrusions 211 being too narrow, in this embodiment, the distance between the two protrusions 211 is equal to or greater than the size of the transmission bar along its width direction. In addition, in order to make the guiding effect of the guide portion 2111 better, the distance between the two protrusions 211 should not be too large. For example, in this embodiment, the transmission bar is located in the middle of the guide portion 2111, and there is a certain gap between the two opposite sides of the transmission bar along its width direction and the two protrusions 211. Among them, the specific size of the gap can be determined by those skilled in the art according to actual conditions, and this application does not make any specific restrictions.

[0042] To better guide the transmission bar, in this embodiment, the size of the two protrusions 211 along the second direction b is optionally greater than the size of the transmission bar along the second direction b, and the second direction b is the thickness direction of the transmission bar. In short, the height of the two protrusions 211 is greater than the thickness of the transmission bar, so that the transmission bar is located in the guide part 2111 as a whole, and the guiding effect of the guide part 2111 is better.

[0043] Optionally, see Figure 1 The bottom plate 10 is provided with a sliding groove 11 extending along the first direction a, the guide mechanism 20 is clamped in the sliding groove 11, and at least a portion of the guide block 21 of the guide mechanism 20 extends out of the sliding groove 11. By setting the sliding groove 11, at least a portion of the guide mechanism 20 can be arranged in the sliding groove 11, and the size of the guide device along the second direction b (i.e., the size in the height direction) can be reduced.

[0044] In this embodiment, at least a portion of the guide block 21 extends out of the sliding slot 11 , and the guide portion 2111 is located on the portion of the guide block 21 extending out of the sliding slot 11 .

[0045] Please refer to Figure 2 Optionally, a drain trough 12 is further provided on the bottom plate 10, and the drain trough 12 is connected to the sliding groove 11. The drain trough 12 is used to remove dust or debris to prevent the transmission mechanism of the sputtering machine from being polluted by dust.

[0046] It should be noted that the sliding groove 11 can also play a role in removing dust or debris. In this embodiment, the sliding groove 11 and the drainage groove 12 are connected to each other. Figure 2 As shown. Exemplarily, the sliding groove 11 and the drain groove 12 may be perpendicular to each other.

[0047] Alternatively, if Figure 2 As shown, the guide mechanism 20 may further include a mounting plate 22 and a connecting block 23, wherein the mounting plate 22 and the guide block 21 are distributed on opposite sides of the connecting block 23, and the mounting plate 22 and the guide block 21 are connected via the connecting block 23. The manner in which the connecting block 23 connects the mounting plate 22 and the guide block 21 is not limited in this application, for example, in a feasible implementation, the mounting plate 22, the connecting block 23 and the connecting block 23 may be sequentially connected together by screws.

[0048] Or, in another possible implementation, see Figures 2 to 4 A threaded hole 231 is provided on the connecting block 23, the guide block 21 includes a first body 212 and a first protruding shaft 213 protruding from the first body 212 on a side close to the connecting block 23, and the guide portion 2111 is provided on a side of the first body 212 away from the first protruding shaft 213; the mounting plate 22 includes a second body 221 and a second protruding shaft 222 protruding from the second body 221 on a side close to the connecting block 23, the first protruding shaft 213 and the second protruding shaft 222 are both provided with external threads adapted to the threaded hole 231, the guide block 21 is screwed to one side of the connecting block 23 through the first protruding shaft 213, and the mounting plate 22 is screwed to the other side of the connecting block 23 through the second protruding shaft 222.

[0049] That is, the three are connected by screwing the first protruding shaft 213 on the guide block 21 to one side of the connecting block 23 and screwing the second protruding shaft 222 on the mounting plate 22 to the other side of the connecting block 23 .

[0050] It should be noted that the first protruding shaft 213 and the second protruding shaft 222 can not only be connected to the connecting block 23, but also can be used to suspend the guide block 21 as needed to adjust the height of the guide block 21 relative to the connecting block 23. Similarly, the height of the mounting plate 22 relative to the connecting block 23 can also be adjusted by suspending the mounting plate 22.

[0051] Of course, the guide block 21 including the first protrusion 213 and the mounting plate 22 including the second protrusion 222 are merely examples. In other embodiments, threaded holes 231 may be respectively provided on the guide block 21 and the mounting plate 22, and correspondingly, protrusions with external threads may be respectively provided on opposite sides of the connecting block 23.

[0052] In order to improve the reliability of the guide mechanism 20 when sliding on the bottom plate 10, optionally, the connection block 23 is located in the sliding groove 11, the first body 212 is located outside the sliding groove 11 and overlaps with one side of the bottom plate 10, and the second body 221 is located outside the sliding groove 11 and overlaps with the other side of the bottom plate 10. In this way, the first body 212 and the second body 221 are in surface contact with the two opposite sides of the bottom plate 10, respectively, which is more reliable when driving the guide mechanism 20 to slide on the bottom plate 10.

[0053] Optionally, the mounting plate 22 may be provided with a plurality of positioning holes 223. In this way, the mounting plate 22 may be provided with other devices through the positioning holes 223. Thus, the side of the mounting plate 22 close to the guide block 21 is closely arranged on the bottom plate 10, which can play an auxiliary role when the guide mechanism 20 slides; the side of the mounting plate 22 away from the guide block 21 may also be used as a placement platform to install or position other devices. In this way, the mounting plate 22 can be used on both sides.

[0054] Furthermore, in this embodiment, in order to make the bottom plate 10 and the machine table or guide rail of the sputtering machine fixed more firmly, optionally, the bottom plate 10 may be provided with fixing holes 13 on opposite sides along the first direction a, and the fixing holes 13 are used to be fixed to the machine table of the sputtering machine through a connecting member, such as Figure 1 shown.

[0055] Another aspect of the present invention provides a sputtering machine, which includes the above-mentioned guide device. Since the specific structure and technical effects of the guide device have been elaborated and explained in detail above, the present application will not repeat them here.

[0056] When the sputtering machine provided by the present application is in use, the base plate 10 of the guide device is fixed on the machine table or guide rail of the sputtering machine, and the transmission bar of the sputtering machine is arranged in the guide part 2111 of the guide block 21. In this way, when the sputtering machine is working, the guide part 2111 can guide the movement direction of the transmission bar to prevent the transmission bar from running off during the operation of the sputtering machine. In addition, when the transmission bar runs off, the present application can drive the guide block 21 to move along the width direction of the transmission bar on the base plate 10 to correct the transmission bar. In this way, the working reliability and accuracy of the transmission bar can be guaranteed, thereby improving the sputtering uniformity of the sputtering machine.

[0057] It should be noted that the sputtering machine also includes a transmission mechanism for driving the carrier to move, and the transmission mechanism uses a transmission motor to drive the belt or chain to rotate, thereby driving the transmission guide wheel to move so that the carrier moves forward, so that the substrate on the carrier is vacuum coated. This application does not limit the specific structure of the transmission mechanism, as long as it can achieve the above functions, and those skilled in the art can directly refer to existing equipment.

[0058] The above description is only an optional embodiment of the utility model and is not intended to limit the utility model. For those skilled in the art, the utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the utility model shall be included in the protection scope of the utility model.

[0059] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present utility model will not further describe various possible combinations.

Claims

1. A guiding device, characterized in that: It includes a base plate and a guide mechanism connected to the base plate for sliding along a first direction; the guide mechanism includes a guide block, the guide block is provided with a guide part, and a transmission bar of the sputtering machine is arranged in the guide part; the guide block is driven to slide on the base plate and can drive the transmission bar to move along the first direction, and the first direction is the width direction of the transmission bar.

2. The guide device according to claim 1, characterized in that: The guide block is provided with two spaced-apart protrusions on one side facing away from the bottom plate, and the two protrusions cooperate with each other to form the guide portion.

3. The guide device according to claim 2, characterized in that: The distance between the two protrusions is equal to or greater than the dimension of the transmission bar along its width direction; And / or, the size of the two protrusions along the second direction is greater than the size of the transmission bar along the second direction, and the second direction is the thickness direction of the transmission bar.

4. The guide device according to claim 1, characterized in that: The bottom plate is provided with a sliding groove extending along the first direction, the guide mechanism is clamped in the sliding groove, and at least a portion of the guide block of the guide mechanism extends out of the sliding groove.

5. The guide device according to claim 4, characterized in that: The bottom plate is also provided with a drainage groove, which is communicated with the sliding groove.

6. The guide device according to claim 4, characterized in that: The guide mechanism further comprises a mounting plate and a connecting block, wherein the mounting plate and the guide block are distributed on opposite sides of the connecting block, and the mounting plate and the guide block are connected via the connecting block.

7. The guide device according to claim 6, characterized in that: A threaded hole is provided on the connecting block, and the guide block includes a first body and a first protruding shaft protruding from the first body on a side close to the connecting block, and the guide portion is provided on a side of the first body away from the first protruding shaft; the mounting plate includes a second body and a second protruding shaft protruding from the second body on a side close to the connecting block, and both the first protruding shaft and the second protruding shaft are provided with external threads adapted to the threaded hole, the guide block is screwed to one side of the connecting block via the first protruding shaft, and the mounting plate is screwed to the other side of the connecting block via the second protruding shaft.

8. The guide device according to claim 7, characterized in that: The connecting block is located in the sliding groove, the first body is located outside the sliding groove and overlaps with one surface of the bottom plate, and the second body is located outside the sliding groove and overlaps with the other surface of the bottom plate.

9. The guide device according to claim 6, characterized in that: The mounting plate is provided with a plurality of positioning holes; And / or, the bottom plate is provided with fixing holes on two opposite sides along the first direction, respectively, and the fixing holes are used to be fixed on a machine platform of the sputtering machine through a connecting piece.

10. A sputtering machine, characterized in that: A guide device comprising any one of claims 1 to 9.

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