Quartz and silicon carbide cleaning and drying cabinet

Abstract

The utility model discloses a quartz and silicon carbide cleaning and drying cabinet which comprises a cabinet body, a first containing cavity is formed in the cabinet body, the cabinet body is provided with an inflation assembly, the first containing cavity is kept sealed compared with the outside of the cabinet body, and the inflation assembly inflates the first containing cavity. And the first placing cavity is kept in a positive pressure state relative to the outside of the cabinet body. The utility model provides a quartz and silicon carbide cleaning and drying cabinet which can reduce movable metal ion contamination and particle contamination.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor quartz or silicon carbide parts storage equipment, in particular to a quartz and silicon carbide clean drying cabinet. Background Art

[0002] As a major technological revolution since the 20th century, the semiconductor industry has an increasingly wide range of applications and is one of the most competitive fields in today's high-tech industry. At present, most semiconductor industries need to use quartz and silicon carbide parts. Because of its advantages such as high temperature resistance, corrosion resistance, good thermal stability, good light transmittance, and good electrical insulation. At the same time, the disadvantages of quartz and silicon carbide are also very significant. They are brittle and easy to break. In addition, improper storage of quartz and silicon carbide parts can easily introduce mobile metal ion contamination and particle contamination, which will directly affect the performance of semiconductor devices. Therefore, the clean and dry storage of quartz and silicon carbide parts has become a very important thing.

[0003] Chinese patent application publication number CN217995275 U, entitled "A quartz and silicon carbide clean drying cabinet", discloses a quartz and silicon carbide clean drying cabinet, a rotating mechanism, the rotating mechanism comprising a base, a rotating disk, a rotating rod and at least two partitions, the rotating disk is movably connected to the base, and the rotating disk is sleeved with the rotating rod at the center, the partitions are arranged on the rotating disk with the rotating rod as the center, one end of the partition extends horizontally to the surface of the rotating rod and forms a fixed connection, the other end of the partition extends horizontally to the edge of the rotating disk, the rotating disk and the partition form a first A chamber; a placement mechanism, the placement mechanism includes a placement plate, at least two support parts, at least two fixing components and at least two U-shaped grooves, the placement plate is sleeved on the rotating rod in the vertical direction, and the placement plate is coaxially arranged above the rotating disk, at least two U-shaped grooves are arranged on the placement plate, the support part is arranged at the bottom of the placement plate and is located between adjacent U-shaped grooves, the fixing component is arranged on the placement plate, and the two ends of the fixing component are respectively connected to the opening of the U-shaped groove to form a second chamber, and the positions of the first chamber and the second chamber match. However, the device adopts an ordinary placement cabinet and a rotating disk structure in the cabinet, and the quartz tube and silicon carbide tube are placed at various positions on the rotating disk, and the quartz tube and silicon carbide tube are taken and placed by rotating the rotating disk. However, when people take and place the quartz tube and silicon carbide tube, the rotating disk is very easy to rotate autonomously and cannot be fixed, which makes it very inconvenient to take the quartz tube and silicon carbide tube. In addition, the cleanliness of traditional storage cabinets cannot be guaranteed. Quartz and silicon carbide parts are very easy to introduce movable metal ion contamination and particle contamination, resulting in serious product scrapping. The above problems have not yet been solved. Utility Model Content

[0004] In order to overcome the deficiencies in the prior art, the utility model provides a quartz and silicon carbide parts clean drying cabinet, which has the advantages of reducing movable metal ion contamination and particle contamination.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A clean drying cabinet for quartz and silicon carbide parts comprises a cabinet body, wherein the cabinet body has a first placement cavity, and is characterized in that the cabinet body is provided with an inflation component, the first placement cavity remains sealed compared to the outside of the cabinet body, and the inflation component inflates the first placement cavity to keep the first placement cavity in a positive pressure state relative to the outside of the cabinet body.

[0007] By adopting the above technical solution, it can be seen that there is a first placement cavity in the cabinet for storing quartz and silicon carbide parts. The first placement cavity is in a sealed state in the cabinet. By inflating the sealed first placement cavity with air through an inflation component arranged in the cabinet, the first placement cavity can be placed in a positive pressure state. At this time, external air cannot flow from the external low-pressure area into the internal high-pressure area, thereby further effectively preventing the entry of external pollutants.

[0008] Furthermore, the cabinet is provided with an exhaust component, and the exhaust component is communicated with the first placement cavity.

[0009] By adopting the above-mentioned technical solution, it can be seen that in order to avoid excessive pressure in the cabinet, an exhaust component needs to be set up to ensure that the pressure in the cabinet can be maintained within a safe range. By setting up the exhaust component, the risk of cabinet bulging due to excessive air pressure is greatly reduced, thereby improving the overall safety performance of the clean drying cabinet.

[0010] Furthermore, the exhaust assembly includes an exhaust pipe and a regulating valve, wherein the regulating valve is connected to one end of the exhaust pipe to change the exhaust size of the exhaust pipe.

[0011] ]Adopting the above-mentioned technical scheme, it can be known that the exhaust component includes an exhaust pipe and a regulating valve. The exhaust pipe is used to discharge the gas in the cabinet to the external environment. The regulating valve is connected to one end of the exhaust pipe to control the exhaust size of the exhaust pipe. The exhaust speed of the gas in the cabinet can be controlled by the regulating valve to achieve the regulation of the pressure in the cabinet. When it is necessary to reduce the pressure in the cabinet, the opening degree of the regulating valve can be increased to speed up the exhaust speed; when it is necessary to maintain a certain pressure, the opening degree of the regulating valve can be reduced to slow down the exhaust speed, thereby achieving flexible adjustment of the pressure. Since the pressure is adjustable, the clean drying cabinet can adapt to different working environments and storage requirements, thereby improving the versatility and adaptability of the equipment.

[0012] Furthermore, a placement component is provided in the first placement cavity, and the inflation direction of the inflatable component is directly opposite to the placement component.

[0013] By adopting the above-mentioned technical solution, it can be known that the inflation direction of the inflation component is facing the placement component, and air can be blown directly to the placement part where the quartz is placed. The direct blowing method can more effectively remove dust and tiny particles on the surface of the quartz, and can ensure that the blown airflow directly acts on the quartz parts, thereby achieving the best cleaning effect and improving the cleaning efficiency of the quartz parts.

[0014] Furthermore, a rotating assembly is provided in the first placement cavity, the rotating assembly is fixedly connected to the placement assembly, and a ratchet pawl assembly for enabling the rotating assembly to rotate in one direction is provided on the rotating assembly.

[0015] By adopting the above-mentioned technical solution, the rotating component is fixedly connected to the placement component. It can be seen that the movement of the placement component is achieved by the rotation of the rotating component. The rotating component includes a ratchet and a pawl. Through the cooperation of the ratchet and the pawl, the rotating component can perform unidirectional intermittent motion at a specific position, ensuring that the placement component can be accurately moved to the specified position when needed, and stay at this position and remain stable.

[0016] Furthermore, the cabinet body also includes a second placement cavity, and the second placement cavity is communicated with the first placement cavity.

[0017] By adopting the above-mentioned technical solution, it can be known that since the inflation component inflates the first placement cavity, and the second placement cavity is connected to the first placement cavity, the gas can flow freely between the two cavities, which helps to reduce the accumulation of dust and impurities, thereby improving the cleanliness of quartz and silicon carbide parts.

[0018] Furthermore, the exhaust assembly is connected to the second placement cavity.

[0019] By adopting the above technical solution, it can be known that connecting the exhaust component with the second placement chamber allows the exhaust component to directly act on the second placement chamber, and discharge the gas from the first placement chamber and the second placement chamber at the same time, which can better improve the working environment in the entire clean drying cabinet.

[0020] Furthermore, the placement assembly includes a quartz placement area, a limiter, a limiter connecting plate, a fixing member and a rotating rod, the quartz placement area is placed on the ratchet, the limiter and the limiter connecting plate are detachably connected through a fixing member to form a limiter, the limiter connecting plate is sleeved on the rotating rod, and the ratchet is fixedly connected to the rotating rod.

[0021] By adopting the above-mentioned technical solution, it can be known that in order to better stabilize the quartz in the quartz placement area, the limiting part formed by the limiting part and the limiting part connecting plate can avoid movement or overturning due to vibration or other external forces, thereby greatly improving the stability of the quartz during the placement process. The limiting part connecting plate is sleeved on the rotating rod so that the limiting part can move with the movement of the rotating rod, and the ratchet is fixedly connected to the rotating rod, which helps to improve the stable placement of the quartz.

[0022] Furthermore, the placement assembly is provided with a plurality of partitions, and the partitions are evenly distributed along the circumference of the rotating rod.

[0023] By adopting the above-mentioned technical solution, it can be seen that by setting multiple partitions on the placement component and evenly distributing them along the circumference of the rotating rod, the entire placement area can be divided into multiple independent areas, each of which can be used to place different quartz or silicon carbide parts, thereby achieving physical isolation between objects.

[0024] Furthermore, the quartz placement area is provided with a placement groove, and the placement groove is provided with a flexible soft pad.

[0025] By adopting the above-mentioned technical solution, it can be seen that the design of the placement groove allows the quartz pieces to be placed in a clear position, avoiding collisions with each other due to random placement. At the same time, the flexible cushion inside the placement groove provides an additional buffer layer, further reducing the impact and friction that the quartz pieces may be subjected to during the placement process.

[0026] The beneficial effects of the utility model are: (1) the cabinet is placed in a stable positive pressure state through the cooperation of the inflation component and the exhaust component; (2) the placement component is placed in a stable state at a specific position through the cooperation of the ratchet and the pawl. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is a structural schematic diagram of the utility model;

[0028] Figure 2 This is a schematic diagram of the bottom drawer structure of the utility model;

[0029] Figure 3 It is a side structural schematic diagram of the utility model;

[0030] Figure 4 This is a schematic diagram of the structure of the fixing ring connecting plate of the utility model;

[0031] Figure 5 This is a schematic diagram of the structure of the rotating disk of the utility model;

[0032] Figure 6 This is a schematic diagram of the structure of the outer ring gear and the ratchet pawl of the utility model;

[0033] Figure 7This is a schematic diagram of the structure of the outer ring placement component of the utility model;

[0034] Figure 8 This is a schematic diagram of the bottom structure of the bearing of the utility model;

[0035] Fig. 9 This is a schematic diagram of the top structure of the bearing of the utility model;

[0036] Fig.10 It is a schematic diagram of the structure of the exhaust system of the utility model.

[0037] In the figure: 1, cabinet; 11, first placement cavity; 12, inflation assembly; 121, handle; 122, high efficiency filter; 123, high purity nitrogen inlet channel; 124, fan; 13, door panel; 131, door handle; 14, second placement cavity; 141, second through hole; 15, placement plate; 151, first through hole; 152, injection pipe groove; 153, TC groove; 154, TC fixing ring; 161, quartz placement area; 162, limiter; 1 63. Limiting piece connecting plate; 164. Fixing piece; 165. Rotating rod; 1651. Partition plate; 1652. Top fixing ring; 166. Bearing; 1661. Fixing hole; 1662. Bearing bottom retaining ring; 1663. Bearing top retaining ring; 1611. Placement groove 171. Exhaust pipe; 172. Regulating valve; 181. Ratchet; 182. Ratchet pawl; 19. Oxygen concentration detector; 183. Limiting block; 184. Spring fixing block; 185. Spring. DETAILED DESCRIPTION

[0038] The utility model is further described below in conjunction with the accompanying drawings and specific embodiments.

[0039] Embodiment 1:

[0040] like Figure 1 As shown, a clean drying cabinet for quartz and silicon carbide parts includes a cabinet body 1, wherein the cabinet body 1 has a first placement cavity 11, and the cabinet body 1 is provided with an inflation component 12. The first placement cavity 11 remains sealed compared to the outside of the cabinet body 1, and the inflation component 12 inflates the first placement cavity 11 to keep the first placement cavity 11 in a positive pressure state relative to the outside of the cabinet body 1.

[0041] It can be understood that the cabinet 1 has a first placement cavity 11 for storing quartz and silicon carbide parts. The first placement cavity is in a sealed state in the cabinet 1. By inflating the sealed first placement cavity 11 with air through the inflation component 12 provided in the cabinet 1, the first placement cavity 11 can be placed in a positive pressure state. At this time, external air cannot flow from the external low-pressure area into the internal high-pressure area, thereby further effectively preventing the entry of external pollutants.

[0042] Preferably, in the present embodiment, the inflation component 12 selects an FFU device, and the FFU device is fixed on the top of the cabinet 1. At the same time, for the convenience of installation, handles 121 are respectively provided on both sides of the FFU device. Furthermore, a fan 124 and a high-efficiency filter 122 are provided in the FFU device, and a high-purity nitrogen inlet pipe 123 is also installed on the side wall of the cabinet 1. The high-purity nitrogen inlet pipe is connected to the fan 124. The high-efficiency filter 122 further filters the high-purity nitrogen and then fills the high-purity nitrogen into the relatively sealed cabinet 1 through the fan 124.

[0043] Preferably, the cabinet body 1 is provided with a door panel 13, which is symmetrically arranged along the center of the cabinet body 1 and is made of transparent PVC material. A door handle 131 for convenient pushing and pulling is also provided on the outside of the door panel 13, which is fixedly connected to the door panel 13 by bolts. The transparent door panel 13 allows the operator to observe the specific situation inside the cabinet without opening the door, thereby improving work efficiency.

[0044] Preferably, in order to ensure the safety of the operator when opening the door panel 13 of the cabinet 1, since the cabinet 1 is relatively sealed and there may be residual nitrogen that has not been completely discharged, an oxygen concentration detector 19 is added to the inner side of the cabinet 1 near the door panel 13. This device can timely monitor and display the changes in the oxygen concentration in the cabinet, thereby effectively preventing the risk of suffocation caused by excessive inhalation of nitrogen by the operators, and ensuring their life safety and health.

[0045] Preferably, the cabinet body 1 has wheels with a locking function at the bottom, which not only allows the entire cabinet body 1 to be easily moved when needed, but the locking function of the wheels also ensures that it can be firmly fixed to the ground when stable placement is required, while providing convenience and stability.

[0046] Preferably, a placement component is provided in the first placement cavity 11, and the inflation direction of the inflation component 12 faces the placement component.

[0047] It can be understood that the inflation direction of the inflation component 12 is facing the placement component, and can blow air directly to the placement part where the quartz is placed. The direct blowing method can more effectively remove dust and tiny particles on the surface of the quartz, and can ensure that the blown airflow directly acts on the quartz part, thereby achieving the best cleaning effect and improving the cleaning efficiency of the quartz part.

[0048] Furthermore, the cabinet 1 is provided with an exhaust component, and the exhaust component is communicated with the first placement cavity 11.

[0049] It is understandable that in order to avoid excessive pressure in the cabinet 1, an exhaust component needs to be set to ensure that the pressure in the cabinet 1 can be maintained within a safe range. By setting up the exhaust component, the risk of the cabinet 1 exploding is greatly reduced, and the overall safety performance of the clean drying cabinet is improved.

[0050] Preferably, the cabinet 1 further includes a second placement cavity 14 , and the second placement cavity 14 is communicated with the first placement cavity 11 .

[0051] It can be understood that since the inflation component 12 inflates the first placement chamber 11 and the second placement chamber 14 is connected to the first placement chamber 11, the gas can flow freely between the two chambers to help reduce the accumulation of dust and impurities, thereby improving the cleanliness of the quartz and silicon carbide parts.

[0052] Preferably, in the present embodiment, the first placement cavity 11 is configured as a quartz working area, the second placement cavity 14 is configured as a push-pull drawer, and the push-pull drawer is disposed below the first placement cavity 11 for storing quartz parts. In particular, the quartz working area and the push-pull drawer are connected via a plate having a plurality of first through holes 151, and the plate is a placement plate 15, so that the gas released by the inflation component 12 can reach the push-pull drawer to further clean the quartz parts stored in the push-pull drawer. Furthermore, the bottom of the push-pull drawer is also configured as a bottom plate having a plurality of second through holes 141. This design can allow the contaminated particles to smoothly fall to the bottom of the cabinet 1, thereby further achieving the purpose of cleaning.

[0053] Preferably, the placement plate 15 is also provided with an injection pipe groove 152 and a TC slot 153 for placing the injection pipe, and a TC fixing ring 154 is also provided on the side wall corresponding to the TC slot 153. By adding the injection pipe groove 152 and the TC slot 153, the equipment space can be maximized.

[0054] Furthermore, the exhaust component includes an exhaust pipe 171 and a regulating valve 172 . The regulating valve 172 is connected to one end of the exhaust pipe 171 to change the exhaust size of the exhaust pipe 171 .

[0055] It can be understood that the exhaust component includes an exhaust pipe 171 and a regulating valve 172. The exhaust pipe 171 is used to discharge the gas in the cabinet 1 to the external environment. The regulating valve 172 is connected to one end of the exhaust pipe 171 and is used to control the exhaust size of the exhaust pipe 171. The regulating valve 172 can be used to control the exhaust speed of the gas in the cabinet 1 to achieve the adjustment of the pressure in the cabinet 1. When it is necessary to reduce the pressure in the cabinet 1, the opening degree of the regulating valve 172 can be increased to speed up the exhaust speed; when it is necessary to maintain a certain pressure, the opening degree of the regulating valve 172 can be reduced to slow down the exhaust speed, thereby achieving flexible adjustment of the pressure. Since the pressure is adjustable, the clean drying cabinet can adapt to different working environments and storage requirements, thereby improving the versatility and adaptability of the equipment.

[0056] Preferably, the exhaust assembly is connected to the second placement cavity 14 .

[0057] It can be understood that by connecting the exhaust component with the second placement chamber 14, the exhaust component can directly act on the second placement chamber 14, and discharge the gas in the first placement chamber 11 and the second placement chamber at the same time, which can better improve the working environment in the entire clean drying cabinet.

[0058] Preferably, in this embodiment, four sets of exhaust components are installed on the back side of the cabinet 1 , wherein one end of the exhaust pipe 171 is connected to the push-pull drawer, and the other end is threadedly connected to the regulating valve 172 .

[0059] Preferably, the exhaust pipe 171 is made of polypropylene plastic.

[0060] Embodiment 2:

[0061] On the basis of the above embodiment, a rotating assembly is provided in the first placement cavity 11, and the rotating assembly is fixedly connected to the placement assembly. The rotating assembly is provided with a ratchet 181 and a pawl 182 assembly for making the rotating assembly rotate unidirectionally.

[0062] It can be understood that, by the fixed connection between the rotating assembly and the placing assembly, it can be known that the movement of the placing assembly is achieved by the rotation of the rotating assembly.

[0063] Furthermore, the rotating assembly includes a limit block 183, a spring fixing block 184, a spring 185, a ratchet 181 and a pawl 182. The limit block 183 and the spring fixing block 184 are welded to the placement plate 15. One end of the spring 185 is connected to the spring fixing block 184, and the other end is against the pawl 182. Through the cooperation of the ratchet 181 and the pawl 182, the rotating assembly can perform unidirectional intermittent motion at a specific position, ensuring that the placement assembly can be accurately moved to the specified position when needed, and stay at that position and remain stable.

[0064] Furthermore, the placement assembly includes a quartz placement area 161, a limiter 162, a limiter connecting plate 163, a fixing member 164 and a rotating rod 165, the quartz placement area 161 is placed on the ratchet 181, the limiter 162 and the limiter connecting plate 163 are detachably connected through the fixing member 164 to form a limiter portion, the limiter ring connecting plate is sleeved on the rotating rod 165, and the ratchet 181 is fixedly connected to the rotating rod 165.

[0065] It can be understood that in order to better stabilize the quartz in the quartz placement area 161, the limiting portion formed by the limiting member 162 and the limiting member connecting plate 163 avoids movement or overturning due to vibration or other external forces, thereby greatly improving the stability of the quartz during the placement process. The limiting member connecting plate 163 is sleeved on the rotating rod 165, so that the limiting portion can move with the movement of the rotating rod 165, and the ratchet 181 is fixedly connected to the rotating rod 165 by the bearing 166, which helps to improve the stable placement of the quartz.

[0066] Preferably, the bearing 166 is provided with a fixing hole 1661, a bearing bottom retaining spring 1662 and a bearing top retaining spring 1663, the fixing hole 1661 is connected to the placement plate 15 by a thread, the bearing bottom retaining spring 1662 and the bearing top retaining spring 1663 are fixedly connected to the bottom fixing and top fixing rings 1652, thereby realizing the rotation of the rotating rod 165, making it convenient for personnel to take the quartz or silicon carbide furnace tube.

[0067] Preferably, the limiting member 162 may be an anti-slip ring or an anti-slip soft rope. In the present embodiment, an anti-slip design is adopted, and the material is specifically polytetrafluoroethylene.

[0068] Preferably, the fixing member 164 may be a fixed joint, and the limiting member 162 and the limiting member connecting plate 163 may be connected via a fixed plug pin.

[0069] Furthermore, a plurality of partitions 1651 are provided on the placement assembly, and the partitions 1651 are evenly distributed along the circumference of the rotating rod 165 .

[0070] It can be understood that in this embodiment, by setting four partitions 1651 on the placement assembly and evenly distributing them circumferentially along the rotating rod 165, the entire placement area can be divided into multiple independent areas, each of which can be used to place different quartz or silicon carbide parts, thereby achieving physical isolation between objects.

[0071] Preferably, a top fixing ring 1652 is further provided at the top of the rotating rod 165 to better stabilize the quartz piece. The top fixing ring 1652 adopts an anti-slip design and is specifically made of polytetrafluoroethylene.

[0072] Preferably, the quartz placement area 161 is provided with a placement groove 1611, and the placement groove 1611 is provided with a flexible cushion.

[0073] It can be understood that the design of the placement groove 1611 allows the quartz pieces to be clearly positioned when placed, avoiding collisions caused by random placement. At the same time, the flexible cushion inside the placement groove 1611 provides an additional buffer layer, further reducing the impact and friction that the quartz pieces may be subjected to during the placement process.

[0074] Preferably, the interior of the placement groove 1611 is coated with a Teflon flexible cushion.

[0075] In addition to the above-mentioned preferred embodiments, the present invention also has other implementation modes. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative work are within the scope of protection requested by the present invention.

Claims

1. A quartz and silicon carbide clean drying cabinet, comprising a cabinet body, wherein the cabinet body has a first placement cavity, characterized in that: The cabinet is provided with an inflatable component, the first placement cavity is kept sealed compared to the outside of the cabinet, and the inflatable component inflates the first placement cavity to keep the first placement cavity in a positive pressure state relative to the outside of the cabinet.

2. A quartz and silicon carbide clean drying cabinet according to claim 1, characterized in that: The cabinet is provided with an exhaust component, and the exhaust component is communicated with the first placement cavity.

3. A quartz and silicon carbide clean drying cabinet according to claim 2, characterized in that: The exhaust assembly comprises an exhaust pipe and a regulating valve, wherein the regulating valve is connected to one end of the exhaust pipe to change the exhaust size of the exhaust pipe.

4. A quartz and silicon carbide clean drying cabinet according to claim 1, characterized in that: A placement component is disposed in the first placement cavity, and the inflation direction of the inflation component faces the placement component.

5. A quartz and silicon carbide clean drying cabinet according to claim 4, characterized in that: A rotating assembly is arranged in the first placement cavity, the rotating assembly is fixedly connected to the placement assembly, and a ratchet pawl assembly for making the rotating assembly rotate in one direction is arranged on the rotating assembly.

6. A quartz and silicon carbide clean drying cabinet according to claim 2, characterized in that: The cabinet also includes a second placement cavity, which is communicated with the first placement cavity.

7. A quartz and silicon carbide clean drying cabinet according to claim 6, characterized in that: The exhaust component is connected to the second placement cavity.

8. A quartz and silicon carbide clean drying cabinet according to claim 5, characterized in that: The placement assembly includes a quartz placement area, a limiter, a limiter connecting plate, a fixing member and a rotating rod. The quartz placement area is placed on the ratchet. The limiter and the limiter connecting plate are detachably connected through a fixing member to form a limiter. The limiter connecting plate is sleeved on the rotating rod, and the ratchet is fixedly connected to the rotating rod.

9. A quartz and silicon carbide clean drying cabinet according to claim 8, characterized in that: The placement assembly is provided with a plurality of partitions, and the partitions are evenly distributed along the circumference of the rotating rod.

10. A quartz and silicon carbide clean drying cabinet according to claim 8, characterized in that: The quartz placement area is provided with a placement groove, and the placement groove is provided with a flexible soft pad.

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