Laser interferometer with function of weakening strong light of reflector

Abstract

The utility model discloses a laser interferometer with a reflector strong light weakening function, and belongs to the field of laser interferometers. The laser interferometer with the function of weakening the strong light of the reflector comprises an interferometer main body which is provided with an interferometer lens; the box body is provided with two open side surfaces, and one open side surface of the box body is detachably connected with the side surface, on which the interferometer lens is arranged, of the interferometer main body; the light reducing assembly is rotatably arranged in the box body, when the light reducing assembly rotates to a first position, the light reducing assembly reduces the laser entering the interferometer lens, and when the light reducing assembly rotates to a second position, the light reducing assembly does not reduce the laser entering the interferometer lens. The laser interferometer provided by the utility model is provided with the dimming assembly, so that the intensity of light reflected back to the lens of the interferometer can be weakened, and the accuracy and reliability of surface type measurement are improved.

Description

Technical Field

[0001] The utility model belongs to the field of laser interferometers, in particular to a laser interferometer with the function of reducing the strong light of a reflector. Background Art

[0002] With the development of optical technology, the application of optical components is becoming more and more extensive, so more stringent requirements are put forward for the quality inspection of optical components. When using a strong light reflector for surface measurement, strong light may have a significant impact on the surface measurement results. For example, the direct reflection of strong light may interfere with the precise positioning of the measuring laser, resulting in increased measurement errors. This interference may affect the accuracy and repeatability of surface data. For some sensitive materials or surfaces, strong light may cause overexposure of the surface, thereby changing its physical or chemical properties. This change may be misunderstood as a change in surface shape. Strong light exposure may also cause excessive burden on equipment such as optical sensors or cameras, and long-term exposure may cause equipment performance degradation or damage. Utility Model Content

[0003] The purpose of the utility model is to overcome the shortcomings of the prior art and provide a laser interferometer with the function of reducing the strong light of the reflector.

[0004] The utility model is realized by the following technical scheme: a laser interferometer with the function of reducing the strong light of the reflector comprises:

[0005] an interferometer body, the interferometer body having an interferometer lens;

[0006] A box body, wherein the box body has two open sides, and one open side of the box body is detachably connected to a side of the interferometer body on which an interferometer lens is disposed;

[0007] The dimming component is rotatably disposed in the box. When the dimming component is rotated to a first position, the dimming component weakens the laser entering the interferometer lens. When the dimming component is rotated to a second position, the dimming component does not weaken the laser entering the interferometer lens.

[0008] Furthermore, the box is connected to the interferometer body via a snap-fit ​​connection.

[0009] Furthermore, the dimming component includes:

[0010] A rotating shaft, the rotating shaft is rotatably disposed in the box;

[0011] The light reduction structure is arranged on the outer side of the rotating shaft.

[0012] Furthermore, the light reduction structure includes:

[0013] A frame, one side of which is connected to the outer side of the rotating shaft;

[0014] The optical filter is embedded in the frame.

[0015] Furthermore, the dimming component further includes:

[0016] A handle, one end of which is connected to the rotating shaft, and the other end of which is located outside the box.

[0017] Furthermore, the handle is a Z-shaped structure.

[0018] Furthermore, the dimming component includes a filter. When the dimming component rotation axis is in a first position, the plane where the filter is located is parallel to the plane where the interferometer lens is located. When the dimming component is rotated to a second position, the plane where the filter is located is perpendicular to the plane where the interferometer lens is located. The orthographic projection of the filter on the plane where the interferometer lens is located does not overlap with the interferometer lens.

[0019] Furthermore, the laser interferometer further comprises:

[0020] The limiting structure is used to limit the dimming component to a first position or a second position.

[0021] Furthermore, the limiting structure includes:

[0022] A first magnetic track, wherein the first magnetic track is used to fix the dimming component at a first position;

[0023] The second magnetic track is used to fix the dimming component at a second position.

[0024] Furthermore, the first magnetic track is perpendicular to the second magnetic track.

[0025] Compared with the prior art, the utility model has the following advantages and beneficial effects: the laser interferometer in the utility model is provided with a light reduction component, which can reduce the intensity of light reflected back to the interferometer lens, thereby improving the accuracy and reliability of surface measurement. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The drawings described herein are used to provide a further understanding of the embodiments of the present utility model, constitute a part of this application, and do not constitute a limitation of the embodiments of the present utility model. In the drawings:

[0027] Figure 1 A schematic diagram of the structure of the laser interferometer in the utility model;

[0028] In the figure, 1 is the interferometer lens, 2 is the housing, 3 is the buckle, 4 is the shaft, 5 is the frame, 6 is the filter, 7 is the handle, 8 is the first magnetic track, and 9 is the second magnetic track. DETAILED DESCRIPTION

[0029] The technical solution of the utility model is further explained below with reference to the accompanying drawings and through specific implementation methods.

[0030] Among them, the drawings are only used for illustrative explanations, and they only represent schematic diagrams rather than actual pictures, and should not be understood as limitations on the present utility model. In order to better illustrate the embodiments of the present utility model, some parts of the drawings may be omitted, enlarged or reduced, and do not represent the size of the actual product. For those skilled in the art, it is understandable that some well-known structures and their descriptions in the drawings may be omitted.

[0031] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right", "inside", "outside", etc. appear to indicate the orientation or position relationship, it is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the position relationship in the drawings are only used for illustrative purposes and cannot be understood as a limitation on the present invention. For ordinary technicians in this field, the specific meanings of the above terms can be understood according to specific circumstances.

[0032] In the description of the present invention, unless otherwise clearly specified and limited, if the term "connection" or the like appears to indicate the connection relationship between components, the term should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two components or the interaction relationship between two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] like Figure 1 As shown, the utility model discloses a laser interferometer with the function of reducing the strong light of the reflector.

[0034] like Figure 1 As shown, the laser interferometer with the function of reducing the strong light of the reflector includes an interferometer body, a box 2 and a light reduction component.

[0035] The interferometer body has an interferometer lens 1, and the interferometer body can complete the relevant measurement functions of the laser interferometer. The interferometer lens 1 is arranged on one side of the interferometer body, for example, Figure 1 The middle interferometer lens 1 is located on the right side of the interferometer body.

[0036] The box 2 is detachably mounted on the side of the interferometer body where the interferometer lens 1 is disposed. In this embodiment, the box 2 is mounted on the interferometer body in a detachable structure, so that the box 2 can be easily disassembled and assembled. The box 2 is used to protect the components in the box 2. The box 2 has two open sides, and one of the open sides of the box 2 is connected to the side of the interferometer body where the interferometer lens 1 is disposed.

[0037] In some implementations of this embodiment, the box 2 is connected to the interferometer body via a buckle 3. For example, Figure 1 The right side of the middle interferometer body and the left side of the box 2 are connected by two upper and lower buckles 3, which increases the firmness of the connection.

[0038] The box 2 and the interferometer body may also be connected by a latch connection, a key connection or the like.

[0039] The dimming component is rotatably disposed in the housing 2, wherein when the dimming component is rotated to the first position, the dimming component attenuates the laser entering the interferometer lens 1, and when the dimming component is rotated to the second position, the dimming component does not attenuate the laser entering the interferometer lens 1. In this embodiment, the dimming function is turned on and off by rotating the dimming component, for example, when the dimming function needs to be turned on, the dimming component is rotated to the first position, and when the dimming function needs to be turned off, the dimming component is rotated to the second position.

[0040] In some implementations of the present embodiment, the dimming component includes a rotating shaft 4 and a dimming structure. The rotating shaft 4 is rotatably disposed in the box body 2, and the dimming structure is disposed on the outer side of the rotating shaft 4. When the rotating shaft 4 rotates, the dimming structure is driven to rotate, thereby realizing the switching of the dimming component between the first position and the second position.

[0041] In some implementations of this embodiment, the light reduction structure includes a frame 5 and a filter 6, one side of the frame 5 is connected to the outer side of the rotating shaft 4, and the filter 6 is embedded in the frame 5. The frame 5 is used to fix the filter 6 and protect the filter 6; the frame 5 is connected to the outer side to facilitate the rotation of the filter 6 and adjust the position of the filter 6. The filter 6 is used to reduce strong light, such as strong light from a high reflector; these implementations use a high-precision filter 6 to ensure that the accuracy of the filter 6 does not affect the accuracy of the surface shape test when the strong light is reduced.

[0042] For example, Figure 1 The middle frame 5 is a rectangular frame, and the filter 6 is embedded in the frame 5 to form a light reduction structure. The light reduction structure is arranged on the outer surface of the shaft 4. When the shaft 4 rotates, the frame 5 is driven to rotate together, thereby realizing the rotation of the light reduction component.

[0043] In some implementations of this embodiment, the dimming assembly further includes a handle 7, one end of which is connected to the rotating shaft 4, and the other end of which is located outside the box 2. In these implementations, by providing the handle 7, the dimming assembly can be conveniently rotated.

[0044] In some implementations of this embodiment, the handle 7 is a Z-shaped structure, which is convenient for rotation operation. The handle 7 can also be L-shaped, T-shaped or other shaped structures.

[0045] In some implementations of this embodiment, the dimming component includes a filter 6, and when the dimming component rotates to the first position, the plane where the filter 6 is located is parallel to the plane where the interferometer lens 1 is located, and when the dimming component rotates to the second position, the plane where the filter 6 is located is perpendicular to the plane where the interferometer lens 1 is located, and the orthographic projection of the filter 6 on the plane where the interferometer lens 1 is located does not overlap with the interferometer lens 1. For example, Figure 1 When the dimming component rotates to the first position, the filter 6 is parallel to the interferometer lens 1, and the laser emitted by the interferometer body passes through the interferometer lens 1 and the filter 6 in sequence, and the reflected laser received by the interferometer body passes through the filter 6 and the interferometer lens 1 in sequence; when the dimming component rotates to the second position, the filter 6 is perpendicular to the interferometer lens 1, and the orthographic projection of the filter 6 on the plane to which the interferometer lens 1 belongs does not overlap with the interferometer lens 1, and the laser emitted by the interferometer lens 1 or the reflected laser received only passes through the interferometer lens 1, and does not pass through the filter 6.

[0046] In some implementations of this embodiment, the laser interferometer further includes a limiting structure, and the limiting structure is used to limit the dimming component to the first position or the second position. In these implementations, the dimming component can only be in the first position or the second position to prevent the dimming component from shaking freely in the box 2.

[0047] In some implementations of this embodiment, the limiting structure includes a magnetic track, such as a first magnetic track 8 and a second magnetic track 9, wherein the first magnetic track 8 is used to fix the dimming component in the first position, and the second magnetic track 9 is used to fix the dimming component in the second position. The first magnetic track 8 and the second magnetic track 9 limit the dimming component by magnetic force. For example, when the attraction force from the first magnetic track 8 to the dimming component is greater than the attraction force from the second magnetic track 9, the dimming component is attracted and fixed in the first position; when the attraction force from the first magnetic track 8 to the dimming component is less than the attraction force from the second magnetic track 9, the dimming component is attracted and fixed in the second position; when the attraction force from the first magnetic track 8 to the dimming component is equal to the attraction force from the second magnetic track 9, the dimming component is rotated to limit the dimming component in the first position or the second position.

[0048] In some implementations of this embodiment, the first magnetic track 8 is perpendicular to the second magnetic track 9, for example, Figure 1 The first magnetic track 8 is perpendicular to the second magnetic track 9, and the first magnetic track 8 and the second magnetic track 9 form an L-shaped structure. The first magnetic track 8 and the second magnetic track 9 are used to fix the filter 6 and the frame 5 to prevent the filter 6 from shaking at will, avoid damaging the filter 6, and ensure the accuracy of subsequent measurements.

[0049] In this embodiment, when the rotating shaft 4 rotates the filter 6 to the first position, the filter 6 is parallel to the interferometer lens 1, and the laser can pass through the interferometer lens 1 and the filter 6 in a straight line to reach the strong light reflector to be measured. The reflected laser enters the interferometer lens 1 after passing through the filter 6, and then enters the interferometer body for data collection to complete the measurement; when the rotating shaft 4 rotates the filter 6 to the second position, the filter 6 is perpendicular to the interferometer lens 1, and the surface shape of low-reflection or transmission products can be tested.

[0050] The specific implementation methods described above further illustrate the purpose, technical solutions and beneficial effects of the utility model in detail. It should be understood that the above description is only the specific implementation method of the utility model and is not used to limit the protection scope of the utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A laser interferometer with a function of reducing the strong light of a reflector, characterized in that: include: an interferometer body, the interferometer body having an interferometer lens; A box body, wherein the box body has two open sides, and one open side of the box body is detachably connected to a side of the interferometer body on which an interferometer lens is disposed; The dimming component is rotatably disposed in the box. When the dimming component is rotated to a first position, the dimming component weakens the laser entering the interferometer lens. When the dimming component is rotated to a second position, the dimming component does not weaken the laser entering the interferometer lens.

2. The laser interferometer with the function of reducing the strong light of the reflector according to claim 1, characterized in that: The box body is connected to the interferometer body through a buckle.

3. The laser interferometer with the function of reducing the strong light of the reflector according to claim 1, characterized in that: The dimming component comprises: A rotating shaft, the rotating shaft is rotatably disposed in the box; The light reduction structure is arranged on the outer side of the rotating shaft.

4. The laser interferometer with the function of reducing the strong light of the reflector according to claim 3, characterized in that: The light reduction structure comprises: A frame, one side of which is connected to the outer side of the rotating shaft; The optical filter is embedded in the frame.

5. The laser interferometer with the function of reducing the strong light of the reflector according to claim 3, characterized in that: The light reduction component also includes: A handle, one end of which is connected to the rotating shaft, and the other end of which is located outside the box.

6. The laser interferometer with the function of reducing the strong light of the reflector according to claim 5, characterized in that: The handle is a Z-shaped structure.

7. The laser interferometer with the function of reducing the strong light of the reflector according to claim 1, characterized in that: The dimming component includes a filter. When the dimming component rotates to a first position, the plane where the filter is located is parallel to the plane where the interferometer lens is located. When the dimming component rotates to a second position, the plane where the filter is located is perpendicular to the plane where the interferometer lens is located. The orthographic projection of the filter on the plane where the interferometer lens is located does not overlap with the interferometer lens.

8. The laser interferometer with the function of reducing the strong light of the reflector according to claim 1, characterized in that: The laser interferometer also includes: The limiting structure is used to limit the dimming component to a first position or a second position.

9. The laser interferometer with the function of reducing the strong light of the reflector according to claim 8, characterized in that: The limiting structure comprises: A first magnetic track, wherein the first magnetic track is used to fix the dimming component at a first position; The second magnetic track is used to fix the dimming component at a second position.

10. The laser interferometer with the function of reducing the strong light of the reflector according to claim 9, characterized in that: The first magnetic track is perpendicular to the second magnetic track.

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