Wafer calibrator capable of increasing calibration range
By setting up an auxiliary calibration bracket on a standard wafer calibrator, the calibration error range is increased, and the problem of limited calibration range in the prior art is solved, and accurate calibration and transmission of wafers with large initial position deviations is achieved.
Patent Information
- Application Number
- CN202421298244.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-07
- Publication Date
- 2025-03-04
- Estimated Expiration
- 2034-06-07
AI Technical Summary
In the prior art, the calibration range of standard calibrators is limited, and it is impossible to effectively calibrate wafers with large initial position deviations, limiting the accurate transmission of wafers in the chamber.
By setting up an auxiliary calibration bracket on the basis of existing standard wafer calibrators, the calibration error range is increased, so that the calibrator can adapt to wafers with large initial position deviations.
The wafer calibration range is effectively expanded, ensuring accurate transmission of wafers in the chamber, and solving the problem of limited calibration range.
Smart Images
Figure CN222562667U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductor equipment, and in particular relates to a wafer calibrator with an increased calibration range. Background Art
[0002] In semiconductor equipment, robots are generally used for automatic wafer transfer, that is, the wafers that need to be processed by semiconductor processes are automatically transferred into the process chamber by the robot, or the wafers that have been processed by semiconductor processes are automatically transferred out of the process chamber. In this process, the wafer calibrator plays a role in ensuring that the wafer can be accurately transferred. Although the robot's control system will save the position information of each station for taking and placing wafers (including the center coordinate value of the wafer, the rotation angle of the robot, the extension length and the height position, etc.), as time goes by, there may be a slight displacement difference between the components in the process chamber, resulting in a deviation between the originally stored position information and the actual station. At this time, the appearance of the wafer calibrator will eliminate these slight deviations, so that the wafer can continue to be accurately transferred in the chamber.
[0003] However, in the existing technology in the same industry, the standard calibrator has a limited wafer calibration range, and some wafers have large initial position deviations and cannot use the calibrator with a limited calibration range, so their use is restricted. Therefore, a method is needed to increase the wafer calibration range. Utility Model Content
[0004] The utility model provides a wafer calibrator with increased calibration range, which aims to increase the wafer calibration error range on the basis of the existing standard wafer calibrator by setting an auxiliary calibration bracket, so that it can calibrate wafers with large initial position deviations and ensure accurate transmission of the wafer in the chamber, thereby solving the above-mentioned problem.
[0005] The technical solution of the utility model to solve the above technical problems is as follows:
[0006] The utility model provides a wafer calibrator with increased calibration range, comprising a calibrator body, a calibration sensor and a calibrator adsorption plate, wherein the calibration sensor and the calibrator adsorption plate are mounted on the top of the calibrator body, and further comprising: a calibrator chassis, wherein the calibrator body is fixedly mounted on the calibrator chassis; at least three auxiliary calibration brackets are evenly arranged on the calibrator chassis; the auxiliary calibration brackets are centered on the calibrator adsorption plate in plane projection, and the auxiliary calibration brackets are higher in vertical height than the top of the calibrator adsorption plate.
[0007] In some embodiments, the auxiliary calibration bracket includes an auxiliary calibration funnel, a vertical bracket, and a horizontal connecting bracket connected in sequence.
[0008] In some embodiments, the auxiliary calibration funnel is fixedly mounted on the top of the vertical bracket; the vertical bracket and the horizontal connecting frame are integrally formed into an L-shaped structure; and the horizontal connecting frame is detachably connected to the calibrator chassis.
[0009] In some embodiments, a plurality of rows of mounting holes are evenly formed on the horizontal connecting frame.
[0010] In some embodiments, each of the horizontal connecting frames is connected to the calibrator chassis through the same row of mounting holes.
[0011] In some embodiments, the side of the auxiliary calibration funnel facing the calibrator adsorption plate is a slope, and the slope of any auxiliary calibration funnel and the slopes of other auxiliary calibration funnels can form a funnel shape for auxiliary calibration of the wafer.
[0012] The beneficial effects of this application are:
[0013] The present application provides a wafer calibrator with an increased calibration range. By setting an auxiliary calibration bracket, the wafer calibration error range is increased on the basis of the existing standard wafer calibrator, so that it can calibrate wafers with large initial position deviations and ensure accurate transmission of the wafer in the chamber. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 This is a front view of the wafer aligner of this application.
[0015] Figure 2 A side view of the wafer aligner of the present application.
[0016] Figure 3 This is a top view of the wafer aligner of the present application.
[0017] Description of reference numerals:
[0018] Calibrator body-1; calibration sensor-11; calibrator adsorption plate-12; calibrator chassis-2; auxiliary calibration bracket-3; auxiliary calibration funnel-31; vertical bracket-32; horizontal connecting bracket-33; mounting hole-4. DETAILED DESCRIPTION
[0019] The principles and features of the present invention are described below in conjunction with the accompanying drawings. The examples given are only used to explain the present invention and are not used to limit the scope of the present invention.
[0020] In order to more clearly understand the above-mentioned purpose, features and advantages of the present application, the present application is further described in detail below in conjunction with the accompanying drawings and examples. It is to be understood that the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. The specific embodiments described herein are merely used to explain the present application, rather than to limit the present application. Based on the described embodiments of the present application, all other embodiments obtained by those of ordinary skill in the art belong to the scope of protection of the present application.
[0021] It should be noted that, in this document, relational terms such as “first” and “second” are merely used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations.
[0022] Figure 1 This is the main view of the wafer aligner of this application. Figure 2 A side view of the wafer aligner of the present application.
[0023] Combination Figure 1 as well as Figure 2 A wafer calibrator with an increased calibration range includes a calibrator body 1, a calibration sensor 11 and a calibrator suction plate 12, wherein the calibration sensor 11 and the calibrator suction plate 12 are installed on the top of the calibrator body 1, and also includes: a calibrator chassis 2, wherein the calibrator body 1 is fixedly installed on the calibrator chassis 2; at least three auxiliary calibration brackets 3 are evenly arranged on the calibrator chassis 2; the auxiliary calibration brackets 3 are centered on the calibrator suction plate 12 in plane projection, and the auxiliary calibration brackets 3 are higher than the top of the calibrator suction plate 12 in vertical height.
[0024] Specifically, the existing wafer calibrator generally detects the edge of the wafer through the calibration sensor 11, and drives the wafer with the wafer suction plate 12, so as to achieve the purpose of wafer position calibration. However, the displacement range of the wafer suction plate 12 is often limited, so it is impossible to accurately calibrate the wafer with a large initial position deviation. In this regard, the present solution adds a calibrator chassis 2 and an auxiliary calibration bracket 3 on the basis of the existing wafer calibrator, wherein the calibrator chassis 2 is used to install the calibrator body 1 and the auxiliary calibration bracket 3, the number of the auxiliary calibration bracket 3 is at least three, and the auxiliary calibration bracket 3 is evenly surrounded by the periphery of the calibrator body 1, and is centered on the calibrator suction plate 12 in the plane projection, and at the same time, the auxiliary calibration bracket 3 is higher than the top of the calibrator suction plate 12 in vertical height. The auxiliary calibration bracket 3 can pre-calibrate the wafer before the wafer is placed on the wafer suction plate 12, so that the larger position error of the wafer can be eliminated before the wafer is placed on the wafer suction plate 12, and then after the wafer is placed on the wafer suction plate 12, its error can be eliminated by the displacement of the wafer suction plate 12, which increases the calibration range of the wafer calibrator in disguised form.
[0025] In some embodiments, the auxiliary calibration bracket 3 includes an auxiliary calibration funnel 31 , a vertical bracket 32 , and a horizontal connecting bracket 33 which are connected in sequence.
[0026] In some embodiments, in combination Figure 3 That is, in the top view of the wafer aligner of the present application, a plurality of rows of mounting holes 4 are evenly arranged on the horizontal connecting frame 33 .
[0027] In some embodiments, each of the horizontal connecting frames 33 is connected to the calibrator chassis 2 through the same row of mounting holes 4 .
[0028] The auxiliary calibration bracket 3 of the present solution specifically includes an auxiliary calibration funnel 31, a vertical bracket 32 and a horizontal connecting bracket 33 connected in sequence. Among them, a plurality of rows of mounting holes 4 are evenly opened on the horizontal connecting bracket 33, and the position of each row of mounting holes 4 can be set according to the size of wafers of different specifications, and when each of the horizontal connecting brackets 33 is connected to the calibrator chassis 2 through the same row of mounting holes 4, all the auxiliary calibration funnels 31 can be surrounded by a funnel shape with the wafer adsorption plate 12 as the center, and adapt to the wafer size corresponding to the position of the row of mounting holes 4.
[0029] In some embodiments, the side of the auxiliary calibration funnel 31 facing the calibrator adsorption plate 12 is a slope, and the slope of any auxiliary calibration funnel 31 and the slopes of other auxiliary calibration funnels 31 can form a funnel shape for auxiliary calibration of the wafer.
[0030] Specifically, the side of the auxiliary calibration funnel 31 facing the calibrator adsorption plate 12 is set to a slope, so that the slope of any auxiliary calibration funnel 31 and the slopes of other auxiliary calibration funnels 31 can form a funnel shape, so that when the wafer is placed in the auxiliary calibration funnel 31, it can slide down along the funnel shape formed by the slope, thereby auxiliary calibration of the wafer center can be performed.
[0031] Those skilled in the art will appreciate that although some embodiments described herein include certain features included in other embodiments but not other features, the combination of features from different embodiments is meant to be within the scope of the present application and to form different embodiments.
[0032] Those skilled in the art will appreciate that the description of each embodiment has its own emphasis, and for parts not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.
[0033] Although the embodiments of the present application are described in conjunction with the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present application, and such modifications and variations all fall within the scope defined by the attached claims. The above are only specific embodiments of the present utility model, but the protection scope of the present utility model is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed by the present utility model, and these modifications or replacements should be included in the protection scope of the present utility model. Therefore, the protection scope of the present utility model shall be based on the protection scope of the claims.
[0034] The above are only specific implementations of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed by the utility model, and these modifications or replacements should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.
Claims
1. A wafer calibrator with an increased calibration range, comprising a calibrator body, a calibration sensor and a calibrator adsorption plate, wherein the calibration sensor and the calibrator adsorption plate are mounted on the top of the calibrator body, characterized in that: Also includes: A calibrator chassis, on which the calibrator body is fixedly mounted; at least three auxiliary calibration brackets are evenly arranged on the calibrator chassis; The auxiliary calibration bracket is centered on the calibrator adsorption plate in plane projection, and the auxiliary calibration bracket is higher than the top of the calibrator adsorption plate in vertical height.
2. A wafer aligner with increased calibration range according to claim 1, characterized in that: The auxiliary calibration bracket comprises an auxiliary calibration funnel, a vertical bracket and a horizontal connecting bracket which are connected in sequence.
3. A wafer aligner with increased calibration range according to claim 2, characterized in that: The auxiliary calibration funnel is fixedly mounted on the top of the vertical bracket; the vertical bracket and the horizontal connecting frame are integrally formed into an L-shaped structure; the horizontal connecting frame is detachably connected to the calibrator chassis.
4. The wafer aligner with increased calibration range according to claim 3, characterized in that: The horizontal connecting frame is evenly provided with a plurality of rows of mounting holes.
5. The wafer aligner with increased calibration range according to claim 4, characterized in that: Each of the horizontal connecting frames is connected to the calibrator chassis through the same row of mounting holes.
6. The wafer aligner with increased calibration range according to claim 2, characterized in that: The side of the auxiliary calibration funnel facing the calibrator adsorption plate is a slope, and the slope of any auxiliary calibration funnel and the slopes of other auxiliary calibration funnels can form a funnel shape for auxiliary calibration of wafers.