ZR-axis movement device

Abstract

The utility model relates to a ZR-axis movement device. The device comprises a suction nozzle; a suction nozzle is arranged at the output end of the rotary motion mechanism; the movement connecting piece comprises a first movement part and a second movement part which are matched with each other, the second movement part extends towards one end far away from the first movement part, and the rotary movement mechanism is arranged on the second movement part; the linear motion mechanism is arranged on the first motion part; wherein the linear motion mechanism is used for driving the second motion part to do linear reciprocating motion on the first motion part so as to drive the rotary motion mechanism to do linear reciprocating motion, the rotary motion mechanism is used for driving the suction nozzle to rotate so as to adsorb an object, and a certain distance is designed between the R axis and the Z axis through the ZR-axis motion device, so that the gravity is prevented from being excessively concentrated; and meanwhile, the industrial requirements of long-distance operation are met.

Description

Technical Field

[0001] The present application relates to the technical field of automation equipment, and in particular to a ZR axis motion device. Background Art

[0002] As a product that came into being with a brand-new design concept, sophisticated structural design and simple motion mechanism, the two-axis manipulator realizes the reciprocating motion of the manipulator in the Z-axis direction and the rotational motion of any angle in the R-axis direction. The new ZR-axis control manipulator is small in size and simple to control, and can be applied to various scenes in various industries. And because the two-axis manipulator is easy to operate, of high quality and small in size, it is more convenient to use with supporting equipment. Therefore, this series of manipulators are often used by engineers in various fields.

[0003] However, the existing ZR axis has the Z axis and the R axis designed to be very close in structure, causing the weight of the ZR axis to be too concentrated in one place. In addition, since the Z axis and the R axis are designed to be very compact, the R axis and the Z axis cannot be separated by a certain distance, and long-distance operations cannot be performed, which cannot meet the higher operation requirements in the existing industry. Utility Model Content

[0004] The purpose of the present application is to provide a ZR axis motion device, which designs a distance between the R axis and the Z axis to avoid excessive concentration of gravity while meeting the industrial needs of long-distance operations.

[0005] To this end, an embodiment of the present application provides a ZR-axis motion device, including: a suction nozzle; a rotary motion mechanism, a suction nozzle is provided at the output end of the rotary motion mechanism; a motion connecting part, including a first motion part and a second motion part that cooperate with each other, the second motion part extends to an end away from the first motion part, and the rotary motion mechanism is provided on the second motion part; and a linear motion mechanism, which is provided on the first motion part; wherein the linear motion mechanism is used to drive the second motion part to perform linear reciprocating motion on the first motion part to drive the rotary motion mechanism to perform linear reciprocating motion, and the rotary motion mechanism is used to drive the suction nozzle to rotate to adsorb objects.

[0006] In one possible implementation, the rotary motion mechanism includes a rotary drive motor and a rotating shaft connected to the output end of the rotary drive motor. A suction nozzle is provided at one end of the rotating shaft away from the rotary drive motor. The rotary drive motor drives the rotating shaft to rotate to drive the suction nozzle to adsorb objects.

[0007] In a possible implementation, the rotary drive motor includes a stator fixing member, a stator and a rotor, the stator is arranged on the stator fixing member, the rotor is rotatably arranged on the stator, and the rotating shaft is connected to the rotor.

[0008] In a possible implementation, the stator and the rotor are coaxially arranged, the rotating shaft passes through the axis of the stator and the rotor and is connected to the rotor, the rotating shaft is a hollow shaft, and a sealing member is provided at one end of the rotating shaft away from the suction nozzle to seal the rotating shaft.

[0009] In a possible implementation, a fastener is provided between the rotating shaft and the suction nozzle to connect the suction nozzle to the rotating shaft.

[0010] In one possible implementation, the linear motion mechanism includes a linear drive motor and a measuring component, wherein the linear drive motor is disposed on the motion connection to drive the motion connection to perform linear reciprocating motion, and the measuring component is disposed on the motion connection to measure the moving distance of the motion connection.

[0011] In a possible implementation, the linear drive motor includes a magnet and a coil, and the coil is movably disposed on a peripheral side of the magnet.

[0012] In a possible implementation, the linear drive motor further includes a magnet fixing member and a coil fixing member, the magnet is disposed in the magnet fixing member, the coil is disposed on the coil fixing member, and the coil fixing member is connected to the first moving part.

[0013] In a possible implementation manner, the measuring component is disposed between the first moving part and the second moving part to measure the relative displacement between the first moving part and the second moving part.

[0014] In a possible implementation, the measuring component includes a grating scale and a reading head cooperating with the grating scale; the grating scale is arranged on the first moving part, and the reading head is arranged on the second moving part; or, the grating scale is arranged on the second moving part, and the reading head is arranged on the first moving part.

[0015] According to the ZR-axis motion device provided in the embodiment of the present application, a motion connection piece is provided with a certain distance, and a rotational motion mechanism, i.e., an R-axis mechanism, and a linear motion mechanism, i.e., a Z-axis mechanism, are respectively installed at both ends of the motion connection piece, so that the linear motion mechanism and the rotational motion mechanism also have a certain distance, thereby avoiding excessive concentration of gravity of the ZR-axis motion device. At the same time, by providing a certain distance between the rotational motion mechanism, i.e., the R-axis mechanism, and the linear motion mechanism, i.e., the Z-axis mechanism, the rotational motion mechanism, i.e., the R-axis mechanism, and the linear motion mechanism, i.e., the Z-axis mechanism, the rotational motion mechanism, i.e., the R-axis mechanism, can operate away from the linear motion mechanism, i.e., the Z-axis mechanism, thereby meeting the requirements for long-distance operation of the ZR-axis structure used in the existing industry. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the prior art descriptions. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In addition, in the drawings, the same components are marked with the same reference numerals, and the drawings are not drawn according to the actual scale.

[0017] Figure 1 A schematic diagram showing the structure of a ZR axis motion device provided in an embodiment of the present application is shown;

[0018] Figure 2 A front view of a ZR axis motion device provided in an embodiment of the present application is shown;

[0019] Figure 3 A bottom view of the ZR axis motion device provided in an embodiment of the present application is shown;

[0020] Figure 4 The embodiment of the present application provides Figure 3 Middle DD section view;

[0021] Description of reference numerals:

[0022] 1. Suction nozzle;

[0023] 2. Rotary motion mechanism; 21. Rotary drive motor; 211. Stator fixing member; 212. Stator; 213. Rotor; 22. Rotating shaft;

[0024] 3. Motion connector; 31. First motion part; 32. Second motion part;

[0025] 4. Linear motion mechanism; 41. Linear drive motor; 411. Magnet; 412. Coil; 413. Magnet fixing part; 414. Coil fixing part; 42. Measuring member; 421. Grating ruler; 422. Reading head;

[0026] 5. Seals;

[0027] 6. Fasteners. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0029] The existing ZR axis designs the Z axis and the R axis to be very close in structure, causing the weight of the ZR axis to be too concentrated in one place, and because the Z axis and the R axis are designed to be very compact, the R axis and the Z axis cannot be separated by a certain distance, and long-distance operations cannot be performed, and higher operation requirements in the existing industry cannot be met. In response to the above-mentioned technical problems, the embodiments of the present application are intended to solve this problem, and thus provide a ZR axis motion device, which designs the R axis and the Z axis to be separated by a certain distance to avoid excessive concentration of gravity while meeting the industrial needs of long-distance operations.

[0030] Specifically, Figures 1 to 3 As shown, the ZR axis motion device provided in the embodiment of the present application includes a suction nozzle 1, a rotary motion mechanism 2, a motion connection member 3 and a linear motion mechanism 4. The rotary motion mechanism 2 is an R axis mechanism, and the output end thereof is provided with a suction nozzle 1; it is emphasized that the motion connection member 3 provided in the embodiment of the present application includes a first motion part 31 and a second motion part 32 that cooperate with each other, and the second motion part 32 can move on the first motion part 31, and the second motion part 32 extends to an end away from the first motion part 31. In the embodiment of the present application, as Figure 2 As shown, the ZR-axis motion device is placed horizontally, the second motion part 32 can move vertically on the first motion part 31, and the second motion part 32 extends horizontally for a distance, the rotational motion mechanism 2 is arranged on the second motion part 32, and the linear motion mechanism 4, that is, the Z-axis mechanism, is arranged on the first motion part 31. According to the above-mentioned structural composition, the motion principle of the ZR-axis motion device provided in the embodiment of the present application is as follows: the linear motion mechanism 4 drives the second motion part 32 to make a linear reciprocating motion on the first motion part 31, that is, reciprocating motion along the Z-axis in the vertical direction, driving the rotational motion mechanism 2 to reciprocate in the vertical direction, and the rotational motion mechanism 2 drives the suction nozzle 1 to rotate to adsorb objects.

[0031] According to the ZR axis motion device provided in the embodiment of the present application, a motion connection member 3 is provided with a certain distance, and the rotational motion mechanism 2, i.e., the R axis mechanism, and the linear motion mechanism 4, i.e., the Z axis mechanism, are respectively installed at both ends of the motion connection member 3, so that the linear motion mechanism 4 and the rotational motion mechanism 2 also have a certain distance, thereby avoiding excessive concentration of gravity of the ZR axis motion device. At the same time, by setting the rotational motion mechanism 2, i.e., the R axis mechanism, and the linear motion mechanism 4, i.e., the Z axis mechanism, at a certain distance, the rotational motion mechanism 2, i.e., the R axis mechanism, can operate away from the linear motion mechanism 4, i.e., the Z axis mechanism, thereby meeting the requirements for long-distance operation of the ZR axis structure used in the existing industry.

[0032] In an application scenario of an embodiment of the present application, the ZR-axis motion device provided in the embodiment of the present application can be applied to the semiconductor industry. To ensure the cleanliness of semiconductor materials, the suction nozzle 1 provided in the embodiment of the present application is a vacuum suction nozzle 1, which performs handling operations by vacuum adsorbing semiconductor materials.

[0033] In an optional example, the rotary motion mechanism 2 provided in the embodiment of the present application includes a rotary drive motor 4121, and a rotating shaft 22 connected to the output end of the rotary drive motor 21, and the above-mentioned suction nozzle 1 is provided at one end of the rotating shaft 22 away from the rotary drive motor 21, and the rotary drive motor 21 drives the rotating shaft 22 to rotate to drive the suction nozzle 1 to adsorb objects.

[0034] In the embodiments of the present application, Figure 2 As shown, the rotary drive motor 21 includes a stator fixing member 211, a stator 212 and a rotor 213. The stator 212 is arranged on the stator fixing member 211, and the stator fixing member 211 is arranged on the second moving part 32 of the moving connecting member 3. The rotor 213 is rotatably arranged on the stator 212, and the rotating shaft 22 is connected to the rotor 213.

[0035] Preferably, in one embodiment of the present application, the stator 212 and the rotor 213 are coaxially arranged, the rotating shaft 22 is passed through the axis of the stator 212 and the rotor 213 and is fixedly connected to the rotor 213, the rotating shaft 22 is a hollow shaft, and a sealing member 5 is provided at one end of the rotating shaft 22 away from the suction nozzle 1 to seal the rotating shaft 22. In the embodiment of the present application, the vacuum suction nozzle 1 realizes the adsorption of objects in the following manner: the rotation of the rotor 213 drives the rotating shaft 22 to rotate, thereby driving the suction nozzle 1 to rotate, and the hollow rotating shaft 22 has an air pipe inside, and the inside of the rotating shaft 22 and the suction nozzle 1 is evacuated through the air pipe, thereby achieving the adsorption effect.

[0036] In an optional example, a fastener 6 is provided between the rotating shaft 22 and the suction nozzle 1 to connect the suction nozzle 1 to the rotating shaft 22. Figure 1 and Figure 2 As shown, the embodiment of the present application selects the fastener 6 as a nut, and the rotating shaft 22 and the suction nozzle 1 are fixedly connected by screwing. It should be noted that in practical applications, the embodiment of the present application can also select the fastener 6 as a sleeve, flange, etc., as long as the through connection between the rotating shaft 22 and the suction nozzle 1 can be achieved. Therefore, the adjustment and change of the specific structure of the fastener 6 does not deviate from the principle and scope of the present application, and should be limited within the protection scope of the present application.

[0037] In an optional example, the linear motion mechanism 4, i.e., the Z-axis mechanism, provided in an embodiment of the present application includes a linear drive motor 41 and a measuring component 42. The linear drive motor 41 is arranged on the motion connection 3 to drive the motion connection 3 to reciprocate linearly. The measuring component 42 is arranged on the motion connection 3 to measure the moving distance of the motion connection 3.

[0038] In the embodiment of the present application, the linear drive motor 41 is an electromagnetic motor, which mainly includes a magnet 411 and a coil 412 . The coil 412 is movably arranged on the peripheral side of the magnet 411 under the action of magnetic force.

[0039] Furthermore, the linear drive motor 41 further includes a magnet fixing part 413 and a coil fixing part 414 . The magnet 411 is disposed in the magnet fixing part 413 , the coil 412 is disposed on the coil fixing part 414 , and the coil fixing part 414 is connected to the first moving part 31 .

[0040] In an alternative example, Figure 4 As shown, the measuring member 42 is disposed between the first moving portion 31 and the second moving portion 32 to measure the relative displacement between the first moving portion 31 and the second moving portion 32 .

[0041] Preferably, the measuring component 42 includes a grating scale 421 and a reading head 422 cooperating with the grating scale 421; the grating scale 421 is arranged on the first moving part 31, and the reading head 422 is arranged on the second moving part 32; or, the grating scale 421 is arranged on the second moving part 32, and the reading head 422 is arranged on the first moving part 31. Through such a setting, the relative displacement of the moving connection 3 can be accurately read, thereby improving the positioning accuracy of the ZR-axis motion device.

[0042] According to the ZR axis motion device provided in the embodiment of the present application, a motion connection piece is provided with a certain distance, and a rotary motion mechanism, namely the R axis mechanism, and a linear motion mechanism, namely the Z axis mechanism, are respectively installed at both ends of the motion connection piece, so that the linear motion mechanism and the rotary motion mechanism also have a certain distance to avoid excessive concentration of gravity of the ZR axis motion device. At the same time, by providing a certain distance between the rotary motion mechanism, namely the R axis mechanism, and the linear motion mechanism, namely the Z axis mechanism, the rotary motion mechanism, namely the R axis mechanism, can operate away from the linear motion mechanism, namely the Z axis mechanism, thereby meeting the requirements of long-distance operation of the ZR axis structure used in the existing industry. The R axis mechanism is driven by a rotary drive motor, and the Z axis mechanism is driven by a linear electromagnetic motor. In order to ensure accuracy, a measuring component, namely a grating scale and a reading head are provided to accurately read the displacement to complete the positioning of each movement, thereby ensuring the accuracy of the ZR axis motion device, facilitating operation, and reducing the operating burden for the operator.

[0043] It should be noted that the phrases "one embodiment", "an embodiment", "an exemplary embodiment", "some embodiments", etc. mentioned in the specification indicate that the described embodiments may include certain features, structures or characteristics, but not every embodiment may include the certain features, structures or characteristics. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when describing certain features, structures or characteristics in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such features, structures or characteristics in conjunction with other embodiments, whether explicitly or not explicitly described.

[0044] It should be easily understood that “on,” “above,” and “over” in the present disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0045] In addition, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one element or feature relative to other elements or features as shown in the figures. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation shown in the figures. The device may have other orientations (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0046] It should be noted that, in this article, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0047] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A ZR axis motion device, characterized in that: include: Suction nozzle; A rotary motion mechanism, wherein the suction nozzle is provided at the output end of the rotary motion mechanism; The motion connecting member comprises a first motion part and a second motion part which cooperate with each other, wherein the second motion part extends to an end away from the first motion part, and the rotary motion mechanism is arranged on the second motion part; as well as A linear motion mechanism, arranged on the first motion part; The linear motion mechanism is used to drive the second motion part to perform linear reciprocating motion on the first motion part, so as to drive the rotary motion mechanism to perform linear reciprocating motion, and the rotary motion mechanism is used to drive the suction nozzle to rotate to adsorb objects.

2. The ZR axis motion device according to claim 1, characterized in that: The rotary motion mechanism includes a rotary drive motor and a rotating shaft connected to the output end of the rotary drive motor. The suction nozzle is arranged at one end of the rotary shaft away from the rotary drive motor. The rotary drive motor drives the rotating shaft to rotate so as to drive the suction nozzle to adsorb objects.

3. The ZR axis motion device according to claim 2, characterized in that: The rotary drive motor comprises a stator fixing part, a stator and a rotor. The stator is arranged on the stator fixing part. The rotor is rotatably arranged on the stator. The rotating shaft is connected to the rotor.

4. The ZR axis motion device according to claim 3, characterized in that: The stator and the rotor are coaxially arranged, the rotating shaft passes through the axis of the stator and the rotor and is connected to the rotor, the rotating shaft is a hollow shaft, and a sealing member is arranged at one end of the rotating shaft away from the suction nozzle to seal the rotating shaft.

5. The ZR axis motion device according to any one of claims 2 to 4, characterized in that: A fastener is arranged between the rotating shaft and the suction nozzle to connect the suction nozzle to the rotating shaft.

6. The ZR axis motion device according to claim 1, characterized in that: The linear motion mechanism includes a linear drive motor and a measuring component. The linear drive motor is arranged on the motion connection part to drive the motion connection part to linearly reciprocate. The measuring component is arranged on the motion connection part to measure the moving distance of the motion connection part.

7. The ZR axis motion device according to claim 6, characterized in that: The linear drive motor comprises a magnet and a coil, and the coil is movably arranged on the peripheral side of the magnet.

8. The ZR axis motion device according to claim 7, characterized in that: The linear drive motor further includes a magnet fixing part and a coil fixing part, the magnet is arranged in the magnet fixing part, the coil is arranged on the coil fixing part, and the coil fixing part is connected to the first moving part.

9. The ZR axis motion device according to claim 6, characterized in that: The measuring component is disposed between the first moving part and the second moving part to measure a relative displacement between the first moving part and the second moving part.

10. The ZR axis motion device according to claim 9, characterized in that: The measuring component includes a grating ruler and a reading head matched with the grating ruler; The grating ruler is arranged on the first moving part, and the reading head is arranged on the second moving part; or The grating ruler is arranged on the second moving part, and the reading head is arranged on the first moving part.

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