Large-size sheet-shaped mask plate
By designing a large-size sheet mask plate, using hollow grid-like structure and intow raw materials, the problem of insufficient width of intow raw materials is solved, and effective evaporation of large-size OLED common layer is achieved, avoiding the occurrence of evaporation shadows.
Patent Information
- Application Number
- CN202420627898.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-29
- Publication Date
- 2025-03-07
- Estimated Expiration
- 2034-03-29
AI Technical Summary
The existing intag raw material width cannot meet the demand for evaporation of large-sized OLED common layers, resulting in the horizontal and vertical mask strips not on the same plane, resulting in the evaporation shadow problem.
A large-size sheet mask plate is designed, including an evaporation zone, an auxiliary zone and a screen zone. It is formed into a hollow grid through an equidistantly arranged horizontal and longitudinal skeleton, and is made of calendered using inwa raw materials to ensure that all surfaces are on the same horizontal plane.
Effective evaporation of large-size OLED common layer is achieved, avoiding the problem of unplanarity of horizontal and vertical mask strips and reducing the occurrence of evaporation shadows.
Smart Images
Figure CN222574754U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of masks, and more specifically to a large-size sheet-shaped mask. Background Art
[0002] The open mask is a key jig for evaporating the common layer of OLED. The Invar raw material used is obtained by calendering, so the width of the Invar raw material is restricted by the calendering equipment. The width of the Invar raw material currently available on the market can meet the G6H size. However, with the rise of large-size OLEDs, the width of the Invar raw material can no longer meet the production requirements of the open mask. The large-size OLED uses a single mask strip to stretch the horizontal and vertical grids, which has the problem that the horizontal and vertical mask strips are not in the same plane, which leads to a prominent evaporation shadow problem when the common layer is evaporated. Therefore, for the evaporation of the common layer of large-size OLEDs, the mask is an urgent problem to be solved. Utility Model Content
[0003] In view of the above problems, the utility model provides a large-size sheet mask, which can be suitable for evaporation of a common layer of a large-size OLED.
[0004] A large-size sheet mask, including a vapor deposition area and an auxiliary area surrounding the vapor deposition area, a netting area is arranged between the vapor deposition area and the auxiliary area, the vapor deposition area is a hollow grid formed by a plurality of equally spaced transverse frames and a plurality of equally spaced longitudinal frames, the width a, length b and thickness h0 of the Invar raw material formed by calendering the Invar raw material are taken as the basis, wherein a is the maximum calendering width of the calendering equipment, each longitudinal frame is composed of an Invar longitudinal frame, each transverse frame is composed of an Invar longitudinal frame segment, and the Invar longitudinal frame is composed of an Invar longitudinal frame segment. The segment is embedded with N welding head longitudinal skeleton segments, the auxiliary area is composed of Invar auxiliary area, and N welding head auxiliary areas are embedded in the Invar auxiliary area. The stretching area is composed of Invar stretching area, and N welding head stretching areas are embedded in the Invar stretching area. The thickness of each transverse skeleton = the thickness of each longitudinal skeleton = the thickness of the auxiliary area = the thickness of the stretching area = h0. The upper and lower surfaces of the transverse skeleton, the longitudinal skeleton, the auxiliary area, and the stretching area are all in the same horizontal plane. The width of the large-size sheet mask is N*a, the length is b, the thickness is h0, and N is a natural number.
[0005] Optionally, N=2.
[0006] Optionally, the upper surface and the lower surface of the welding head auxiliary area, the welding head mesh area and the welding head longitudinal skeleton segment are upper surfaces and lower surfaces formed by grinding.
[0007] Optionally, the Ra of the upper surface and the lower surface of the welding head auxiliary area, the welding head mesh area and the welding head longitudinal skeleton section is less than 0.1.
[0008] Optionally, h0=100-200 μm.
[0009] Compared with the prior art, the beneficial effects of the utility model are:
[0010] The large-size sheet-shaped mask provided by the utility model can be suitable for evaporation of a common layer of a large-size OLED. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, a brief introduction will be given below to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.
[0012] Figure 1 This is a schematic diagram of the structure of a large-size sheet-shaped mask in Embodiment 1 of the utility model;
[0013] Figure 2 This is a schematic diagram of the Invar raw material structure of the utility model;
[0014] Figure 3 This is a schematic diagram of the spliced substrates of Example 1 of the utility model;
[0015] Figure 4 This is a schematic diagram of the common mask structure of Embodiment 1 of the utility model;
[0016] Explanation of the accompanying reference numerals: 1. first Invar raw material unit, 2. second Invar raw material unit, 3. splicing area, 5. auxiliary area, 6. evaporation area, 7. stretching area, 8. longitudinal skeleton, 9. transverse skeleton, 10. Invar longitudinal skeleton segment, 11. welding head longitudinal skeleton segment, 13. Invar auxiliary area, 14. welding head auxiliary area, 15. Invar stretching area, 16. Welding head stretching area, 17. frame. DETAILED DESCRIPTION
[0017] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, or it can be an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0018] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific position, be constructed and operated in a specific position, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, "multiple" means two or more, unless otherwise precisely and specifically specified.
[0019] The terms "first", "second", "third", "fourth", etc. (if any) in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchangeable where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein, for example. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device comprising a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.
[0020] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0021] The following specific embodiments are used to describe the technical solution of the utility model in detail. The following specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described in detail in some embodiments.
[0022] In the following embodiments, when the raw material is calendered with Invar, the maximum calendering width of the calendering equipment is a, the cutting length is b, and the width, length, and thickness of the Invar raw material unit are a, b, and h0.
[0023] Example 1
[0024] Please refer to Figure 1 , Figure 1 A schematic diagram of a large-size sheet mask structure provided in this embodiment.
[0025] A large-size sheet mask comprises a vapor deposition area 6 and an auxiliary area 5 surrounding the vapor deposition area 6. A mesh area 7 is arranged between the vapor deposition area 6 and the auxiliary area 5. The vapor deposition area 6 is a hollow grid formed by a plurality of equally spaced transverse frames 9 and a plurality of equally spaced longitudinal frames 8. Each longitudinal frame 8 is composed of an Invar longitudinal frame. Each transverse frame 9 is composed of an Invar longitudinal frame segment 10. The Invar longitudinal frame segment 10 has a welding head longitudinal frame segment 11 embedded therein. The auxiliary area 5 is composed of an Invar auxiliary area 13. The Invar auxiliary area 13 has a welding head auxiliary area 14 embedded therein. The mesh area 7 is composed of an Invar mesh area 15. The Invar mesh area 15 has a welding head mesh area 16 embedded therein. The thickness of each transverse frame = the thickness of each longitudinal frame = the thickness of the auxiliary area 5 = the thickness of the mesh area 7 = h0 = the unit thickness of the Invar raw material. The upper surface and the lower surface of the transverse frame 9, the longitudinal frame 8, the auxiliary area 5 and the mesh area 7 are all in the same horizontal plane.
[0026] In one or more specific implementations of this embodiment, Ra of the upper surface and the lower surface of the welding head auxiliary area 14, the welding head stretching area 16 and the welding head longitudinal skeleton section 11 is less than 0.1.
[0027] In one or more specific implementations of this embodiment, the large-size common mask has a width of at least 2a and a length of b.
[0028] In one or more specific implementations of this embodiment, h0 of the large-size common mask is 100-200 μm.
[0029] Figure 1 The large-size common mask is prepared by the following method:
[0030] S0, take two pieces of Invar raw material units after cutting, namely the first Invar raw material unit 1 and the second Invar raw material unit 2, as Figure 2 The sizes of the first Invar raw material unit 1 and the second Invar raw material unit 2 are both Invar raw materials with the maximum width of the Invar raw materials running in the calendering equipment, that is, the width is a and the length is b; the first Invar raw material unit 1 and the second Invar raw material unit 2 are respectively cut longitudinally and the butt joint positions are cleaned, wherein the longitudinal cutting process ensures the straightness of the butt joint, and the butt joint position is cleaned to ensure the welding strength.
[0031] S1, splicing: the first Invar raw material unit 1 is butted with the second Invar raw material unit 2, and spliced by means of small thermal deformation, including but not limited to welding and crimping; after splicing, Figure 3 , Figure 2 In the embodiment, the first Invar raw material unit 1 and the first Invar raw material unit 2 are connected as a whole through the splicing area 3 to form a spliced substrate.
[0032] S2, grinding: After the splicing is completed, the uneven surface and burrs caused by the splicing will cause scratches on the common mask surface during the evaporation process of the OLED product. Therefore, it is necessary to process the splicing area 3 of the splicing substrate, grind the surface of the splicing area 3 to make it smooth, and ensure that Ra is less than 0.1.
[0033] S3, Annealing: Annealing process is used to eliminate the internal stress of Invar sheet caused by cutting, splicing and grinding process.
[0034] S4, micro-etching: In order to deal with the surface scratches of Invar raw materials produced during the splicing and processing process, the surface of Invar raw materials is etched using a micro-etching process.
[0035] S5, mask exposure: coating a photoresist film (dry or wet) on the micro-etched splicing substrate, exposing, and developing. Since the strength of the splicing area 3 is lower than that of the normal position, when designing the mask, it is necessary to avoid the corner areas where the force is concentrated to prevent the original material from being torn during the subsequent stretching process.
[0036] S6, etching, forming Figure 1 Sheet mask, Figure 1 In the figure, the sheet mask includes a vapor deposition area 6 and an auxiliary area 5 surrounding the vapor deposition area 6. A mesh area 7 is provided between the vapor deposition area 6 and the auxiliary area 5. The vapor deposition area 6 is a hollow grid formed by a plurality of equally spaced transverse frames 9 and a plurality of equally spaced longitudinal frames 8. Each longitudinal frame 8 is composed of an Invar longitudinal frame, and each transverse frame 9 is composed of an Invar longitudinal frame segment 10. The Invar longitudinal frame segment 10 has a welding head longitudinal frame segment 11 embedded therein. The auxiliary area 5 is composed of an Invar auxiliary area 13. The Invar auxiliary area 13 has a welding head auxiliary area 14 embedded therein. The mesh area 7 is composed of an Invar mesh area 15. The Invar mesh area 15 has a welding head mesh area 16 embedded therein. The thickness of each transverse frame = the thickness of each longitudinal frame = the thickness of the auxiliary area 5 = the thickness of the mesh area 7 = h0 = the unit thickness of the Invar raw material. The upper and lower surfaces of the transverse frames 9, the longitudinal frames 8, the auxiliary areas 5 and the mesh area 7 are all in the same horizontal plane. At this time, the width of the sheet mask is 2a, and the width length of the sheet mask is b.
[0037] After the sheet mask is formed, the net is stretched to form a common mask: the mask net is welded to the frame 17 to form a common mask. Figure 4 A common mask.
[0038] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit it. Although the utility model has been described in detail with reference to the aforementioned embodiments, ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not make the essence of the corresponding technical solution deviate from the scope of the technical solution of the embodiments of the utility model.
Claims
1. A large-size sheet mask, comprising a vapor deposition area and an auxiliary area surrounding the vapor deposition area, a netting area is provided between the vapor deposition area and the auxiliary area, the vapor deposition area is a hollow grid formed by a plurality of equally spaced transverse frames and a plurality of equally spaced longitudinal frames, and the width a, length b and thickness h0 of the Invar raw material formed by calendering the Invar raw material are taken as the basis, wherein: a is the maximum calendering width of the calendering equipment, which is characterized in that each longitudinal skeleton is composed of an Invar longitudinal skeleton, each transverse skeleton is composed of an Invar longitudinal skeleton segment, and the Invar longitudinal skeleton segment is embedded with N welding head longitudinal skeleton segments, the auxiliary area is composed of an Invar auxiliary area, and the Invar auxiliary area is embedded with N welding head auxiliary areas, the stretching area is composed of an Invar stretching area, and the Invar stretching area is embedded with N welding head stretching areas, the thickness of each transverse skeleton = the thickness of each longitudinal skeleton = the thickness of the auxiliary area = the thickness of the stretching area = h0, the upper surface and the lower surface of the transverse skeleton, the longitudinal skeleton, the auxiliary area, and the stretching area are all in the same horizontal plane, the width of the large-size sheet mask is N*a, the length is b, the thickness is h0, and N is a natural number.
2. The large-size sheet mask according to claim 1, characterized in that: N＝2。 3. The large-size sheet mask according to claim 1, characterized in that: The upper surface and the lower surface of the welding head auxiliary area, the welding head mesh area and the welding head longitudinal skeleton section are upper surfaces and lower surfaces formed by grinding.
4. The large-size sheet mask according to claim 3, characterized in that: The Ra of the upper surface and the lower surface of the welding head auxiliary area, the welding head mesh area and the welding head longitudinal skeleton section is less than 0.
1.
5. The large-size sheet mask according to claim 1, characterized in that: The h0=100-200 μm.