Semiconductor external grinding sheet detection fixing jig
By designing a semiconductor external film detection fixing fixture including a fixing frame, a fixing plate and a rocker, the problem of position adjustment in the prior art is solved, and accurate fixing and detection of semiconductor external film is achieved, and operation flexibility and detection accuracy are improved.
Patent Information
- Application Number
- CN202420639654.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-29
- Publication Date
- 2025-03-07
- Estimated Expiration
- 2034-03-29
AI Technical Summary
The existing semiconductor external-deep-detection fixture only includes a fastening structure, making it difficult to adjust the position again, resulting in a small operating space and unable to perform effective operation.
A semiconductor external drilling and detecting fixing fixture including a base, a fixing frame, a fixing plate, a fixing plate, a slide rail and a rocker is designed. The precise position adjustment of the semiconductor external drilling is achieved through the combination of left and right rocker, front and rear rocker, collar, bottom plate, slider, left and right slide rails and lower blocks.
Through this design, accurate fixing and detection of semiconductor external research films is achieved, operation flexibility and adaptability are improved, and detection accuracy and work efficiency are ensured.
Smart Images
Figure CN222581144U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of fixing fixtures, in particular to a fixing fixture for detecting semiconductor external research wafers. Background Art
[0002] Semiconductor wafer inspection fixtures are mainly used to test and inspect wafers in semiconductor production. Wafers refer to semiconductor wafers that have not yet been cut into individual chips, usually an intermediate stage in the chip manufacturing process. Wafer inspection fixtures are tools used to fix wafers and connect them to test equipment in order to perform electrical performance testing, defect detection, etc. on wafers.
[0003] The prior art with announcement number CN2017216450619 discloses a fixed fixture for PCB inspection, including a base and a pressing piece, the base is provided with a PCB accommodation position, and also includes a frame surrounding the accommodation position, the frame includes a plurality of connecting rods, and a connecting seat with the same number of connecting rods, two adjacent connecting rods are connected by the connecting seat, the connecting seat is rotatably arranged on the base, the connecting rod and the connecting seat are rotatably connected, at least one connecting rod is provided with a driving part for driving the frame to move, and the pressing piece is arranged on the frame; when the frame moves, the pressing piece moves to the upper part of the accommodation position; the frame has an open end. The frame with a linkage structure is provided, and the movement of the frame can drive multiple pressing pieces to move to the upper part of the accommodation position at the same time to press and fix the PCB, so that the fixed fixture can quickly clamp the PCB in one step, the operation is simple, and it is conducive to improving the efficiency of PCB inspection; the first and second rollers are provided to prevent the pressing piece from causing damage to the PCB when pressing the PCB.
[0004] However, the existing semiconductor external research wafer inspection and fixing fixture only includes a fastening structure. In the fastening structure, it is difficult to adjust the position of the semiconductor external research wafer again after it is fixed. As a result, after the fixing plate is covered, when the external research wafer is operated through the inspection hole, the operation cannot be performed due to the small operating space. Utility Model Content
[0005] Based on this, it is necessary to provide a semiconductor external research wafer detection and fixing fixture, which only includes a fastening structure. In the fastening structure, after the semiconductor external research wafer is fixed, it is difficult to adjust the position again, resulting in the problem that after the fixing plate is covered, when the external research wafer is operated through the detection hole, the operation cannot be performed due to the small operating space.
[0006] The utility model provides a semiconductor external research wafer detection fixing fixture, comprising a base and a fixing frame arranged above the base;
[0007] A fixing plate is arranged at the rear of the upper side of the fixing frame, a detection hole is arranged at the middle inner side of the fixing plate, and an insert is arranged at the outer side of the front upper side of the fixing plate;
[0008] A jig plate is arranged at the upper middle of the inner side of the fixing frame, a jig groove is arranged at the inner middle side of the jig plate, a bottom plate is arranged at the lower side of the jig plate, left and right slide rails are arranged at the connection between the bottom plate and the jig plate, a slider is arranged at the connection between the jig plate and the slide rail, and a lower clamping block is arranged at the lower side of the bottom plate;
[0009] Left and right rockers are connected at the middle left and right ends of the jig plate and the fixed frame, front and rear rockers are connected at the middle front and rear ends of the bottom plate and the fixed frame, and rings are connected between the left and right rockers and the front and rear rockers and the jig plate and the bottom plate.
[0010] In one embodiment, the collar and the left and right rockers and the front and rear rockers are connected by welding, and the left and right rockers and the front and rear rockers are connected to the fixing frame by threaded connection.
[0011] In one of the embodiments, the sliding block and the lower clamping block are respectively connected to the fixture plate and the bottom plate by an integrated connection method, and a sliding groove is provided at the lower side connection of the lower clamping block and the fixed frame.
[0012] In one of the embodiments, the jig plate can move left and right on the left and right slide rails through a slider, and the bottom plate can move forward and backward in the fixed frame through a lower clamping block.
[0013] In one of the embodiments, a rocker handle is provided at one end of each of the left and right rockers and the front and rear rockers, and a plurality of positioning holes are provided on the inner side of the fixture groove.
[0014] In one of the embodiments, the fixing plate is connected to the fixing frame by a hinge connection, and the fixing plate can be opened and closed on the fixing frame by the hinge.
[0015] In one of the embodiments, the embedding block is connected to the fixing plate by an integrated connection, and a embedding groove for embedding with the embedding block is provided inside the front side of the fixing frame.
[0016] Compared with the prior art, the utility model provides a semiconductor external research wafer detection and fixing fixture, which has the following beneficial effects:
[0017] In a semiconductor external research wafer inspection fixture, the following benefits can be achieved through the arrangement of left and right rockers, front and rear rockers, collars, bottom plates, sliders, left and right slide rails, and lower clamping blocks:
[0018] Accuracy: By rotating the left and right joysticks and the front and back joysticks, the positions of the detection holes in the semiconductor external research wafer and the fixed plate can be fine-tuned to achieve more precise operation and ensure the accuracy of detection.
[0019] Flexibility: Operators can adjust the position and detection range of semiconductor external research wafers at any time as needed to improve operational flexibility and adaptability.
[0020] Convenience: Through threaded connection and slide rail adjustment, the adjustment process is simple and quick. Operators can easily complete the position adjustment and improve work efficiency.
[0021] Versatility: Through this adjustment method, the detection range of semiconductor external research wafers can be changed, which is suitable for external research wafers of different sizes and shapes, and improves the applicability and versatility of the fixing fixture.
[0022] In general, by holding the left and right joysticks or the front and back joysticks to rotate and adjust the fixed fixture, more precise, flexible, convenient and multifunctional operations can be achieved, thereby improving the inspection efficiency and accuracy of semiconductor external research wafers. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 It is a schematic diagram of the structure of the utility model;
[0024] Figure 2 It is a structural schematic diagram of the connection between the jig plate and the base plate of the utility model;
[0025] Figure 3 This is a schematic diagram of the structure of the fixture plate of the utility model;
[0026] Figure 4 It is a structural schematic diagram of the bottom plate of the utility model;
[0027] In the accompanying drawings, the components represented by the reference numerals are listed as follows:
[0028] 1. Base; 2. Fixed frame; 3. Fixed plate; 4. Detection hole; 5. Embedded block; 6. Jig plate; 7. Jig slot; 8. Left and right rockers; 9. Front and rear rockers; 10. Ring; 11. Bottom plate; 12. Slider; 13. Left and right slide rails; 14. Lower clamping block. DETAILED DESCRIPTION
[0029] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described clearly and completely below in conjunction with the accompanying drawings. Obviously, the specific details described below are only part of the embodiments of the utility model, and the utility model can also be implemented in many other embodiments different from those described here. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the protection scope of the utility model.
[0030] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.
[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention.
[0032] Please refer to Figure 1-4 The utility model provides a semiconductor external research wafer detection fixture, comprising a base 1 and a fixing frame 2 arranged above the base 1;
[0033] A fixing plate 3 is arranged at the rear of the upper side of the fixing frame 2, a detection hole 4 is arranged at the middle inner side of the fixing plate 3, and an insert block 5 is arranged at the outer side of the front upper side of the fixing plate 3;
[0034] A jig plate 6 is provided at the upper middle of the inner side of the fixed frame 2, a jig groove 7 is provided at the inner middle side of the jig plate 6, a bottom plate 11 is provided at the lower side of the jig plate 6, left and right slide rails 13 are provided at the connection between the bottom plate 11 and the jig plate 6, a slider 12 is provided at the connection between the jig plate 6 and the slide rail, and a lower clamping block 14 is provided at the lower side of the bottom plate 11;
[0035] Left and right rocker arms 8 are connected between the middle left and right ends of the jig plate 6 and the fixed frame 2, front and rear rocker arms 9 are connected between the middle front and rear ends of the bottom plate 11 and the fixed frame 2, and rings 10 are provided at the connection between the left and right rocker arms 8 and the front and rear rocker arms 9 and the jig plate 6 and the bottom plate 11.
[0036] In this embodiment, the fixing fixture is composed of a base 1, a fixing frame 2, a fixing plate 3, an insert 5, a fixture plate 6, a bottom plate 11, a slide rail, a slider 12, a rocker and other components to achieve the fixation and detection of the semiconductor external research wafer.
[0037] The fixture plate 6 can move left and right on the left and right slide rails 13, and the bottom plate 11 can move forward and backward in the fixed frame 2. The position of the semiconductor external research wafer can be fixed and adjusted through the connection between the rocker and the ring 10.
[0038] Steps:
[0039] The semiconductor wafer to be tested is placed on the fixing plate 3 and fixed on the fixing frame 2 via the insert 5 .
[0040] The position of the semiconductor external research sheet can be adjusted as needed, and fine-tuned through the left and right slide rails 13 and the front and rear slide rails.
[0041] The detection operation is performed to position the semiconductor outer research wafer according to the positioning holes in the fixture groove 7.
[0042] After the inspection is completed, the semiconductor wafer to be inspected is removed by releasing the connection between the insert block 5 and the fixing plate 3 .
[0043] This fixing fixture can achieve accurate fixation and convenient detection of semiconductor external research wafers, improving work efficiency and accuracy.
[0044] like Figure 1-4 As shown, the collar 10 and the left and right rocking arms 8 and the front and rear rocking arms 9 are respectively connected by welding, the left and right rocking arms 8 and the front and rear rocking arms 9 are respectively connected to the fixed frame 2 by threaded connection, the slider 12 and the lower clamping block 14 are respectively connected to the fixture plate 6 and the bottom plate 11 by integrated connection, the lower clamping block 14 and the lower side of the fixed frame 2 are connected with a slide groove, the fixture plate 6 can move left and right on the left and right slide rails 13 through the slider 12, the bottom plate 11 can move forward and backward in the fixed frame 2 through the lower clamping block 14, the left and right rocking arms 8 and the front and rear rocking arms 9 are respectively provided with a rocking handle at one end, a plurality of positioning holes are provided on the inner side of the fixture groove 7, the fixed plate 3 is connected to the fixed frame 2 by a hinge connection, and the fixed plate 3 can be opened and closed on the fixed frame 2 by a hinge, the inlay block 5 is connected to the fixed plate 3 by an integrated connection, and the front side of the fixed frame 2 is provided with an inlay groove inlaid with the inlay block 5.
[0045] Preferably, after fixing the semiconductor external research wafer by means of the device, the operator can rotate it again by holding the end of the left and right rocker 8 or the front and rear rocker 9, and move it in the fixed frame 2 by rotating it through the threaded connection between the left and right rocker 8 and the front and rear rocker 9 and the fixed frame 2. During the movement, the left and right directions of the jig plate 6 are adjusted by the slider 12 in the left and right slide rails 13 on the base plate 11 by means of the ring 10, and the front and rear directions are adjusted by the lower clamping block 14 in the slide groove on the fixed frame 2 by means of the ring 10. Through this adjustment method, the detection range of the semiconductor external research wafer fixed in the jig groove 7 and the detection hole 4 in the fixed plate 3 can be changed, thereby performing more precise operations.
[0046] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0047] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several deformations, substitutions and improvements can be made without departing from the concept of the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model patent should be based on the claims.
Claims
1. A semiconductor external research wafer detection fixture, characterized in that: The invention comprises a base (1) and a fixing frame (2) arranged above the base (1); a fixing plate (3) is arranged at the rear of the upper side of the fixing frame (2); a detection hole (4) is arranged at the middle inner side of the fixing plate (3); an insert block (5) is arranged at the front upper outer side of the fixing plate (3); a fixture plate (6) is arranged at the upper middle side of the inner side of the fixing frame (2); a fixture groove (7) is arranged at the middle inner side of the fixture plate (6); a bottom plate (11) is arranged at the lower side of the fixture plate (6); the bottom plate (11) and the fixture plate ( The jig plate (6) is connected with a left and right slide rail (13), the connection between the jig plate (6) and the slide rail is provided with a slider (12), and the lower side of the bottom plate (11) is provided with a lower clamping block (14); the left and right ends of the middle of the jig plate (6) and the fixed frame (2) are connected with left and right rocking arms (8), the front and rear ends of the middle of the bottom plate (11) and the fixed frame (2) are provided with front and rear rocking arms (9), and the connection between the left and right rocking arms (8) and the front and rear rocking arms (9) and the jig plate (6) and the bottom plate (11) is provided with a collar (10).
2. A semiconductor external wafer detection fixture according to claim 1, characterized in that: The collar (10) and the left and right rockers (8) and the front and rear rockers (9) are connected respectively by welding, and the left and right rockers (8) and the front and rear rockers (9) are connected respectively by threading to the fixing frame (2).
3. A semiconductor external wafer detection fixture according to claim 2, characterized in that: The sliding block (12) and the lower clamping block (14) are respectively connected to the fixture plate (6) and the bottom plate (11) in an integrated connection manner, and a sliding groove is provided between the lower side of the lower clamping block (14) and the fixed frame (2).
4. A semiconductor external wafer detection fixture according to claim 3, characterized in that: The jig plate (6) can move left and right on the left and right slide rails (13) via a slider (12), and the bottom plate (11) can move forward and backward in the fixed frame (2) via a lower clamping block (14).
5. A semiconductor external wafer detection fixture according to claim 4, characterized in that: A rocking handle is provided at one end of each of the left and right rocking arms (8) and the front and rear rocking arms (9), and a plurality of positioning holes are provided on the inner side of the fixture groove (7).
6. A semiconductor external wafer detection fixture according to claim 1, characterized in that: The fixing plate (3) is connected to the fixing frame (2) by means of a hinge connection, and the fixing plate (3) can be opened and closed on the fixing frame (2) by means of the hinge.
7. A semiconductor external wafer detection fixture according to claim 1, characterized in that: The insert (5) is connected to the fixing plate (3) in an integrated connection manner, and a groove for inserting the insert (5) is provided inside the front side of the fixing frame (2).